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<p align="right" style="text-align: right"><font size="2">As
filed with the Securities and Exchange Commission on March 13, 2008<br>
Registration No. 333-_____________</font></p>
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	<hr size="2" width="100%" align="center"></div>
<p align="center" style="text-align: center">&nbsp;</p>
<div align="center">
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		<tr>
			<td colspan="3" style="padding: .75pt">
			<p class="MsoNormal" align="center" style="text-align: center"><b>
			<font size="5">UNITED STATES<br>
			SECURITIES AND EXCHANGE COMMISSION</font></b></td>
		</tr>
		<tr>
			<td colspan="3" style="padding: .75pt">
			<p class="MsoNormal" align="center" style="text-align: center">
			<font size="2">Washington, D.C. 20549</font></td>
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		<tr>
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			<p class="MsoNormal" align="center" style="text-align: center">&nbsp;</td>
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		<tr>
			<td colspan="3" style="padding: .75pt">
			<p class="MsoNormal" align="center" style="text-align: center"><b>
			<font size="5">FORM S-8</font></b></td>
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		<tr>
			<td colspan="3" style="padding: .75pt">
			<p class="MsoNormal" align="center" style="text-align: center"><b>
			<font size="5">REGISTRATION STATEMENT</font></b></td>
		</tr>
		<tr>
			<td colspan="3" style="padding: .75pt">
			<p class="MsoNormal" align="center" style="text-align: center"><i>
			<font size="2">Under<br>
			THE SECURITIES ACT OF 1933</font></i></td>
		</tr>
		<tr>
			<td colspan="3" style="padding: .75pt">
			<p class="MsoNormal" align="center" style="text-align: center">&nbsp;</td>
		</tr>
		<tr>
			<td colspan="3" style="padding: .75pt">
			<p class="MsoNormal" align="center" style="text-align: center"><b>
			<font size="5">RUDOLPH TECHNOLOGIES, INC.</font></b></td>
		</tr>
		<tr>
			<td colspan="3" style="padding: .75pt">
			<p class="MsoNormal" align="center" style="text-align: center">
			<font size="1">(Exact name of Registrant as
			specified in its charter)</font></td>
		</tr>
		<tr>
			<td colspan="3" style="padding: .75pt">
			<p class="MsoNormal">&nbsp;</td>
		</tr>
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			<td width="33%" style="width: 33.0%; padding: .75pt">
			<p class="MsoNormal" align="center" style="text-align: center"><u>
			<font size="2">Delaware </font> </u></td>
			<td width="33%" style="width: 33.0%; padding: .75pt">
			<p class="MsoNormal">&nbsp;</td>
			<td width="33%" style="width: 33.0%; padding: .75pt">
			<p class="MsoNormal" align="center" style="text-align: center"><u>
			<font size="2">22-3531208</font></u></td>
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		<tr>
			<td width="33%" style="width: 33.0%; padding: .75pt">
			<p class="MsoNormal" align="center" style="text-align: center">
			<font size="2">(State of Incorporation)</font></td>
			<td width="33%" style="width: 33.0%; padding: .75pt">
			<p class="MsoNormal">&nbsp;</td>
			<td width="33%" style="width: 33.0%; padding: .75pt">
			<p class="MsoNormal" align="center" style="text-align: center">
			<font size="2">(I.R.S. Employer Identification
			Number)</font></td>
		</tr>
		<tr>
			<td width="33%" style="width: 33.0%; padding: .75pt">
			<p class="MsoNormal" align="center" style="text-align: center">&nbsp;</td>
			<td width="33%" style="width: 33.0%; padding: .75pt">
			<p align="center" style="text-align: center"><font size="2">One Rudolph Road, PO
			Box 1000<br>
			Flanders, NJ 07836<br>
			973-691-1300 </font> </td>
			<td width="33%" style="width: 33.0%; padding: .75pt">
			<p class="MsoNormal">&nbsp;</td>
		</tr>
		<tr>
			<td colspan="3" style="padding: .75pt">
			<p align="center" style="text-align: center">
			<font size="2">&nbsp; (Address, including zip code, and
			telephone number, <br>
			including area code of registrant's principal executive offices)</font></td>
		</tr>
		<tr>
			<td colspan="3" style="padding: .75pt">
			<p class="MsoNormal" align="center" style="text-align: center">&nbsp;</td>
		</tr>
	</table>
</div>
<p align="center" style="text-align: center"><b><font size="5">1999 STOCK PLAN</font><br>
<font size="5">1999 EMPLOYEE STOCK PURCHASE PLAN</font><br>
</b><font size="1">(Full title of the Plans)</font></p>
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			<td width="716" style="width: 537.0pt; padding: .75pt">
			<p class="MsoNormal">&nbsp;</td>
		</tr>
		<tr>
			<td width="716" style="width: 537.0pt; padding: .75pt">
			<p align="center" style="text-align: center"><font size="2">PAUL F. McLAUGHLIN<br>
			Chairman and Chief Executive Officer<br>
			RUDOLPH TECHNOLOGIES, INC.<br>
			One Rudolph Road, PO Box 1000<br>
			Flanders, NJ 07836<br>
			(973) 691-1300<br>
			(Name, address including zip code,
			and telephone number, including area code, of agent for service)</font></td>
		</tr>
		</table>
</div>
<p><font size="2">&nbsp;Indicate by check mark whether the registrant is a large accelerated filer,
an accelerated filer, a non-accelerated filer, or a smaller reporting company.&nbsp;
See the definitions of&nbsp; "large accelerated filer," "accelerated filer" and
"smaller reporting company" in Rule 12b-2 of the Exchange Act.</font></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Large accelerated filer&nbsp; [&nbsp;
]&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Accelerated filer [X]<br>
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Non-accelerated filer [&nbsp; ] (Do not check if smaller reporting
company)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Smaller reporting company [&nbsp; ]</font></p>
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	<hr size="2" width="100%" align="center"></div>
<p align="center" style="text-align: center">&nbsp;</p>
<p align="center" style="text-align: center"><b><font size="2">CALCULATION OF REGISTRATION FEE</font></b></p>
<div align="center">
	<table class="MsoNormalTable" border="0" cellspacing="0" cellpadding="0" width="790" style="width: 592.5pt" id="table3">
		<tr>
			<td width="32%" style="width: 32.0%; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal" align="center" style="text-align: center">
			<font size="2">Title of Securities to be Registered</font></td>
			<td width="12%" style="width: 12.0%; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal" align="center" style="text-align: center">
			<font size="2">Amount to be Registered (1)</font></td>
			<td width="14%" style="width: 14.0%; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal" align="center" style="text-align: center">
			<font size="2">Proposed Maximum Offering Price Per
			Share</font></td>
			<td width="16%" style="width: 16.0%; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal" align="center" style="text-align: center">
			<font size="2">Proposed Maximum Aggregate Offering
			Price</font></td>
			<td width="14%" style="width: 14.0%; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal" align="center" style="text-align: center">
			<font size="2">Amount of Registration Fee</font></td>
		</tr>
		<tr>
			<td width="32%" style="width: 32.0%; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">Common Stock
			$0.001 par value, to be issued under the 1999 Stock Plan</font></td>
			<td width="12%" style="width: 12.0%; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal" align="right" style="text-align: right">
			<font size="2">1,138,824 (2)</font></td>
			<td width="14%" style="width: 14.0%; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal" align="right" style="text-align: right">
			<font size="2">$8.78&nbsp; (3)</font></td>
			<td width="16%" style="width: 16.0%; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal" align="right" style="text-align: right">
			<font size="2">$9,998,874.72&nbsp;&nbsp; &nbsp; </font></td>
			<td width="14%" style="width: 14.0%; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal" align="right" style="text-align: right">
			<font size="2">$392.96 &nbsp;&nbsp;&nbsp; &nbsp; </font></td>
		</tr>
		<tr>
			<td width="32%" style="width: 32.0%; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">Common Stock
			$0.001 par value, to be issued under the 1999 Employee Stock
			Purchase Plan</font></td>
			<td width="12%" style="width: 12.0%; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal" align="right" style="text-align: right">
			<font size="2">900,000 (4)</font></td>
			<td width="14%" style="width: 14.0%; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal" align="right" style="text-align: right">
			<font size="2">$8.78&nbsp; (3)</font></td>
			<td width="16%" style="width: 16.0%; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal" align="right" style="text-align: right">
			<font size="2">$7,902,000.00 &nbsp;&nbsp;&nbsp; </font></td>
			<td width="14%" style="width: 14.0%; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal" align="right" style="text-align: right">
			<font size="2">$310.55 &nbsp; &nbsp; &nbsp; </font></td>
		</tr>
		<tr>
			<td width="32%" style="width: 32.0%; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">Total</font></td>
			<td width="12%" style="width: 12.0%; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal" align="right" style="text-align: right">
			<font size="2">2,038,824 &nbsp;&nbsp;&nbsp; </font> </td>
			<td width="14%" style="width: 14.0%; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal" align="right" style="text-align: right">
			<font size="2">&nbsp;&nbsp; </font> </td>
			<td width="16%" style="width: 16.0%; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal" align="right" style="text-align: right">
			<font size="2">$17,900,874.72 &nbsp; </font></td>
			<td width="14%" style="width: 14.0%; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal" align="right" style="text-align: right">
			<font size="2">$703.51 &nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </font></td>
		</tr>
	</table>
</div>
<p>&nbsp;</p>
<p><font size="2">(1) For the sole purpose of calculating the registration fee, the number of
shares to be registered under this Registration Statement is the number of
