<P style="TEXT-ALIGN: right" align=right><FONT size=2>As filed with the
Securities and Exchange Commission on November 20, 2009<BR>Registration No.
333-_____________</FONT></P>
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      <P class=MsoNormal style="TEXT-ALIGN: center" align=center><B><FONT
      size=5>UNITED STATES<BR>SECURITIES AND EXCHANGE
    COMMISSION</FONT></B></P></TD></TR>
  <TR>
    <TD
    style="PADDING-RIGHT: 0.75pt; PADDING-LEFT: 0.75pt; PADDING-BOTTOM: 0.75pt; PADDING-TOP: 0.75pt"
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      <P class=MsoNormal style="TEXT-ALIGN: center" align=center><FONT
      size=2>Washington, D.C. 20549</FONT></P></TD></TR>
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      <P class=MsoNormal style="TEXT-ALIGN: center"
align=center>&nbsp;</P></TD></TR>
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      <P class=MsoNormal style="TEXT-ALIGN: center" align=center><B><FONT
      size=5>FORM S-8</FONT></B></P></TD></TR>
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      <P class=MsoNormal style="TEXT-ALIGN: center" align=center><B><FONT
      size=5>REGISTRATION STATEMENT</FONT></B></P></TD></TR>
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    style="PADDING-RIGHT: 0.75pt; PADDING-LEFT: 0.75pt; PADDING-BOTTOM: 0.75pt; PADDING-TOP: 0.75pt"
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      <P class=MsoNormal style="TEXT-ALIGN: center" align=center><I><FONT
      size=2>Under<BR>THE SECURITIES ACT OF 1933</FONT></I></P></TD></TR>
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      <P class=MsoNormal style="TEXT-ALIGN: center"
align=center>&nbsp;</P></TD></TR>
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      <P class=MsoNormal style="TEXT-ALIGN: center" align=center><B><FONT
      size=5>RUDOLPH TECHNOLOGIES, INC.</FONT></B></P></TD></TR>
  <TR>
    <TD
    style="PADDING-RIGHT: 0.75pt; PADDING-LEFT: 0.75pt; PADDING-BOTTOM: 0.75pt; PADDING-TOP: 0.75pt"
    colSpan=3>
      <P class=MsoNormal style="TEXT-ALIGN: center" align=center><FONT
      size=1>(Exact name of Registrant as specified in its
  charter)</FONT></P></TD></TR>
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    <TD
    style="PADDING-RIGHT: 0.75pt; PADDING-LEFT: 0.75pt; PADDING-BOTTOM: 0.75pt; PADDING-TOP: 0.75pt"
    colSpan=3>
      <P class=MsoNormal>&nbsp;</P></TD></TR>
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    <TD
    style="PADDING-RIGHT: 0.75pt; PADDING-LEFT: 0.75pt; PADDING-BOTTOM: 0.75pt; WIDTH: 33%; PADDING-TOP: 0.75pt"
    width="33%">
      <P class=MsoNormal style="TEXT-ALIGN: center" align=center><U><FONT
      size=2>Delaware </FONT></U></P></TD>
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    style="PADDING-RIGHT: 0.75pt; PADDING-LEFT: 0.75pt; PADDING-BOTTOM: 0.75pt; WIDTH: 33%; PADDING-TOP: 0.75pt"
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      <P class=MsoNormal>&nbsp;</P></TD>
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    style="PADDING-RIGHT: 0.75pt; PADDING-LEFT: 0.75pt; PADDING-BOTTOM: 0.75pt; WIDTH: 33%; PADDING-TOP: 0.75pt"
    width="33%">
      <P class=MsoNormal style="TEXT-ALIGN: center" align=center><U><FONT
      size=2>22-3531208</FONT></U></P></TD></TR>
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    <TD
    style="PADDING-RIGHT: 0.75pt; PADDING-LEFT: 0.75pt; PADDING-BOTTOM: 0.75pt; WIDTH: 33%; PADDING-TOP: 0.75pt"
    width="33%">
      <P class=MsoNormal style="TEXT-ALIGN: center" align=center><FONT
      size=2>(State of Incorporation)</FONT></P></TD>
    <TD
    style="PADDING-RIGHT: 0.75pt; PADDING-LEFT: 0.75pt; PADDING-BOTTOM: 0.75pt; WIDTH: 33%; PADDING-TOP: 0.75pt"
    width="33%">
      <P class=MsoNormal>&nbsp;</P></TD>
    <TD
    style="PADDING-RIGHT: 0.75pt; PADDING-LEFT: 0.75pt; PADDING-BOTTOM: 0.75pt; WIDTH: 33%; PADDING-TOP: 0.75pt"
    width="33%">
      <P class=MsoNormal style="TEXT-ALIGN: center" align=center><FONT
      size=2>(I.R.S. Employer Identification Number)</FONT></P></TD></TR>
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    style="PADDING-RIGHT: 0.75pt; PADDING-LEFT: 0.75pt; PADDING-BOTTOM: 0.75pt; WIDTH: 33%; PADDING-TOP: 0.75pt"
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      <P class=MsoNormal style="TEXT-ALIGN: center" align=center>&nbsp;</P></TD>
    <TD
    style="PADDING-RIGHT: 0.75pt; PADDING-LEFT: 0.75pt; PADDING-BOTTOM: 0.75pt; WIDTH: 33%; PADDING-TOP: 0.75pt"
    width="33%">
      <P style="TEXT-ALIGN: center" align=center><FONT size=2>One Rudolph Road,
      PO Box 1000<BR>Flanders, NJ 07836<BR>973-691-1300 </FONT></P></TD>
    <TD
    style="PADDING-RIGHT: 0.75pt; PADDING-LEFT: 0.75pt; PADDING-BOTTOM: 0.75pt; WIDTH: 33%; PADDING-TOP: 0.75pt"
    width="33%">
      <P class=MsoNormal>&nbsp;</P></TD></TR>
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    style="PADDING-RIGHT: 0.75pt; PADDING-LEFT: 0.75pt; PADDING-BOTTOM: 0.75pt; PADDING-TOP: 0.75pt"
    colSpan=3>
      <P style="TEXT-ALIGN: center" align=center><FONT size=2>&nbsp; (Address,
      including zip code, and telephone number, <BR>including area code of
      registrant's principal executive offices)</FONT></P></TD></TR>
  <TR>
    <TD
    style="PADDING-RIGHT: 0.75pt; PADDING-LEFT: 0.75pt; PADDING-BOTTOM: 0.75pt; PADDING-TOP: 0.75pt"
    colSpan=3>
      <P class=MsoNormal style="TEXT-ALIGN: center"
  align=center>&nbsp;</P></TD></TR></TABLE></DIV>
<P style="TEXT-ALIGN: center" align=center><font size="5"><b>RUDOLPH
TECHNOLOGIES, INC. 2009</b></font><B><FONT size=5> STOCK
PLAN</FONT><BR><FONT size=5>RUDOLPH TECHNOLOGIES, INC. 2009 EMPLOYEE STOCK PURCHASE
PLAN</FONT><BR></B><FONT size=1>(Full title of the Plans)</FONT></P>
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    width=716>
      <P class=MsoNormal>&nbsp;</P></TD></TR>
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    <TD
    style="PADDING-RIGHT: 0.75pt; PADDING-LEFT: 0.75pt; PADDING-BOTTOM: 0.75pt; WIDTH: 537pt; PADDING-TOP: 0.75pt"
    width=716>
      <P style="TEXT-ALIGN: center" align=center><FONT size=2>PAUL F.
      McLAUGHLIN<BR>Chairman and Chief Executive Officer<BR>RUDOLPH
      TECHNOLOGIES, INC.<BR>One Rudolph Road, PO Box 1000<BR>Flanders, NJ
      07836<BR>(973) 691-1300<BR>(Name, address including zip code, and
      telephone number, including area code, of agent for
  service)</FONT></P></TD></TR></TABLE></DIV>
<P><FONT size=2>&nbsp;Indicate by check mark whether the Registrant is a large
accelerated filer, an accelerated filer, a non-accelerated filer, or a smaller
reporting company.&nbsp; See the definitions of&nbsp; "large accelerated filer,"
"accelerated filer" and "smaller reporting company" in Rule 12b-2 of the
Exchange Act.</FONT></P>
<P><FONT
size=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Large
accelerated filer&nbsp; [&nbsp;
]&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
Accelerated filer
[X]<BR>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
Non-accelerated filer [&nbsp; ] (Do not check if smaller reporting
company)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
Smaller reporting company [&nbsp; ]</FONT></P>
<DIV class=MsoNormal style="TEXT-ALIGN: center" align=center>
<HR align=center width="100%" SIZE=2>
</DIV>
<P style="TEXT-ALIGN: center" align=center><B><FONT size=2><br>
CALCULATION OF
REGISTRATION FEE</FONT></B></P>
<DIV align=left>
<TABLE class=MsoNormalTable id=table3 cellSpacing=0
cellPadding=0 border=0>
	<TR>
		<TD
    style="padding:6pt; border-right:medium none; border-top:medium none; border-left:medium none; WIDTH: 33%; BORDER-BOTTOM: 1pt solid black; ">
		<P class=MsoNormal style="TEXT-ALIGN: center" align=center>
		<FONT
      size=2>Title of Securities to be Registered</FONT></P></TD>
		<TD
    style="padding:6pt; border-right:medium none; border-top:medium none; border-left:medium none; WIDTH: 15%; BORDER-BOTTOM: 1pt solid black; ">
		<P class=MsoNormal style="TEXT-ALIGN: center" align=center>
		<FONT
      size=2>Amount to be Registered (1)</FONT></P></TD>
		<TD
    style="BORDER-RIGHT: medium none; PADDING-RIGHT: 6pt; BORDER-TOP: medium none; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; BORDER-LEFT: medium none; WIDTH: 14%; PADDING-TOP: 6pt; BORDER-BOTTOM: black 1pt solid">
		<P class=MsoNormal style="TEXT-ALIGN: center" align=center>
		<FONT
      size=2>Proposed Maximum Offering Price Per Share</FONT></P></TD>
		<TD
    style="BORDER-RIGHT: medium none; PADDING-RIGHT: 6pt; BORDER-TOP: medium none; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; BORDER-LEFT: medium none; WIDTH: 16%; PADDING-TOP: 6pt; BORDER-BOTTOM: black 1pt solid">
		<P class=MsoNormal style="TEXT-ALIGN: center" align=center>
		<FONT
      size=2>Proposed Maximum Aggregate Offering Price</FONT></P></TD>
		<TD
    style="padding:6pt; border-right:medium none; border-top:medium none; border-left:medium none; WIDTH: 10%; BORDER-BOTTOM: 1pt solid black; ">
		<P class=MsoNormal style="TEXT-ALIGN: center" align=center>
		<FONT
      size=2>Amount of Registration Fee</FONT></P></TD>
	</TR>
	<TR>
		<TD
    style="padding:6pt; border-right:medium none; border-top:medium none; border-left:medium none; WIDTH: 33%; BORDER-BOTTOM: 1pt solid black; ">
		<P class=MsoNormal><FONT size=2>Common Stock $0.001 par value, to be
      issued under the Rudolph Technologies, Inc. 2009 Stock Plan</FONT></P>
		</TD>
		<TD
    style="padding:6pt; border-right:medium none; border-top:medium none; border-left:medium none; WIDTH: 15%; BORDER-BOTTOM: 1pt solid black; ">
		<P class=MsoNormal style="TEXT-ALIGN: right" align=right><font size="2">3,300,000 (2)</font></P>
		</TD>
		<TD
