<PAGE>   1


    As filed with the Securities and Exchange Commission on January 30, 1998

                                                          REGISTRATION NO. 333 -

================================================================================

                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                             ----------------------

                                    FORM S-8
                             REGISTRATION STATEMENT
                                    UNDER THE
                             SECURITIES ACT OF 1933

                             ----------------------

                           IBIS TECHNOLOGY CORPORATION
             (Exact name of Registrant as specified in its charter)

              MASSACHUSETTS                                 04-2987600
      (State or other jurisdiction                       (I.R.S. Employer
    of incorporation or organization)                   Identification No.)

                              32 CHERRY HILL DRIVE
                          DANVERS, MASSACHUSETTS 01923
                                 (978) 777-4247
                    (Address of Principal Executive Offices)

                      THE IBIS TECHNOLOGY CORPORATION 1997
               EMPLOYEE, DIRECTOR AND CONSULTANT STOCK OPTION PLAN

                                 MARTIN J. REID
                      PRESIDENT AND CHIEF EXECUTIVE OFFICER
                           IBIS TECHNOLOGY CORPORATION
                              32 CHERRY HILL DRIVE
                          DANVERS, MASSACHUSETTS 01923
                                 (978) 777-4247
    (Name, address, including zip code, and telephone number, including area
                           code, of agent for service)

                             ----------------------


                         CALCULATION OF REGISTRATION FEE
<TABLE>
<CAPTION>
=========================================================================================================================
                                                           Proposed              Proposed
           Title of                 Amount to be            maximum               maximum
  securities to be registered       registered(1)        offering price           aggregate               Amount of
                                                          per share(2)        offering price(2)       registration fee
-------------------------------------------------------------------------------------------------------------------------
<S>                                    <C>                  <C>                  <C>                       <C>    
Common Stock, $.008 par                105,000              $9.375               $  984,375                $  291
value                                  645,000              $7.875               $5,079,375                $1,499
                                       -------                                                             ------
                                       750,000                                                             $1,790
=========================================================================================================================
</TABLE>

(1)  The number of shares of common stock, par value $.008 per share ("Common
     Stock"), stated above consists of the aggregate number of shares which may
     be sold upon the exercise of options which have been granted and/or may
     hereafter be granted under The Ibis Technology Corporation 1997 Employee,
     Director and Consultant Stock Option Plan, (the "Plan"). The maximum number
     of shares which may be sold upon the exercise of such options granted under
     the Plan is subject to adjustment in accordance with certain anti-dilution
     and other provisions of the Plan. Accordingly, pursuant to Rule 416 under
     the Securities Act of 1933, as amended (the "Securities Act"), this
     Registration Statement covers, in addition to the number of shares stated
     above, an indeterminate number of shares which may be subject to grant or
     otherwise issuable after the operation of any such anti-dilution and other
     provisions.

(2)  This calculation is made solely for the purpose of determining the
     registration fee pursuant to the provisions of Rule 457(h) under the
     Securities Act as follows: (i) in the case of shares of Common Stock which
     may be purchased upon exercise of outstanding options, the fee is
     calculated on the basis of the price at which the options may be exercised;
     and (ii) in the case of shares of Common Stock for which options have not
     yet been granted and the option price of which is therefore unknown, the
     fee is calculated on the basis of the average of the high and low sale
     prices per share of the Common Stock on the National Market System of the
     National Association of Securities Dealers Automated Quotation System
     ("Nasdaq") as of a date (January 26, 1998) within 5 business days prior to
     filing this Registration Statement.


<PAGE>   2



                                EXPLANATORY NOTE


         In accordance with the instructional Note to Part I of Form S-8 as
promulgated by the Securities and Exchange Commission, the information specified
by Part I of Form S-8 has been omitted from this Registration Statement on Form
S-8 for offers of Common Stock pursuant to the Plan.


<PAGE>   3



                                    PART II

               INFORMATION REQUIRED IN THE REGISTRATION STATEMENT

ITEM 3.  INCORPORATION OF CERTAIN DOCUMENTS BY REFERENCE.

         The following documents filed by the Registrant with the Commission are
incorporated herein by reference:

         (a) The Registrant's Annual Report on Form 10-K for the fiscal year
ended December 31, 1996;

         (b) The Registrant's Quarterly Reports on Form 10-Q for the fiscal
quarters ended September 30, 1997, June 30, 1997 and March 31, 1997; and

         (c) The description of the Common Stock contained in the Registrant's
Registration Statement on Form 8-A (File No. 0-23668) filed under the Securities
Exchange Act of 1934, including any amendment or report filed for the purpose of
updating such description.

