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<head>
<title>Rudolph Technologies, Inc. Form S-8</title>
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<body>
<font SIZE="1">

<p ALIGN="right">As filed with the Securities and Exchange Commission on April 7, 2003<br>
Registration No. 333-_____________</p>
</font>

<hr>

<p ALIGN="center">&nbsp;</p>
<div align="center"><center>

<table CELLSPACING="0" BORDER="0" WIDTH="650">
  <tr>
    <td COLSPAN="3" align="center"><font SIZE="5"><b>SECURITIES AND EXCHANGE COMMISSION</b></font></td>
  </tr>
  <tr>
    <td COLSPAN="3" align="center"><font SIZE="3">Washington, D.C. 20549</font></td>
  </tr>
  <tr>
    <td COLSPAN="3" align="center"></td>
  </tr>
  <tr>
    <td COLSPAN="3" align="center"><font SIZE="5"><b>FORM S-8</b></font></td>
  </tr>
  <tr>
    <td COLSPAN="3" align="center"><font SIZE="5"><b>REGISTRATION STATEMENT</b></font></td>
  </tr>
  <tr>
    <td COLSPAN="3" align="center"><font SIZE="3"><i>Under<br>
    THE SECURITIES ACT OF 1933</i></font></td>
  </tr>
  <tr>
    <td COLSPAN="3" align="center"></td>
  </tr>
  <tr>
    <td COLSPAN="3" align="center"><font SIZE="5"><b>RUDOLPH TECHNOLOGIES, INC.</b></font></td>
  </tr>
  <tr>
    <td COLSPAN="3" align="center"><font SIZE="1">(Exact name of Registrant as specified in
    its charter)</font></td>
  </tr>
  <tr>
    <td COLSPAN="3"></td>
  </tr>
  <tr>
    <td WIDTH="33%" align="center"><font SIZE="3"><u>Delaware </u></font></td>
    <td WIDTH="33%"></td>
    <td WIDTH="33%" align="center"><font SIZE="3"><u>22-3538009 </u></font></td>
  </tr>
  <tr>
    <td WIDTH="33%" align="center"><font SIZE="1">(State of Incorporation)</font></td>
    <td WIDTH="33%"></td>
    <td WIDTH="33%" align="center"><font SIZE="1">(I.R.S. Employer Identification Number)</font></td>
  </tr>
  <tr>
    <td WIDTH="33%" align="center"></td>
    <td WIDTH="33%" align="center"><font SIZE="3">One Rudolph Road<br>
    Flanders, NJ 07836 </font></td>
    <td WIDTH="33%"></td>
  </tr>
  <tr>
    <td COLSPAN="3" align="center"><font SIZE="1">(Address of principal executive offices)</font></td>
  </tr>
  <tr>
    <td COLSPAN="3" align="center"></td>
  </tr>
</table>
</center></div><font SIZE="5"><b>

<p ALIGN="CENTER">1999 STOCK PLAN<br>
1999 EMPLOYEE STOCK PURCHASE PLAN<br>
</b></font><font SIZE="1">(Full title of the Plans)</font><font SIZE="5"><b></p>
</b></font><div align="center"><center>

<table CELLSPACING="0" BORDER="0" WIDTH="720">
  <tr>
    <td COLSPAN="3"></td>
  </tr>
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    <td COLSPAN="3"><p align="center"><font SIZE="3">PAUL F. McLAUGHLIN<br>
    Chairman and Chief Executive Officer<br>
    RUDOLPH TECHNOLOGIES, INC.<br>
    One Rudolph Road<br>
    Flanders, NJ 07836<br>
    (973) 691-1300</font><br>
    <font SIZE="1">(Name, address and telephone number of agent for service)</font></td>
  </tr>
  <tr>
    <td WIDTH="33%"></td>
    <td WIDTH="33%"><font SIZE="3"><i><br>
    Copies to:</i></font></td>
    <td WIDTH="33%"></td>
  </tr>
  <tr>
    <td WIDTH="33%"></td>
    <td WIDTH="33%"><p align="center"><font SIZE="3"><br>
    HENRY P. MASSEY, JR., ESQ. TREVOR J. CHAPLICK, ESQ. Wilson Sonsini Goodrich &amp; Rosati
    Professional Corporation<br>
    650 Page Mill Road<br>
    Palo Alto, CA 94304-1050<br>
    (650) 493-9300</font></td>
    <td WIDTH="33%"></td>
  </tr>
</table>
</center></div>

<p><font SIZE="3">&nbsp;</p>

<hr>

<p ALIGN="CENTER">&nbsp;</p>
<b>

<p ALIGN="CENTER">CALCULATION OF REGISTRATION FEE</b></font></p>
<div align="center"><center>

