<PAGE>

   As filed with the Securities and Exchange Commission on May 10, 2000

                                         REGISTRATION NO. 333 -
------------------------------------------------------------------------------
------------------------------------------------------------------------------


                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                              --------------------

                                   FORM S-8
                             REGISTRATION STATEMENT
                                   UNDER THE
                             SECURITIES ACT OF 1933

                              --------------------


                           IBIS TECHNOLOGY CORPORATION
             (EXACT NAME OF REGISTRANT AS SPECIFIED IN ITS CHARTER)

         MASSACHUSETTS                                  04-2987600
 (STATE OR OTHER JURISDICTION                         (I.R.S. EMPLOYER
 OF INCORPORATION OR ORGANIZATION)                   IDENTIFICATION NO.)

                              32 CHERRY HILL DRIVE
                          DANVERS, MASSACHUSETTS 01923
                                 (978) 777-4247
                     (ADDRESS OF PRINCIPAL EXECUTIVE OFFICES)

                       THE IBIS TECHNOLOGY CORPORATION 2000
                           EMPLOYEE STOCK PURCHASE PLAN

                                  MARTIN J. REID
                      PRESIDENT AND CHIEF EXECUTIVE OFFICER
                            IBIS TECHNOLOGY CORPORATION
                               32 CHERRY HILL DRIVE
                          DANVERS, MASSACHUSETTS 01923
                                  (978) 777-4247
  (NAME, ADDRESS, INCLUDING ZIP CODE, AND TELEPHONE NUMBER, INCLUDING AREA
                           CODE, OF AGENT FOR SERVICE)

                              --------------------

                         CALCULATION OF REGISTRATION FEE
------------------------------------------------------------------------------
------------------------------------------------------------------------------

<TABLE>
<CAPTION>

                                                              Proposed                 Proposed
          Title of                 Amount to be                maximum                  maximum
 securities to be registered       registered(1)           offering price              aggregate                Amount of
                                                            per share(2)            offering price(2)        registration fee
-------------------------------------------------------------------------------------------------------------------------------
<S>                                 <C>                        <C>                    <C>                     <C>
Common Stock, $.008 par value        300,000                  $39.469                 $11,840,700              $3,126
-------------------------------------------------------------------------------------------------------------------------------
-------------------------------------------------------------------------------------------------------------------------------
</TABLE>


(1)  The number of shares of common stock, par value $.008 per share ("Common
     Stock"), stated above consists of the aggregate number of shares which may
     be sold under The Ibis Technology Corporation 2000 Employee Stock Purchase
     Plan, (the "Plan"). The maximum number of shares which may be sold under
     the Plan is subject to adjustment in accordance with certain anti-dilution
     and other provisions of the Plan. Accordingly, pursuant to Rule 416 under
     the Securities Act of 1933, as amended (the "Securities Act"), this
     Registration Statement covers, in addition to the number of shares stated
     above, an indeterminate number of shares which may be subject to grant or
     otherwise issuable after the operation of any such anti-dilution and other
     provisions.

(2)  This calculation is made solely for the purpose of determining the
     registration fee pursuant to the provisions of Rule 457(h) under the
     Securities Act on the basis of the average of the high and low sale prices
     per share of the Common Stock on the Nasdaq National Market as of a date
     (May 4, 2000) within 5 business days prior to filing this Registration
     Statement.

------------------------------------------------------------------------------
------------------------------------------------------------------------------



<PAGE>


                                EXPLANATORY NOTE


         In accordance with the instructional Note to Part I of Form S-8 as
promulgated by the Securities and Exchange Commission, the information specified
by Part I of Form S-8 has been omitted from this Registration Statement on Form
S-8 for offers of Common Stock pursuant to the Plan.


<PAGE>


                                    PART II

                 INFORMATION REQUIRED IN THE REGISTRATION STATEMENT

ITEM 3.  INCORPORATION OF CERTAIN DOCUMENTS BY REFERENCE.

         The following documents filed by the Registrant with the Commission
are incorporated herein by reference:

         (a)      The Registrant's Annual Report on Form 10-K for the fiscal
year ended December 31, 1999;

         (b)      The  Registrant's  Current  Reports on Form 8-K filed on
February  22,  2000,  April 13, 2000 and April 24, 2000; and

         (c) The description of the Common Stock contained in the
Registrant's Registration Statement on Form 8-A (File No. 0-23668) filed
under the Securities Exchange Act of 1934, including any amendment or report
filed for the purpose of updating such description.