         All reports and other documents filed by the Registrant after the date
hereof pursuant to Sections 13(a), 13(c), 14 and 15(d) of the Securities
Exchange Act of 1934 prior to the filing of a post-effective amendment which
indicates that all securities offered hereby have been sold or which deregisters
all securities then remaining unsold, shall be deemed to be incorporated by
reference herein and to be part hereof from the date of filing of such reports
and documents.

ITEM 4.  DESCRIPTION OF SECURITIES.

         Not applicable.

ITEM 5.  INTERESTS OF NAMED EXPERTS AND COUNSEL.

         Not applicable.

ITEM 6.  INDEMNIFICATION OF DIRECTORS AND OFFICERS.

         Incorporated by reference to the Registrant's Registration Statement on
Form S-1, File No. 333-1174.

ITEM 7.  EXEMPTION FROM REGISTRATION CLAIMED.

         Not applicable.


                                      II-1
<PAGE>   4


ITEM 8.  EXHIBITS.

         (4.1)   Form of Common Stock Certificate incorporated herein by
                 reference to Exhibit 4.2 to the Registrant's Registration
                 Statement filed on Form S-1, File No. 333-1174.

         (4.2)   Article 4 of the Restated Articles of Organization of the
                 Registrant incorporated herein by reference to Exhibit 3.1 to
                 the Registrant's Registration Statement filed on Form S-1, File
                 No. 333-1174.

         (4.3)   Restated Bylaws of the Registrant, incorporated herein by
                 reference to Exhibit 3.2 to the Registrant's Registration
                 Statement filed on Form S-1, File No. 333-1174.

         (5)     Opinion of Mintz, Levin, Cohn, Ferris, Glovsky and Popeo, P.C.
                 as to the legality of shares being registered.

         (23.1)  Consent of Mintz, Levin, Cohn, Ferris, Glovsky and Popeo, P.C.
                 (included in opinion of counsel filed as Exhibit 5).

         (23.2)  Consent of KPMG Peat Marwick LLP.

         (24)    Power of Attorney to file future amendments (set forth on the
                 signature page of this Registration Statement).

         (99.1)  The Ibis Technology Corporation 1997 Employee, Director and
                 Consultant Stock Option Plan.

ITEM 9.  UNDERTAKINGS.

(a)      The undersigned Registrant hereby undertakes:

         (1)     To file, during any period in which offers or sales are being
         made, a post-effective amendment to this Registration Statement:

                       (i)   To include any prospectus required by Section
                 10(a)(3) of the Securities Act of 1933;

                      (ii)   To reflect in the prospectus any facts or events
                 arising after the effective date of the Registration Statement
                 (or the most recent post-effective amendment thereof) which,
                 individually or in the aggregate, represents a fundamental
                 change in the information set forth in the Registration
                 Statement. Notwithstanding the foregoing, any increase or
                 decrease in volume of securities offered (if the total dollar
                 value of securities offered would not exceed that which was
                 registered) and any deviation from the low or high end of the
                 estimated maximum offering range may be reflected in the form
                 of prospectus filed with the Commission pursuant to Rule 424(b)
                 (Section 230.424(b) of this chapter) if, in the aggregate, the
                 changes in volume and price represent no more than a 20% change
                 in the 


                                      II-2

<PAGE>   5

                 maximum aggregate offering price set forth in the "Calculation
                 of Registration Fee" table in the effective Registration
                 Statement.

                     (iii)   To include any material information with respect to
                 the plan of distribution not previously disclosed in the
                 Registration Statement or any material change to such
                 information in the Registration Statement;

                 Provided, however, that paragraphs (a)(1)(i) and (a)(1)(ii) do
         not apply if the Registration Statement is on Form S-3 or Form S-8, and
         the information required to be included in a post-effective amendment
         by those paragraphs is contained in periodic reports filed by the
         Registrant pursuant to Section 13 or Section 15(d) of the Securities
         Exchange Act of 1934 that are incorporated by reference in this
         Registration Statement.