additional shares authorized to be issued under the 1999 Stock Plan and the 1999
Employee Stock Purchase Plan.&nbsp; This Registration Statement shall also cover any
additional shares of Common Stock which become issuable by reason of any stock
dividend, stock split, recapitalization or other similar transaction effected
without the receipt of consideration which results in an increase in the number
of the outstanding shares of Common Stock.</font></p>
<p><font size="2">(2) Includes the following automatic annual increases to the number of shares
of the Registrant's Common Stock reserved for issuance under the 1999 Stock
Plan: (i) 338,824 shares on January 1, 2006, (ii) 400,000 shares on January 1,
2007 and (iii) 400,000 shares on January 1, 2008.</font></p>
<p><font size="2">(3) Estimated solely for the purpose of determining the registration fee
pursuant to Rule 457(c) and Rule 457(h)(1) on the basis of the average of the
high and low sale prices of Common Stock on the Nasdaq Global Market on March 3,
2008.</font></p>
<p><font size="2">(4) Includes the following automatic annual increases to the number of shares
of the Registrant's Common Stock reserved for issuance under the 1999 Employee
Stock Purchase Plan: (i) 300,000 shares on January 1, 2006, (ii) 300,000 shares
on January 1, 2007 and (iii) 300,000 shares on January 1, 2008.</font></p>
<p>&nbsp;</p>
<div class="MsoNormal" align="center" style="text-align: center">
	<b><hr size="2" width="100%" align="center"></b></div>
<p align="center" style="text-align: center"><b><font size="2">PART I</font></b></p>
<p><b><font size="2">Item 1. </font> </b><u><font size="2">Plan Information*<br>
&nbsp;</font></u></p>
<p><b><font size="2">Item 2. </font> </b><u><font size="2">Registrant Information and Employee Plan Annual
Information*</font></u></p>
<p><font size="2">*Information required by Part I to be contained in the Section 10(a)
prospectus is omitted from this registration statement in accordance with Rule
428 under the Securities Act and the Note to Part I of Form S-8.</font></p>
<div class="MsoNormal" align="center" style="text-align: center">
	<b><hr size="2" width="100%" align="center"></b></div>
<p align="center" style="text-align: center"><b><font size="2">PART II</font></b></p>
<p align="center" style="text-align: center"><b><font size="2">INFORMATION REQUIRED IN THE
REGISTRATION STATEMENT</font></b></p>
<p align="center" style="text-align: center"><b><font size="2">&nbsp;</font></b></p>
<p><b><font size="2">Item 3</font></b><font size="2">. </font> <u>
<font size="2">Incorporation of Documents by Reference</font></u></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; The following documents and information heretofore filed with the
Securities and Exchange Commission (the &quot;Commission&quot;) are hereby incorporated by
reference:</font></p>
<p><b><font size="2">Item 3(a)</font></b></p>
<p><font size="2">The Registrant's Annual Report on Form 10-K for the fiscal year ended
December 31, 2007, filed on March 3, 2008.</font></p>
<p><b><font size="2">Item 3(b)</font></b></p>
<p><FONT face="Times New Roman" size=2>The Registrant's Current Reports on
      Form 8-K , filed on January 11, 2008, January 28, 2008 and February 7, 2008.</FONT></p>
<p><b><font size="2">Item 3(c) </font> </b></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; The description of the Common Stock of the Registrant contained in
the Registrant's Registration Statement on Form 8-A filed on November 5, 1999,
pursuant to Section 12 of the Securities Exchange Act of 1934, as amended (the
&quot;Exchange Act&quot;).</font></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; All documents subsequently filed by the Registrant pursuant to
Sections 13(a), 13(c), 14 and 15(d) of the Exchange Act, prior to the filing of
a post-effective amendment which indicates that all securities registered hereby
have been sold or which deregisters all securities then remaining unsold, shall
be deemed to be incorporated by reference in this Registration Statement and to
be part hereof from the date of filing such documents.</font></p>
<p><b><font size="2"><br>
Item 4</font></b><font size="2">. </font> <u><font size="2">Description of Securities</font></u></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Not Applicable.</font><b><font size="2"><br>
&nbsp;</font></b></p>
<p><b><font size="2">Item 5</font></b><font size="2">. </font> <u>
<font size="2">Interests of Named Experts and Counsel</font></u></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Not Applicable.</font></p>
<p><b><font size="2"><br>
Item 6</font></b><font size="2">. </font> <u><font size="2">Indemnification of Directors and Officers</font></u></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; The Registrant's certificate of incorporation contains certain
provisions permitted under the Delaware General Corporation Law relating to the
liability of directors. These provisions eliminate a director's personal
liability for monetary damages resulting from a breach of fiduciary duty, except
in certain circumstances involving certain wrongful acts, including: (i) for any
breach of the director's duty of loyalty to the corporation or its stockholders,
(ii) for acts or omissions not in good faith or that involve intentional
misconduct or a knowing violation of law, (iii) for unlawful payments of
dividends or unlawful stock repurchases or redemptions as provided in Section
174 of the Delaware General Corporation Law, or (iv) for any transaction from
which the director derived an improper personal benefit.</font></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; The Registrant's Bylaws provide that the Registrant shall
indemnify its directors and officers and may indemnify its employees and other
agents to the fullest extent permitted by law. The Registrant's Bylaws also
permit the Registrant to secure insurance on behalf of any officer, director,
employee or other agent for any liability arising out of his or her actions in
such capacity, regardless of whether the Registrant would have the power to
indemnify him or her against such liability under the General Corporation Law of
Delaware.</font></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; The Registrant has entered into agreements to indemnify its
directors and officers, in addition to indemnification provided for in the
Registrant's Bylaws. Subject to certain conditions, these agreements, among
other things, indemnify the Registrant's directors and officers for certain
expenses (including attorney's fees), judgments, fines and settlement amounts
incurred by any such person in any action or proceeding, including any action by
or in the right of the Registrant, arising out of such person's services as a
director or officer of the Registrant. The Registrant maintains an insurance policy covering its officers and directors
with respect to certain liabilities, including liabilities arising under the
Securities Act or otherwise.</font></p>
<p><b><font size="2"><br>
Item 7</font></b><font size="2">. </font> <u><font size="2">Exemption From Registration Claimed</font></u></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Not Applicable.</font></p>
<p><b><font size="2"><br>
Item 8</font></b><font size="2">. </font> <u><font size="2">Exhibits</font></u></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; 4.1(1)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Restated Certificate of Incorporation of
Registrant</font></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; 4.2(2)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Restated Bylaws of Registrant</font></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; 4.3(3) &nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Rights Agreement</font></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
5.1&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
Opinion of Wolff &amp; Samson, PC, as to legality of securities being registered<br>
<br>
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; 10.1(4) &nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; 1999 Stock Plan</font></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; 10.2(5)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;1999 Employee Stock Purchase Plan, as amended and
restated.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </font> </p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; 23.1 &nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Consent of KPMG LLP, independent registered
public accounting firm</font></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
23.2&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
Consent of Wolff &amp; Samson, PC (contained in Exhibit 5.1).</font></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; 24.1 &nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Power of Attorney
</font><FONT face="Times New Roman" size=2>(included on signature page of the
Registration Statement hereto)</FONT><font size="2"><br>
</font>
<u><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
</font> </u></p>
<p><font size="2">(1) Exhibit 4.1 is incorporated by reference to Exhibit 3.1(c) filed with the
Registrant's Registration Statement on Form S-1as amended, No. 333-86821, filed
with the SEC on September 9, 1999.</font></p>
<p><font size="2">(2) Exhibit 4.2 is incorporated by reference to Exhibit 3.1 filed with the
Registrant's Registration Statement on Form 8-K, filed with the SEC on August 1,
2007.</font></p>
<p><font size="2">(3) Exhibit 4.3 incorporated by reference to Exhibit 4.1 of the Registrant's
Registration Statement on Form 8-A, filed with the SEC on June 28, 2005.</font></p>
<p><font size="2">(4) Exhibit 10.1 is incorporated by reference to Exhibit 10.5 filed with the
Registrant's Registration Statement on Form S-1 as amended, No. 333-86821, filed
with the SEC on September 9, 1999.</font></p>
<p><font size="2">(5) Exhibit 10.2 is incorporated by reference to Exhibit 10.2 filed with the
Registrant's Registration Statement on Form S-8, No. 333-129773, filed with the
SEC on November 17, 2005.</font></p>
<p><b><font size="2">&nbsp;</font></b></p>
<p><b><font size="2">Item 9</font></b><font size="2">. </font> <u>
<font size="2">Undertakings</font></u></p>
<P style="MARGIN-TOP: 6px; MARGIN-BOTTOM: 0px; TEXT-INDENT: 4%">