         All reports and other documents filed by the Registrant after the
date hereof pursuant to Sections 13(a), 13(c), 14 and 15(d) of the Securities
Exchange Act of 1934 prior to the filing of a post-effective amendment which
indicates that all securities offered hereby have been sold or which
deregisters all securities then remaining unsold, shall be deemed to be
incorporated by reference herein and to be part hereof from the date of
filing of such reports and documents.

ITEM 4.  DESCRIPTION OF SECURITIES.

         Not applicable.

ITEM 5.  INTERESTS OF NAMED EXPERTS AND COUNSEL.

         Not applicable.

ITEM 6.  INDEMNIFICATION OF DIRECTORS AND OFFICERS.

         Incorporated by reference to the Registrant's Registration Statement
on Form S-1, File No. 333-1174.

ITEM 7.  EXEMPTION FROM REGISTRATION CLAIMED.

         Not applicable.

ITEM 8.  EXHIBITS.

         (4.1)    Form of Common Stock Certificate incorporated herein by
                  reference to Exhibit 4.2 to the Registrant's Registration
                  Statement filed on Form S-1, File No. 333-1174.


                                      II-1


<PAGE>

         (4.2)    Article 4 of the Restated Articles of Organization of the
                  Registrant incorporated herein by reference to Exhibit 4.1 to
                  the Registrant's Registration Statement filed on Form S-1,
                  File No. 333-1174.

         (4.3)    Restated Bylaws of the Registrant, incorporated herein by
                  reference to Exhibit 3.2 to the Registrant's Registration
                  Statement filed on Form S-1, File No. 333-1174.

         (5)      Opinion of Mintz, Levin, Cohn, Ferris, Glovsky and Popeo,
                  P.C. as to the legality of shares being registered.

         (23.1)   Consent of Mintz, Levin, Cohn, Ferris, Glovsky and Popeo,
                  P.C. (included in opinion of counsel filed as Exhibit 5).

         (23.2)   Consent of KPMG LLP.

         (24)     Power of Attorney to file future amendments (set forth on the
                  signature page of this Registration Statement).

         (99.1)   The Ibis Technology Corporation 2000 Employee Stock Purchase
                  Plan.

ITEM 9.  UNDERTAKINGS.

(a)      The undersigned Registrant hereby undertakes:

         (1) To file, during any period in which offers or sales are being made,
         a post-effective amendment to this Registration Statement:

                 (i) To include any prospectus required by Section 10(a)(3)
              of the Securities Act of 1933;

                 (ii) To reflect in the prospectus any facts or events arising
              after the effective date of the Registration Statement (or the
              most recent post-effective amendment thereof) which, individually
              or in the aggregate, represents a fundamental change in the
              information set forth in the Registration Statement.
              Notwithstanding the foregoing, any increase or decrease in
              volume of securities offered (if the total dollar value of
              securities offered would not exceed that which was registered)
              and any deviation from the low or high end of the estimated
              maximum offering range may be reflected in the form of prospectus
              filed with the Commission pursuant to Rule 424(b) (Section
              230.424(b) of this chapter) if, in the aggregate, the changes in
              volume and price represent no more than a 20% change in the
              maximum aggregate offering price set forth in the "Calculation of
              Registration Fee" table in the effective Registration Statement.

                 (iii) To include any material information with respect to the
              plan of distribution not previously disclosed in the Registration
              Statement or any material change to such information in the
              Registration Statement;



                                     II-2


<PAGE>

                  PROVIDED, HOWEVER, that paragraphs (a)(1)(i) and (a)(1)(ii) do
         not apply if the Registration Statement is on Form S-3 or Form S-8, and
         the information required to be included in a post-effective amendment
         by those paragraphs is contained in periodic reports filed by the
         Registrant pursuant to Section 13 or Section 15(d) of the Securities
         Exchange Act of 1934 that are incorporated by reference in this
         Registration Statement.

         (2) That, for the purpose of determining any liability under the
         Securities Act of 1933, each such post-effective amendment shall be
         deemed to be a new registration statement relating to the securities
         offered therein, and the offering of such securities at that time shall
         be deemed to be the initial bona fide offering thereof.