    style="BORDER-RIGHT: medium none; PADDING-RIGHT: 6pt; BORDER-TOP: medium none; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; BORDER-LEFT: medium none; WIDTH: 14%; PADDING-TOP: 6pt; BORDER-BOTTOM: black 1pt solid">
		<P class=MsoNormal style="TEXT-ALIGN: right" align=right>
		<FONT
      size=2>$6.57&nbsp; (4)</FONT></P></TD>
		<TD
    style="BORDER-RIGHT: medium none; PADDING-RIGHT: 6pt; BORDER-TOP: medium none; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; BORDER-LEFT: medium none; WIDTH: 16%; PADDING-TOP: 6pt; BORDER-BOTTOM: black 1pt solid">
		<P class=MsoNormal style="TEXT-ALIGN: right" align=right>
		<FONT
      size=2>$21,681,000.00</FONT></P></TD>
		<TD
    style="padding:6pt; border-right:medium none; border-top:medium none; border-left:medium none; WIDTH: 10%; BORDER-BOTTOM: 1pt solid black; ">
		<P class=MsoNormal style="TEXT-ALIGN: right" align=right>
		<FONT
      size=2>$1,209.80</FONT></P></TD>
	</TR>
	<TR>
		<TD
    style="padding:6pt; border-right:medium none; border-top:medium none; border-left:medium none; WIDTH: 33%; BORDER-BOTTOM: 1pt solid black; ">
		<P class=MsoNormal><FONT size=2>Common Stock $0.001 par value, to be
      issued under the 2009 Employee Stock Purchase Plan</FONT></P></TD>
		<TD
    style="padding:6pt; border-right:medium none; border-top:medium none; border-left:medium none; WIDTH: 15%; BORDER-BOTTOM: 1pt solid black; ">
		<P class=MsoNormal style="TEXT-ALIGN: right" align=right>
		<FONT
      size=2>300,000 (3)</FONT></P></TD>
		<TD
    style="BORDER-RIGHT: medium none; PADDING-RIGHT: 6pt; BORDER-TOP: medium none; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; BORDER-LEFT: medium none; WIDTH: 14%; PADDING-TOP: 6pt; BORDER-BOTTOM: black 1pt solid">
		<P class=MsoNormal style="TEXT-ALIGN: right" align=right>
		<FONT
      size=2>$6.57&nbsp; (4)</FONT></P></TD>
		<TD
    style="BORDER-RIGHT: medium none; PADDING-RIGHT: 6pt; BORDER-TOP: medium none; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; BORDER-LEFT: medium none; WIDTH: 16%; PADDING-TOP: 6pt; BORDER-BOTTOM: black 1pt solid">
		<P class=MsoNormal style="TEXT-ALIGN: right" align=right>
		<FONT
      size=2>$1,971,000.00</FONT></P></TD>
		<TD
    style="padding:6pt; border-right:medium none; border-top:medium none; border-left:medium none; WIDTH: 10%; BORDER-BOTTOM: 1pt solid black; ">
		<P class=MsoNormal style="TEXT-ALIGN: right" align=right>
		<FONT
      size=2>$109.98</FONT></P></TD>
	</TR>
	<TR>
		<TD
    style="padding:6pt; border-right:medium none; border-top:medium none; border-left:medium none; WIDTH: 33%; BORDER-BOTTOM: 1pt solid black; ">
		<P class=MsoNormal><FONT size=2>Total</FONT></P></TD>
		<TD
    style="padding:6pt; border-right:medium none; border-top:medium none; border-left:medium none; WIDTH: 15%; BORDER-BOTTOM: 1pt solid black; ">
		<P class=MsoNormal style="TEXT-ALIGN: right" align=right>
		<FONT
      size=2>3,600,000&nbsp;&nbsp;&nbsp; &nbsp;&nbsp; </FONT></P></TD>
		<TD
    style="BORDER-RIGHT: medium none; PADDING-RIGHT: 6pt; BORDER-TOP: medium none; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; BORDER-LEFT: medium none; WIDTH: 14%; PADDING-TOP: 6pt; BORDER-BOTTOM: black 1pt solid">
		<P class=MsoNormal style="TEXT-ALIGN: right" align=right>
		<FONT
      size=2>&nbsp;&nbsp; </FONT></P></TD>
		<TD
    style="BORDER-RIGHT: medium none; PADDING-RIGHT: 6pt; BORDER-TOP: medium none; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; BORDER-LEFT: medium none; WIDTH: 16%; PADDING-TOP: 6pt; BORDER-BOTTOM: black 1pt solid">
		<P class=MsoNormal style="TEXT-ALIGN: right" align=right>
		<FONT
      size=2>$23,652,000.00</FONT></P></TD>
		<TD
    style="padding:6pt; border-right:medium none; border-top:medium none; border-left:medium none; WIDTH: 10%; BORDER-BOTTOM: 1pt solid black; ">
		<P class=MsoNormal style="TEXT-ALIGN: right" align=right>
		<FONT
      size=2>$1,319.78</FONT></P></TD>
	</TR>
</TABLE></DIV>
<P>&nbsp;</P>
<div style="FONT-FAMILY: TIMES NEW ROMAN">
	<table style="WIDTH: 100%; BORDER-COLLAPSE: collapse" cellSpacing="0" cellPadding="0" width="100%" border="0">
		<tr>
			<td style="PADDING-RIGHT: 0in; PADDING-LEFT: 0in; PADDING-BOTTOM: 0in; WIDTH: 4%; PADDING-TOP: 0in" vAlign="top" width="4%">
			<p style="MARGIN: 0in 0in 0pt">
			<font style="FONT-SIZE: 10pt" face="TIMES NEW ROMAN" size="2">(1)
			</font></td>
			<td style="PADDING-RIGHT: 0in; PADDING-LEFT: 0in; PADDING-BOTTOM: 0in; WIDTH: 96%; PADDING-TOP: 0in" vAlign="bottom" width="96%">
			<p style="MARGIN: 0in 0in 0pt">
			<font style="FONT-SIZE: 10pt" face="Times New Roman" size="2">
			Pursuant to Rule&nbsp;416(a)&nbsp;under the Securities Act of 1933, as amended
			(the "Securities Act"), this Registration Statement on Form&nbsp;S-8
			(this "Registration Statement") shall also cover any additional
			shares of Common Stock, par value $0.001 per share (the "Common
			Stock"), of Rudolph Technologies, Inc. (the "Registrant") which
			become issuable under the Rudolph Technologies, Inc. 2009 Stock Plan,
			as amended
			(the "2009</font><font face="Times New Roman" size="2"></a>
			<a name="HH_2">Stock</a>
			<a name="HH_3">Plan</a>"), and
			the Rudolph Technologies, Inc. 2009 Employee Stock Purchase Plan, as
			amended
			(the "2009 ESPP"), by reason of any stock dividend, stock split,
			recapitalization or other similar transaction effected without the
			Registrant's receipt of consideration which results in an increase
			in the number of outstanding shares of the Registrant's Common
			Stock. </font></font></td>
		</tr>
		<tr>
			<td style="PADDING-RIGHT: 0in; PADDING-LEFT: 0in; PADDING-BOTTOM: 0in; WIDTH: 4%; PADDING-TOP: 0in" vAlign="top" width="4%">
			<p style="MARGIN: 0in 0in 0pt">
			<font style="FONT-SIZE: 10pt" face="TIMES NEW ROMAN" size="2">&nbsp;
			</font></td>
			<td style="PADDING-RIGHT: 0in; PADDING-LEFT: 0in; PADDING-BOTTOM: 0in; WIDTH: 96%; PADDING-TOP: 0in" vAlign="bottom" width="96%">
			<p style="MARGIN: 0in 0in 0pt">
			<font style="FONT-SIZE: 10pt" face="Times New Roman" size="2">&nbsp;
			</font></td>
		</tr>
		<tr>
			<td style="PADDING-RIGHT: 0in; PADDING-LEFT: 0in; PADDING-BOTTOM: 0in; WIDTH: 4%; PADDING-TOP: 0in" vAlign="top" width="4%">
			<p style="MARGIN: 0in 0in 0pt">
			<font style="FONT-SIZE: 10pt" face="TIMES NEW ROMAN" size="2">(2)
			</font></td>
			<td style="PADDING-RIGHT: 0in; PADDING-LEFT: 0in; PADDING-BOTTOM: 0in; WIDTH: 96%; PADDING-TOP: 0in" vAlign="bottom" width="96%">
			<p style="MARGIN: 0in 0in 0pt">
			<font style="FONT-SIZE: 10pt" face="Times New Roman" size="2">
			Represents the aggregate number of shares of Common Stock of the
			Registrant available for issuance under the <a name="HH_4">2009</a> <a name="HH_5">Stock</a> <a name="HH_6">Plan</a>. </font></td>
		</tr>
		<tr>
			<td style="PADDING-RIGHT: 0in; PADDING-LEFT: 0in; PADDING-BOTTOM: 0in; WIDTH: 4%; PADDING-TOP: 0in" vAlign="top" width="4%">
			<p style="MARGIN: 0in 0in 0pt">
			<font style="FONT-SIZE: 10pt" face="TIMES NEW ROMAN" size="2">&nbsp;
			</font></td>
			<td style="PADDING-RIGHT: 0in; PADDING-LEFT: 0in; PADDING-BOTTOM: 0in; WIDTH: 96%; PADDING-TOP: 0in" vAlign="bottom" width="96%">
			<p style="MARGIN: 0in 0in 0pt">
			<font style="FONT-SIZE: 10pt" face="Times New Roman" size="2">&nbsp;
			</font></td>
		</tr>
		<tr>
			<td style="PADDING-RIGHT: 0in; PADDING-LEFT: 0in; PADDING-BOTTOM: 0in; WIDTH: 4%; PADDING-TOP: 0in" vAlign="top" width="4%">
			<p style="MARGIN: 0in 0in 0pt">
			<font style="FONT-SIZE: 10pt" face="TIMES NEW ROMAN" size="2">(3)
			</font></td>
			<td style="PADDING-RIGHT: 0in; PADDING-LEFT: 0in; PADDING-BOTTOM: 0in; WIDTH: 96%; PADDING-TOP: 0in" vAlign="bottom" width="96%">
			<p style="MARGIN: 0in 0in 0pt">
			<font style="FONT-SIZE: 10pt" face="Times New Roman" size="2">
			Represents the aggregate number of shares of Common Stock of the
			Registrant available for issuance under the 2009 ESPP. </font></td>
		</tr>
		<tr>
			<td style="PADDING-RIGHT: 0in; PADDING-LEFT: 0in; PADDING-BOTTOM: 0in; WIDTH: 4%; PADDING-TOP: 0in" vAlign="top" width="4%">
			<p style="MARGIN: 0in 0in 0pt">
			<font style="FONT-SIZE: 10pt" face="TIMES NEW ROMAN" size="2">&nbsp;
			</font></td>
			<td style="PADDING-RIGHT: 0in; PADDING-LEFT: 0in; PADDING-BOTTOM: 0in; WIDTH: 96%; PADDING-TOP: 0in" vAlign="bottom" width="96%">
			<p style="MARGIN: 0in 0in 0pt">
			<font style="FONT-SIZE: 10pt" face="Times New Roman" size="2">&nbsp;
			</font></td>
		</tr>
		<tr>
			<td style="PADDING-RIGHT: 0in; PADDING-LEFT: 0in; PADDING-BOTTOM: 0in; WIDTH: 4%; PADDING-TOP: 0in" vAlign="top" width="4%">
			<p style="MARGIN: 0in 0in 0pt">
			<font style="FONT-SIZE: 10pt" face="TIMES NEW ROMAN" size="2">(4)
			</font></td>
			<td style="PADDING-RIGHT: 0in; PADDING-LEFT: 0in; PADDING-BOTTOM: 0in; WIDTH: 96%; PADDING-TOP: 0in" vAlign="bottom" width="96%">
			<p style="MARGIN: 0in 0in 0pt">
			<font style="FONT-SIZE: 10pt" face="Times New Roman" size="2">
			Estimated in accordance with Rule&nbsp;457(c)&nbsp;and Rule&nbsp;457(h)&nbsp;under the
			Securities Act solely for the purpose of calculating the
			registration fee of shares of the Registrant's Common Stock reserved
			for future issuance under the <a name="HH_7">2009</a> <a name="HH_8">Stock</a> <a name="HH_9">Plan</a>
			and 2009 ESPP. The computation is based
			on the average of the high and low prices of the Registrant's Common
			Stock as reported on NASDAQ Global Select Market on November 16,
			2009. </font></td>
		</tr>
		</table>
	<p style="MARGIN: 0in 0in 0pt; TEXT-ALIGN: center" align="center">
	<font style="FONT-SIZE: 10pt" face="TIMES NEW ROMAN" size="2">&nbsp; </font>
</div>