<FONT
face="Times New Roman" size=2>(a) The undersigned registrant hereby undertakes:
</FONT></P>
<P
style="MARGIN-TOP: 6px; MARGIN-BOTTOM: 0px; MARGIN-LEFT: 8%; TEXT-INDENT: 4%"><FONT
face="Times New Roman" size=2>1. To file, during any period in which offers or
sales are being made, a post-effective amendment to this registration statement:
</FONT></P>
<P
style="MARGIN-TOP: 6px; MARGIN-BOTTOM: 0px; MARGIN-LEFT: 13%; TEXT-INDENT: 4%"><FONT
face="Times New Roman" size=2>(i) To include any prospectus required by
Section&nbsp;10(a)(3) of the Securities Act of 1933; </FONT></P>
<P
style="MARGIN-TOP: 6px; MARGIN-BOTTOM: 0px; MARGIN-LEFT: 13%; TEXT-INDENT: 4%"><FONT
face="Times New Roman" size=2>(ii) To reflect in the prospectus any facts or
events arising after the effective date of the registration statement (or the
most recent post-effective amendment thereof) which, individually or in the
aggregate, represent a fundamental change in the information set forth in the
registration statement. Notwithstanding the foregoing, any increase or decrease
in volume of securities offered (if the total dollar value of securities offered
would not exceed that which was registered) and any deviation from the low or
high end of the estimated offering range may be reflected in the form of
prospectus filed with the Commission pursuant to Rule 424(b) if, in the
aggregate, the changes in volume and price represent no more than a 20 percent
change in the maximum aggregate offering price set forth in the "Calculation of
Registration Fee" table in the effective registration statement; and </FONT></P>
<P
style="MARGIN-TOP: 6px; MARGIN-BOTTOM: 0px; MARGIN-LEFT: 13%; TEXT-INDENT: 4%"><FONT
face="Times New Roman" size=2>(iii) To include any material information with
respect to the plan of distribution not previously disclosed in the registration
statement or any material change to such information in the registration
statement; </FONT></P>
<P style="MARGIN-TOP: 6px; MARGIN-BOTTOM: 0px; MARGIN-LEFT: 8%"><FONT
face="Times New Roman" size=2><I>provided, however</I>, that paragraphs
(a)(1)(i) and (a)(1)(ii) of this section do not apply if the
information required to be included in a post-effective amendment by those
paragraphs is contained in reports filed with or furnished to the Commission by
the registrant pursuant to Section&nbsp;13 or Section&nbsp;15(d) of the
Securities Exchange Act of 1934 that are incorporated by reference in the
registration statement. </FONT></P>
<P
style="MARGIN-TOP: 6px; MARGIN-BOTTOM: 0px; MARGIN-LEFT: 8%; TEXT-INDENT: 4%"><FONT
face="Times New Roman" size=2>2. That, for the purpose of determining any
liability under the Securities Act of 1933, each such post-effective amendment
shall be deemed to be a new registration statement relating to the securities
offered therein, and the offering of such securities at that time shall be
deemed to be the initial <I>bona fide</I> offering thereof. </FONT></P>
<P
style="MARGIN-TOP: 6px; MARGIN-BOTTOM: 0px; MARGIN-LEFT: 8%; TEXT-INDENT: 4%"><FONT
face="Times New Roman" size=2>3. To remove from registration by means of a
post-effective amendment any of the securities being registered which remain
unsold at the termination of the offering. </FONT></P>
<P style="MARGIN-TOP: 12px; MARGIN-BOTTOM: 0px; TEXT-INDENT: 4%"><FONT
face="Times New Roman" size=2>(b) The undersigned registrant hereby undertakes
that, for purposes of determining any liability under the Securities Act of
1933, each filing of the registrant's annual report pursuant to
Section&nbsp;13(a) or Section&nbsp;15(d) of the Securities Exchange Act of 1934
that is
incorporated by reference in the registration statement shall be deemed to be a
new registration statement relating to the securities offered therein, and the
offering of such securities at that time shall be deemed to be the initial
<I>bona fide</I> offering thereof. </FONT></P>
<P style="MARGIN-TOP: 12px; MARGIN-BOTTOM: 0px; TEXT-INDENT: 4%"><FONT
face="Times New Roman" size=2>(c) Insofar as indemnification for liabilities
arising under the Securities Act of 1933 may be permitted to directors, officers
and controlling persons of the registrant pursuant to the foregoing provisions,
or otherwise, the registrant has been advised that in the opinion of the
Securities and Exchange Commission such indemnification is against public policy
as expressed in the Securities Act of 1933 and is, therefore, unenforceable. In
the event that a claim for indemnification against such liabilities (other than
the payment by the registrant of expenses incurred or paid by a director,
officer or controlling person of the registrant in the successful defense of any
action, suit or proceeding) is asserted by such director, officer or controlling
person in connection with the securities being registered, the registrant will,
unless in the opinion of its counsel the matter has been settled by controlling
precedent, submit to a court of appropriate jurisdiction the question whether
such indemnification by it is against public policy as expressed in the
Securities Act of 1933 and will be governed by the final adjudication of such
issue. </FONT></P>
<p><b><font size="2">&nbsp;</font></b></p>
<div class="MsoNormal" align="center" style="text-align: center">
	<b><hr size="2" width="100%" align="center"></b></div>
<p align="center" style="text-align: center"><b><font size="2">SIGNATURES</font></b></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Pursuant to the requirements of the Securities Act of 1933, as
amended, the Registrant, Rudolph Technologies, Inc., a corporation organized and
existing under the laws of the State of Delaware, certifies that it has
reasonable grounds to believe that it meets all of the requirements for filing
on Form S-8 and has duly caused this Registration Statement to be signed on its
behalf by the undersigned, thereunto duly authorized, in the City of Flanders,
State of New Jersey, on this 13th day of March, 2008.</font></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; RUDOLPH
TECHNOLOGIES, INC.</font></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; By:<u> &nbsp;&nbsp; /s/
Paul F. McLaughlin </u><br>
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; &nbsp;&nbsp; <strong>
&nbsp;&nbsp; Paul F. McLaughlin,</strong></font><b><font size="2"><br>
</font>
<strong><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Chairman and Chief Executive Officer</font></strong></b></p>
<p><b><font size="2">&nbsp;</font></b></p>
<p align="center" style="text-align: center"><b><font size="2">POWER OF ATTORNEY</font></b></p>
<P style="MARGIN-TOP: 12px; MARGIN-BOTTOM: 0px; TEXT-INDENT: 4%"><FONT
face="Times New Roman" size=2>KNOW ALL PERSONS BY THESE PRESENTS, that the
undersigned officers and directors of Rudolph Technologies, Inc., a
Delaware corporation, do hereby constitute and appoint Paul F. McLaughlin and
Steven R. Roth, and each of them individually, the lawful
attorneys-in-fact and agents, each with full power of substitution or
re-substitution, with full power and authority to do any and all acts and things
and to execute any and all instruments which said attorneys-in-fact and agents,
or either one of them, determine may be necessary or advisable or required to
enable said corporation to comply with the Securities Act of 1933, as amended,
and any rules or regulation or requirements of the Securities and Exchange
Commission in connection with this Registration Statement. Without limiting the
generality of the foregoing power and authority, the powers granted include the
power and authority to sign the names of the undersigned officers and directors
in the capacities indicated below to this Registration Statement, to any and all
amendments, both pre-effective and post-effective, and supplements to this
Registration Statement and to any and all instruments or documents filed as part
of or in conjunction with this Registration Statement or amendments or
supplements thereto, and each of the undersigned hereby ratifies and confirms
all that said attorneys-in-fact and agents, or either one of them, shall do or
cause to be done by virtue hereof. This Power of Attorney may be signed in
several counterparts. </FONT></P>
<P style="MARGIN-TOP: 12px; MARGIN-BOTTOM: 0px; TEXT-INDENT: 4%">
<FONT
face="Times New Roman" size=2>IN WITNESS WHEREOF, each of the undersigned has
executed this Power of Attorney as of the date indicated. </FONT></P>
<P style="MARGIN-TOP: 12px; MARGIN-BOTTOM: 0px; TEXT-INDENT: 4%"><FONT
face="Times New Roman" size=2><B>Pursuant to the requirements of the Securities
Act of 1933, this registration statement has been signed below by the following
persons in the capacities and on the dates indicated. </B></FONT></P>
<P style="MARGIN-TOP: 12px; MARGIN-BOTTOM: 0px; TEXT-INDENT: 4%">&nbsp;</P>
<div align="center">
	<table class="MsoNormalTable" border="0" cellspacing="0" cellpadding="0" width="650" style="width: 487.5pt" height="882" id="table4">
		<tr style="height: 12.75pt">
			<td width="33%" style="width: 33.0%; height: 12.75pt; padding: 6.0pt">
			<p align="center" style="text-align: center"><b><u>
			<font size="2">Signature</font></u></b></td>
			<td width="38%" style="width: 38.0%; height: 12.75pt; padding: 6.0pt">
			<p align="center" style="text-align: center"><b><u>
			<font size="2">Title</font></u></b></td>
			<td width="29%" style="width: 29.0%; height: 12.75pt; padding: 6.0pt">
			<p align="center" style="text-align: center"><b><u>
			<font size="2">Date</font></u></b></td>
		</tr>
		<tr style="height: 23.25pt">
			<td width="33%" valign="bottom" style="width: 33.0%; height: 23.25pt; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">/s/
			Paul F. McLaughlin</font></td>
			<td width="38%" rowspan="2" style="width: 38.0%; height: 23.25pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">Chairman and Chief Executive Officer (Principal
			Executive Officer) </font> </p>
			<p>&nbsp;</td>
			<td width="29%" rowspan="2" style="width: 29.0%; height: 23.25pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">March 13, 2008 </font> </p>
			<p>&nbsp;</td>
		</tr>
		<tr style="height: 27.0pt">
			<td width="33%" valign="top" style="width: 33.0%; height: 27.0pt; padding: 6.0pt">
			<p class="MsoNormal"><strong><font size="2">Paul F.