         (3) To remove from registration by means of a post-effective amendment
         any of the securities being registered which remain unsold at the
         termination of the offering.

(b)      The undersigned Registrant hereby undertakes that, for purposes of
         determining any liability under the Securities Act of 1933, each filing
         of the Registrant's annual report pursuant to Section 13(a) or Section
         15(d) of the Securities Exchange Act of 1934 that is incorporated by
         reference in this Registration Statement shall be deemed to be a new
         registration statement relating to the securities offered therein, and
         the offering of such securities at that time shall be deemed to be the
         initial bona fide offering thereof.

(c)      Insofar as indemnification for liabilities arising under the
         Securities Act of 1933 may be permitted to directors, officers and
         controlling persons of the Registrant pursuant to the foregoing
         provisions, or otherwise, the Registrant has been advised that in the
         opinion of the Securities and Exchange Commission such indemnification
         is against public policy as expressed in the Act and is, therefore,
         unenforceable. In the event that a claim for indemnification against
         such liabilities (other than the payment by the Registrant of
         expenses incurred or paid by a director, officer or controlling person
         of the Registrant in the successful defense of any action, suit or
         proceeding) is asserted by such director, officer or controlling
         person in connection with the securities being registered, the
         Registrant will, unless in the opinion of its counsel the matter has
         been settled by controlling precedent, submit to a court of
         appropriate jurisdiction the question whether such indemnification
         by it is against public policy as expressed in the Act and will be
         governed by the final adjudication of such issue.



                                     II-3

<PAGE>



                                  SIGNATURES

         THE REGISTRANT. Pursuant to the requirements of the Securities Act
of 1933, the Registrant certifies that it has reasonable grounds to believe
that it meets all of the requirements for filing on Form S-8 and has duly
caused this Registration Statement to be signed on its behalf by the
undersigned, thereunto duly authorized, in Danvers, Massachusetts on May 10,
2000.

                                IBIS TECHNOLOGY CORPORATION



                                By   /s/ Martin J. Reid
                                    ----------------------------
                                         Martin J. Reid
                                         President and Chief Executive Officer


         Each person whose signature appears below constitutes and appoints
Martin J. Reid and Debra L. Nelson, and each of them, his/her true and lawful
attorneys-in-fact and agents, with full power of substitution and
resubstitution in each of them, for him and in his name, place and stead, and
in any and all capacities, to sign any and all amendments (including
post-effective amendments) to this Registration Statement on Form S-8 of Ibis
Technology Corporation, or any other registration statement for the same
offering that is to be effective upon filing pursuant to Rule 462(b) under
the Securities Act of 1933, as amended, and to file the same, with all
exhibits thereto and other documents in connection therewith, with the
Securities and Exchange Commission, granting unto said attorneys-in-fact and
agents, and each of them, full power and authority to do and perform each and
every act and thing requisite or necessary to be done in or about the
premises, as full to all intents and purposes as he or she might or could do
in person, hereby ratifying and confirming all that said attorneys-in-fact
and agents or any of them or their or his/her substitute or substitutes may
lawfully do or cause to be done by virtue hereof.

         Pursuant to the requirements of the Securities Act of 1933, this
Registration Statement has been signed by the following persons in the
capacities and on the dates indicated.

<TABLE>
<CAPTION>

Signature                          Title                                  Date
---------                          -----                                  ----
<S>                       <C>                                         <C>

/s/ Martin J. Reid        President, Chief Executive Officer and       May 10, 2000
---------------------     Director (principal executive officer)
Martin J. Reid

/s/ Debra L. Nelson       Chief Financial Officer, Treasurer           May 10, 2000
---------------------     and Clerk (principal financial and
Debra L. Nelson           accounting officer)

</TABLE>


                                     II-4


<PAGE>

<TABLE>
<CAPTION>

Signature                          Title                               Date
---------                          -----                               ----
<S>                             <C>                                   <C>

/s/ Geoffrey Ryding             Director                               May 10, 2000
-----------------------
Geoffrey Ryding, Ph.D.


/s/ Peter H. Rose               Director                               May 10, 2000
-----------------------
Peter H. Rose, Ph.D.