         (2)     That, for the purpose of determining any liability under the
         Securities Act of 1933, each such post-effective amendment shall be
         deemed to be a new registration statement relating to the securities
         offered therein, and the offering of such securities at that time shall
         be deemed to be the initial bona fide offering thereof.

         (3)     To remove from registration by means of a post-effective
         amendment any of the securities being registered which remain unsold at
         the termination of the offering.

(b)      The undersigned Registrant hereby undertakes that, for purposes of
         determining any liability under the Securities Act of 1933, each filing
         of the Registrant's annual report pursuant to Section 13(a) or Section
         15(d) of the Securities Exchange Act of 1934 that is incorporated by
         reference in this Registration Statement shall be deemed to be a new
         registration statement relating to the securities offered therein, and
         the offering of such securities at that time shall be deemed to be the
         initial bona fide offering thereof.

(c)      Insofar as indemnification for liabilities arising under the Securities
         Act of 1933 may be permitted to directors, officers and controlling
         persons of the Registrant pursuant to the foregoing provisions, or
         otherwise, the Registrant has been advised that in the opinion of the
         Securities and Exchange Commission such indemnification is against
         public policy as expressed in the Act and is, therefore, unenforceable.
         In the event that a claim for indemnification against such liabilities
         (other than the payment by the Registrant of expenses incurred or paid
         by a director, officer or controlling person of the Registrant in the
         successful defense of any action, suit or proceeding) is asserted by
         such director, officer or controlling person in connection with the
         securities being registered, the Registrant will, unless in the opinion
         of its counsel the matter has been settled by controlling precedent,
         submit to a court of appropriate jurisdiction the question whether such
         indemnification by it is against public policy as expressed in the Act
         and will be governed by the final adjudication of such issue.




                                      II-3
<PAGE>   6



                                   SIGNATURES

         The Registrant. Pursuant to the requirements of the Securities Act of
1933, the Registrant certifies that it has reasonable grounds to believe that it
meets all of the requirements for filing on Form S-8 and has duly caused this
Registration Statement to be signed on its behalf by the undersigned, thereunto
duly authorized, in Danvers, Massachusetts on January 30, 1998.


                                    IBIS TECHNOLOGY CORPORATION

                                    By /s/ Martin J. Reid
                                       -----------------------------------------
                                           Martin J. Reid
                                           President and Chief Executive Officer


         Each person whose signature appears below constitutes and appoints
Martin J. Reid and Timothy J. Burns, and each of them, his/her true and lawful
attorneys-in-fact and agents, with full power of substitution and resubstitution
in each of them, for him and in his name, place and stead, and in any and all
capacities, to sign any and all amendments (including post-effective amendments)
to this Registration Statement on Form S-8 of Ibis Technology Corporation, or
any other registration statement for the same offering that is to be effective
upon filing pursuant to Rule 462(b) under the Securities Act of 1933, as
amended, and to file the same, with all exhibits thereto and other documents in
connection therewith, with the Securities and Exchange Commission, granting unto
said attorneys-in-fact and agents, and each of them, full power and authority to
do and perform each and every act and thing requisite or necessary to be done in
or about the premises, as full to all intents and purposes as he or she might or
could do in person, hereby ratifying and confirming all that said
attorneys-in-fact and agents or any of them or their or his/her substitute or
substitutes may lawfully do or cause to be done by virtue hereof.

         Pursuant to the requirements of the Securities Act of 1933, this
Registration Statement has been signed by the following persons in the
capacities and on the dates indicated.

<TABLE>
<CAPTION>
Signature                                          Title                                    Date
---------                                          -----                                    ----

<S>                                       <C>                                       <C> 
 /s/ Richard Hodgson                      Chairman of the Board of Directors        January 30, 1998
----------------------------              and Director
Richard Hodgson                           


 /s/  Martin J. Reid                      President, Chief Executive Officer and    January 30, 1998
----------------------------              Director (principal executive officer)
Martin J. Reid                            
</TABLE>


                                      II-4
<PAGE>   7



<TABLE>
<S>                                       <C>                                       <C> 
 /s/ Timothy J. Burns                     Chief Financial Officer, Operations       January 30, 1998
----------------------------              Manager, Treasurer and Clerk
Timothy J. Burns                          (principal financial and accounting 
                                          officer)


 /s/ Geoffrey Ryding                      Director                                  January 30, 1998
----------------------------
Geoffrey Ryding, Ph.D.