<table BORDER="0" CELLSPACING="0" CELLPADDING="8" WIDTH="650">
  <tr>
    <td WIDTH="33%" align="center" style="border-bottom: thin solid rgb(0,0,0)"><font SIZE="2">Title
    of Securities to be Registered</font></td>
    <td WIDTH="17%" align="center" style="border-bottom: thin solid rgb(0,0,0)"><font SIZE="2">Amount
    to be Registered(1)</font></td>
    <td WIDTH="17%" align="center" style="border-bottom: thin solid rgb(0,0,0)"><font SIZE="2">Proposed
    Maximum Offering Price Per Share</font></td>
    <td WIDTH="17%" align="center" style="border-bottom: thin solid rgb(0,0,0)"><font SIZE="2">Proposed
    Maximum Aggregate Offering Price</font></td>
    <td WIDTH="17%" align="center" style="border-bottom: thin solid rgb(0,0,0)"><font SIZE="2">Amount
    of Registration Fee</font></td>
  </tr>
  <tr>
    <td WIDTH="33%" style="border-bottom: thin solid rgb(0,0,0)"><font SIZE="2">Common Stock
    $0.001 par value, to be issued under the 1999 Stock Plan</font></td>
    <td WIDTH="17%" style="border-bottom: thin solid rgb(0,0,0)" align="right"><font SIZE="2">946,774
    (2)</font></td>
    <td WIDTH="17%" style="border-bottom: thin solid rgb(0,0,0)" align="right"><font SIZE="2">$
    15.15 (3)</font></td>
    <td WIDTH="17%" style="border-bottom: thin solid rgb(0,0,0)" align="right"><font SIZE="2">$14,343,626.10</font></td>
    <td WIDTH="17%" style="border-bottom: thin solid rgb(0,0,0)" align="right"><font SIZE="2">$1,160.39</font></td>
  </tr>
  <tr>
    <td WIDTH="33%" style="border-bottom: thin solid rgb(0,0,0)"><font SIZE="2">Common Stock
    $0.001 par value, to be issued under the 1999 Employee Stock Purchase Plan</font></td>
    <td WIDTH="17%" style="border-bottom: thin solid rgb(0,0,0)" align="right"><font SIZE="2">897,438
    (4)</font></td>
    <td WIDTH="17%" style="border-bottom: thin solid rgb(0,0,0)" align="right"><font SIZE="2">$12.40
    (5)</font></td>
    <td WIDTH="17%" style="border-bottom: thin solid rgb(0,0,0)" align="right"><font SIZE="2">$11,128,231.20</font></td>
    <td WIDTH="17%" style="border-bottom: thin solid rgb(0,0,0)" align="right"><font SIZE="2">$
    &nbsp;&nbsp; 900.27</font></td>
  </tr>
  <tr>
    <td WIDTH="33%" style="border-bottom: thin solid rgb(0,0,0)"><font SIZE="2">Total</font></td>
    <td WIDTH="17%" style="border-bottom: thin solid rgb(0,0,0)" align="right"><font SIZE="2">1,844,212
    &nbsp;&nbsp;&nbsp; </font></td>
    <td WIDTH="17%" style="border-bottom: thin solid rgb(0,0,0)" align="right">&nbsp;&nbsp; </td>
    <td WIDTH="17%" style="border-bottom: thin solid rgb(0,0,0)" align="right"><font SIZE="2">$25,471,857.30</font></td>
    <td WIDTH="17%" style="border-bottom: thin solid rgb(0,0,0)" align="right"><font SIZE="2">$2,060.66</font></td>
  </tr>
</table>
</center></div><font SIZE="3">

<p ALIGN="JUSTIFY"></font>&nbsp;</p>

<blockquote>
  <p ALIGN="JUSTIFY"><font SIZE="3">(1) For the sole purpose of calculating the registration
  fee, the number of shares to be registered under this Registration Statement is the number
  of additional shares authorized to be issued under the 1999 Stock Plan and the 1999
  Employee Stock Purchase Plan.</font></p>
  <p ALIGN="JUSTIFY"><font SIZE="3">(2) Includes the following automatic annual increases to
  the number of shares of the Registrant&#146;s Common Stock reserved for issuance under the
  1999 Stock Plan: (i) 297,438 shares on January 1, 2001, (ii) 322,720 shares on January 1,
  2002 and (iii) 326,616 shares on January 1, 2003.</font></p>
  <p ALIGN="JUSTIFY"><font SIZE="3">(3) Estimated in accordance with Rule 457(h) under the
  Securities Act solely for the purpose of calculating the registration fee. The price of
  $15.15 represents the weighted average exercise price based on (i) the weighted average
  exercise price of $15.43 per share for options to purchase a total of 629,519 shares of
  Common Stock outstanding under the 1999 Stock Plan and (ii) $14.59 per share (the average
  of the high and low reported prices on the Nasdaq National Market as of March 31, 2003)
  for 317,255 shares of Common Stock reserved for issuance under the 1999 Stock Plan. The
  price in (ii) of the preceding sentence is being used because the exercise prices of
  options to be granted in the future are not currently determinable. </font></p>
  <p ALIGN="JUSTIFY"><font SIZE="3">(4) Includes the following automatic annual increases to
  the number of shares of the Registrant&#146;s Common Stock reserved for issuance under the
  1999 Employee Stock Purchase Plan: (i) 297,438 shares on January 1, 2001, (ii) 300,000
  shares on January 1, 2002 and (iii) 300,000 shares on January 1, 2003.</font></p>
  <p ALIGN="JUSTIFY"><font SIZE="3">(5) Estimated pursuant to Rule 457(h) of the Securities
  Act solely for purposes of calculating the registration fee on the basis of 85% of $14.59
  per share (the average of the bid and ask reported prices on the Nasdaq National Market as
  of March 31, 2003) because the prices at which shares will be purchased in the future are
  not currently determinable.</font></p>
</blockquote>

<p><font SIZE="3"><b>&nbsp;</p>

<hr>

<p ALIGN="CENTER">PART II: INFORMATION REQUIRED IN THE REGISTRATION STATEMENT</p>

<p ALIGN="JUSTIFY">Item 3</b>. <u>Information Incorporated by Reference</u></p>

<p ALIGN="JUSTIFY">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; The
following documents and information heretofore filed with the Securities and Exchange
Commission (the &quot;Commission&quot;) are hereby incorporated by reference:</p>

<blockquote>
  <b><p ALIGN="JUSTIFY">Item 3(a)</p>
  </b><p ALIGN="JUSTIFY">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; The Registrant's Annual
  Report on Form 10-K for the fiscal year ended December 31, 2002, filed on March 31, 2003.</p>
</blockquote>

<blockquote>
  <b><p ALIGN="JUSTIFY">Item 3(b) </p>
  </b>
</blockquote>
<b>

<blockquote>
  <p ALIGN="JUSTIFY">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </b>The Registrant&#146;s
  Current Report on Form 8-K, which was filed on March 31, 2003.<b></p>
  <font FACE="Arial Unicode MS" SIZE="3"><p>Item 3(c) </p>
  </font></b><p>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; The description of the Common
  Stock of the Registrant contained in the Registrant's Registration Statement on Form 8-A
  filed on November 5, 1999, pursuant to Section 12 of the Securities Exchange Act of 1934,
  as amended (the &quot;Exchange Act&quot;).</p>
  <p ALIGN="JUSTIFY">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; All documents subsequently
  filed by the Registrant pursuant to Sections 13(a), 13(c), 14 and 15(d) of the Exchange
  Act, prior to the filing of a post-effective amendment which indicates that all securities
  registered hereby have been sold or which deregisters all securities then remaining
  unsold, shall be deemed to be incorporated by reference in this Registration Statement and
  to be part hereof from the date of filing such documents.</p>
</blockquote>