<DIV class=MsoNormal style="TEXT-ALIGN: center" align=center><B>
<HR align=center width="100%" SIZE=2>
</B></DIV>
<P style="TEXT-ALIGN: center" align=center><B><FONT size=2>PART I</FONT></B></P>
<P><B><FONT size=2>Item 1. </FONT></B><U><FONT size=2>Plan
Information*</FONT></U></P>
<P><B><FONT size=2><br>
Item 2. </FONT></B><U><FONT size=2>Registrant Information and
Employee Plan Annual Information*</FONT></U></P>
<P><FONT size=2>*Information required by Part I to be contained in the Section
10(a) prospectus is omitted from this registration statement in accordance with
Rule 428 under the Securities Act and the Note to Part I of Form S-8.</FONT></P>
<DIV class=MsoNormal style="TEXT-ALIGN: center" align=center><B>
<HR align=center width="100%" SIZE=2>
</B></DIV>
<P style="TEXT-ALIGN: center" align=center><B><FONT size=2>PART
II</FONT></B></P>
<P style="TEXT-ALIGN: center" align=center><B><FONT size=2>INFORMATION REQUIRED
IN THE REGISTRATION STATEMENT</FONT></B></P>
<P style="TEXT-ALIGN: center" align=center><B><FONT size=2></FONT></B>&nbsp;</P>
<P><B><FONT size=2>Item 3</FONT></B><FONT size=2>. </FONT><U><FONT
size=2>Incorporation of Documents by Reference</FONT></U></P>
<P><FONT
size=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; The
following documents and information heretofore filed with the Securities and
Exchange Commission (the "Commission") are hereby incorporated by
reference:</FONT></P>
<ul>
	<li><FONT
size=2>The Registrant's Annual Report on Form 10-K for the fiscal year
ended December 31, 2008, filed on March 6, 2009.<br>
&nbsp;</FONT></li>
	<li><font style="FONT-SIZE: 10pt" face="TIMES NEW ROMAN" size="2">The Registrant's Quarterly Reports on Form&nbsp;10-Q for the quarters ended March 31,
2009, June 30, 2009 and September 30, 2009, filed with the Commission on May 8, 2009, August 7, 2009
	and November 6, 2009, respectively.<br>
&nbsp;</font></li>
	<li><font style="FONT-SIZE: 10pt" face="TIMES NEW ROMAN" size="2">&nbsp;The Registrant's Current Reports on Form&nbsp;8-K filed with
the Commission on August 4, 2009, August 6, 2009 and August 24,
2009, and all other reports filed pursuant to Section&nbsp;13(a)&nbsp;or 15(d)&nbsp;of the
Securities Exchange Act of 1934, as amended (the "Exchange Act") since the end
of the fiscal year covered by the Registrant's latest Annual Report referred to
	above, provided that any portions of such reports that are deemed furnished
	and not filed pursuant to the instructions to Form&nbsp;8-K shall not be
	incorporated by reference into this Registration Statement. <br>
&nbsp;</font></li>
	<li><FONT size=2>The description of
the Common Stock of the Registrant contained in the Registrant's Registration
Statement on Form 8-A filed on November 5, 1999, pursuant to Section 12 of the
	Exchange Act.<br>
&nbsp;</FONT></li>
	<li><font size="2">The description of common stock purchase rights contained
	in the Registration Statement on Form 8-A filed June 28, 2005 and including
	any amendment or report filed for the purpose of updating such description.</font></li>
</ul>
<P><FONT size=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; All documents
subsequently filed by the Registrant pursuant to Sections 13(a), 13(c), 14 and
15(d) of the Exchange Act, prior to the filing of a post-effective amendment
which indicates that all securities registered hereby have been sold or which
deregisters all securities then remaining unsold, shall be deemed to be
incorporated by reference in this Registration Statement and to be part hereof
from the date of filing such documents. Any statement contained herein or in a
document incorporated or deemed to be incorporated by reference herein shall be
deemed to be modified or superseded for purposes of this Registration Statement
to the extent that a statement contained herein or in any other subsequently
filed document which also is or is deemed to be incorporated by reference herein
modifies or supersedes such statement.&nbsp; Any such statement so modified or
superseded shall not be deemed, except as so modified or superseded, to
constitute a part of this Registration Statement.</FONT></P>
<P><B><FONT size=2><BR>Item 4</FONT></B><FONT size=2>. </FONT><U><FONT
size=2>Description of Securities</FONT></U></P>
<P><FONT
size=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Not
applicable.</FONT><B><FONT size=2><BR>&nbsp;</FONT></B></P>
<P><B><FONT size=2>Item 5</FONT></B><FONT size=2>. </FONT><U><FONT
size=2>Interests of Named Experts and Counsel</FONT></U></P>
<P><FONT
size=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Not
applicable.</FONT></P>
<P><B><FONT size=2><BR>Item 6</FONT></B><FONT size=2>. </FONT><U><FONT
size=2>Indemnification of Directors and Officers</FONT></U></P>
<P><FONT
size=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; The
Registrant's certificate of incorporation contains certain provisions permitted
under the Delaware General Corporation Law relating to the liability of
directors. Under Delaware law, these provisions eliminate a director's personal liability for
monetary damages resulting from a breach of fiduciary duty, except in certain
circumstances involving certain wrongful acts, including: (i) for any breach of
the director's duty of loyalty to the corporation or its stockholders, (ii) for
acts or omissions not in good faith or that involve intentional misconduct or a
knowing violation of law, (iii) for unlawful payments of dividends or unlawful
stock repurchases or redemptions as provided in Section 174 of the Delaware
General Corporation Law, or (iv) for any transaction from which the director
derived an improper personal benefit.</FONT></P>
<P><FONT
size=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; The
Registrant's Bylaws provide that the Registrant shall indemnify its directors
and officers and may indemnify its employees and other agents to the fullest
extent permitted by law. The Registrant's Bylaws also permit the Registrant to
secure insurance on behalf of any officer, director, employee or other agent for
any liability arising out of his or her actions in such capacity, regardless of
whether the Registrant would have the power to indemnify him or her against such
liability under the General Corporation Law of Delaware.</FONT></P>
<P><FONT
size=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; The
Registrant has entered into agreements to indemnify its directors and officers,
in addition to indemnification provided for in the Registrant's Bylaws. Subject
to certain conditions, these agreements, among other things, indemnify the
Registrant's directors and officers for certain expenses (including attorney's
fees), judgments, fines and settlement amounts incurred by any such person in
any action or proceeding, including any action by or in the right of the
Registrant, arising out of such person's services as a director or officer of
the Registrant. The Registrant maintains an insurance policy covering its
officers and directors with respect to certain liabilities, including
liabilities arising under the Securities Act or otherwise.</FONT></P>
<P><B><FONT size=2><BR>Item 7</FONT></B><FONT size=2>. </FONT><U><FONT
size=2>Exemption from Registration Claimed</FONT></U></P>
<P><FONT
size=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Not
applicable.</FONT></P>
<P><B><FONT size=2><BR>Item 8</FONT></B><FONT size=2>. </FONT><U><FONT
size=2>Exhibits</FONT></U></P>
<P><FONT
size=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
4.1(1)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Restated
Certificate of Incorporation of Registrant</FONT></P>
<P><FONT
size=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
4.2(2)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Restated Bylaws of
Registrant</FONT></P>
<P><FONT
size=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; 4.3(3)
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Rights Agreement</FONT></P>
<P><FONT
size=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
5.1&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
Opinion of Day Pitney LLP, as to legality of securities being
registered<BR><BR>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
10.1(4) &nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Rudolph Technologies, Inc. 2009 Stock Plan</FONT></P>
<P><FONT
size=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
10.2(5)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Rudolph Technologies,
Inc. 2009 Employee Stock
Purchase Plan&nbsp;&nbsp;</FONT></P>
<P><FONT
size=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; 23.1
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Consent of
KPMG LLP, independent registered public accounting firm</FONT></P>
<P><FONT
size=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; 23.2
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Consent of
Ernst &amp; Young LLP, independent registered public accounting firm</FONT></P>
<P><FONT
size=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
23.3&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
Consent of Day Pitney LLP (contained in Exhibit 5.1).</FONT></P>
<P><FONT
size=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; 24.1
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Power of
Attorney </FONT><FONT face="Times New Roman" size=2>(included on signature page
of the Registration Statement hereto)</FONT><FONT size=2><BR></FONT><U><FONT
size=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
</FONT></U></P>
<P><FONT size=2>(1)&nbsp;&nbsp;&nbsp;&nbsp; Exhibit 4.1 is incorporated by reference to Exhibit 3.1(c)
filed with the Registrant's Registration Statement on Form S-1as amended, No.