/s/ Donald F. McGuinness        Director                               May 10, 2000
------------------------
Donald F. McGuinness

/s/ Dimitri Antoniadis          Director                               May 10, 2000
------------------------
Dimitri Antoniadis

/s/ Robert L. Gable             Director                               May 10, 2000
------------------------
Robert L. Gable

/s/ Lamberto Raffaelli          Director                               May 10, 2000
-------------------------
Lamberto Raffaelli

/s/ Leslie Lewis                Director                               May 10, 2000
--------------------------
Leslie Lewis

</TABLE>


                                      II-5

<PAGE>

                          IBIS TECHNOLOGY CORPORATION

                         INDEX TO EXHIBITS FILED WITH
                        FORM S-8 REGISTRATION STATEMENT

<TABLE>
<CAPTION>

Exhibit
Number                 Description
-------                ------------
<S>                    <C>
(4.1)                  Form of Common Stock Certificate incorporated herein by
                       reference to Exhibit 4.2 to the Registrant's Registration
                       Statement filed on Form S-1, File No. 333-1174.

(4.2)                  Article 4 of the Restated Articles of Organization of the Registrant
                       incorporated herein by reference to Exhibit 4.1 to the Registrant's
                       Registration Statement filed on Form S-1, File No. 333-1174.

(4.3)                  Restated  Bylaws of the  Registrant,  incorporated  herein by reference to
                       Exhibit 3.2 to the Registrant's  Registration Statement filed on Form S-1,
                       File No. 333-1174.

(5)                    Opinion of Mintz, Levin, Cohn, Ferris, Glovsky and Popeo, P.C. as to the
                       legality of shares being registered.

(23.1)                 Consent of Mintz, Levin, Cohn, Ferris, Glovsky and Popeo, P.C. (included
                       in opinion of counsel filed as Exhibit 5).

(23.2)                 Consent of KPMG LLP.

(24)                   Power of Attorney to file future amendments (set forth on the signature
                       page of this Registration Statement).

(99.1)                 The Ibis Technology Corporation 2000 Employee Stock Purchase Plan.

</TABLE>


                                      II-6
[{"type": "S-8", "sequence": "1", "description": "FORM S-8", "secsgml_size_bytes": 18506}]
{"company-data": {"conformed-name": "IBIS TECHNOLOGY CORP", "cik": "0000855182", "assigned-sic": "3674", "irs-number": "042987600", "state-of-incorporation": "MA", "fiscal-year-end": "1231"}, "filing-values": {"form-type": "S-8", "act": "33", "file-number": "333-36706", "film-number": "624903"}, "business-address": {"street1": "32 CHERRY HILL DR", "city": "DANVERS", "state": "MA", "zip": "01923", "phone": "9787774247"}, "mail-address": {"street1": "32 CHERRY HILL DR", "street2": "32 CHERRY HILL DR", "city": "DANVERS", "state": "MA", "zip": "01923"}}
As filed with the Securities and Exchange Commission on May 10, 2000

                                         REGISTRATION NO. 333 -
------------------------------------------------------------------------------
------------------------------------------------------------------------------

                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                              --------------------

                                   FORM S-8
                             REGISTRATION STATEMENT
                                   UNDER THE
                             SECURITIES ACT OF 1933

                              --------------------

                           IBIS TECHNOLOGY CORPORATION
             (EXACT NAME OF REGISTRANT AS SPECIFIED IN ITS CHARTER)

         MASSACHUSETTS                                  04-2987600
 (STATE OR OTHER JURISDICTION                         (I.R.S. EMPLOYER
 OF INCORPORATION OR ORGANIZATION)                   IDENTIFICATION NO.)

                              32 CHERRY HILL DRIVE
                          DANVERS, MASSACHUSETTS 01923
                                 (978) 777-4247
                     (ADDRESS OF PRINCIPAL EXECUTIVE OFFICES)

                       THE IBIS TECHNOLOGY CORPORATION 2000
                           EMPLOYEE STOCK PURCHASE PLAN

                                  MARTIN J. REID
                      PRESIDENT AND CHIEF EXECUTIVE OFFICER
                            IBIS TECHNOLOGY CORPORATION
                               32 CHERRY HILL DRIVE
                          DANVERS, MASSACHUSETTS 01923
                                  (978) 777-4247
  (NAME, ADDRESS, INCLUDING ZIP CODE, AND TELEPHONE NUMBER, INCLUDING AREA
                           CODE, OF AGENT FOR SERVICE)