<blockquote>
  <b><p ALIGN="JUSTIFY">Arthur Andersen</b></p>
</blockquote>

<p ALIGN="JUSTIFY">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; As
previously disclosed in the Registrant&#146;s current report on Form 8-K filed on May 31,
2002, the Registrant dismissed Arthur Andersen LLP as its independent public accountants
and appointed KPMG LLP as its independent public accountants on May 23, 2002. After
reasonable efforts, the Registrant has been unable to obtain Arthur Andersen LLP&#146;s
written consent to incorporate by reference in this Registration Statement Arthur
Andersen&#146;s report on the financial statements of the Registrant for the year ended
December 31, 2001. Under these circumstances, the Registrant is permitted to file this
Registration Statement without a written consent from Arthur Andersen LLP in accordance
with Rule 437a of the Securities Act. Because Arthur Andersen LLP has not consented to the
incorporation by reference of their report in this Registration Statement, you will not be
able to recover against Arthur Andersen LLP under Section 11 of the Securities Act of 1933
for any untrue statements of material fact contained in the financial statements audited
by Arthur Andersen LLP or any omissions to state a material fact required to be stated
therein.</p>

<p><b>&nbsp;</p>

<p ALIGN="JUSTIFY">Item 4</b>. <u>Description of Securities</u></p>

<p ALIGN="JUSTIFY">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Not
Applicable.</p>

<p><b>&nbsp;</p>

<p ALIGN="JUSTIFY">Item 5</b>. <u>Interests of Named Experts and Counsel</u></p>

<p ALIGN="JUSTIFY">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Not
Applicable.</p>
<b>

<p ALIGN="JUSTIFY"></b>&nbsp;</p>

<p ALIGN="JUSTIFY"><b>Item 6</b>. <u>Indemnification of Directors and Officers</u></p>

<p ALIGN="JUSTIFY">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; The
Registrant&#146;s certificate of incorporation contains certain provisions permitted under
the Delaware General Corporation Law relating to the liability of directors. These
provisions eliminate a director&#146;s personal liability for monetary damages resulting
from a breach of fiduciary duty, except in certain circumstances involving certain
wrongful acts, including: (i) for any breach of the director&#146;s duty of loyalty to the
corporation or its stockholders, (ii) for acts or omissions not in good faith or that
involve intentional misconduct or a knowing violation of law, (iii) for unlawful payments
of dividends or unlawful stock repurchases or redemptions as provided in Section 174 of
the Delaware General Corporation Law, or (iv) for any transaction from which the director
derived an improper personal benefit.</p>

<p ALIGN="JUSTIFY">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; The
Registrant&#146;s Bylaws provide that the Registrant shall indemnify its directors and
officers and may indemnify its employees and other agents to the fullest extent permitted
by law. The Registrant&#146;s Bylaws also permit the Registrant to secure insurance on
behalf of any officer, director, employee or other agent for any liability arising out of
his or her actions in such capacity, regardless of whether the Registrant would have the
power to indemnify him or her against such liability under the General Corporation Law of
Delaware.</p>

<p ALIGN="JUSTIFY">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; The
Registrant has entered into agreements to indemnify its directors and officers, in
addition to indemnification provided for in the Registrant&#146;s Bylaws. Subject to
certain conditions, these agreements, among other things, indemnify the Registrant&#146;s
directors and officers for certain expenses (including attorney&#146;s fees), judgments,
fines and settlement amounts incurred by any such person in any action or proceeding,
including any action by or in the right of the Registrant, arising out of such
person&#146;s services as a director or officer of the Registrant.</p>

<p><b>&nbsp;</p>

<p ALIGN="JUSTIFY">Item 7</b>. <u>Exemption From Registration Claimed</u></p>

<p ALIGN="JUSTIFY">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Not
Applicable.</p>

<p><b>&nbsp;</p>

<p ALIGN="JUSTIFY">Item 8</b>. <u>Exhibits</u></p>

<p ALIGN="JUSTIFY">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
4.1(1)&nbsp;&nbsp;&nbsp; Restated Certificate of Incorporation of Registrant</p>

<p ALIGN="JUSTIFY">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
4.2(2)&nbsp;&nbsp;&nbsp; Restated Bylaws of Registrant</p>

<p>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; 5.1
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Opinion of Wilson Sonsini Goodrich &amp;
Rosati, Professional Corporation, as <br>
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
to legality of securities being registered</p>

<p ALIGN="JUSTIFY">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; 23.1
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Consent of PricewaterhouseCoopers LLP,
independent auditors</p>

<p ALIGN="JUSTIFY">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; 23.2
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Consent of KPMG LLP, independent auditors</p>

<p ALIGN="JUSTIFY">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; 23.3
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Consent of Counsel (contained in Exhibit 5.1).</p>

<p ALIGN="JUSTIFY">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; 24.1
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Power of Attorney (see Page II-5).<br>
<u>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
</u></p>

<p ALIGN="JUSTIFY">(1) Exhibit 4.1 is incorporated by reference to Exhibit 3.1(c) filed
with the Registrant&#146;s Registration Statement on Form S-1, No. 333-86821.</p>

<p ALIGN="JUSTIFY">(2) Exhibit 4.2 is incorporated by reference to Exhibit 3.2(b) filed
with the Registrant&#146;s Registration Statement on Form S-1, No. 333-86821</p>

<p><b>&nbsp;</p>

<p ALIGN="JUSTIFY">Item 9</b>. <u>UNDERTAKINGS</u></p>

<p ALIGN="JUSTIFY">(a)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; The undersigned
Registrant hereby undertakes:</p>

<p ALIGN="JUSTIFY">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; (1)
To file, during any period in which offers or sales are being made, a post-effective
amendment to this registration statement: </p>

<blockquote>
  <blockquote>
    <p ALIGN="JUSTIFY">(i) To include any prospectus required by Section 10(a)(3) of the
    Securities Act; </p>
    <p ALIGN="JUSTIFY">(ii) To reflect in the prospectus any facts or events arising after the
    effective date of the registration statement (or the most recent post-effective amendment
    thereof) which, individually or in the aggregate, represent a fundamental change in the
    information set forth in the registration statement; and </p>
    <p ALIGN="JUSTIFY">(iii) To include any material information with respect to the plan of
    distribution not previously disclosed in the registration statement or any material change
    to such information in the registration statement.</p>
  </blockquote>
</blockquote>