			McLaughlin</font></strong><b><font size="2"><br>
			</font>
			<strong><font size="2">&nbsp; </font> </strong></b></td>
		</tr>
		<tr style="height: 16.5pt">
			<td width="33%" valign="top" style="width: 33.0%; height: 16.5pt; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">/s/
			Steven R. Roth</font></td>
			<td width="38%" rowspan="2" style="width: 38.0%; height: 16.5pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">Senior Vice President &amp; Chief Financial Officer
			(Principal Financial and Accounting Officer)</font></td>
			<td width="29%" rowspan="2" style="width: 29.0%; height: 16.5pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">March 13, 2008</font></p>
			<p>&nbsp;</td>
		</tr>
		<tr style="height: 27.0pt">
			<td width="33%" valign="top" style="width: 33.0%; height: 27.0pt; padding: 6.0pt">
			<p class="MsoNormal"><strong><font size="2">Steven
			R. Roth</font></strong><font size="2"><br>
			&nbsp; </font> </td>
		</tr>
		<tr style="height: 16.5pt">
			<td width="33%" style="width: 33.0%; height: 16.5pt; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">/s/
			Daniel H. Berry</font></td>
			<td width="38%" rowspan="2" style="width: 38.0%; height: 16.5pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">Director </font> </p>
			<p>&nbsp;</td>
			<td width="29%" rowspan="2" style="width: 29.0%; height: 16.5pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">March 13, 2008&nbsp; </font> </p>
			<p>&nbsp;</td>
		</tr>
		<tr style="height: 27.0pt">
			<td width="33%" valign="top" style="width: 33.0%; height: 27.0pt; padding: 6.0pt">
			<p class="MsoNormal"><strong><font size="2">Daniel
			H. Berry</font></strong><font size="2"><br>
			&nbsp; </font> </td>
		</tr>
		<tr style="height: 16.5pt">
			<td width="33%" style="width: 33.0%; height: 16.5pt; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">/s/
			Paul Craig</font></td>
			<td width="38%" rowspan="2" style="width: 38.0%; height: 16.5pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">Director </font> </p>
			<p>&nbsp;</td>
			<td width="29%" rowspan="2" style="width: 29.0%; height: 16.5pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">March 13, 2008&nbsp; </font> </p>
			<p>&nbsp;</td>
		</tr>
		<tr style="height: 27.0pt">
			<td width="33%" style="width: 33.0%; height: 27.0pt; padding: 6.0pt">
			<p class="MsoNormal"><strong><font size="2">Paul
			Craig</font></strong><font size="2"><br>
			&nbsp; </font> </td>
		</tr>
		<tr style="height: 16.5pt">
			<td width="33%" style="width: 33.0%; height: 16.5pt; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">/s/
			Thomas G. Greig</font></td>
			<td width="38%" rowspan="2" style="width: 38.0%; height: 16.5pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">Director </font> </p>
			<p>&nbsp;</td>
			<td width="29%" rowspan="2" style="width: 29.0%; height: 16.5pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">March 13, 2008 </font> </p>
			<p>&nbsp;</td>
		</tr>
		<tr style="height: 27.0pt">
			<td width="33%" style="width: 33.0%; height: 27.0pt; padding: 6.0pt">
			<p class="MsoNormal"><strong><font size="2">Thomas
			G. Greig</font></strong><font size="2"><br>
			&nbsp; </font> </td>
		</tr>
		<tr style="height: 16.5pt">
			<td width="33%" style="width: 33.0%; height: 16.5pt; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">/s/
			Jeff L. O'Dell</font></td>
			<td width="38%" rowspan="2" style="width: 38.0%; height: 16.5pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">Director </font> </p>
			<p>&nbsp;</td>
			<td width="29%" rowspan="2" style="width: 29.0%; height: 16.5pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">March 13, 2008&nbsp; </font> </p>
			<p>&nbsp;</td>
		</tr>
		<tr style="height: 24.0pt">
			<td width="33%" style="width: 33.0%; height: 24.0pt; padding: 6.0pt">
			<p class="MsoNormal"><strong><font size="2">Jeff L.
			O'Dell</font></strong></td>
		</tr>
		<tr style="height: 15.75pt">
			<td width="33%" style="width: 33.0%; height: 15.75pt; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">/s/
			Carl E. Ring, Jr.&nbsp;&nbsp;&nbsp; </font> </td>
			<td width="38%" rowspan="2" style="width: 38.0%; height: 15.75pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">Director </font> </p>
			<p>&nbsp;</td>
			<td width="29%" rowspan="2" style="width: 29.0%; height: 15.75pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">March 13, 2008 </font> </p>
			<p>&nbsp;</td>
		</tr>
		<tr style="height: 27.0pt">
			<td width="33%" style="width: 33.0%; height: 27.0pt; padding: 6.0pt">
			<p class="MsoNormal"><strong><font size="2">Carl E.
			Ring, Jr.</font></strong><font size="2"><br>
			&nbsp; </font> </td>
		</tr>
		<tr style="height: 15.0pt">
			<td width="33%" style="width: 33.0%; height: 15.0pt; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">/s/
			Richard F. Spanier</font></td>
			<td width="38%" rowspan="2" style="width: 38.0%; height: 15.0pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">Director </font> </p>
			<p>&nbsp;</td>
			<td width="29%" rowspan="2" style="width: 29.0%; height: 15.0pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">March 13, 2008&nbsp; </font> </p>
			<p>&nbsp;</td>
		</tr>
		<tr style="height: 27.0pt">
			<td width="33%" style="width: 33.0%; height: 27.0pt; padding: 6.0pt">
			<p class="MsoNormal"><strong><font size="2">Richard
			F. Spanier</font></strong><font size="2"><br>
			&nbsp; </font> </td>
		</tr>
		<tr style="height: 16.5pt">
			<td width="33%" style="width: 33.0%; height: 16.5pt; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">/s/
			Aubrey C. Tobey</font></td>
			<td width="38%" rowspan="2" style="width: 38.0%; height: 16.5pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">Director </font> </p>
			<p>&nbsp;</td>
			<td width="29%" rowspan="2" style="width: 29.0%; height: 16.5pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">March 13, 2008&nbsp; </font> </p>
			<p>&nbsp;</td>
		</tr>
		<tr style="height: 24.0pt">
			<td width="33%" style="width: 33.0%; height: 24.0pt; padding: 6.0pt">
			<p class="MsoNormal"><strong><font size="2">Aubrey
			C. Tobey</font></strong></td>
		</tr>
		<tr style="height: 16.5pt">
			<td width="33%" style="width: 33.0%; height: 16.5pt; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">/s/
			John R. Whitten</font></td>
			<td width="38%" rowspan="2" style="width: 38.0%; height: 16.5pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">Director </font> </p>
			<p>&nbsp;</td>
			<td width="29%" rowspan="2" style="width: 29.0%; height: 16.5pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">March 13, 2008&nbsp; </font> </p>
			<p>&nbsp;</td>
		</tr>
		<tr style="height: 24.0pt">
			<td width="33%" style="width: 33.0%; height: 24.0pt; padding: 6.0pt">
			<p class="MsoNormal"><strong><font size="2">John R.