                                          Director                                  January   , 1998
----------------------------
Peter H. Rose, Ph.D.


 /s/ Donald F. McGuinness                 Director                                  January 30, 1998
----------------------------
Donald F. McGuinness


 /s/ Dimitri Antoniadis                   Director                                  January 30, 1998
----------------------------
Dimitri Antoniadis


 /s/ Robert L. Gable                      Director                                  January 30, 1998
----------------------------
Robert L. Gable
</TABLE>



                                      II-5
<PAGE>   8


                           IBIS TECHNOLOGY CORPORATION

                          INDEX TO EXHIBITS FILED WITH
                         FORM S-8 REGISTRATION STATEMENT

<TABLE>
<CAPTION>
Exhibit                                                                        
Number            Description                                                        
-------           -----------                                                        

<S>               <C>                                                                
(4.1)             Form of Common Stock Certificate incorporated herein by
                  reference to Exhibit 4.2 to the Registrant's Registration
                  Statement filed on Form S-1, File No. 333-1174.

(4.2)             Article 4 of the Restated Articles of Organization of the
                  Registrant incorporated herein by reference to Exhibit 3.1 to
                  the Registrant's Registration Statement filed on Form S-1,
                  File No. 333-1174.

(4.3)             Restated Bylaws of the Registrant, incorporated herein by
                  reference to Exhibit 3.2 to the Registrant's Registration
                  Statement filed on Form S-1, File No. 333-1174.

(5)               Opinion of Mintz, Levin, Cohn, Ferris, Glovsky and Popeo, P.C.
                  as to the legality of shares being registered.

(23.1)            Consent of Mintz, Levin, Cohn, Ferris, Glovsky and Popeo, P.C.
                  (included in opinion of counsel filed as Exhibit 5).

(23.2)            Consent of KPMG Peat Marwick LLP.

(24)              Power of Attorney to file future amendments (set forth on the
                  signature page of this Registration Statement).

(99.1)            The Ibis Technology Corporation 1997 Employee, Director and
                  Consultant Stock Option Plan.
</TABLE>





                                      II-6
[{"type": "S-8", "sequence": "1", "description": "IBIS TECH CORP", "secsgml_size_bytes": 19648}]
{"company-data": {"conformed-name": "IBIS TECHNOLOGY CORP", "cik": "0000855182", "assigned-sic": "3674", "irs-number": "042987600", "state-of-incorporation": "MA", "fiscal-year-end": "1231"}, "filing-values": {"form-type": "S-8", "act": "33", "file-number": "333-45247", "film-number": "98517394"}, "business-address": {"street1": "32 CHERRY HILL DR", "city": "DANVERS", "state": "MA", "zip": "01923", "phone": "5087774247"}, "mail-address": {"street1": "32 CHERRY HILL DR", "street2": "32 CHERRY HILL DR", "city": "DANVERS", "state": "MA", "zip": "01923"}}
1

    As filed with the Securities and Exchange Commission on January 30, 1998

                                                          REGISTRATION NO. 333 -

================================================================================

                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                             ----------------------

                                    FORM S-8
                             REGISTRATION STATEMENT
                                    UNDER THE
                             SECURITIES ACT OF 1933

                             ----------------------

                           IBIS TECHNOLOGY CORPORATION
             (Exact name of Registrant as specified in its charter)

              MASSACHUSETTS                                 04-2987600
      (State or other jurisdiction                       (I.R.S. Employer
    of incorporation or organization)                   Identification No.)

                              32 CHERRY HILL DRIVE
                          DANVERS, MASSACHUSETTS 01923
                                 (978) 777-4247
                    (Address of Principal Executive Offices)

                      THE IBIS TECHNOLOGY CORPORATION 1997
               EMPLOYEE, DIRECTOR AND CONSULTANT STOCK OPTION PLAN

                                 MARTIN J. REID
                      PRESIDENT AND CHIEF EXECUTIVE OFFICER
                           IBIS TECHNOLOGY CORPORATION
                              32 CHERRY HILL DRIVE
                          DANVERS, MASSACHUSETTS 01923
                                 (978) 777-4247
    (Name, address, including zip code, and telephone number, including area
                           code, of agent for service)