                              --------------------

                         CALCULATION OF REGISTRATION FEE
------------------------------------------------------------------------------
------------------------------------------------------------------------------
Proposed                 Proposed
          Title of                 Amount to be                maximum                  maximum
 securities to be registered       registered(1)           offering price              aggregate                Amount of
                                                            per share(2)            offering price(2)        registration fee
-------------------------------------------------------------------------------------------------------------------------------
Common Stock, $.008 par value        300,000                  $39.469                 $11,840,700              $3,126
-------------------------------------------------------------------------------------------------------------------------------
-------------------------------------------------------------------------------------------------------------------------------
(1)  The number of shares of common stock, par value $.008 per share ("Common
     Stock"), stated above consists of the aggregate number of shares which may
     be sold under The Ibis Technology Corporation 2000 Employee Stock Purchase
     Plan, (the "Plan"). The maximum number of shares which may be sold under
     the Plan is subject to adjustment in accordance with certain anti-dilution
     and other provisions of the Plan. Accordingly, pursuant to Rule 416 under
     the Securities Act of 1933, as amended (the "Securities Act"), this
     Registration Statement covers, in addition to the number of shares stated
     above, an indeterminate number of shares which may be subject to grant or
     otherwise issuable after the operation of any such anti-dilution and other
     provisions.

(2)  This calculation is made solely for the purpose of determining the
     registration fee pursuant to the provisions of Rule 457(h) under the
     Securities Act on the basis of the average of the high and low sale prices
     per share of the Common Stock on the Nasdaq National Market as of a date
     (May 4, 2000) within 5 business days prior to filing this Registration
     Statement.

------------------------------------------------------------------------------
------------------------------------------------------------------------------
EXPLANATORY NOTE

         In accordance with the instructional Note to Part I of Form S-8 as
promulgated by the Securities and Exchange Commission, the information specified
by Part I of Form S-8 has been omitted from this Registration Statement on Form
S-8 for offers of Common Stock pursuant to the Plan.
PART II

                 INFORMATION REQUIRED IN THE REGISTRATION STATEMENT

ITEM 3.  INCORPORATION OF CERTAIN DOCUMENTS BY REFERENCE.

         The following documents filed by the Registrant with the Commission
are incorporated herein by reference:

         (a)      The Registrant's Annual Report on Form 10-K for the fiscal
year ended December 31, 1999;

         (b)      The  Registrant's  Current  Reports on Form 8-K filed on
February  22,  2000,  April 13, 2000 and April 24, 2000; and

         (c) The description of the Common Stock contained in the
Registrant's Registration Statement on Form 8-A (File No. 0-23668) filed
under the Securities Exchange Act of 1934, including any amendment or report
filed for the purpose of updating such description.

         All reports and other documents filed by the Registrant after the
date hereof pursuant to Sections 13(a), 13(c), 14 and 15(d) of the Securities
Exchange Act of 1934 prior to the filing of a post-effective amendment which
indicates that all securities offered hereby have been sold or which
deregisters all securities then remaining unsold, shall be deemed to be
incorporated by reference herein and to be part hereof from the date of
filing of such reports and documents.

ITEM 4.  DESCRIPTION OF SECURITIES.

         Not applicable.

ITEM 5.  INTERESTS OF NAMED EXPERTS AND COUNSEL.

         Not applicable.

ITEM 6.  INDEMNIFICATION OF DIRECTORS AND OFFICERS.

         Incorporated by reference to the Registrant's Registration Statement
on Form S-1, File No. 333-1174.

ITEM 7.  EXEMPTION FROM REGISTRATION CLAIMED.

         Not applicable.

ITEM 8.  EXHIBITS.

         (4.1)    Form of Common Stock Certificate incorporated herein by
                  reference to Exhibit 4.2 to the Registrant's Registration
                  Statement filed on Form S-1, File No. 333-1174.

                                      II-1
(4.2)    Article 4 of the Restated Articles of Organization of the
                  Registrant incorporated herein by reference to Exhibit 4.1 to
                  the Registrant's Registration Statement filed on Form S-1,
                  File No. 333-1174.