			Whitten</font></strong></td>
		</tr>
		<tr style="height: 16.5pt">
			<td width="33%" style="width: 33.0%; height: 16.5pt; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">/s/
			Michael W. Wright</font></td>
			<td width="38%" rowspan="2" style="width: 38.0%; height: 16.5pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">Director </font> </p>
			<p>&nbsp;</td>
			<td width="29%" rowspan="2" style="width: 29.0%; height: 16.5pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">March 13, 2008&nbsp; </font> </p>
			<p>&nbsp;</td>
		</tr>
		<tr style="height: 24.0pt">
			<td width="33%" style="width: 33.0%; height: 24.0pt; padding: 6.0pt">
			<p class="MsoNormal"><strong><font size="2">Michael
			W. Wright</font></strong></td>
		</tr>
		<tr style="height: 15.75pt">
			<td width="33%" style="width: 33.0%; height: 15.75pt; padding: 6.0pt">
			<p class="MsoNormal">&nbsp;</td>
			<td width="38%" style="width: 38.0%; height: 15.75pt; padding: 6.0pt">
			<p class="MsoNormal">&nbsp;</td>
			<td width="29%" style="width: 29.0%; height: 15.75pt; padding: 6.0pt">
			<p class="MsoNormal">&nbsp;</td>
		</tr>
	</table>
</div>
<p>&nbsp;</p>
<div class="MsoNormal" align="center" style="text-align: center">
	<hr size="2" width="100%" align="center"></div>
<p align="center" style="text-align: center"><b><font size="2">INDEX TO EXHIBITS</font></b></p>
<p>&nbsp;</p>
<div align="center">
	<table class="MsoNormalTable" border="0" cellspacing="0" cellpadding="0" width="570" style="width: 427.5pt" id="table5">
		<tr>
			<td width="68" style="width: 51.0pt; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal"><b><font size="2">Exhibit Number</font></b></td>
			<td width="12" style="width: 9.0pt; padding: 6.0pt">
			<p class="MsoNormal">&nbsp;</td>
			<td width="442" style="width: 331.5pt; border-left: medium none; border-right: medium none; border-top: medium none; border-bottom: 1.0pt solid black; padding: 6.0pt">
			<p class="MsoNormal">&nbsp;</td>
		</tr>
		<tr>
			<td width="68" style="width: 51.0pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">4.1(1) </font> </td>
			<td width="12" style="width: 9.0pt; padding: 6.0pt">
			<p class="MsoNormal">&nbsp;</td>
			<td width="442" style="width: 331.5pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">Restated Certificate of Incorporation of
			Registrant </font> </td>
		</tr>
		<tr>
			<td width="68" style="width: 51.0pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">4.2(2)</font></td>
			<td width="12" style="width: 9.0pt; padding: 6.0pt">
			<p class="MsoNormal">&nbsp;</td>
			<td width="442" style="width: 331.5pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">Restated Bylaws of Registrant</font></td>
		</tr>
		<tr>
			<td width="68" style="width: 51.0pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">4.3(3)</font></td>
			<td width="12" style="width: 9.0pt; padding: 6.0pt">
			<p class="MsoNormal">&nbsp;</td>
			<td width="442" style="width: 331.5pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">Rights Agreement</font></td>
		</tr>
		<tr>
			<td width="68" style="width: 51.0pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">5.1<br>
			&nbsp; </font> </td>
			<td width="12" style="width: 9.0pt; padding: 6.0pt">
			<p class="MsoNormal">&nbsp;</td>
			<td width="442" style="width: 331.5pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">Opinion of Wolff &amp; Samson, PC, as to legality of securities being
			registered</font></td>
		</tr>
		<tr>
			<td width="68" style="width: 51.0pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">10.1(4)</font></td>
			<td width="12" style="width: 9.0pt; padding: 6.0pt">
			<p class="MsoNormal">&nbsp;</td>
			<td width="442" style="width: 331.5pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">1999 Stock Plan</font></td>
		</tr>
		<tr>
			<td width="68" style="width: 51.0pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">10.2(5)</font></td>
			<td width="12" style="width: 9.0pt; padding: 6.0pt">
			<p class="MsoNormal">&nbsp;</td>
			<td width="442" style="width: 331.5pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">1999 Employee Stock Purchase Plan, as amended
			and restated.</font></td>
		</tr>
		<tr>
			<td width="68" style="width: 51.0pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">23.1</font></td>
			<td width="12" style="width: 9.0pt; padding: 6.0pt">
			<p class="MsoNormal">&nbsp;</td>
			<td width="442" style="width: 331.5pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">Consent of KPMG LLP, independent registered
			public accounting firm</font></td>
		</tr>
		<tr>
			<td width="68" style="width: 51.0pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">23.2</font></td>
			<td width="12" style="width: 9.0pt; padding: 6.0pt">
			<p class="MsoNormal">&nbsp;</td>
			<td width="442" style="width: 331.5pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">Consent of Wolff &amp; Samson, PC (contained in Exhibit 5.1)</font></td>
		</tr>
		<tr>
			<td width="68" style="width: 51.0pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">24.1</font></td>
			<td width="12" style="width: 9.0pt; padding: 6.0pt">
			<p class="MsoNormal">&nbsp;</td>
			<td width="442" style="width: 331.5pt; padding: 6.0pt">
			<p class="MsoNormal"><font size="2">Power of Attorney </font><FONT face="Times New Roman" size=2>
			(included on signature page of the Registration Statement hereto)</FONT></td>
		</tr>
	</table>
</div>
<div class="MsoNormal" align="center" style="text-align: center">
	<hr size="2" width="100%" noshade color="black" align="center"></div>
<p><font size="2">(1)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Exhibit 4.1 is incorporated by reference to Exhibit 3.1(c) filed
with the Registrant's Registration Statement on Form S-1 as amended, No. 333-86821,
filed with the SEC on September 9, 1999.</font></p>
<p><font size="2">(2)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Exhibit 4.2 is incorporated by reference to Exhibit 3.1 filed with
the Registrant's Registration Statement on Form 8-K, filed with the SEC on
August 1, 2007.</font></p>
<p><font size="2">(3)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Exhibit 4.3 incorporated by reference to Exhibit 4.1 of the
Registrant's Registration Statement on Form 8-A, filed with the SEC on June 28,
2005.</font></p>
<p><font size="2">(4)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Exhibit 10.1 is incorporated by reference to Exhibit 10.5 filed
with the Registrant's Registration Statement on Form S-1as amended, No. 333-86821,
filed with the SEC on September 9, 1999.</font></p>
<p><font size="2">(5)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Exhibit 10.2 is incorporated by reference to Exhibit 10.2 filed
with the Registrant's Registration Statement on Form S-8, No. 333-129773, filed
with the SEC on November 17, 2005.</font></p>
<p><b><font size="2">&nbsp;</font></b></p>
<p><b><font size="2">&nbsp;</font></b></p>
<p><b><font size="2">&nbsp;</font></b></p>
<div class="MsoNormal" align="center" style="text-align: center">
	<b><hr size="2" width="100%" align="center"></b></div>
<p align="right" style="text-align: right"><b><font size="2">EXHIBIT 5.1</font></b></p>
<p><font size="2">March 13, 2008</font></p>
<p><font size="2">Rudolph Technologies, Inc.&nbsp;<br>
One Rudolph Road, PO Box 1000&nbsp;<br>
Flanders, NJ 07836&nbsp;<br>
<br>
Re: Registration Statement on Form S-8&nbsp;<br>
<br>
The Board
of Directors:&nbsp;</font></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; We
have examined the Registration Statement on Form S-8 to be filed by Rudolph
Technologies, Inc. (the &quot;Corporation&quot;) with the Securities and Exchange
Commission on or about March 13, 2008 (the &quot;Registration Statement&quot;) in
connection with the registration under the Securities Act of 1933, as amended,
of 2,038,824 shares of Common Stock (the &quot;Shares&quot;) reserved for issuance under
the 1999 Stock Plan and 1999 Employee Stock Purchase Plan (collectively, the
&quot;Plans&quot;). As your counsel, we have examined the proceedings taken and are
familiar with the proceedings proposed to be taken by you in connection with
said issuance and sale of the Shares pursuant to the Plans.&nbsp;. This Opinion
Letter is rendered pursuant to Item 8 of Form S-8 and Item 601(b)(5) of
Regulation S-K.</font></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; We have examined the Plans, the
Amended and Restated Certificate of Incorporation of the Corporation, as
amended, the Restated Bylaws of the Corporation, records of proceedings of the
Board of Directors of the Corporation deemed by us to be relevant to this
opinion letter, the Registration Statement and other documents and agreements we
deemed necessary for purposes of expressing the opinion set forth herein. We
also have made such further legal and factual examinations and investigations as
we deemed necessary for purposes of expressing the opinion set forth herein.</font></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; As to certain factual matters relevant