<p ALIGN="JUSTIFY">Provided, however, that the undertakings set forth in clauses (i) and
(ii) above shall not apply if the information required to be included in a post-effective
amendment by these clauses is contained in periodic reports filed by the Registrant
pursuant to Section 13 or Section 15(d) of the Exchange Act that are incorporated by
reference in this registration statement.</p>

<p ALIGN="JUSTIFY">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; (2)
That, for the purpose of determining any liability under the Securities Act, each such
post-effective amendment shall be deemed to be a new registration statement relating to
the securities offered therein, and the offering of such securities at that time shall be
deemed to be the initial bona fide offering thereof;</p>

<p ALIGN="JUSTIFY">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; (3)
To remove from registration by means of a post-effective amendment any of the securities
being registered which remain unsold at the termination of the offering.</p>

<p ALIGN="JUSTIFY">(b)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; The undersigned
Registrant hereby undertakes that, for purposes of determining any liability under the
Securities Act, each filing of the Registrant&#146;s annual report pursuant to Section
13(a) or Section 15(d) of the Exchange Act (and, where applicable, each filing of an
employee benefit plan&#146;s annual report under Section 15(d) of the Exchange Act) that
is incorporated by reference in the registration statement shall be deemed to be a new
registration statement relating to the securities offered therein, and the offering of
such securities at that time shall be deemed to be the initial bona fide offering thereof.
</p>

<p ALIGN="JUSTIFY">(c)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Insofar as
indemnification for liabilities arising under the Securities Act may be permitted to
directors, officers and controlling persons of the Registrant pursuant to the foregoing
provisions, or otherwise, the Registrant has been advised that in the opinion of the
Commission such indemnification is against public policy as expressed in the Securities
Act and is, therefore, unenforceable. In the event that a claim for indemnification
against such liabilities (other than the payment by the Registrant of expenses incurred or
paid by a director, officer or controlling person of the Registrant in the successful
defense of any action, suit or proceeding) is asserted by such director, officer or
controlling person in connection with the securities being registered, the Registrant
will, unless in the opinion of its counsel the matter has been settled by controlling
precedent, submit to a court of appropriate jurisdiction the question whether such
indemnification by it is against public policy as expressed in the Securities Act and will
be governed by the final adjudication of such issue.</p>

<p><b>&nbsp;</p>

<hr>

<p ALIGN="CENTER">SIGNATURES</b></p>

<p ALIGN="JUSTIFY">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
Pursuant to the requirements of the Securities Act of 1933, as amended, the Registrant,
Rudolph Technologies, Inc., a corporation organized and existing under the laws of the
State of Delaware, certifies that it has reasonable grounds to believe that it meets all
of the requirements for filing on Form S-8 and has duly caused this Registration Statement
to be signed on its behalf by the undersigned, thereunto duly authorized, in the City of
Flanders, State of New Jersey, on this 7th day of April, 2003.</p>

<p ALIGN="JUSTIFY">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
RUDOLPH TECHNOLOGIES, INC.</p>

<p ALIGN="JUSTIFY">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
By:<u> &nbsp;&nbsp; /s/ <font face="Book Antiqua">Paul F. McLaughlin</font> </u><br>
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
&nbsp;&nbsp; </font><font SIZE="2"><strong>&nbsp;&nbsp; Paul F. McLaughlin,<br>
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
Chairman and Chief Executive Officer</strong></font><font SIZE="3"></p>

<p><b>&nbsp;</p>

<p ALIGN="CENTER">POWER OF ATTORNEY</b></p>

<p ALIGN="JUSTIFY">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; KNOW
ALL PERSONS BY THESE PRESENTS, that each person whose signature appears below constitutes
and appoints Paul F. McLaughlin and Steven R. Roth, jointly and severally, his or her
attorneys-in-fact, each with the power of substitution, for him or her in any and all
capacities, to sign any amendments to this Registration Statement on Form S-8, and to file
the same, with exhibits thereto and other documents in connection therewith, with the
Commission, hereby ratifying and confirming all that each of said attorneys-in-fact, or
his substitute or substitutes, may do or cause to be done by virtue hereof.</p>

<p ALIGN="JUSTIFY">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
Pursuant to the requirements of the Securities Act of 1933, this Registration Statement
has been signed by the following persons in the capacities and on the dates indicated:</font></p>
<div align="center"><center>