333-86821, filed with the SEC on September 9, 1999.</FONT></P>
<P><FONT size=2>(2)&nbsp;&nbsp;&nbsp;&nbsp; Exhibit 4.2 is incorporated by reference to Exhibit 3.1
filed with the Registrant's Registration Statement on Form 8-K, filed with the
SEC on February 2, 2009.</FONT></P>
<P><FONT size=2>(3)&nbsp;&nbsp;&nbsp;&nbsp; Exhibit 4.3 incorporated by reference to Exhibit 4.1 of the
Registrant's Registration Statement on Form 8-A, filed with the SEC on June 28,
2005.</FONT></P>
<P><FONT size=2>(4)&nbsp;&nbsp;&nbsp;&nbsp; Exhibit 10.1 is incorporated by reference to Appendix A of the Registrant's
revised Proxy Statement on Form DEFR14A, filed with the Commission May 8, 2009.</FONT></P>
<P><FONT size=2>(5)&nbsp;&nbsp;&nbsp;&nbsp; Exhibit 10.2 is incorporated by reference to Appendix B of the Registrant's
revised Proxy Statement on Form DEFR14A, filed with the Commission May 8, 2009.</FONT></P>
<P><B><FONT size=2></FONT></B>&nbsp;<B><FONT size=2><br>
Item 9</FONT></B><FONT size=2>. </FONT><U><FONT
size=2>Undertakings</FONT></U></P>
<P><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
</font><FONT
face="Times New Roman" size=2>(a)&nbsp;&nbsp;&nbsp;&nbsp; The undersigned registrant hereby undertakes:
</FONT></P>
<blockquote>
	<blockquote>
		<P><FONT
face="Times New Roman" size=2>1.&nbsp;&nbsp;&nbsp;&nbsp; To file, during any period in which offers or
sales are being made, a post-effective amendment to this registration statement:</FONT></P>
		<P><font face="Times New Roman" size="2">(i)&nbsp;&nbsp;&nbsp;&nbsp; To include any prospectus required by
Section&nbsp;10(a)(3) of the Securities Act of 1933; </font></P>
		<P><font face="Times New Roman" size="2">(ii)&nbsp;&nbsp;&nbsp;&nbsp; To reflect in the prospectus any facts or
events arising after the effective date of the registration statement (or the
most recent post-effective amendment thereof) which, individually or in the
aggregate, represent a fundamental change in the information set forth in the
registration statement. Notwithstanding the foregoing, any increase or decrease
in volume of securities offered (if the total dollar value of securities offered
would not exceed that which was registered) and any deviation from the low or
high end of the estimated maximum offering range may be reflected in the form of
prospectus filed with the Commission pursuant to Rule 424(b) if, in the
aggregate, the changes in volume and price represent no more than a 20 percent
change in the maximum aggregate offering price set forth in the "Calculation of
Registration Fee" table in the effective registration statement; and</font></P>
		<P><font face="Times New Roman" size="2">(iii)&nbsp;&nbsp;&nbsp;&nbsp; To include any material information with
respect to the plan of distribution not previously disclosed in the registration
statement or any material change to such information in the registration
statement; </font></P>
	</blockquote>
	<P><font face="Times New Roman" size="2"><I>provided, however</I>, that paragraphs
(a)(1)(i) and (a)(1)(ii) of this section do not apply if the information
required to be included in a post-effective amendment by those paragraphs is
contained in reports filed with or furnished to the Commission by the registrant
pursuant to Section&nbsp;13 or Section&nbsp;15(d) of the Securities Exchange Act
of 1934 that are incorporated by reference in the registration statement.
</font></P>
	<blockquote>
		<P><font face="Times New Roman" size="2">2.&nbsp;&nbsp;&nbsp;&nbsp; That, for the purpose of determining any
liability under the Securities Act of 1933, each such post-effective amendment
shall be deemed to be a new registration statement relating to the securities
offered therein, and the offering of such securities at that time shall be
deemed to be the initial <I>bona fide</I> offering thereof.</font></P>
		<P><font face="Times New Roman" size="2">3.&nbsp;&nbsp;&nbsp;&nbsp; To remove from registration by means of a
post-effective amendment any of the securities being registered which remain
unsold at the termination of the offering.</font></P>
	</blockquote>
	<P><font face="Times New Roman" size="2">&nbsp;(b)&nbsp;&nbsp;&nbsp;&nbsp; The undersigned registrant hereby undertakes
that, for purposes of determining any liability under the Securities Act of
1933, each filing of the registrant's annual report pursuant to
Section&nbsp;13(a) or Section&nbsp;15(d) of the Securities Exchange Act of 1934
that is incorporated by reference in the registration statement shall be deemed
to be a new registration statement relating to the securities offered therein,
and the offering of such securities at that time shall be deemed to be the
initial <I>bona fide</I> offering thereof.</font></P>
	<P><font face="Times New Roman" size="2">&nbsp;(c)&nbsp;&nbsp;&nbsp;&nbsp; Insofar as indemnification for liabilities
arising under the Securities Act of 1933 may be permitted to directors, officers
and controlling persons of the registrant pursuant to the foregoing provisions,
or otherwise, the registrant has been advised that in the opinion of the
Securities and Exchange Commission such indemnification is against public policy
as expressed in the Securities Act of 1933 and is, therefore, unenforceable. In
the event that a claim for indemnification against such liabilities (other than
the payment by the registrant of expenses incurred or paid by a director,
officer or controlling person of the registrant in the successful defense of any
action, suit or proceeding) is asserted by such director, officer or controlling
person in connection with the securities being registered, the registrant will,
unless in the opinion of its counsel the matter has been settled by controlling
precedent, submit to a court of appropriate jurisdiction the question whether
such indemnification by it is against public policy as expressed in the
Securities Act of 1933 and will be governed by the final adjudication of such
issue. </font></P>
</blockquote>
<P><B><FONT size=2></FONT></B>&nbsp;</P>
<DIV class=MsoNormal style="TEXT-ALIGN: center" align=center><B>
<HR align=center width="100%" SIZE=2>
</B></DIV>
<P style="TEXT-ALIGN: center" align=center><br>
<B><FONT
size=2>SIGNATURES</FONT></B></P>
<P><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Pursuant to the requirements of the Securities Act of 1933, as amended, the
Registrant, Rudolph Technologies, Inc., a corporation organized and existing
under the laws of the State of Delaware, certifies that it has reasonable
grounds to believe that it meets all of the requirements for filing on Form S-8
and has duly caused this Registration Statement to be signed on its behalf by
the undersigned, thereunto duly authorized, in the City of Flanders, State of
New Jersey, on this 20th day of November, 2009.</font></P>
<P><FONT
size=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
RUDOLPH TECHNOLOGIES, INC.</FONT></P>
<P><FONT
size=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
By:<U> &nbsp;&nbsp; /s/ Paul F. McLaughlin
</U><BR>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
&nbsp;&nbsp; <STRONG>&nbsp;&nbsp; Paul F. McLaughlin,</STRONG></FONT><B><FONT
size=2><BR></FONT><STRONG><FONT
size=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Chairman and Chief Executive
Officer</FONT></STRONG></B></P>
<P><B><FONT size=2></FONT></B>&nbsp;</P>
<P style="TEXT-ALIGN: center" align=center><B><FONT size=2>POWER OF
ATTORNEY<br>
&nbsp;</FONT></B></P>
<P style="TEXT-ALIGN: left" align=center><FONT
face="Times New Roman" size=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; KNOW ALL PERSONS BY THESE PRESENTS, that the
undersigned officers and directors of Rudolph Technologies, Inc., a Delaware
corporation, do hereby constitute and appoint Paul F. McLaughlin and Steven R.
Roth, and each of them individually, the lawful attorneys-in-fact and agents,
each with full power of substitution or re-substitution, with full power and
authority to do any and all acts and things and to execute any and all
instruments which said attorneys-in-fact and agents, or either one of them,
determine may be necessary or advisable or required to enable said corporation
to comply with the Securities Act of 1933, as amended, and any rules or
regulation or requirements of the Securities and Exchange Commission in
connection with this Registration Statement. Without limiting the generality of
the foregoing power and authority, the powers granted include the power and
authority to sign the names of the undersigned officers and directors in the
capacities indicated below to this Registration Statement, to any and all
amendments, both pre-effective and post-effective, and supplements to this
Registration Statement and to any and all instruments or documents filed as part
of or in conjunction with this Registration Statement or amendments or
supplements thereto, and each of the undersigned hereby ratifies and confirms
all that said attorneys-in-fact and agents, or either one of them, shall do or
cause to be done by virtue hereof. This Power of Attorney may be signed in
several counterparts. </FONT></P>
<P style="TEXT-ALIGN: left" align=center><font face="Times New Roman" size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; IN WITNESS WHEREOF, each of the undersigned has
executed this Power of Attorney as of the date indicated. </font></P>
<P style="TEXT-ALIGN: left" align=center><font face="Times New Roman" size="2">&nbsp;&nbsp;&nbsp;
<B>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Pursuant to the requirements of the Securities
Act of 1933, this registration statement has been signed below by the following
persons in the capacities and on the dates indicated. </B></font></P>
<P style="MARGIN-TOP: 12px; MARGIN-BOTTOM: 0px; TEXT-INDENT: 4%">&nbsp;</P>
<DIV align=center>
<TABLE class=MsoNormalTable id=table4 style="WIDTH: 487.5pt" height=882
cellSpacing=0 cellPadding=0 width=650 border=0>

  <TR style="HEIGHT: 12.75pt">
    <TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 33%; PADDING-TOP: 6pt; HEIGHT: 12.75pt"
    width="33%">
      <P style="TEXT-ALIGN: center" align=center><B><U><FONT
      size=2>Signature</FONT></U></B></P></TD>
    <TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 38%; PADDING-TOP: 6pt; HEIGHT: 12.75pt"
    width="38%">
      <P style="TEXT-ALIGN: center" align=center><B><U><FONT
      size=2>Title</FONT></U></B></P></TD>
    <TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 29%; PADDING-TOP: 6pt; HEIGHT: 12.75pt"
    width="29%">
      <P style="TEXT-ALIGN: center" align=center><B><U><FONT
      size=2>Date</FONT></U></B></P></TD></TR>
  <TR style="HEIGHT: 23.25pt">
    <TD
    style="BORDER-RIGHT: medium none; PADDING-RIGHT: 6pt; BORDER-TOP: medium none; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; BORDER-LEFT: medium none; WIDTH: 33%; PADDING-TOP: 6pt; BORDER-BOTTOM: black 1pt solid; HEIGHT: 23.25pt"
    vAlign=bottom width="33%">
      <P class=MsoNormal><FONT size=2>/s/ Paul F. McLaughlin</FONT></P></TD>
    <TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 38%; PADDING-TOP: 6pt; HEIGHT: 23.25pt"
    width="38%" rowSpan=2>
      <P class=MsoNormal><FONT size=2>Chairman and Chief Executive Officer
      (Principal Executive Officer) </FONT></P>
      <P>&nbsp;</P></TD>
    <TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 29%; PADDING-TOP: 6pt; HEIGHT: 23.25pt"
    width="29%" rowSpan=2>
      <P class=MsoNormal><font size="2">November 20, 2009 </font></P>
      <P>&nbsp;</P></TD></TR>
  <TR style="HEIGHT: 27pt">
    <TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 33%; PADDING-TOP: 6pt; HEIGHT: 27pt"
    vAlign=top width="33%">
      <P class=MsoNormal><STRONG><FONT size=2>Paul F.
      McLaughlin</FONT></STRONG><B><FONT size=2><BR></FONT><STRONG><FONT
      size=2>&nbsp; </FONT></STRONG></B></P></TD></TR>
  <TR style="HEIGHT: 16.5pt">
    <TD
    style="BORDER-RIGHT: medium none; PADDING-RIGHT: 6pt; BORDER-TOP: medium none; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; BORDER-LEFT: medium none; WIDTH: 33%; PADDING-TOP: 6pt; BORDER-BOTTOM: black 1pt solid; HEIGHT: 16.5pt"
    vAlign=top width="33%">
      <P class=MsoNormal><FONT size=2>/s/ Steven R. Roth</FONT></P></TD>
    <TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 38%; PADDING-TOP: 6pt; HEIGHT: 16.5pt"
    width="38%" rowSpan=2>
      <P class=MsoNormal><FONT size=2>Senior Vice President &amp; Chief
      Financial Officer (Principal Financial and Accounting
    Officer)</FONT></P></TD>
    <TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 29%; PADDING-TOP: 6pt; HEIGHT: 16.5pt"
    width="29%" rowSpan=2>
      <P class=MsoNormal><font size="2">November 20, 2009</font></P>
      <P>&nbsp;</P></TD></TR>
  <TR style="HEIGHT: 27pt">
    <TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 33%; PADDING-TOP: 6pt; HEIGHT: 27pt"
    vAlign=top width="33%">
      <P class=MsoNormal><STRONG><FONT size=2>Steven R.