to this opinion letter, we have relied upon certificates and statements of
officers of the Corporation and certificates of public officials. Except to the
extent expressly set forth herein, we have made no independent investigations
with regard thereto, and, accordingly, we do not express any opinion as to
matters that might have been disclosed by independent verification.</font></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; This opinion letter is provided to the
Corporation and the Commission for their use solely in connection with the
transactions contemplated by the Registration Statement. The only opinion
rendered by us consists of those matters set forth in the sixth paragraph
hereof, and no opinion may be implied or inferred beyond those expressly stated.</font></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Our opinion set forth below is limited
to the General Corporation Law of the State of Delaware, applicable provisions
of the Constitution of the State of Delaware and reported judicial decisions
interpreting such General Corporation Law and Constitution, in each case as of
the date hereof, and we do not express any opinion herein concerning any other
laws.</font></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Based on the foregoing, it is our
opinion that the 2,038,824 &nbsp;Shares covered by the Registration Statement and to
be issued pursuant to the Plans, when issued in accordance with the terms and
conditions of the Plans, will be legally and validly issued, fully paid and
non-assessable.</font></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; We consent to the filing of this
opinion letter as an exhibit to the Registration Statement and to the use of our
name wherever appearing in the Registration Statement. In giving such consent,
we do not thereby admit that we are within the category of persons whose consent
is required under Section 7 of the Securities Act or the rules and regulations
of the Commission thereunder.</font></p>
<p><font size="2"><br>
&nbsp;Very truly yours,</font></p>
<p><font size="2">&nbsp;<br>
/s/ Wolff &amp; Samson PC</font></p>
<p>&nbsp;</p>
<p>&nbsp;</p>
<p>&nbsp;</p>
<p>&nbsp;</p>
<p>&nbsp;</p>
<p>&nbsp;</p>
<p>&nbsp;</p>
<p>&nbsp;</p>
<div class="MsoNormal" align="center" style="text-align: center">
	<hr size="2" width="100%" align="center"></div>
<p><b><font size="2">&nbsp;</font></b></p>
<p align="right" style="text-align: right"><b><font size="2">EXHIBIT 23.1</font></b></p>
<p align="center" style="text-align: center">&nbsp;</p>
<p align="center" style="text-align: center">&nbsp;</p>
<p align="center" style="text-align: center"><strong><font size="2">CONSENT OF INDEPENDENT
REGISTERED PUBLIC ACCOUNTING FIRM</font></strong></p>
<p class="letterbody" style="text-align: justify">&nbsp;</p>
<p>&nbsp;</p>
<p><font size="2">The Board of Directors <br>
Rudolph Technologies, Inc.: </font></p>
<p><font size="2">We consent to the use of our reports dated March 3, 2008 with
respect to the consolidated financial statements, and the related consolidated
financial statement schedule, and the effectiveness of
internal control over financial reporting incorporated by reference.
</font></p>
<p><font size="2">Our report with respect to the consolidated balance sheets of
Rudolph Technologies, Inc. and subsidiaries as of December 31, 2007 and 2006 and
the related consolidated statements of operations, stockholders' equity and
comprehensive income, and cash flows for each of the years in the three-year
period ended December 31, 2007, and the related consolidated financial statement
schedule, dated March 3, 2008 refers to Rudolph Technologies, Inc.'s adoption of
Financial Accounting Standards Board Interpretation No. 48, "Accounting for
Uncertainties in Income Taxes", effective January 1, 2007, and Statement of
Financial Accounting Standards No. 123(R), "Share-Based Payment", effective
January 1, 2006. </font></p>
<p><font size="2">Our report dated March 3, 2008, on the effectiveness of
internal control over financial reporting as of December 31, 2007, expresses our
opinion that Rudolph Technologies, Inc. did not maintain effective internal
control over financial reporting as of December 31, 2007 because of the effect
of a material weakness on the achievement of the objectives of the control
criteria and contains an explanatory paragraph that states Rudolph Technologies,
Inc. did not have adequate oversight and review controls regarding the
preparation and review of the accounting for income taxes as of December 31,
2007.&nbsp; Our report also contains an additional explanatory paragraph that
states management of Rudolph Technologies, Inc. excluded the probe card
test and analysis business (PCTA) acquired in December 2007 from its assessment
of the effectiveness of Rudolph Technologies, Inc.'s internal control over
financial reporting as of December 31, 2007, and our audit of internal control
over financial reporting of Rudolph Technologies, Inc. as of December 31, 2007
also excluded an evaluation of the internal control over financial reporting of
PCTA.</font></p>
<p><font size="2">/s/ KPMG LLP</font></p>
<p><font size="2">KPMG LLP<br>
Short Hills, New Jersey<br>
March 12, 2008</font></p>

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As
filed with the Securities and Exchange Commission on March 13, 2008
Registration No. 333-_____________
UNITED STATES
SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549
FORM S-8
REGISTRATION STATEMENT
Under
THE SECURITIES ACT OF 1933
RUDOLPH TECHNOLOGIES, INC.
(Exact name of Registrant as
			specified in its charter)
Delaware
22-3531208
(State of Incorporation)
(I.R.S. Employer Identification
			Number)
One Rudolph Road, PO
			Box 1000
Flanders, NJ 07836
973-691-1300
(Address, including zip code, and
			telephone number,
including area code of registrant's principal executive offices)
1999 STOCK PLAN
1999 EMPLOYEE STOCK PURCHASE PLAN
(Full title of the Plans)
PAUL F. McLAUGHLIN
Chairman and Chief Executive Officer
RUDOLPH TECHNOLOGIES, INC.
One Rudolph Road, PO Box 1000
Flanders, NJ 07836
(973) 691-1300
(Name, address including zip code,
			and telephone number, including area code, of agent for service)
Indicate by check mark whether the registrant is a large accelerated filer,
an accelerated filer, a non-accelerated filer, or a smaller reporting company. 
See the definitions of  "large accelerated filer," "accelerated filer" and
"smaller reporting company" in Rule 12b-2 of the Exchange Act.
Large accelerated filer  [ 
]                                                                                            Accelerated filer [X]
Non-accelerated filer [  ] (Do not check if smaller reporting
company)                Smaller reporting company [  ]
CALCULATION OF REGISTRATION FEE
Title of Securities to be Registered
Amount to be Registered (1)
Proposed Maximum Offering Price Per
			Share
Proposed Maximum Aggregate Offering
			Price
Amount of Registration Fee
Common Stock
			$0.001 par value, to be issued under the 1999 Stock Plan
1,138,824 (2)
$8.78  (3)
$9,998,874.72
$392.96
Common Stock
			$0.001 par value, to be issued under the 1999 Employee Stock
			Purchase Plan
900,000 (4)
$8.78  (3)
$7,902,000.00
$310.55
Total
2,038,824
$17,900,874.72
$703.51
(1) For the sole purpose of calculating the registration fee, the number of
shares to be registered under this Registration Statement is the number of
additional shares authorized to be issued under the 1999 Stock Plan and the 1999
Employee Stock Purchase Plan.  This Registration Statement shall also cover any
additional shares of Common Stock which become issuable by reason of any stock
dividend, stock split, recapitalization or other similar transaction effected
without the receipt of consideration which results in an increase in the number
of the outstanding shares of Common Stock.
(2) Includes the following automatic annual increases to the number of shares
of the Registrant's Common Stock reserved for issuance under the 1999 Stock
Plan: (i) 338,824 shares on January 1, 2006, (ii) 400,000 shares on January 1,
2007 and (iii) 400,000 shares on January 1, 2008.
(3) Estimated solely for the purpose of determining the registration fee
pursuant to Rule 457(c) and Rule 457(h)(1) on the basis of the average of the
high and low sale prices of Common Stock on the Nasdaq Global Market on March 3,
2008.
(4) Includes the following automatic annual increases to the number of shares
of the Registrant's Common Stock reserved for issuance under the 1999 Employee
Stock Purchase Plan: (i) 300,000 shares on January 1, 2006, (ii) 300,000 shares
on January 1, 2007 and (iii) 300,000 shares on January 1, 2008.
PART I
Item 1.
Plan Information*
Item 2.
Registrant Information and Employee Plan Annual
Information*
*Information required by Part I to be contained in the Section 10(a)
prospectus is omitted from this registration statement in accordance with Rule
428 under the Securities Act and the Note to Part I of Form S-8.