                             ----------------------

                         CALCULATION OF REGISTRATION FEE
=========================================================================================================================
                                                           Proposed              Proposed
           Title of                 Amount to be            maximum               maximum
  securities to be registered       registered(1)        offering price           aggregate               Amount of
                                                          per share(2)        offering price(2)       registration fee
-------------------------------------------------------------------------------------------------------------------------
Common Stock, $.008 par                105,000              $9.375               $  984,375                $  291
value                                  645,000              $7.875               $5,079,375                $1,499
                                       -------                                                             ------
                                       750,000                                                             $1,790
=========================================================================================================================
(1)  The number of shares of common stock, par value $.008 per share ("Common
     Stock"), stated above consists of the aggregate number of shares which may
     be sold upon the exercise of options which have been granted and/or may
     hereafter be granted under The Ibis Technology Corporation 1997 Employee,
     Director and Consultant Stock Option Plan, (the "Plan"). The maximum number
     of shares which may be sold upon the exercise of such options granted under
     the Plan is subject to adjustment in accordance with certain anti-dilution
     and other provisions of the Plan. Accordingly, pursuant to Rule 416 under
     the Securities Act of 1933, as amended (the "Securities Act"), this
     Registration Statement covers, in addition to the number of shares stated
     above, an indeterminate number of shares which may be subject to grant or
     otherwise issuable after the operation of any such anti-dilution and other
     provisions.

(2)  This calculation is made solely for the purpose of determining the
     registration fee pursuant to the provisions of Rule 457(h) under the
     Securities Act as follows: (i) in the case of shares of Common Stock which
     may be purchased upon exercise of outstanding options, the fee is
     calculated on the basis of the price at which the options may be exercised;
     and (ii) in the case of shares of Common Stock for which options have not
     yet been granted and the option price of which is therefore unknown, the
     fee is calculated on the basis of the average of the high and low sale
     prices per share of the Common Stock on the National Market System of the
     National Association of Securities Dealers Automated Quotation System
     ("Nasdaq") as of a date (January 26, 1998) within 5 business days prior to
     filing this Registration Statement.
2

                                EXPLANATORY NOTE

         In accordance with the instructional Note to Part I of Form S-8 as
promulgated by the Securities and Exchange Commission, the information specified
by Part I of Form S-8 has been omitted from this Registration Statement on Form
S-8 for offers of Common Stock pursuant to the Plan.
3

                                    PART II

               INFORMATION REQUIRED IN THE REGISTRATION STATEMENT

ITEM 3.  INCORPORATION OF CERTAIN DOCUMENTS BY REFERENCE.

         The following documents filed by the Registrant with the Commission are
incorporated herein by reference:

         (a) The Registrant's Annual Report on Form 10-K for the fiscal year
ended December 31, 1996;

         (b) The Registrant's Quarterly Reports on Form 10-Q for the fiscal
quarters ended September 30, 1997, June 30, 1997 and March 31, 1997; and

         (c) The description of the Common Stock contained in the Registrant's
Registration Statement on Form 8-A (File No. 0-23668) filed under the Securities
Exchange Act of 1934, including any amendment or report filed for the purpose of
updating such description.

         All reports and other documents filed by the Registrant after the date
hereof pursuant to Sections 13(a), 13(c), 14 and 15(d) of the Securities
Exchange Act of 1934 prior to the filing of a post-effective amendment which
indicates that all securities offered hereby have been sold or which deregisters
all securities then remaining unsold, shall be deemed to be incorporated by
reference herein and to be part hereof from the date of filing of such reports
and documents.

ITEM 4.  DESCRIPTION OF SECURITIES.

         Not applicable.

ITEM 5.  INTERESTS OF NAMED EXPERTS AND COUNSEL.

         Not applicable.

ITEM 6.  INDEMNIFICATION OF DIRECTORS AND OFFICERS.

         Incorporated by reference to the Registrant's Registration Statement on
Form S-1, File No. 333-1174.

ITEM 7.  EXEMPTION FROM REGISTRATION CLAIMED.

         Not applicable.

                                      II-1
4

ITEM 8.  EXHIBITS.

         (4.1)   Form of Common Stock Certificate incorporated herein by
                 reference to Exhibit 4.2 to the Registrant's Registration
                 Statement filed on Form S-1, File No. 333-1174.

         (4.2)   Article 4 of the Restated Articles of Organization of the
                 Registrant incorporated herein by reference to Exhibit 3.1 to
                 the Registrant's Registration Statement filed on Form S-1, File
                 No. 333-1174.