         (4.3)    Restated Bylaws of the Registrant, incorporated herein by
                  reference to Exhibit 3.2 to the Registrant's Registration
                  Statement filed on Form S-1, File No. 333-1174.

         (5)      Opinion of Mintz, Levin, Cohn, Ferris, Glovsky and Popeo,
                  P.C. as to the legality of shares being registered.

         (23.1)   Consent of Mintz, Levin, Cohn, Ferris, Glovsky and Popeo,
                  P.C. (included in opinion of counsel filed as Exhibit 5).

         (23.2)   Consent of KPMG LLP.

         (24)     Power of Attorney to file future amendments (set forth on the
                  signature page of this Registration Statement).

         (99.1)   The Ibis Technology Corporation 2000 Employee Stock Purchase
                  Plan.

ITEM 9.  UNDERTAKINGS.

(a)      The undersigned Registrant hereby undertakes:

         (1) To file, during any period in which offers or sales are being made,
         a post-effective amendment to this Registration Statement:

                 (i) To include any prospectus required by Section 10(a)(3)
              of the Securities Act of 1933;

                 (ii) To reflect in the prospectus any facts or events arising
              after the effective date of the Registration Statement (or the
              most recent post-effective amendment thereof) which, individually
              or in the aggregate, represents a fundamental change in the
              information set forth in the Registration Statement.
              Notwithstanding the foregoing, any increase or decrease in
              volume of securities offered (if the total dollar value of
              securities offered would not exceed that which was registered)
              and any deviation from the low or high end of the estimated
              maximum offering range may be reflected in the form of prospectus
              filed with the Commission pursuant to Rule 424(b) (Section
              230.424(b) of this chapter) if, in the aggregate, the changes in
              volume and price represent no more than a 20% change in the
              maximum aggregate offering price set forth in the "Calculation of
              Registration Fee" table in the effective Registration Statement.

                 (iii) To include any material information with respect to the
              plan of distribution not previously disclosed in the Registration
              Statement or any material change to such information in the
              Registration Statement;

                                     II-2
PROVIDED, HOWEVER, that paragraphs (a)(1)(i) and (a)(1)(ii) do
         not apply if the Registration Statement is on Form S-3 or Form S-8, and
         the information required to be included in a post-effective amendment
         by those paragraphs is contained in periodic reports filed by the
         Registrant pursuant to Section 13 or Section 15(d) of the Securities
         Exchange Act of 1934 that are incorporated by reference in this
         Registration Statement.

         (2) That, for the purpose of determining any liability under the
         Securities Act of 1933, each such post-effective amendment shall be
         deemed to be a new registration statement relating to the securities
         offered therein, and the offering of such securities at that time shall
         be deemed to be the initial bona fide offering thereof.

         (3) To remove from registration by means of a post-effective amendment
         any of the securities being registered which remain unsold at the
         termination of the offering.

(b)      The undersigned Registrant hereby undertakes that, for purposes of
         determining any liability under the Securities Act of 1933, each filing
         of the Registrant's annual report pursuant to Section 13(a) or Section
         15(d) of the Securities Exchange Act of 1934 that is incorporated by
         reference in this Registration Statement shall be deemed to be a new
         registration statement relating to the securities offered therein, and
         the offering of such securities at that time shall be deemed to be the
         initial bona fide offering thereof.

(c)      Insofar as indemnification for liabilities arising under the
         Securities Act of 1933 may be permitted to directors, officers and
         controlling persons of the Registrant pursuant to the foregoing
         provisions, or otherwise, the Registrant has been advised that in the
         opinion of the Securities and Exchange Commission such indemnification
         is against public policy as expressed in the Act and is, therefore,
         unenforceable. In the event that a claim for indemnification against
         such liabilities (other than the payment by the Registrant of
         expenses incurred or paid by a director, officer or controlling person
         of the Registrant in the successful defense of any action, suit or
         proceeding) is asserted by such director, officer or controlling
         person in connection with the securities being registered, the
         Registrant will, unless in the opinion of its counsel the matter has
         been settled by controlling precedent, submit to a court of
         appropriate jurisdiction the question whether such indemnification
         by it is against public policy as expressed in the Act and will be
         governed by the final adjudication of such issue.