      Roth</FONT></STRONG><FONT size=2><BR>&nbsp; </FONT></P></TD></TR>
  <TR style="HEIGHT: 16.5pt">
    <TD
    style="BORDER-RIGHT: medium none; PADDING-RIGHT: 6pt; BORDER-TOP: medium none; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; BORDER-LEFT: medium none; WIDTH: 33%; PADDING-TOP: 6pt; BORDER-BOTTOM: black 1pt solid; HEIGHT: 16.5pt"
    width="33%">
      <P class=MsoNormal><FONT size=2>/s/ Leo Berlinghieri</FONT></P></TD>
    <TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 38%; PADDING-TOP: 6pt; HEIGHT: 16.5pt"
    width="38%" rowSpan=2>
      <P class=MsoNormal><FONT size=2>Director </FONT></P>
      <P>&nbsp;</P></TD>
    <TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 29%; PADDING-TOP: 6pt; HEIGHT: 16.5pt"
    width="29%" rowSpan=2>
      <P class=MsoNormal><FONT size=2>November 20, 2009&nbsp; </FONT></P>
      <P>&nbsp;</P></TD></TR>
  <TR style="HEIGHT: 27pt">
    <TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 33%; PADDING-TOP: 6pt; HEIGHT: 27pt"
    width="33%">
      <P class=MsoNormal><FONT
      size=2><strong>Leo Berlinghieri</strong><BR>&nbsp; </FONT></P></TD></TR>
  <TR style="HEIGHT: 16.5pt">
    <TD
    style="BORDER-RIGHT: medium none; PADDING-RIGHT: 6pt; BORDER-TOP: medium none; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; BORDER-LEFT: medium none; WIDTH: 33%; PADDING-TOP: 6pt; BORDER-BOTTOM: black 1pt solid; HEIGHT: 16.5pt"
    width="33%">
      <P class=MsoNormal><FONT size=2>/s/ Daniel H. Berry</FONT></P></TD>
    <TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 38%; PADDING-TOP: 6pt; HEIGHT: 16.5pt"
    width="38%" rowSpan=2>
      <P class=MsoNormal><FONT size=2>Director </FONT></P>
      <P>&nbsp;</P></TD>
    <TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 29%; PADDING-TOP: 6pt; HEIGHT: 16.5pt"
    width="29%" rowSpan=2>
      <P class=MsoNormal><font size="2">November 20, 2009&nbsp; </font></P>
      <P>&nbsp;</P></TD></TR>
  <TR style="HEIGHT: 27pt">
    <TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 33%; PADDING-TOP: 6pt; HEIGHT: 27pt"
    width="33%">
      <P class=MsoNormal><FONT
      size=2><strong>Daniel H. Berry</strong><BR>&nbsp; </FONT></P></TD></TR>
  <TR style="HEIGHT: 16.5pt">
    <TD
    style="BORDER-RIGHT: medium none; PADDING-RIGHT: 6pt; BORDER-TOP: medium none; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; BORDER-LEFT: medium none; WIDTH: 33%; PADDING-TOP: 6pt; BORDER-BOTTOM: black 1pt solid; HEIGHT: 16.5pt"
    width="33%">
      <P class=MsoNormal><FONT size=2>/s/ Thomas G. Greig</FONT></P></TD>
    <TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 38%; PADDING-TOP: 6pt; HEIGHT: 16.5pt"
    width="38%" rowSpan=2>
      <P class=MsoNormal><FONT size=2>Director </FONT></P>
      <P>&nbsp;</P></TD>
    <TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 29%; PADDING-TOP: 6pt; HEIGHT: 16.5pt"
    width="29%" rowSpan=2>
      <P class=MsoNormal><FONT size=2>November 20, 2009 </FONT></P>
      <P>&nbsp;</P></TD></TR>
  <TR style="HEIGHT: 27pt">
    <TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 33%; PADDING-TOP: 6pt; HEIGHT: 27pt"
    width="33%">
      <P class=MsoNormal><STRONG><FONT size=2>Thomas G.
      Greig</FONT></STRONG><FONT size=2><BR>&nbsp; </FONT></P></TD></TR>
  <TR style="HEIGHT: 15pt">
    <TD
    style="BORDER-RIGHT: medium none; PADDING-RIGHT: 6pt; BORDER-TOP: medium none; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; BORDER-LEFT: medium none; WIDTH: 33%; PADDING-TOP: 6pt; BORDER-BOTTOM: black 1pt solid; HEIGHT: 15pt"
    width="33%">
      <P class=MsoNormal><FONT size=2>/s/ Richard F. Spanier</FONT></P></TD>
    <TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 38%; PADDING-TOP: 6pt; HEIGHT: 15pt"
    width="38%" rowSpan=2>
      <P class=MsoNormal><FONT size=2>Director </FONT></P>
      <P>&nbsp;</P></TD>
    <TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 29%; PADDING-TOP: 6pt; HEIGHT: 15pt"
    width="29%" rowSpan=2>
      <P class=MsoNormal><FONT size=2>November 20, 2009&nbsp; </FONT></P>
      <P>&nbsp;</P></TD></TR>
  <TR style="HEIGHT: 27pt">
    <TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 33%; PADDING-TOP: 6pt; HEIGHT: 27pt"
    width="33%">
      <P class=MsoNormal><STRONG><FONT size=2>Richard F.
      Spanier</FONT></STRONG><FONT size=2><BR>&nbsp; </FONT></P></TD></TR>
  <TR style="HEIGHT: 16.5pt">
    <TD
    style="BORDER-RIGHT: medium none; PADDING-RIGHT: 6pt; BORDER-TOP: medium none; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; BORDER-LEFT: medium none; WIDTH: 33%; PADDING-TOP: 6pt; BORDER-BOTTOM: black 1pt solid; HEIGHT: 16.5pt"
    width="33%">
      <P class=MsoNormal><FONT size=2>/s/ Aubrey C. Tobey</FONT></P></TD>
    <TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 38%; PADDING-TOP: 6pt; HEIGHT: 16.5pt"
    width="38%" rowSpan=2>
      <P class=MsoNormal><FONT size=2>Director </FONT></P>
      <P>&nbsp;</P></TD>
    <TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 29%; PADDING-TOP: 6pt; HEIGHT: 16.5pt"
    width="29%" rowSpan=2>
      <P class=MsoNormal><FONT size=2>November 20, 2009&nbsp; </FONT></P>
      <P>&nbsp;</P></TD></TR>
  <TR style="HEIGHT: 24pt">
    <TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 33%; PADDING-TOP: 6pt; HEIGHT: 24pt"
    width="33%">
      <P class=MsoNormal><STRONG><FONT size=2>Aubrey C.
    Tobey</FONT></STRONG></P></TD></TR>
  <TR style="HEIGHT: 16.5pt">
    <TD
    style="BORDER-RIGHT: medium none; PADDING-RIGHT: 6pt; BORDER-TOP: medium none; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; BORDER-LEFT: medium none; WIDTH: 33%; PADDING-TOP: 6pt; BORDER-BOTTOM: black 1pt solid; HEIGHT: 16.5pt"
    width="33%">
      <P class=MsoNormal><FONT size=2>/s/ John R. Whitten</FONT></P></TD>
    <TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 38%; PADDING-TOP: 6pt; HEIGHT: 16.5pt"
    width="38%" rowSpan=2>
      <P class=MsoNormal><FONT size=2>Director </FONT></P>
      <P>&nbsp;</P></TD>
    <TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 29%; PADDING-TOP: 6pt; HEIGHT: 16.5pt"
    width="29%" rowSpan=2>
      <P class=MsoNormal><FONT size=2>November 20, 2009&nbsp; </FONT></P>
      <P>&nbsp;</P></TD></TR>
  <TR style="HEIGHT: 24pt">
    <TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 33%; PADDING-TOP: 6pt; HEIGHT: 24pt"
    width="33%">
      <P class=MsoNormal><STRONG><FONT size=2>John R.
    Whitten</FONT></STRONG></P></TD></TR>
 </TABLE></DIV>
<DIV class=MsoNormal style="TEXT-ALIGN: center" align=center>
<HR align=center width="100%" SIZE=2>
</DIV>
<P style="TEXT-ALIGN: center" align=center><B><FONT size=2><br>
INDEX TO
EXHIBITS</FONT></B></P>
<DIV align=left>
<blockquote>
	<TABLE class=MsoNormalTable id=table5 style="WIDTH: 427.5pt" cellSpacing=0
cellPadding=0 width=570 border=0>
		<TR>
			<TD
    style="BORDER-RIGHT: medium none; PADDING-RIGHT: 6pt; BORDER-TOP: medium none; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; BORDER-LEFT: medium none; WIDTH: 51pt; PADDING-TOP: 6pt; BORDER-BOTTOM: black 1pt solid"
    width=68>
			<P class=MsoNormal><B><FONT size=2>Exhibit Number</FONT></B></P>
			</TD>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 9pt; PADDING-TOP: 6pt"
    width=12>
			<P class=MsoNormal>&nbsp;</P></TD>
			<TD
    style="BORDER-RIGHT: medium none; PADDING-RIGHT: 6pt; BORDER-TOP: medium none; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; BORDER-LEFT: medium none; WIDTH: 331.5pt; PADDING-TOP: 6pt; BORDER-BOTTOM: black 1pt solid"
    width=442>
			<P class=MsoNormal>&nbsp;</P></TD>
		</TR>
		<TR>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 51pt; PADDING-TOP: 6pt"
    width=68>
			<P class=MsoNormal><FONT size=2>4.1(1) </FONT></P></TD>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 9pt; PADDING-TOP: 6pt"
    width=12>
			<P class=MsoNormal>&nbsp;</P></TD>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 331.5pt; PADDING-TOP: 6pt"
    width=442>
			<P class=MsoNormal><FONT size=2>Restated Certificate of Incorporation of
      Registrant </FONT></P></TD>
		</TR>
		<TR>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 51pt; PADDING-TOP: 6pt"
    width=68>
			<P class=MsoNormal><FONT size=2>4.2(2)</FONT></P></TD>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 9pt; PADDING-TOP: 6pt"
    width=12>
			<P class=MsoNormal>&nbsp;</P></TD>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 331.5pt; PADDING-TOP: 6pt"
    width=442>
			<P class=MsoNormal><FONT size=2>Restated Bylaws of
  Registrant</FONT></P></TD>
		</TR>
		<TR>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 51pt; PADDING-TOP: 6pt"
    width=68>
			<P class=MsoNormal><FONT size=2>4.3(3)</FONT></P></TD>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 9pt; PADDING-TOP: 6pt"
    width=12>
			<P class=MsoNormal>&nbsp;</P></TD>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 331.5pt; PADDING-TOP: 6pt"
    width=442>
			<P class=MsoNormal><FONT size=2>Rights Agreement</FONT></P></TD>
		</TR>
		<TR>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 51pt; PADDING-TOP: 6pt"
    width=68>
			<P class=MsoNormal><FONT size=2>5.1<BR>&nbsp; </FONT></P></TD>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 9pt; PADDING-TOP: 6pt"
    width=12>
			<P class=MsoNormal>&nbsp;</P></TD>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 331.5pt; PADDING-TOP: 6pt"
    width=442>
			<P class=MsoNormal><FONT size=2>Opinion of Day Pitney LLP, as to
      legality of securities being registered</FONT></P></TD>
		</TR>
		<TR>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 51pt; PADDING-TOP: 6pt"
    width=68>
			<P class=MsoNormal><FONT size=2>10.1(4)</FONT></P></TD>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 9pt; PADDING-TOP: 6pt"
    width=12>
			<P class=MsoNormal>&nbsp;</P></TD>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 331.5pt; PADDING-TOP: 6pt"
    width=442>
			<P class=MsoNormal><font size="2">Rudolph Technologies, Inc. 2009 Stock Plan</font></P>
			</TD>
		</TR>
		<TR>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 51pt; PADDING-TOP: 6pt"
    width=68>
			<P class=MsoNormal><FONT size=2>10.2(5)</FONT></P></TD>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 9pt; PADDING-TOP: 6pt"
    width=12>
			<P class=MsoNormal>&nbsp;</P></TD>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 331.5pt; PADDING-TOP: 6pt"
    width=442>
			<P class=MsoNormal><FONT size=2>Rudolph Technologies, Inc. 2009 Employee Stock Purchase Plan</FONT></P>
			</TD>
		</TR>
		<tr>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 51pt; PADDING-TOP: 6pt"