<table CELLSPACING="0" BORDER="0" CELLPADDING="8" WIDTH="650" height="882">
  <tr>
    <td WIDTH="33%" height="17"><p align="center"><u><font SIZE="2"><b>Signature</b></font></u></td>
    <td WIDTH="38%" height="17"><p align="center"><u><font SIZE="2"><b>Title</b></font></u></td>
    <td WIDTH="29%" height="17"><p align="center"><u><font SIZE="2"><b>Date</b></font></u></td>
  </tr>
  <tr>
    <td WIDTH="33%" style="border-bottom: 1px solid rgb(0,0,0)" valign="bottom" height="31"><font
    SIZE="3">/s/ <font face="Book Antiqua">Paul F. McLaughlin</font></font></td>
    <td WIDTH="38%" rowspan="2" height="83"><font SIZE="3">Chairman and Chief Executive
    Officer (Principal Executive Officer)</font><p>&nbsp;</td>
    <td WIDTH="29%" rowspan="2" height="83"><font SIZE="3">March 31, 2003 </font><p>&nbsp;</td>
  </tr>
  <tr>
    <td WIDTH="33%" valign="top" height="36"><strong><font SIZE="2">Paul F. McLaughlin</font><font
    SIZE="3"><br>
    &nbsp; </font></strong></td>
  </tr>
  <tr>
    <td WIDTH="33%" style="border-bottom: 1px solid rgb(0,0,0)" valign="top" height="22"><font
    SIZE="3">/s/ <font face="Book Antiqua">Steven R. Roth</font></font></td>
    <td WIDTH="38%" rowspan="2" height="74"><font SIZE="3">Senior Vice President &amp; Chief
    Financial Officer (Principal Financial and Accounting Officer)</font></td>
    <td WIDTH="29%" rowspan="2" height="74"><font SIZE="3">March 31, 2003 </font><p>&nbsp;</td>
  </tr>
  <tr>
    <td WIDTH="33%" valign="top" height="36"><font SIZE="2"><strong>Steven R. Roth</strong></font><font
    SIZE="3"><br>
    &nbsp; </font></td>
  </tr>
  <tr>
    <td WIDTH="33%" style="border-bottom: 1px solid rgb(0,0,0)" valign="top" height="22"><font
    SIZE="3">/s/ <font face="Book Antiqua">David Belluck</font></font></td>
    <td WIDTH="38%" rowspan="2" height="74"><font SIZE="3">Director </font><p>&nbsp;</td>
    <td WIDTH="29%" rowspan="2" height="74"><font SIZE="3">April 7, 2003 </font><p>&nbsp;</td>
  </tr>
  <tr>
    <td WIDTH="33%" valign="bottom" height="36"><font SIZE="2"><strong>David Belluck</strong></font><font
    SIZE="3"><br>
    &nbsp; </font></td>
  </tr>
  <tr>
    <td WIDTH="33%" style="border-bottom: 1px solid rgb(0,0,0)" height="22"><font SIZE="3">/s/
    <font face="Book Antiqua">Daniel H. Berry</font></font></td>
    <td WIDTH="38%" rowspan="2" height="74"><font SIZE="3">Director </font><p>&nbsp;</td>
    <td WIDTH="29%" rowspan="2" height="74"><font SIZE="3">April 4, 2003 </font><p>&nbsp;</td>
  </tr>
  <tr>
    <td WIDTH="33%" valign="top" height="36"><font SIZE="2"><strong>Daniel H. Berry</strong></font><font
    SIZE="3"><br>
    &nbsp; </font></td>
  </tr>
  <tr>
    <td WIDTH="33%" style="border-bottom: 1px solid rgb(0,0,0)" height="22"><font SIZE="3">/s/
    <font face="Book Antiqua">Paul Craig</font></font></td>
    <td WIDTH="38%" rowspan="2" height="74"><font SIZE="3">Director </font><p>&nbsp;</td>
    <td WIDTH="29%" rowspan="2" height="74"><font SIZE="3">March 31, 2003</font><p>&nbsp;</td>
  </tr>
  <tr>
    <td WIDTH="33%" height="36"><font SIZE="2"><strong>Paul Craig</strong></font><font
    SIZE="3"><br>
    &nbsp; </font></td>
  </tr>
  <tr>
    <td WIDTH="33%" style="border-bottom: 1px solid rgb(0,0,0)" height="22"><font SIZE="3">/s/<font
    face="Book Antiqua"> Thomas G. Greig</font></font></td>
    <td WIDTH="38%" rowspan="2" height="74"><font SIZE="3">Director </font><p>&nbsp;</td>
    <td WIDTH="29%" rowspan="2" height="74"><font SIZE="3">April 2, 2003 </font><p>&nbsp;</td>
  </tr>
  <tr>
    <td WIDTH="33%" height="36"><font SIZE="2"><strong>Thomas G. Greig</strong></font><font
    SIZE="3"><br>
    &nbsp; </font></td>
  </tr>
  <tr>
    <td WIDTH="33%" style="border-bottom: 1px solid rgb(0,0,0)" height="21"><font SIZE="3">/s/
    </font><font face="Book Antiqua" size="3">Carl E. Ring, Jr.</font>&nbsp;&nbsp;&nbsp; </td>
    <td WIDTH="38%" rowspan="2" height="73"><font SIZE="3">Director </font><p>&nbsp;</td>
    <td WIDTH="29%" rowspan="2" height="73"><font SIZE="3">April 7, 2003 </font><p>&nbsp;</td>
  </tr>
  <tr>
    <td WIDTH="33%" height="36"><font SIZE="2"><strong>Carl E. Ring, Jr.</strong></font><font
    SIZE="3"><br>
    &nbsp; </font></td>
  </tr>
  <tr>
    <td WIDTH="33%" style="border-bottom: 1px solid rgb(0,0,0)" height="20"><font SIZE="3">/s/
    <font face="Book Antiqua">Richard F. Spanier</font></font></td>
    <td WIDTH="38%" rowspan="2" height="72"><font SIZE="3">Director </font><p>&nbsp;</td>
    <td WIDTH="29%" rowspan="2" height="72"><font SIZE="3">April 3, 2003 </font><p>&nbsp;</td>
  </tr>
  <tr>
    <td WIDTH="33%" height="36"><font SIZE="2"><strong>Richard F. Spanier</strong></font><font
    SIZE="3"><br>
    &nbsp; </font></td>
  </tr>
  <tr>
    <td WIDTH="33%" style="border-bottom: 1px solid rgb(0,0,0)" height="22"><font SIZE="3">/s/
    <font face="Book Antiqua">Aubrey C. Tobey</font></font></td>
    <td WIDTH="38%" rowspan="2" height="70"><font SIZE="3">Director </font><p>&nbsp;</td>
    <td WIDTH="29%" rowspan="2" height="70"><font SIZE="3">March 31, 2003 </font><p>&nbsp;</td>
  </tr>
  <tr>
    <td WIDTH="33%" height="32"><font SIZE="2"><strong>Aubrey C. Tobey<br>
    </strong></font></td>
  </tr>
  <tr>
    <td WIDTH="33%" height="21"></td>
    <td WIDTH="38%" height="21"></td>
    <td WIDTH="29%" height="21"></td>
  </tr>
</table>
</center></div>