         (4.3)   Restated Bylaws of the Registrant, incorporated herein by
                 reference to Exhibit 3.2 to the Registrant's Registration
                 Statement filed on Form S-1, File No. 333-1174.

         (5)     Opinion of Mintz, Levin, Cohn, Ferris, Glovsky and Popeo, P.C.
                 as to the legality of shares being registered.

         (23.1)  Consent of Mintz, Levin, Cohn, Ferris, Glovsky and Popeo, P.C.
                 (included in opinion of counsel filed as Exhibit 5).

         (23.2)  Consent of KPMG Peat Marwick LLP.

         (24)    Power of Attorney to file future amendments (set forth on the
                 signature page of this Registration Statement).

         (99.1)  The Ibis Technology Corporation 1997 Employee, Director and
                 Consultant Stock Option Plan.

ITEM 9.  UNDERTAKINGS.

(a)      The undersigned Registrant hereby undertakes:

         (1)     To file, during any period in which offers or sales are being
         made, a post-effective amendment to this Registration Statement:

                       (i)   To include any prospectus required by Section
                 10(a)(3) of the Securities Act of 1933;

                      (ii)   To reflect in the prospectus any facts or events
                 arising after the effective date of the Registration Statement
                 (or the most recent post-effective amendment thereof) which,
                 individually or in the aggregate, represents a fundamental
                 change in the information set forth in the Registration
                 Statement. Notwithstanding the foregoing, any increase or
                 decrease in volume of securities offered (if the total dollar
                 value of securities offered would not exceed that which was
                 registered) and any deviation from the low or high end of the
                 estimated maximum offering range may be reflected in the form
                 of prospectus filed with the Commission pursuant to Rule 424(b)
                 (Section 230.424(b) of this chapter) if, in the aggregate, the
                 changes in volume and price represent no more than a 20% change
                 in the 

                                      II-2
5

                 maximum aggregate offering price set forth in the "Calculation
                 of Registration Fee" table in the effective Registration
                 Statement.

                     (iii)   To include any material information with respect to
                 the plan of distribution not previously disclosed in the
                 Registration Statement or any material change to such
                 information in the Registration Statement;

                 Provided, however, that paragraphs (a)(1)(i) and (a)(1)(ii) do
         not apply if the Registration Statement is on Form S-3 or Form S-8, and
         the information required to be included in a post-effective amendment
         by those paragraphs is contained in periodic reports filed by the
         Registrant pursuant to Section 13 or Section 15(d) of the Securities
         Exchange Act of 1934 that are incorporated by reference in this
         Registration Statement.

         (2)     That, for the purpose of determining any liability under the
         Securities Act of 1933, each such post-effective amendment shall be
         deemed to be a new registration statement relating to the securities
         offered therein, and the offering of such securities at that time shall
         be deemed to be the initial bona fide offering thereof.

         (3)     To remove from registration by means of a post-effective
         amendment any of the securities being registered which remain unsold at
         the termination of the offering.

(b)      The undersigned Registrant hereby undertakes that, for purposes of
         determining any liability under the Securities Act of 1933, each filing
         of the Registrant's annual report pursuant to Section 13(a) or Section
         15(d) of the Securities Exchange Act of 1934 that is incorporated by
         reference in this Registration Statement shall be deemed to be a new
         registration statement relating to the securities offered therein, and
         the offering of such securities at that time shall be deemed to be the
         initial bona fide offering thereof.

(c)      Insofar as indemnification for liabilities arising under the Securities
         Act of 1933 may be permitted to directors, officers and controlling
         persons of the Registrant pursuant to the foregoing provisions, or
         otherwise, the Registrant has been advised that in the opinion of the
         Securities and Exchange Commission such indemnification is against
         public policy as expressed in the Act and is, therefore, unenforceable.
         In the event that a claim for indemnification against such liabilities
         (other than the payment by the Registrant of expenses incurred or paid
         by a director, officer or controlling person of the Registrant in the
         successful defense of any action, suit or proceeding) is asserted by
         such director, officer or controlling person in connection with the
         securities being registered, the Registrant will, unless in the opinion
         of its counsel the matter has been settled by controlling precedent,
         submit to a court of appropriate jurisdiction the question whether such
         indemnification by it is against public policy as expressed in the Act
         and will be governed by the final adjudication of such issue.