    width=68>
			<P class=MsoNormal><FONT size=2>23.1</FONT></P></TD>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 9pt; PADDING-TOP: 6pt"
    width=12>
			<P class=MsoNormal>&nbsp;</P></TD>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 331.5pt; PADDING-TOP: 6pt"
    width=442>
			<P class=MsoNormal><FONT size=2>Consent of KPMG LLP, independent
      registered public accounting firm</FONT></P></TD>
		</tr>
		<TR>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 51pt; PADDING-TOP: 6pt"
    width=68>
			<P class=MsoNormal><FONT size=2>23.2</FONT></P></TD>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 9pt; PADDING-TOP: 6pt"
    width=12>
			<P class=MsoNormal>&nbsp;</P></TD>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 331.5pt; PADDING-TOP: 6pt"
    width=442>
			<P class=MsoNormal><FONT size=2>Consent of Ernst &amp; Young LLP, independent
      registered public accounting firm</FONT></P></TD>
		</TR>
		<TR>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 51pt; PADDING-TOP: 6pt"
    width=68>
			<P class=MsoNormal><FONT size=2>23.3</FONT></P></TD>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 9pt; PADDING-TOP: 6pt"
    width=12>
			<P class=MsoNormal>&nbsp;</P></TD>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 331.5pt; PADDING-TOP: 6pt"
    width=442>
			<P class=MsoNormal><FONT size=2>Consent of Day Pitney LLP
      (contained in Exhibit 5.1)</FONT></P></TD>
		</TR>
		<TR>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 51pt; PADDING-TOP: 6pt"
    width=68>
			<P class=MsoNormal><FONT size=2>24.1</FONT></P></TD>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 9pt; PADDING-TOP: 6pt"
    width=12>
			<P class=MsoNormal>&nbsp;</P></TD>
			<TD
    style="PADDING-RIGHT: 6pt; PADDING-LEFT: 6pt; PADDING-BOTTOM: 6pt; WIDTH: 331.5pt; PADDING-TOP: 6pt"
    width=442>
			<P class=MsoNormal><FONT size=2>Power of Attorney </FONT>
			<FONT
      face="Times New Roman" size=2>(included on signature page of the
      Registration Statement hereto)</FONT></P></TD>
		</TR>
	</TABLE>
</blockquote>
<P><U><FONT
size=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
</FONT></U></P></DIV>
<P><FONT size=2>(1)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Exhibit 4.1 is
incorporated by reference to Exhibit 3.1(c) filed with the Registrant's
Registration Statement on Form S-1 as amended, No. 333-86821, filed with the SEC
on September 9, 1999.</FONT></P>
<P><FONT size=2>(2)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Exhibit 4.2 is
incorporated by reference to Exhibit 3.1 filed with the Registrant's
Registration Statement on Form 8-K, filed with the SEC on February 2, 2009.</FONT></P>
<P><FONT size=2>(3)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Exhibit 4.3
incorporated by reference to Exhibit 4.1 of the Registrant's Registration
Statement on Form 8-A, filed with the SEC on June 28, 2005.</FONT></P>
<P><FONT size=2>(4)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Exhibit 10.1 is
incorporated by reference to Appendix A of the Registrant's revised Proxy
Statement on Form DEFR14A, filed with the Commission May 8, 2009.</FONT></P>
<P><FONT size=2>(5)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Exhibit 10.2 is incorporated by reference to
Appendix B of the Registrant's revised Proxy Statement on Form DEFR14A, filed with the
Commission May 8, 2009.</FONT></P>
<P><B><FONT size=2></FONT></B>&nbsp;&nbsp;</P>
<DIV class=MsoNormal style="TEXT-ALIGN: center" align=center><B>
<HR align=center width="100%" SIZE=2>
</B></DIV>
<P style="TEXT-ALIGN: right" align=right><B><FONT size=2><br>
EXHIBIT
5.1</FONT></B></P>
<p><font size="2">November 20 , 2009 </font>
</p>
<p><font size="2">Rudolph Technologies, Inc.<br>
One Rudolph Road<br>
P.O. Box 1000<br>
Flanders, NJ 07836
 </font>
 </p>
<p><font size="2">RE:&nbsp;&nbsp;&nbsp; Rudolph
		Technologies, Inc. - Registration Statement on Form S-8</td>
	</tr>

</font>
</p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
We refer to the
Registration Statement on Form S-8 (the &quot;Registration Statement&quot;) to be filed by
Rudolph Technologies, Inc.,
a Delaware corporation (the &quot;Company&quot;), with the Securities and Exchange
Commission in connection with the registration under the Securities Act of 1933,
as amended (the &quot;Act&quot;), of 3,600,000 shares of the Company's common stock,
$0.001 par value per share (the &quot;Securities&quot;), to be offered pursuant to the
Rudolph Technologies, Inc. 2009 Stock Plan, as amended (the &quot;2009 Stock Plan&quot;),
and the Rudolph Technologies, Inc. 2009 Employee Stock Purchase Plan, as amended
(the &quot;2009 ESPP&quot;).&nbsp; The 2009 Stock Plan and the 2009 ESPP are referred to herein
together as the &quot;Plans&quot;.</font></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
In connection with our
opinion, we have examined the Plans and the Registration Statement.&nbsp; We have
also examined originals, or copies certified or otherwise identified to our
satisfaction, of the Restated Certificate of Incorporation and the Restated
Bylaws of the Company, each as amended and currently in effect, and relevant
resolutions of the Board of Directors of the Company and we have examined such
other documents as we deemed necessary in order to express the opinion
hereinafter set forth.</font></p>
</p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
In our examination of such
documents and records, we have assumed the genuineness of all signatures, the
authenticity of all documents submitted to us as originals, and the conformity
with authentic original documents of all of the documents submitted to us as
copies.</font></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
It is understood that this
opinion is to be used only in connection with the offer and sale of the
Securities while the Registration Statement is in effect.</font></p>
<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
Based upon the foregoing, we
are of the opinion that, when the Registration Statement has become effective
under the Act, and the Securities have been duly issued as contemplated by the
Registration Statement and the Plans and for the consideration determined in
accordance with the terms of the Plans, the Securities will be validly issued,
fully paid and nonassessable.&nbsp;&nbsp; </font> </p>
</p>

<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;

The foregoing opinion is
limited to the Federal laws of the United States and the General Corporation Law
of the State of Delaware, and we express no opinion as to the effect of the laws
of any other jurisdiction.&nbsp; In this connection, we hereby confirm that the
foregoing reference to the General Corporation Law of the State of Delaware
includes the statutory provisions and also all applicable provisions of the
Delaware Constitution and reported judicial decisions interpreting these laws.</font></p>
</p>

<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;

This opinion letter is being
delivered by us solely for your benefit pursuant to the requirements of Item
601(b)(5) of Regulation S-K under the Act.&nbsp; We hereby consent to use of this
opinion as an exhibit to the Registration Statement.&nbsp; In giving such consent, we
do not thereby admit that we come within the category of persons whose consent
is required under Section 7 of the Act, or the Rules and Regulations of the
Securities and Exchange Commission thereunder.</font></p>
</p>
<p class="MsoSignature" style="margin-top:0in">
&nbsp;</p>
<p class="MsoSignature" style="margin-top:0in">
<font size="2">Very truly yours,</font></p>
<p class="MsoSignature" style="margin-top:0in">
<font size="2">/s/ Day Pitney LLP</font></p>
<p class="MsoSignature" style="margin-top:0in">
&nbsp;</p>
<b></b>
<DIV class=MsoNormal style="TEXT-ALIGN: center" align=center>
<HR align=center width="100%" SIZE=2>
</DIV>
<P style="TEXT-ALIGN: right" align=right><B><FONT size=2>EXHIBIT
23.1</FONT></B></P>
<P style="TEXT-ALIGN: center" align=center>&nbsp;</P>
<P style="TEXT-ALIGN: center" align=center>&nbsp;</P>
<P style="TEXT-ALIGN: center" align=center><STRONG><FONT size=2>CONSENT OF
INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM</FONT></STRONG></P>
<p>&nbsp;</p>
<p>&nbsp;</p>
<p><font size="2">The Board of Directors <br>
Rudolph Technologies, Inc.: </font></p>
<p><font size="2">We consent to the incorporation by reference in the
registration statement on Form S-8 of Rudolph Technologies, Inc. expected to be dated November
20, 2009 of our report dated March 3, 2008, with respect to the consolidated
balance sheet of Rudolph Technologies, Inc. and subsidiaries as of December 31,
2007 and the related consolidated statements of operations, stockholders' equity
and comprehensive income (loss), and cash flows for each of the years in the
two-year period ended December 31, 2007, and the related consolidated financial
statement schedule. </font></p>
<p><font size="2">Our report with respect to the consolidated balance sheet of
Rudolph Technologies, Inc. and subsidiaries as of December 31, 2007 and the
related consolidated statements of operations, stockholders' equity and
comprehensive income (loss), and cash flows for each of the years in the
two-year period ended December 31, 2007, and the related consolidated financial
statement schedule, dated March 3, 2008 refers to Rudolph Technologies, Inc.'s
adoption of Financial Accounting Standards Board Interpretation No. 48,
"Accounting for Uncertainties in Income Taxes", effective January 1, 2007, and
Statement of Financial Accounting Standards No. 123(R), "Share-Based Payment",
effective January 1, 2006.</font></p>
<p><font size="2">/s/ KPMG LLP<br>
Short Hills, New Jersey<br>
November 19, 2009</font></p>
<P class=letterbody style="TEXT-ALIGN: justify">&nbsp;</P>
<p class="MsoSignature" style="margin-top:0in">
&nbsp;</p>
<DIV class=MsoNormal style="TEXT-ALIGN: center" align=center>
<HR align=center width="100%" SIZE=2>
</DIV>
<P style="TEXT-ALIGN: right" align=right><B><FONT size=2>EXHIBIT
23.</FONT></B><font size="2"><b>2</b></font></P>
<P style="TEXT-ALIGN: center" align=center>&nbsp;</P>
<P style="TEXT-ALIGN: center" align=center>&nbsp;</P>
<P style="TEXT-ALIGN: center" align=center><STRONG><FONT size=2>CONSENT OF
INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM</FONT></STRONG></P>
<p>&nbsp;</p>
<p><font size="2">We consent to the incorporation by reference in the
Registration Statement on Form S-8 pertaining to the Rudolph Technologies, Inc.