<p><font SIZE="3">&nbsp;</p>

<hr>

<p ALIGN="CENTER">&nbsp;</p>

<p ALIGN="CENTER">&nbsp;</p>

<p ALIGN="CENTER">&nbsp;</p>

<p ALIGN="CENTER">SECURITIES AND EXCHANGE COMMISSION</p>

<p ALIGN="CENTER">Washington, D.C. 20549</p>

<p ALIGN="CENTER">&nbsp;</p>

<p ALIGN="CENTER">&nbsp;</p>

<p ALIGN="CENTER">EXHIBITS</p>

<p ALIGN="CENTER">&nbsp;</p>

<p ALIGN="CENTER">Registration Statement on Form S-8</p>

<p ALIGN="CENTER">RUDOLPH TECHNOLOGIES, INC.</p>

<p ALIGN="CENTER">April 7, 2003</p>

<p><b>&nbsp;</p>

<p>&nbsp;</p>

<p>&nbsp;</p>

<hr>

<p ALIGN="CENTER">INDEX TO EXHIBITS</b></p>

<p ALIGN="JUSTIFY"></font>&nbsp;</p>
<div align="center"><center>

<table CELLSPACING="0" BORDER="0" CELLPADDING="8" WIDTH="570">
  <tr>
    <td WIDTH="68" style="border-bottom: 1px solid rgb(0,0,0)"><font SIZE="3"><b>Exhibit
    Number</b></font></td>
    <td WIDTH="12"></td>
    <td WIDTH="442" style="border-bottom: 1px solid rgb(0,0,0)"></td>
  </tr>
  <tr>
    <td WIDTH="68"><font SIZE="3">4.1(1) </font></td>
    <td WIDTH="12"></td>
    <td WIDTH="442"><font SIZE="3">Restated Certificate of Incorporation of Registrant </font></td>
  </tr>
  <tr>
    <td WIDTH="68"><font SIZE="3">4.2(2)</font></td>
    <td WIDTH="12"></td>
    <td WIDTH="442"><font SIZE="3">Restated Bylaws of Registrant</font></td>
  </tr>
  <tr>
    <td WIDTH="68"><font SIZE="3">5.1<br>
    &nbsp; </font></td>
    <td WIDTH="12"></td>
    <td WIDTH="442"><font SIZE="3">Opinion of Wilson Sonsini Goodrich &amp; Rosati,
    Professional Corporation, as to legality of securities being registered</font></td>
  </tr>
  <tr>
    <td WIDTH="68"><font SIZE="3">23.1</font></td>
    <td WIDTH="12"></td>
    <td WIDTH="442"><font SIZE="3">Consent of PricewaterhouseCoopers LLP, independent
    accountants </font></td>
  </tr>
  <tr>
    <td WIDTH="68"><font SIZE="3">23.2</font></td>
    <td WIDTH="12"></td>
    <td WIDTH="442"><font SIZE="3">Consent of KPMG LLP, independent auditors</font></td>
  </tr>
  <tr>
    <td WIDTH="68"><font SIZE="3">23.3</font></td>
    <td WIDTH="12"></td>
    <td WIDTH="442"><font SIZE="3">Consent of Counsel (contained in Exhibit 5.1)</font></td>
  </tr>
  <tr>
    <td WIDTH="68"><font SIZE="3">24.1</font></td>
    <td WIDTH="12"></td>
    <td WIDTH="442"><font SIZE="3">Power of Attorney (see Page II-5)</font></td>
  </tr>
</table>
</center></div><font SIZE="3">

<hr noshade color="#000000">

<p ALIGN="JUSTIFY">(1)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Exhibit 4.1 is
incorporated by reference to Exhibit 3.1(c) filed with the Registrant&#146;s Registration
Statement on Form S-1, No. 333-86821.</p>

<p ALIGN="JUSTIFY">(2)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Exhibit 4.2 is
incorporated by reference to Exhibit 3.2(b) filed with the Registrant&#146;s Registration
Statement on Form S-1, No. 333-86821.</p>

<p><b>&nbsp;</p>

<hr>

<p ALIGN="RIGHT">EXHIBIT 5.1</b></p>

<p ALIGN="CENTER">April 7, 2003</p>

<p ALIGN="JUSTIFY">Rudolph Technologies, Inc.<br>
One Rudolph Road<br>
Flanders, NJ 07836</p>
<b>

<p ALIGN="JUSTIFY">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Re:
Registration Statement on Form S-8</b></p>

<p ALIGN="JUSTIFY">Ladies and Gentlemen:</p>

<p ALIGN="JUSTIFY">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; We
have examined the Registration Statement on Form S-8 to be filed by Rudolph Technologies,
Inc. (the &quot;Company&quot;) with the Securities and Exchange Commission on or about
April 7, 2003 (the &quot;Registration Statement&quot;) in connection with the registration
under the Securities Act of 1933, as amended, of 1,844,212 shares of Common Stock (the
&quot;Shares&quot;) reserved for issuance under the 1999 Stock Plan and 1999 Employee
Stock Purchase Plan (collectively, the &quot;Plans&quot;). As your counsel, we have
examined the proceedings taken and are familiar with the proceedings proposed to be taken
by you in connection with said issuance and sale of the Shares pursuant to the Plans.</p>

<p ALIGN="JUSTIFY">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; It
is our opinion that, upon completion of the proceedings being taken or contemplated by us
to be taken prior to the issuance and sale of the Shares pursuant to the Plans, and upon
completion of the proceedings being taken in order to permit such transaction to be
carried out in accordance with the securities laws of the various states where required,
the Shares, when issued and sold in the manner referred to in the Plan and the
Registration Statement, will be legally and validly issued, fully-paid and non-assessable.</p>

<p ALIGN="JUSTIFY">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; We
consent to the use of this opinion as an exhibit to the Registration Statement, and
further consent to the use of our name wherever appearing in the Registration Statement,
including the prospectus constituting a part thereof, and any amendments thereto.</p>

<p>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
Very truly yours,</p>

<p>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
WILSON SONSINI GOODRICH &amp; ROSATI<br>
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
Professional Corporation</p>

<p>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
/s/ Wilson Sonsini Goodrich &amp; Rosati</p>

<p><b>&nbsp;</p>

<hr>

<p ALIGN="RIGHT">&nbsp;</p>

<p ALIGN="RIGHT">EXHIBIT 23.1</p>

<p ALIGN="CENTER"></b>&nbsp;</p>

<p ALIGN="CENTER">&nbsp;</p>

<p ALIGN="CENTER"><b>CONSENT OF INDEPENDENT ACCOUNTANTS</b></p>

<p ALIGN="JUSTIFY">&nbsp;</p>

<p ALIGN="JUSTIFY">We hereby consent to the incorporation by reference in this
Registration Statement on Form S-8 of our report</font><font SIZE="3" COLOR="#ff0000"><b> </b></font><font
SIZE="3">dated January 26, 2001 relating to the consolidated financial statements and
financial statement schedule of Rudolph Technologies, Inc., which appears in Rudolph
Technologies, Inc.'s Annual Report on Form 10-K for the year ended December 31, 2002.</p>

<p ALIGN="JUSTIFY">&nbsp;</p>

<p ALIGN="JUSTIFY">/s/ PRICEWATERHOUSECOOPERS LLP</p>

<p ALIGN="JUSTIFY">PricewaterhouseCoopers LLP<br>
Florham Park, New Jersey<br>
April 7, 2003</p>