                                      II-3
6

                                   SIGNATURES

         The Registrant. Pursuant to the requirements of the Securities Act of
1933, the Registrant certifies that it has reasonable grounds to believe that it
meets all of the requirements for filing on Form S-8 and has duly caused this
Registration Statement to be signed on its behalf by the undersigned, thereunto
duly authorized, in Danvers, Massachusetts on January 30, 1998.

                                    IBIS TECHNOLOGY CORPORATION

                                    By /s/ Martin J. Reid
                                       -----------------------------------------
                                           Martin J. Reid
                                           President and Chief Executive Officer

         Each person whose signature appears below constitutes and appoints
Martin J. Reid and Timothy J. Burns, and each of them, his/her true and lawful
attorneys-in-fact and agents, with full power of substitution and resubstitution
in each of them, for him and in his name, place and stead, and in any and all
capacities, to sign any and all amendments (including post-effective amendments)
to this Registration Statement on Form S-8 of Ibis Technology Corporation, or
any other registration statement for the same offering that is to be effective
upon filing pursuant to Rule 462(b) under the Securities Act of 1933, as
amended, and to file the same, with all exhibits thereto and other documents in
connection therewith, with the Securities and Exchange Commission, granting unto
said attorneys-in-fact and agents, and each of them, full power and authority to
do and perform each and every act and thing requisite or necessary to be done in
or about the premises, as full to all intents and purposes as he or she might or
could do in person, hereby ratifying and confirming all that said
attorneys-in-fact and agents or any of them or their or his/her substitute or
substitutes may lawfully do or cause to be done by virtue hereof.

         Pursuant to the requirements of the Securities Act of 1933, this
Registration Statement has been signed by the following persons in the
capacities and on the dates indicated.
Signature                                          Title                                    Date
---------                                          -----                                    ----
/s/ Richard Hodgson                      Chairman of the Board of Directors        January 30, 1998
----------------------------              and Director
Richard Hodgson                           

 /s/  Martin J. Reid                      President, Chief Executive Officer and    January 30, 1998
----------------------------              Director (principal executive officer)
Martin J. Reid
II-4
7
/s/ Timothy J. Burns                     Chief Financial Officer, Operations       January 30, 1998
----------------------------              Manager, Treasurer and Clerk
Timothy J. Burns                          (principal financial and accounting 
                                          officer)

 /s/ Geoffrey Ryding                      Director                                  January 30, 1998
----------------------------
Geoffrey Ryding, Ph.D.

                                          Director                                  January   , 1998
----------------------------
Peter H. Rose, Ph.D.

 /s/ Donald F. McGuinness                 Director                                  January 30, 1998
----------------------------
Donald F. McGuinness

 /s/ Dimitri Antoniadis                   Director                                  January 30, 1998
----------------------------
Dimitri Antoniadis

 /s/ Robert L. Gable                      Director                                  January 30, 1998
----------------------------
Robert L. Gable
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                           IBIS TECHNOLOGY CORPORATION

                          INDEX TO EXHIBITS FILED WITH
                         FORM S-8 REGISTRATION STATEMENT
Exhibit                                                                        
Number            Description                                                        
-------           -----------
(4.1)             Form of Common Stock Certificate incorporated herein by
                  reference to Exhibit 4.2 to the Registrant's Registration
                  Statement filed on Form S-1, File No. 333-1174.

(4.2)             Article 4 of the Restated Articles of Organization of the
                  Registrant incorporated herein by reference to Exhibit 3.1 to
                  the Registrant's Registration Statement filed on Form S-1,
                  File No. 333-1174.

(4.3)             Restated Bylaws of the Registrant, incorporated herein by
                  reference to Exhibit 3.2 to the Registrant's Registration
                  Statement filed on Form S-1, File No. 333-1174.

(5)               Opinion of Mintz, Levin, Cohn, Ferris, Glovsky and Popeo, P.C.
                  as to the legality of shares being registered.

(23.1)            Consent of Mintz, Levin, Cohn, Ferris, Glovsky and Popeo, P.C.
                  (included in opinion of counsel filed as Exhibit 5).

(23.2)            Consent of KPMG Peat Marwick LLP.

(24)              Power of Attorney to file future amendments (set forth on the
                  signature page of this Registration Statement).

(99.1)            The Ibis Technology Corporation 1997 Employee, Director and
                  Consultant Stock Option Plan.
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