PART II
INFORMATION REQUIRED IN THE
REGISTRATION STATEMENT
Item 3
.
Incorporation of Documents by Reference
The following documents and information heretofore filed with the
Securities and Exchange Commission (the "Commission") are hereby incorporated by
reference:
Item 3(a)
The Registrant's Annual Report on Form 10-K for the fiscal year ended
December 31, 2007, filed on March 3, 2008.
Item 3(b)
The Registrant's Current Reports on
      Form 8-K , filed on January 11, 2008, January 28, 2008 and February 7, 2008.
Item 3(c)
The description of the Common Stock of the Registrant contained in
the Registrant's Registration Statement on Form 8-A filed on November 5, 1999,
pursuant to Section 12 of the Securities Exchange Act of 1934, as amended (the
"Exchange Act").
All documents subsequently filed by the Registrant pursuant to
Sections 13(a), 13(c), 14 and 15(d) of the Exchange Act, prior to the filing of
a post-effective amendment which indicates that all securities registered hereby
have been sold or which deregisters all securities then remaining unsold, shall
be deemed to be incorporated by reference in this Registration Statement and to
be part hereof from the date of filing such documents.
Item 4
.
Description of Securities
Not Applicable.
Item 5
.
Interests of Named Experts and Counsel
Not Applicable.
Item 6
.
Indemnification of Directors and Officers
The Registrant's certificate of incorporation contains certain
provisions permitted under the Delaware General Corporation Law relating to the
liability of directors. These provisions eliminate a director's personal
liability for monetary damages resulting from a breach of fiduciary duty, except
in certain circumstances involving certain wrongful acts, including: (i) for any
breach of the director's duty of loyalty to the corporation or its stockholders,
(ii) for acts or omissions not in good faith or that involve intentional
misconduct or a knowing violation of law, (iii) for unlawful payments of
dividends or unlawful stock repurchases or redemptions as provided in Section
174 of the Delaware General Corporation Law, or (iv) for any transaction from
which the director derived an improper personal benefit.
The Registrant's Bylaws provide that the Registrant shall
indemnify its directors and officers and may indemnify its employees and other
agents to the fullest extent permitted by law. The Registrant's Bylaws also
permit the Registrant to secure insurance on behalf of any officer, director,
employee or other agent for any liability arising out of his or her actions in
such capacity, regardless of whether the Registrant would have the power to
indemnify him or her against such liability under the General Corporation Law of
Delaware.
The Registrant has entered into agreements to indemnify its
directors and officers, in addition to indemnification provided for in the
Registrant's Bylaws. Subject to certain conditions, these agreements, among
other things, indemnify the Registrant's directors and officers for certain
expenses (including attorney's fees), judgments, fines and settlement amounts
incurred by any such person in any action or proceeding, including any action by
or in the right of the Registrant, arising out of such person's services as a
director or officer of the Registrant. The Registrant maintains an insurance policy covering its officers and directors
with respect to certain liabilities, including liabilities arising under the
Securities Act or otherwise.
Item 7
.
Exemption From Registration Claimed
Not Applicable.
Item 8
.
Exhibits
4.1(1)          Restated Certificate of Incorporation of
Registrant
4.2(2)          Restated Bylaws of Registrant
4.3(3)          Rights Agreement
5.1             
Opinion of Wolff & Samson, PC, as to legality of securities being registered
10.1(4)        1999 Stock Plan
10.2(5)        1999 Employee Stock Purchase Plan, as amended and
restated.
23.1             Consent of KPMG LLP, independent registered
public accounting firm
23.2            
Consent of Wolff & Samson, PC (contained in Exhibit 5.1).
24.1             Power of Attorney
(included on signature page of the
Registration Statement hereto)
(1) Exhibit 4.1 is incorporated by reference to Exhibit 3.1(c) filed with the
Registrant's Registration Statement on Form S-1as amended, No. 333-86821, filed
with the SEC on September 9, 1999.
(2) Exhibit 4.2 is incorporated by reference to Exhibit 3.1 filed with the
Registrant's Registration Statement on Form 8-K, filed with the SEC on August 1,
2007.
(3) Exhibit 4.3 incorporated by reference to Exhibit 4.1 of the Registrant's
Registration Statement on Form 8-A, filed with the SEC on June 28, 2005.
(4) Exhibit 10.1 is incorporated by reference to Exhibit 10.5 filed with the
Registrant's Registration Statement on Form S-1 as amended, No. 333-86821, filed
with the SEC on September 9, 1999.
(5) Exhibit 10.2 is incorporated by reference to Exhibit 10.2 filed with the
Registrant's Registration Statement on Form S-8, No. 333-129773, filed with the
SEC on November 17, 2005.
Item 9
.
Undertakings
(a) The undersigned registrant hereby undertakes:
1. To file, during any period in which offers or
sales are being made, a post-effective amendment to this registration statement:
(i) To include any prospectus required by
Section 10(a)(3) of the Securities Act of 1933;
(ii) To reflect in the prospectus any facts or
events arising after the effective date of the registration statement (or the
most recent post-effective amendment thereof) which, individually or in the
aggregate, represent a fundamental change in the information set forth in the
registration statement. Notwithstanding the foregoing, any increase or decrease
in volume of securities offered (if the total dollar value of securities offered
would not exceed that which was registered) and any deviation from the low or
high end of the estimated offering range may be reflected in the form of
prospectus filed with the Commission pursuant to Rule 424(b) if, in the
aggregate, the changes in volume and price represent no more than a 20 percent
change in the maximum aggregate offering price set forth in the "Calculation of
Registration Fee" table in the effective registration statement; and
(iii) To include any material information with
respect to the plan of distribution not previously disclosed in the registration
statement or any material change to such information in the registration
statement;
provided, however
, that paragraphs
(a)(1)(i) and (a)(1)(ii) of this section do not apply if the
information required to be included in a post-effective amendment by those
paragraphs is contained in reports filed with or furnished to the Commission by
the registrant pursuant to Section 13 or Section 15(d) of the
Securities Exchange Act of 1934 that are incorporated by reference in the
registration statement.
2. That, for the purpose of determining any
liability under the Securities Act of 1933, each such post-effective amendment
shall be deemed to be a new registration statement relating to the securities
offered therein, and the offering of such securities at that time shall be
deemed to be the initial
bona fide
offering thereof.
3. To remove from registration by means of a
post-effective amendment any of the securities being registered which remain
unsold at the termination of the offering.
(b) The undersigned registrant hereby undertakes
that, for purposes of determining any liability under the Securities Act of
1933, each filing of the registrant's annual report pursuant to
Section 13(a) or Section 15(d) of the Securities Exchange Act of 1934
that is
incorporated by reference in the registration statement shall be deemed to be a
new registration statement relating to the securities offered therein, and the
offering of such securities at that time shall be deemed to be the initial
bona fide
offering thereof.
(c) Insofar as indemnification for liabilities
arising under the Securities Act of 1933 may be permitted to directors, officers
and controlling persons of the registrant pursuant to the foregoing provisions,
or otherwise, the registrant has been advised that in the opinion of the
Securities and Exchange Commission such indemnification is against public policy
as expressed in the Securities Act of 1933 and is, therefore, unenforceable. In
the event that a claim for indemnification against such liabilities (other than
the payment by the registrant of expenses incurred or paid by a director,
officer or controlling person of the registrant in the successful defense of any
action, suit or proceeding) is asserted by such director, officer or controlling
person in connection with the securities being registered, the registrant will,
unless in the opinion of its counsel the matter has been settled by controlling
precedent, submit to a court of appropriate jurisdiction the question whether
such indemnification by it is against public policy as expressed in the
Securities Act of 1933 and will be governed by the final adjudication of such
issue.
SIGNATURES
Pursuant to the requirements of the Securities Act of 1933, as
amended, the Registrant, Rudolph Technologies, Inc., a corporation organized and
existing under the laws of the State of Delaware, certifies that it has
reasonable grounds to believe that it meets all of the requirements for filing
on Form S-8 and has duly caused this Registration Statement to be signed on its
behalf by the undersigned, thereunto duly authorized, in the City of Flanders,
State of New Jersey, on this 13th day of March, 2008.
RUDOLPH
TECHNOLOGIES, INC.