<p>&nbsp;</p>

<p>&nbsp;</p>

<hr>

<p><b>&nbsp;</p>

<p ALIGN="RIGHT">EXHIBIT 23.2</p>

<p ALIGN="CENTER"></b>&nbsp;</p>

<p ALIGN="CENTER">&nbsp;</p>

<p align="center"></font><font face="Times New Roman" size="3"><strong>INDEPENDENT
AUDITORS' CONSENT</strong></font><font SIZE="3"></p>

<p class="LetterBody" style="text-align:justify"><font face="Times New Roman" size="3">We
consent to the incorporation by reference in this registration statement on Form S-8 of
Rudolph Technologies, Inc. of our report dated January 29, 2003, with respect to the
consolidated balance sheet of Rudolph Technolgies, Inc. and subsidiaries as of December
31, 2002, and the related consolidated statement of income (loss), stockholders&#146;
equity, and cash flows for the year then ended, and the related 2002 financial statement
schedule, which report appears in the December 31, 2002 annual report on Form 10-K of
Rudolph Technologies, Inc. </font></p>

<p ALIGN="JUSTIFY">&nbsp;</p>

<p ALIGN="JUSTIFY"><font face="Times New Roman" size="3">/s/ KPMG LLP<br>
</font></p>

<p ALIGN="JUSTIFY"><font face="Times New Roman" size="3">KPMG LLP<br>
Short Hills, New Jersey<br>
April 7, 2003</font></p>
</font>
</body>
</html>
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Rudolph Technologies, Inc. Form S-8
As filed with the Securities and Exchange Commission on April 7, 2003
Registration No. 333-_____________
SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549
FORM S-8
REGISTRATION STATEMENT
Under
THE SECURITIES ACT OF 1933
RUDOLPH TECHNOLOGIES, INC.
(Exact name of Registrant as specified in
    its charter)
Delaware
22-3538009
(State of Incorporation)
(I.R.S. Employer Identification Number)
One Rudolph Road
Flanders, NJ 07836
(Address of principal executive offices)
1999 STOCK PLAN
1999 EMPLOYEE STOCK PURCHASE PLAN
(Full title of the Plans)
PAUL F. McLAUGHLIN
Chairman and Chief Executive Officer
RUDOLPH TECHNOLOGIES, INC.
One Rudolph Road
Flanders, NJ 07836
(973) 691-1300
(Name, address and telephone number of agent for service)
Copies to:
HENRY P. MASSEY, JR., ESQ. TREVOR J. CHAPLICK, ESQ. Wilson Sonsini Goodrich & Rosati
    Professional Corporation
650 Page Mill Road
Palo Alto, CA 94304-1050
(650) 493-9300
CALCULATION OF REGISTRATION FEE
Title
    of Securities to be Registered
Amount
    to be Registered(1)
Proposed
    Maximum Offering Price Per Share
Proposed
    Maximum Aggregate Offering Price
Amount
    of Registration Fee
Common Stock
    $0.001 par value, to be issued under the 1999 Stock Plan
946,774
    (2)
$
    15.15 (3)
$14,343,626.10
$1,160.39
Common Stock
    $0.001 par value, to be issued under the 1999 Employee Stock Purchase Plan
897,438
    (4)
$12.40
    (5)
$11,128,231.20
$
       900.27
Total
1,844,212
$25,471,857.30
$2,060.66
(1) For the sole purpose of calculating the registration
  fee, the number of shares to be registered under this Registration Statement is the number
  of additional shares authorized to be issued under the 1999 Stock Plan and the 1999
  Employee Stock Purchase Plan.
(2) Includes the following automatic annual increases to
  the number of shares of the Registrant's Common Stock reserved for issuance under the
  1999 Stock Plan: (i) 297,438 shares on January 1, 2001, (ii) 322,720 shares on January 1,
  2002 and (iii) 326,616 shares on January 1, 2003.
(3) Estimated in accordance with Rule 457(h) under the
  Securities Act solely for the purpose of calculating the registration fee. The price of
  $15.15 represents the weighted average exercise price based on (i) the weighted average
  exercise price of $15.43 per share for options to purchase a total of 629,519 shares of
  Common Stock outstanding under the 1999 Stock Plan and (ii) $14.59 per share (the average
  of the high and low reported prices on the Nasdaq National Market as of March 31, 2003)
  for 317,255 shares of Common Stock reserved for issuance under the 1999 Stock Plan. The
  price in (ii) of the preceding sentence is being used because the exercise prices of
  options to be granted in the future are not currently determinable.
(4) Includes the following automatic annual increases to
  the number of shares of the Registrant's Common Stock reserved for issuance under the
  1999 Employee Stock Purchase Plan: (i) 297,438 shares on January 1, 2001, (ii) 300,000
  shares on January 1, 2002 and (iii) 300,000 shares on January 1, 2003.
(5) Estimated pursuant to Rule 457(h) of the Securities
  Act solely for purposes of calculating the registration fee on the basis of 85% of $14.59
  per share (the average of the bid and ask reported prices on the Nasdaq National Market as
  of March 31, 2003) because the prices at which shares will be purchased in the future are
  not currently determinable.
PART II: INFORMATION REQUIRED IN THE REGISTRATION STATEMENT
Item 3
.
Information Incorporated by Reference
The
following documents and information heretofore filed with the Securities and Exchange
Commission (the "Commission") are hereby incorporated by reference:
Item 3(a)
The Registrant's Annual
  Report on Form 10-K for the fiscal year ended December 31, 2002, filed on March 31, 2003.
Item 3(b)
The Registrant's
  Current Report on Form 8-K, which was filed on March 31, 2003.
Item 3(c)
The description of the Common
  Stock of the Registrant contained in the Registrant's Registration Statement on Form 8-A
  filed on November 5, 1999, pursuant to Section 12 of the Securities Exchange Act of 1934,
  as amended (the "Exchange Act").
All documents subsequently
  filed by the Registrant pursuant to Sections 13(a), 13(c), 14 and 15(d) of the Exchange
  Act, prior to the filing of a post-effective amendment which indicates that all securities
  registered hereby have been sold or which deregisters all securities then remaining
  unsold, shall be deemed to be incorporated by reference in this Registration Statement and
  to be part hereof from the date of filing such documents.
Arthur Andersen
As
previously disclosed in the Registrant's current report on Form 8-K filed on May 31,
2002, the Registrant dismissed Arthur Andersen LLP as its independent public accountants
and appointed KPMG LLP as its independent public accountants on May 23, 2002. After
reasonable efforts, the Registrant has been unable to obtain Arthur Andersen LLP's
written consent to incorporate by reference in this Registration Statement Arthur
Andersen's report on the financial statements of the Registrant for the year ended
December 31, 2001. Under these circumstances, the Registrant is permitted to file this
Registration Statement without a written consent from Arthur Andersen LLP in accordance
with Rule 437a of the Securities Act. Because Arthur Andersen LLP has not consented to the
incorporation by reference of their report in this Registration Statement, you will not be
able to recover against Arthur Andersen LLP under Section 11 of the Securities Act of 1933