                                     II-3
SIGNATURES

         THE REGISTRANT. Pursuant to the requirements of the Securities Act
of 1933, the Registrant certifies that it has reasonable grounds to believe
that it meets all of the requirements for filing on Form S-8 and has duly
caused this Registration Statement to be signed on its behalf by the
undersigned, thereunto duly authorized, in Danvers, Massachusetts on May 10,
2000.

                                IBIS TECHNOLOGY CORPORATION

                                By   /s/ Martin J. Reid
                                    ----------------------------
                                         Martin J. Reid
                                         President and Chief Executive Officer

         Each person whose signature appears below constitutes and appoints
Martin J. Reid and Debra L. Nelson, and each of them, his/her true and lawful
attorneys-in-fact and agents, with full power of substitution and
resubstitution in each of them, for him and in his name, place and stead, and
in any and all capacities, to sign any and all amendments (including
post-effective amendments) to this Registration Statement on Form S-8 of Ibis
Technology Corporation, or any other registration statement for the same
offering that is to be effective upon filing pursuant to Rule 462(b) under
the Securities Act of 1933, as amended, and to file the same, with all
exhibits thereto and other documents in connection therewith, with the
Securities and Exchange Commission, granting unto said attorneys-in-fact and
agents, and each of them, full power and authority to do and perform each and
every act and thing requisite or necessary to be done in or about the
premises, as full to all intents and purposes as he or she might or could do
in person, hereby ratifying and confirming all that said attorneys-in-fact
and agents or any of them or their or his/her substitute or substitutes may
lawfully do or cause to be done by virtue hereof.

         Pursuant to the requirements of the Securities Act of 1933, this
Registration Statement has been signed by the following persons in the
capacities and on the dates indicated.
Signature                          Title                                  Date
---------                          -----                                  ----
/s/ Martin J. Reid        President, Chief Executive Officer and       May 10, 2000
---------------------     Director (principal executive officer)
Martin J. Reid

/s/ Debra L. Nelson       Chief Financial Officer, Treasurer           May 10, 2000
---------------------     and Clerk (principal financial and
Debra L. Nelson           accounting officer)
II-4
Signature                          Title                               Date
---------                          -----                               ----
/s/ Geoffrey Ryding             Director                               May 10, 2000
-----------------------
Geoffrey Ryding, Ph.D.

/s/ Peter H. Rose               Director                               May 10, 2000
-----------------------
Peter H. Rose, Ph.D.

/s/ Donald F. McGuinness        Director                               May 10, 2000
------------------------
Donald F. McGuinness

/s/ Dimitri Antoniadis          Director                               May 10, 2000
------------------------
Dimitri Antoniadis

/s/ Robert L. Gable             Director                               May 10, 2000
------------------------
Robert L. Gable

/s/ Lamberto Raffaelli          Director                               May 10, 2000
-------------------------
Lamberto Raffaelli

/s/ Leslie Lewis                Director                               May 10, 2000
--------------------------
Leslie Lewis
II-5
IBIS TECHNOLOGY CORPORATION

                         INDEX TO EXHIBITS FILED WITH
                        FORM S-8 REGISTRATION STATEMENT
Exhibit
Number                 Description
-------                ------------
(4.1)                  Form of Common Stock Certificate incorporated herein by
                       reference to Exhibit 4.2 to the Registrant's Registration
                       Statement filed on Form S-1, File No. 333-1174.

(4.2)                  Article 4 of the Restated Articles of Organization of the Registrant
                       incorporated herein by reference to Exhibit 4.1 to the Registrant's
                       Registration Statement filed on Form S-1, File No. 333-1174.

(4.3)                  Restated  Bylaws of the  Registrant,  incorporated  herein by reference to
                       Exhibit 3.2 to the Registrant's  Registration Statement filed on Form S-1,
                       File No. 333-1174.

(5)                    Opinion of Mintz, Levin, Cohn, Ferris, Glovsky and Popeo, P.C. as to the
                       legality of shares being registered.

(23.1)                 Consent of Mintz, Levin, Cohn, Ferris, Glovsky and Popeo, P.C. (included
                       in opinion of counsel filed as Exhibit 5).

(23.2)                 Consent of KPMG LLP.

(24)                   Power of Attorney to file future amendments (set forth on the signature
                       page of this Registration Statement).

(99.1)                 The Ibis Technology Corporation 2000 Employee Stock Purchase Plan.
II-6