2009 Stock Plan and the Rudolph Technologies, Inc. 2009 Employee Stock Purchase
Plan of our reports dated March 5, 2009, with respect to the consolidated
financial statements and schedule of Rudolph Technologies, Inc. in its Annual
Report (Form 10-K) for the year ended December 31, 2008, and the effectiveness
of internal control over financial reporting of Rudolph Technologies, Inc. filed
with the Securities and Exchange Commission.</font></p>
<P><font size="2">/s/ Ernst &amp; Young LLP<BR>Metropark, New Jersey<BR>November
19, 2009
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As filed with the
Securities and Exchange Commission on November 20, 2009
Registration No.
333-_____________
UNITED STATES
SECURITIES AND EXCHANGE
    COMMISSION
Washington, D.C. 20549
FORM S-8
REGISTRATION STATEMENT
Under
THE SECURITIES ACT OF 1933
RUDOLPH TECHNOLOGIES, INC.
(Exact name of Registrant as specified in its
  charter)
Delaware
22-3531208
(State of Incorporation)
(I.R.S. Employer Identification Number)
One Rudolph Road,
      PO Box 1000
Flanders, NJ 07836
973-691-1300
(Address,
      including zip code, and telephone number,
including area code of
      registrant's principal executive offices)
RUDOLPH
TECHNOLOGIES, INC. 2009
STOCK
PLAN
RUDOLPH TECHNOLOGIES, INC. 2009 EMPLOYEE STOCK PURCHASE
PLAN
(Full title of the Plans)
PAUL F.
      McLAUGHLIN
Chairman and Chief Executive Officer
RUDOLPH
      TECHNOLOGIES, INC.
One Rudolph Road, PO Box 1000
Flanders, NJ
      07836
(973) 691-1300
(Name, address including zip code, and
      telephone number, including area code, of agent for
  service)
Indicate by check mark whether the Registrant is a large
accelerated filer, an accelerated filer, a non-accelerated filer, or a smaller
reporting company.  See the definitions of  "large accelerated filer,"
"accelerated filer" and "smaller reporting company" in Rule 12b-2 of the
Exchange Act.
Large
accelerated filer  [ 
]                                                                                           
Accelerated filer
[X]
Non-accelerated filer [  ] (Do not check if smaller reporting
company)               
Smaller reporting company [  ]
CALCULATION OF
REGISTRATION FEE
Title of Securities to be Registered
Amount to be Registered (1)
Proposed Maximum Offering Price Per Share
Proposed Maximum Aggregate Offering Price
Amount of Registration Fee
Common Stock $0.001 par value, to be
      issued under the Rudolph Technologies, Inc. 2009 Stock Plan
3,300,000 (2)
$6.57  (4)
$21,681,000.00
$1,209.80
Common Stock $0.001 par value, to be
      issued under the 2009 Employee Stock Purchase Plan
300,000 (3)
$6.57  (4)
$1,971,000.00
$109.98
Total
3,600,000
$23,652,000.00
$1,319.78
(1)
Pursuant to Rule 416(a) under the Securities Act of 1933, as amended
			(the "Securities Act"), this Registration Statement on Form S-8
			(this "Registration Statement") shall also cover any additional
			shares of Common Stock, par value $0.001 per share (the "Common
			Stock"), of Rudolph Technologies, Inc. (the "Registrant") which
			become issuable under the Rudolph Technologies, Inc. 2009 Stock Plan,
			as amended
			(the "2009
Stock
Plan
"), and
			the Rudolph Technologies, Inc. 2009 Employee Stock Purchase Plan, as
			amended
			(the "2009 ESPP"), by reason of any stock dividend, stock split,
			recapitalization or other similar transaction effected without the
			Registrant's receipt of consideration which results in an increase
			in the number of outstanding shares of the Registrant's Common
			Stock.
(2)
Represents the aggregate number of shares of Common Stock of the
			Registrant available for issuance under the
2009
Stock
Plan
.
(3)
Represents the aggregate number of shares of Common Stock of the
			Registrant available for issuance under the 2009 ESPP.
(4)
Estimated in accordance with Rule 457(c) and Rule 457(h) under the
			Securities Act solely for the purpose of calculating the
			registration fee of shares of the Registrant's Common Stock reserved
			for future issuance under the
2009
Stock
Plan
and 2009 ESPP. The computation is based
			on the average of the high and low prices of the Registrant's Common
			Stock as reported on NASDAQ Global Select Market on November 16,
			2009.
PART I
Item 1.
Plan
Information*
Item 2.
Registrant Information and
Employee Plan Annual Information*
*Information required by Part I to be contained in the Section
10(a) prospectus is omitted from this registration statement in accordance with
Rule 428 under the Securities Act and the Note to Part I of Form S-8.
PART
II
INFORMATION REQUIRED
IN THE REGISTRATION STATEMENT
Item 3
.
Incorporation of Documents by Reference
The
following documents and information heretofore filed with the Securities and
Exchange Commission (the "Commission") are hereby incorporated by
reference:
The Registrant's Annual Report on Form 10-K for the fiscal year
ended December 31, 2008, filed on March 6, 2009.
The Registrant's Quarterly Reports on Form 10-Q for the quarters ended March 31,
2009, June 30, 2009 and September 30, 2009, filed with the Commission on May 8, 2009, August 7, 2009
	and November 6, 2009, respectively.
The Registrant's Current Reports on Form 8-K filed with
the Commission on August 4, 2009, August 6, 2009 and August 24,
2009, and all other reports filed pursuant to Section 13(a) or 15(d) of the
Securities Exchange Act of 1934, as amended (the "Exchange Act") since the end
of the fiscal year covered by the Registrant's latest Annual Report referred to
	above, provided that any portions of such reports that are deemed furnished
	and not filed pursuant to the instructions to Form 8-K shall not be
	incorporated by reference into this Registration Statement.
The description of
the Common Stock of the Registrant contained in the Registrant's Registration
Statement on Form 8-A filed on November 5, 1999, pursuant to Section 12 of the
	Exchange Act.
The description of common stock purchase rights contained
	in the Registration Statement on Form 8-A filed June 28, 2005 and including
	any amendment or report filed for the purpose of updating such description.
All documents
subsequently filed by the Registrant pursuant to Sections 13(a), 13(c), 14 and
15(d) of the Exchange Act, prior to the filing of a post-effective amendment
which indicates that all securities registered hereby have been sold or which
deregisters all securities then remaining unsold, shall be deemed to be
incorporated by reference in this Registration Statement and to be part hereof
from the date of filing such documents. Any statement contained herein or in a
document incorporated or deemed to be incorporated by reference herein shall be
deemed to be modified or superseded for purposes of this Registration Statement
to the extent that a statement contained herein or in any other subsequently
filed document which also is or is deemed to be incorporated by reference herein
modifies or supersedes such statement.  Any such statement so modified or
superseded shall not be deemed, except as so modified or superseded, to
constitute a part of this Registration Statement.
Item 4
.
Description of Securities
Not
applicable.
Item 5
.
Interests of Named Experts and Counsel
Not
applicable.
Item 6
.
Indemnification of Directors and Officers
The
Registrant's certificate of incorporation contains certain provisions permitted
under the Delaware General Corporation Law relating to the liability of
directors. Under Delaware law, these provisions eliminate a director's personal liability for
monetary damages resulting from a breach of fiduciary duty, except in certain
circumstances involving certain wrongful acts, including: (i) for any breach of
the director's duty of loyalty to the corporation or its stockholders, (ii) for
acts or omissions not in good faith or that involve intentional misconduct or a
knowing violation of law, (iii) for unlawful payments of dividends or unlawful
stock repurchases or redemptions as provided in Section 174 of the Delaware
General Corporation Law, or (iv) for any transaction from which the director
derived an improper personal benefit.
The
Registrant's Bylaws provide that the Registrant shall indemnify its directors
and officers and may indemnify its employees and other agents to the fullest
extent permitted by law. The Registrant's Bylaws also permit the Registrant to
secure insurance on behalf of any officer, director, employee or other agent for
any liability arising out of his or her actions in such capacity, regardless of
whether the Registrant would have the power to indemnify him or her against such
liability under the General Corporation Law of Delaware.
The
Registrant has entered into agreements to indemnify its directors and officers,
in addition to indemnification provided for in the Registrant's Bylaws. Subject
to certain conditions, these agreements, among other things, indemnify the
Registrant's directors and officers for certain expenses (including attorney's
fees), judgments, fines and settlement amounts incurred by any such person in
any action or proceeding, including any action by or in the right of the
Registrant, arising out of such person's services as a director or officer of
the Registrant. The Registrant maintains an insurance policy covering its
officers and directors with respect to certain liabilities, including
liabilities arising under the Securities Act or otherwise.
Item 7
.
Exemption from Registration Claimed
Not
applicable.
Item 8
.
Exhibits
4.1(1)          Restated
Certificate of Incorporation of Registrant
4.2(2)          Restated Bylaws of
Registrant
4.3(3)
         Rights Agreement
5.1             
Opinion of Day Pitney LLP, as to legality of securities being
registered
10.1(4)       Rudolph Technologies, Inc. 2009 Stock Plan
10.2(5)        Rudolph Technologies,
Inc. 2009 Employee Stock
Purchase Plan
23.1
            Consent of
KPMG LLP, independent registered public accounting firm
23.2
            Consent of
Ernst & Young LLP, independent registered public accounting firm
23.3            
Consent of Day Pitney LLP (contained in Exhibit 5.1).
24.1
            Power of
Attorney
(included on signature page
of the Registration Statement hereto)
(1)     Exhibit 4.1 is incorporated by reference to Exhibit 3.1(c)
filed with the Registrant's Registration Statement on Form S-1as amended, No.
333-86821, filed with the SEC on September 9, 1999.
(2)     Exhibit 4.2 is incorporated by reference to Exhibit 3.1
filed with the Registrant's Registration Statement on Form 8-K, filed with the
SEC on February 2, 2009.
(3)     Exhibit 4.3 incorporated by reference to Exhibit 4.1 of the
Registrant's Registration Statement on Form 8-A, filed with the SEC on June 28,
2005.
(4)     Exhibit 10.1 is incorporated by reference to Appendix A of the Registrant's
revised Proxy Statement on Form DEFR14A, filed with the Commission May 8, 2009.
(5)     Exhibit 10.2 is incorporated by reference to Appendix B of the Registrant's
revised Proxy Statement on Form DEFR14A, filed with the Commission May 8, 2009.
Item 9
.
Undertakings
(a)     The undersigned registrant hereby undertakes:
1.     To file, during any period in which offers or
sales are being made, a post-effective amendment to this registration statement:
(i)     To include any prospectus required by
Section 10(a)(3) of the Securities Act of 1933;
(ii)     To reflect in the prospectus any facts or
events arising after the effective date of the registration statement (or the
most recent post-effective amendment thereof) which, individually or in the
aggregate, represent a fundamental change in the information set forth in the
registration statement. Notwithstanding the foregoing, any increase or decrease
in volume of securities offered (if the total dollar value of securities offered
would not exceed that which was registered) and any deviation from the low or
high end of the estimated maximum offering range may be reflected in the form of
prospectus filed with the Commission pursuant to Rule 424(b) if, in the
aggregate, the changes in volume and price represent no more than a 20 percent
change in the maximum aggregate offering price set forth in the "Calculation of
Registration Fee" table in the effective registration statement; and
(iii)     To include any material information with
respect to the plan of distribution not previously disclosed in the registration
statement or any material change to such information in the registration
statement;
provided, however
, that paragraphs
(a)(1)(i) and (a)(1)(ii) of this section do not apply if the information
required to be included in a post-effective amendment by those paragraphs is
contained in reports filed with or furnished to the Commission by the registrant
pursuant to Section 13 or Section 15(d) of the Securities Exchange Act
of 1934 that are incorporated by reference in the registration statement.