By:
/s/
Paul F. McLaughlin
Paul F. McLaughlin,
Chairman and Chief Executive Officer
POWER OF ATTORNEY
KNOW ALL PERSONS BY THESE PRESENTS, that the
undersigned officers and directors of Rudolph Technologies, Inc., a
Delaware corporation, do hereby constitute and appoint Paul F. McLaughlin and
Steven R. Roth, and each of them individually, the lawful
attorneys-in-fact and agents, each with full power of substitution or
re-substitution, with full power and authority to do any and all acts and things
and to execute any and all instruments which said attorneys-in-fact and agents,
or either one of them, determine may be necessary or advisable or required to
enable said corporation to comply with the Securities Act of 1933, as amended,
and any rules or regulation or requirements of the Securities and Exchange
Commission in connection with this Registration Statement. Without limiting the
generality of the foregoing power and authority, the powers granted include the
power and authority to sign the names of the undersigned officers and directors
in the capacities indicated below to this Registration Statement, to any and all
amendments, both pre-effective and post-effective, and supplements to this
Registration Statement and to any and all instruments or documents filed as part
of or in conjunction with this Registration Statement or amendments or
supplements thereto, and each of the undersigned hereby ratifies and confirms
all that said attorneys-in-fact and agents, or either one of them, shall do or
cause to be done by virtue hereof. This Power of Attorney may be signed in
several counterparts.
IN WITNESS WHEREOF, each of the undersigned has
executed this Power of Attorney as of the date indicated.
Pursuant to the requirements of the Securities
Act of 1933, this registration statement has been signed below by the following
persons in the capacities and on the dates indicated.
Signature
Title
Date
/s/
			Paul F. McLaughlin
Chairman and Chief Executive Officer (Principal
			Executive Officer)
March 13, 2008
Paul F.
			McLaughlin
/s/
			Steven R. Roth
Senior Vice President & Chief Financial Officer
			(Principal Financial and Accounting Officer)
March 13, 2008
Steven
			R. Roth
/s/
			Daniel H. Berry
Director
March 13, 2008
Daniel
			H. Berry
/s/
			Paul Craig
Director
March 13, 2008
Paul
			Craig
/s/
			Thomas G. Greig
Director
March 13, 2008
Thomas
			G. Greig
/s/
			Jeff L. O'Dell
Director
March 13, 2008
Jeff L.
			O'Dell
/s/
			Carl E. Ring, Jr.
Director
March 13, 2008
Carl E.
			Ring, Jr.
/s/
			Richard F. Spanier
Director
March 13, 2008
Richard
			F. Spanier
/s/
			Aubrey C. Tobey
Director
March 13, 2008
Aubrey
			C. Tobey
/s/
			John R. Whitten
Director
March 13, 2008
John R.
			Whitten
/s/
			Michael W. Wright
Director
March 13, 2008
Michael
			W. Wright
INDEX TO EXHIBITS
Exhibit Number
4.1(1)
Restated Certificate of Incorporation of
			Registrant
4.2(2)
Restated Bylaws of Registrant
4.3(3)
Rights Agreement
5.1
Opinion of Wolff & Samson, PC, as to legality of securities being
			registered
10.1(4)
1999 Stock Plan
10.2(5)
1999 Employee Stock Purchase Plan, as amended
			and restated.
23.1
Consent of KPMG LLP, independent registered
			public accounting firm
23.2
Consent of Wolff & Samson, PC (contained in Exhibit 5.1)
24.1
Power of Attorney
(included on signature page of the Registration Statement hereto)
(1)        Exhibit 4.1 is incorporated by reference to Exhibit 3.1(c) filed
with the Registrant's Registration Statement on Form S-1 as amended, No. 333-86821,
filed with the SEC on September 9, 1999.
(2)        Exhibit 4.2 is incorporated by reference to Exhibit 3.1 filed with
the Registrant's Registration Statement on Form 8-K, filed with the SEC on
August 1, 2007.
(3)        Exhibit 4.3 incorporated by reference to Exhibit 4.1 of the
Registrant's Registration Statement on Form 8-A, filed with the SEC on June 28,
2005.
(4)        Exhibit 10.1 is incorporated by reference to Exhibit 10.5 filed
with the Registrant's Registration Statement on Form S-1as amended, No. 333-86821,
filed with the SEC on September 9, 1999.
(5)        Exhibit 10.2 is incorporated by reference to Exhibit 10.2 filed
with the Registrant's Registration Statement on Form S-8, No. 333-129773, filed
with the SEC on November 17, 2005.
EXHIBIT 5.1
March 13, 2008
Rudolph Technologies, Inc.
One Rudolph Road, PO Box 1000
Flanders, NJ 07836
Re: Registration Statement on Form S-8
The Board
of Directors:
We
have examined the Registration Statement on Form S-8 to be filed by Rudolph
Technologies, Inc. (the "Corporation") with the Securities and Exchange
Commission on or about March 13, 2008 (the "Registration Statement") in
connection with the registration under the Securities Act of 1933, as amended,
of 2,038,824 shares of Common Stock (the "Shares") reserved for issuance under
the 1999 Stock Plan and 1999 Employee Stock Purchase Plan (collectively, the
"Plans"). As your counsel, we have examined the proceedings taken and are
familiar with the proceedings proposed to be taken by you in connection with
said issuance and sale of the Shares pursuant to the Plans. . This Opinion
Letter is rendered pursuant to Item 8 of Form S-8 and Item 601(b)(5) of
Regulation S-K.
We have examined the Plans, the
Amended and Restated Certificate of Incorporation of the Corporation, as
amended, the Restated Bylaws of the Corporation, records of proceedings of the
Board of Directors of the Corporation deemed by us to be relevant to this
opinion letter, the Registration Statement and other documents and agreements we
deemed necessary for purposes of expressing the opinion set forth herein. We
also have made such further legal and factual examinations and investigations as
we deemed necessary for purposes of expressing the opinion set forth herein.
As to certain factual matters relevant
to this opinion letter, we have relied upon certificates and statements of
officers of the Corporation and certificates of public officials. Except to the
extent expressly set forth herein, we have made no independent investigations
with regard thereto, and, accordingly, we do not express any opinion as to
matters that might have been disclosed by independent verification.
This opinion letter is provided to the
Corporation and the Commission for their use solely in connection with the
transactions contemplated by the Registration Statement. The only opinion
rendered by us consists of those matters set forth in the sixth paragraph
hereof, and no opinion may be implied or inferred beyond those expressly stated.
Our opinion set forth below is limited
to the General Corporation Law of the State of Delaware, applicable provisions
of the Constitution of the State of Delaware and reported judicial decisions
interpreting such General Corporation Law and Constitution, in each case as of
the date hereof, and we do not express any opinion herein concerning any other
laws.
Based on the foregoing, it is our
opinion that the 2,038,824  Shares covered by the Registration Statement and to
be issued pursuant to the Plans, when issued in accordance with the terms and
conditions of the Plans, will be legally and validly issued, fully paid and
non-assessable.
We consent to the filing of this
opinion letter as an exhibit to the Registration Statement and to the use of our
name wherever appearing in the Registration Statement. In giving such consent,
we do not thereby admit that we are within the category of persons whose consent
is required under Section 7 of the Securities Act or the rules and regulations
of the Commission thereunder.
Very truly yours,
/s/ Wolff & Samson PC
EXHIBIT 23.1
CONSENT OF INDEPENDENT
REGISTERED PUBLIC ACCOUNTING FIRM
The Board of Directors
Rudolph Technologies, Inc.:
We consent to the use of our reports dated March 3, 2008 with
respect to the consolidated financial statements, and the related consolidated
financial statement schedule, and the effectiveness of
internal control over financial reporting incorporated by reference.
Our report with respect to the consolidated balance sheets of
Rudolph Technologies, Inc. and subsidiaries as of December 31, 2007 and 2006 and
the related consolidated statements of operations, stockholders' equity and
comprehensive income, and cash flows for each of the years in the three-year
period ended December 31, 2007, and the related consolidated financial statement
schedule, dated March 3, 2008 refers to Rudolph Technologies, Inc.'s adoption of
Financial Accounting Standards Board Interpretation No. 48, "Accounting for
Uncertainties in Income Taxes", effective January 1, 2007, and Statement of
Financial Accounting Standards No. 123(R), "Share-Based Payment", effective
January 1, 2006.
Our report dated March 3, 2008, on the effectiveness of
internal control over financial reporting as of December 31, 2007, expresses our
opinion that Rudolph Technologies, Inc. did not maintain effective internal
control over financial reporting as of December 31, 2007 because of the effect
of a material weakness on the achievement of the objectives of the control
criteria and contains an explanatory paragraph that states Rudolph Technologies,
Inc. did not have adequate oversight and review controls regarding the
preparation and review of the accounting for income taxes as of December 31,
2007.  Our report also contains an additional explanatory paragraph that
states management of Rudolph Technologies, Inc. excluded the probe card
test and analysis business (PCTA) acquired in December 2007 from its assessment
of the effectiveness of Rudolph Technologies, Inc.'s internal control over
financial reporting as of December 31, 2007, and our audit of internal control
over financial reporting of Rudolph Technologies, Inc. as of December 31, 2007
also excluded an evaluation of the internal control over financial reporting of
PCTA.
/s/ KPMG LLP
KPMG LLP
Short Hills, New Jersey
March 12, 2008