2.     That, for the purpose of determining any
liability under the Securities Act of 1933, each such post-effective amendment
shall be deemed to be a new registration statement relating to the securities
offered therein, and the offering of such securities at that time shall be
deemed to be the initial
bona fide
offering thereof.
3.     To remove from registration by means of a
post-effective amendment any of the securities being registered which remain
unsold at the termination of the offering.
(b)     The undersigned registrant hereby undertakes
that, for purposes of determining any liability under the Securities Act of
1933, each filing of the registrant's annual report pursuant to
Section 13(a) or Section 15(d) of the Securities Exchange Act of 1934
that is incorporated by reference in the registration statement shall be deemed
to be a new registration statement relating to the securities offered therein,
and the offering of such securities at that time shall be deemed to be the
initial
bona fide
offering thereof.
(c)     Insofar as indemnification for liabilities
arising under the Securities Act of 1933 may be permitted to directors, officers
and controlling persons of the registrant pursuant to the foregoing provisions,
or otherwise, the registrant has been advised that in the opinion of the
Securities and Exchange Commission such indemnification is against public policy
as expressed in the Securities Act of 1933 and is, therefore, unenforceable. In
the event that a claim for indemnification against such liabilities (other than
the payment by the registrant of expenses incurred or paid by a director,
officer or controlling person of the registrant in the successful defense of any
action, suit or proceeding) is asserted by such director, officer or controlling
person in connection with the securities being registered, the registrant will,
unless in the opinion of its counsel the matter has been settled by controlling
precedent, submit to a court of appropriate jurisdiction the question whether
such indemnification by it is against public policy as expressed in the
Securities Act of 1933 and will be governed by the final adjudication of such
issue.
SIGNATURES
Pursuant to the requirements of the Securities Act of 1933, as amended, the
Registrant, Rudolph Technologies, Inc., a corporation organized and existing
under the laws of the State of Delaware, certifies that it has reasonable
grounds to believe that it meets all of the requirements for filing on Form S-8
and has duly caused this Registration Statement to be signed on its behalf by
the undersigned, thereunto duly authorized, in the City of Flanders, State of
New Jersey, on this 20th day of November, 2009.
RUDOLPH TECHNOLOGIES, INC.
By:
/s/ Paul F. McLaughlin
Paul F. McLaughlin,
Chairman and Chief Executive
Officer
POWER OF
ATTORNEY
KNOW ALL PERSONS BY THESE PRESENTS, that the
undersigned officers and directors of Rudolph Technologies, Inc., a Delaware
corporation, do hereby constitute and appoint Paul F. McLaughlin and Steven R.
Roth, and each of them individually, the lawful attorneys-in-fact and agents,
each with full power of substitution or re-substitution, with full power and
authority to do any and all acts and things and to execute any and all
instruments which said attorneys-in-fact and agents, or either one of them,
determine may be necessary or advisable or required to enable said corporation
to comply with the Securities Act of 1933, as amended, and any rules or
regulation or requirements of the Securities and Exchange Commission in
connection with this Registration Statement. Without limiting the generality of
the foregoing power and authority, the powers granted include the power and
authority to sign the names of the undersigned officers and directors in the
capacities indicated below to this Registration Statement, to any and all
amendments, both pre-effective and post-effective, and supplements to this
Registration Statement and to any and all instruments or documents filed as part
of or in conjunction with this Registration Statement or amendments or
supplements thereto, and each of the undersigned hereby ratifies and confirms
all that said attorneys-in-fact and agents, or either one of them, shall do or
cause to be done by virtue hereof. This Power of Attorney may be signed in
several counterparts.
IN WITNESS WHEREOF, each of the undersigned has
executed this Power of Attorney as of the date indicated.
Pursuant to the requirements of the Securities
Act of 1933, this registration statement has been signed below by the following
persons in the capacities and on the dates indicated.
Signature
Title
Date
/s/ Paul F. McLaughlin
Chairman and Chief Executive Officer
      (Principal Executive Officer)
November 20, 2009
Paul F.
      McLaughlin
/s/ Steven R. Roth
Senior Vice President & Chief
      Financial Officer (Principal Financial and Accounting
    Officer)
November 20, 2009
Steven R.
      Roth
/s/ Leo Berlinghieri
Director
November 20, 2009
Leo Berlinghieri
/s/ Daniel H. Berry
Director
November 20, 2009
Daniel H. Berry
/s/ Thomas G. Greig
Director
November 20, 2009
Thomas G.
      Greig
/s/ Richard F. Spanier
Director
November 20, 2009
Richard F.
      Spanier
/s/ Aubrey C. Tobey
Director
November 20, 2009
Aubrey C.
    Tobey
/s/ John R. Whitten
Director
November 20, 2009
John R.
    Whitten
INDEX TO
EXHIBITS
Exhibit Number
4.1(1)
Restated Certificate of Incorporation of
      Registrant
4.2(2)
Restated Bylaws of
  Registrant
4.3(3)
Rights Agreement
5.1
Opinion of Day Pitney LLP, as to
      legality of securities being registered
10.1(4)
Rudolph Technologies, Inc. 2009 Stock Plan
10.2(5)
Rudolph Technologies, Inc. 2009 Employee Stock Purchase Plan
23.1
Consent of KPMG LLP, independent
      registered public accounting firm
23.2
Consent of Ernst & Young LLP, independent
      registered public accounting firm
23.3
Consent of Day Pitney LLP
      (contained in Exhibit 5.1)
24.1
Power of Attorney
(included on signature page of the
      Registration Statement hereto)
(1)        Exhibit 4.1 is
incorporated by reference to Exhibit 3.1(c) filed with the Registrant's
Registration Statement on Form S-1 as amended, No. 333-86821, filed with the SEC
on September 9, 1999.
(2)        Exhibit 4.2 is
incorporated by reference to Exhibit 3.1 filed with the Registrant's
Registration Statement on Form 8-K, filed with the SEC on February 2, 2009.
(3)        Exhibit 4.3
incorporated by reference to Exhibit 4.1 of the Registrant's Registration
Statement on Form 8-A, filed with the SEC on June 28, 2005.
(4)        Exhibit 10.1 is
incorporated by reference to Appendix A of the Registrant's revised Proxy
Statement on Form DEFR14A, filed with the Commission May 8, 2009.
(5)        Exhibit 10.2 is incorporated by reference to
Appendix B of the Registrant's revised Proxy Statement on Form DEFR14A, filed with the
Commission May 8, 2009.
EXHIBIT
5.1
November 20 , 2009
Rudolph Technologies, Inc.
One Rudolph Road
P.O. Box 1000
Flanders, NJ 07836
RE:    Rudolph
		Technologies, Inc. - Registration Statement on Form S-8
We refer to the
Registration Statement on Form S-8 (the "Registration Statement") to be filed by
Rudolph Technologies, Inc.,
a Delaware corporation (the "Company"), with the Securities and Exchange
Commission in connection with the registration under the Securities Act of 1933,
as amended (the "Act"), of 3,600,000 shares of the Company's common stock,
$0.001 par value per share (the "Securities"), to be offered pursuant to the
Rudolph Technologies, Inc. 2009 Stock Plan, as amended (the "2009 Stock Plan"),
and the Rudolph Technologies, Inc. 2009 Employee Stock Purchase Plan, as amended
(the "2009 ESPP").  The 2009 Stock Plan and the 2009 ESPP are referred to herein
together as the "Plans".
In connection with our
opinion, we have examined the Plans and the Registration Statement.  We have
also examined originals, or copies certified or otherwise identified to our
satisfaction, of the Restated Certificate of Incorporation and the Restated
Bylaws of the Company, each as amended and currently in effect, and relevant
resolutions of the Board of Directors of the Company and we have examined such
other documents as we deemed necessary in order to express the opinion
hereinafter set forth.
In our examination of such
documents and records, we have assumed the genuineness of all signatures, the
authenticity of all documents submitted to us as originals, and the conformity
with authentic original documents of all of the documents submitted to us as
copies.
It is understood that this
opinion is to be used only in connection with the offer and sale of the
Securities while the Registration Statement is in effect.
Based upon the foregoing, we
are of the opinion that, when the Registration Statement has become effective
under the Act, and the Securities have been duly issued as contemplated by the
Registration Statement and the Plans and for the consideration determined in
accordance with the terms of the Plans, the Securities will be validly issued,
fully paid and nonassessable.
The foregoing opinion is
limited to the Federal laws of the United States and the General Corporation Law
of the State of Delaware, and we express no opinion as to the effect of the laws
of any other jurisdiction.  In this connection, we hereby confirm that the
foregoing reference to the General Corporation Law of the State of Delaware
includes the statutory provisions and also all applicable provisions of the
Delaware Constitution and reported judicial decisions interpreting these laws.
This opinion letter is being
delivered by us solely for your benefit pursuant to the requirements of Item
601(b)(5) of Regulation S-K under the Act.  We hereby consent to use of this
opinion as an exhibit to the Registration Statement.  In giving such consent, we
do not thereby admit that we come within the category of persons whose consent
is required under Section 7 of the Act, or the Rules and Regulations of the
Securities and Exchange Commission thereunder.
Very truly yours,
/s/ Day Pitney LLP
EXHIBIT
23.1
CONSENT OF
INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
The Board of Directors
Rudolph Technologies, Inc.:
We consent to the incorporation by reference in the
registration statement on Form S-8 of Rudolph Technologies, Inc. expected to be dated November
20, 2009 of our report dated March 3, 2008, with respect to the consolidated
balance sheet of Rudolph Technologies, Inc. and subsidiaries as of December 31,
2007 and the related consolidated statements of operations, stockholders' equity
and comprehensive income (loss), and cash flows for each of the years in the
two-year period ended December 31, 2007, and the related consolidated financial
statement schedule.
Our report with respect to the consolidated balance sheet of
Rudolph Technologies, Inc. and subsidiaries as of December 31, 2007 and the
related consolidated statements of operations, stockholders' equity and
comprehensive income (loss), and cash flows for each of the years in the
two-year period ended December 31, 2007, and the related consolidated financial
statement schedule, dated March 3, 2008 refers to Rudolph Technologies, Inc.'s
adoption of Financial Accounting Standards Board Interpretation No. 48,
"Accounting for Uncertainties in Income Taxes", effective January 1, 2007, and
Statement of Financial Accounting Standards No. 123(R), "Share-Based Payment",
effective January 1, 2006.
/s/ KPMG LLP
Short Hills, New Jersey
November 19, 2009
EXHIBIT
23.
2
CONSENT OF
INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
We consent to the incorporation by reference in the
Registration Statement on Form S-8 pertaining to the Rudolph Technologies, Inc.
2009 Stock Plan and the Rudolph Technologies, Inc. 2009 Employee Stock Purchase
Plan of our reports dated March 5, 2009, with respect to the consolidated
financial statements and schedule of Rudolph Technologies, Inc. in its Annual
Report (Form 10-K) for the year ended December 31, 2008, and the effectiveness
of internal control over financial reporting of Rudolph Technologies, Inc. filed
with the Securities and Exchange Commission.
/s/ Ernst & Young LLP
Metropark, New Jersey
November
19, 2009