for any untrue statements of material fact contained in the financial statements audited
by Arthur Andersen LLP or any omissions to state a material fact required to be stated
therein.
Item 4
.
Description of Securities
Not
Applicable.
Item 5
.
Interests of Named Experts and Counsel
Not
Applicable.
Item 6
.
Indemnification of Directors and Officers
The
Registrant's certificate of incorporation contains certain provisions permitted under
the Delaware General Corporation Law relating to the liability of directors. These
provisions eliminate a director's personal liability for monetary damages resulting
from a breach of fiduciary duty, except in certain circumstances involving certain
wrongful acts, including: (i) for any breach of the director's duty of loyalty to the
corporation or its stockholders, (ii) for acts or omissions not in good faith or that
involve intentional misconduct or a knowing violation of law, (iii) for unlawful payments
of dividends or unlawful stock repurchases or redemptions as provided in Section 174 of
the Delaware General Corporation Law, or (iv) for any transaction from which the director
derived an improper personal benefit.
The
Registrant's Bylaws provide that the Registrant shall indemnify its directors and
officers and may indemnify its employees and other agents to the fullest extent permitted
by law. The Registrant's Bylaws also permit the Registrant to secure insurance on
behalf of any officer, director, employee or other agent for any liability arising out of
his or her actions in such capacity, regardless of whether the Registrant would have the
power to indemnify him or her against such liability under the General Corporation Law of
Delaware.
The
Registrant has entered into agreements to indemnify its directors and officers, in
addition to indemnification provided for in the Registrant's Bylaws. Subject to
certain conditions, these agreements, among other things, indemnify the Registrant's
directors and officers for certain expenses (including attorney's fees), judgments,
fines and settlement amounts incurred by any such person in any action or proceeding,
including any action by or in the right of the Registrant, arising out of such
person's services as a director or officer of the Registrant.
Item 7
.
Exemption From Registration Claimed
Not
Applicable.
Item 8
.
Exhibits
4.1(1)    Restated Certificate of Incorporation of Registrant
4.2(2)    Restated Bylaws of Registrant
5.1
         Opinion of Wilson Sonsini Goodrich &
Rosati, Professional Corporation, as
to legality of securities being registered
23.1
        Consent of PricewaterhouseCoopers LLP,
independent auditors
23.2
        Consent of KPMG LLP, independent auditors
23.3
        Consent of Counsel (contained in Exhibit 5.1).
24.1
        Power of Attorney (see Page II-5).
(1) Exhibit 4.1 is incorporated by reference to Exhibit 3.1(c) filed
with the Registrant's Registration Statement on Form S-1, No. 333-86821.
(2) Exhibit 4.2 is incorporated by reference to Exhibit 3.2(b) filed
with the Registrant's Registration Statement on Form S-1, No. 333-86821
Item 9
.
UNDERTAKINGS
(a)         The undersigned
Registrant hereby undertakes:
(1)
To file, during any period in which offers or sales are being made, a post-effective
amendment to this registration statement:
(i) To include any prospectus required by Section 10(a)(3) of the
    Securities Act;
(ii) To reflect in the prospectus any facts or events arising after the
    effective date of the registration statement (or the most recent post-effective amendment
    thereof) which, individually or in the aggregate, represent a fundamental change in the
    information set forth in the registration statement; and
(iii) To include any material information with respect to the plan of
    distribution not previously disclosed in the registration statement or any material change
    to such information in the registration statement.
Provided, however, that the undertakings set forth in clauses (i) and
(ii) above shall not apply if the information required to be included in a post-effective
amendment by these clauses is contained in periodic reports filed by the Registrant
pursuant to Section 13 or Section 15(d) of the Exchange Act that are incorporated by
reference in this registration statement.
(2)
That, for the purpose of determining any liability under the Securities Act, each such
post-effective amendment shall be deemed to be a new registration statement relating to
the securities offered therein, and the offering of such securities at that time shall be
deemed to be the initial bona fide offering thereof;
(3)
To remove from registration by means of a post-effective amendment any of the securities
being registered which remain unsold at the termination of the offering.
(b)         The undersigned
Registrant hereby undertakes that, for purposes of determining any liability under the
Securities Act, each filing of the Registrant's annual report pursuant to Section
13(a) or Section 15(d) of the Exchange Act (and, where applicable, each filing of an
employee benefit plan's annual report under Section 15(d) of the Exchange Act) that
is incorporated by reference in the registration statement shall be deemed to be a new
registration statement relating to the securities offered therein, and the offering of
such securities at that time shall be deemed to be the initial bona fide offering thereof.
(c)         Insofar as
indemnification for liabilities arising under the Securities Act may be permitted to
directors, officers and controlling persons of the Registrant pursuant to the foregoing
provisions, or otherwise, the Registrant has been advised that in the opinion of the
Commission such indemnification is against public policy as expressed in the Securities
Act and is, therefore, unenforceable. In the event that a claim for indemnification
against such liabilities (other than the payment by the Registrant of expenses incurred or
paid by a director, officer or controlling person of the Registrant in the successful
defense of any action, suit or proceeding) is asserted by such director, officer or
controlling person in connection with the securities being registered, the Registrant
will, unless in the opinion of its counsel the matter has been settled by controlling
precedent, submit to a court of appropriate jurisdiction the question whether such
indemnification by it is against public policy as expressed in the Securities Act and will
be governed by the final adjudication of such issue.
SIGNATURES
Pursuant to the requirements of the Securities Act of 1933, as amended, the Registrant,
Rudolph Technologies, Inc., a corporation organized and existing under the laws of the
State of Delaware, certifies that it has reasonable grounds to believe that it meets all
of the requirements for filing on Form S-8 and has duly caused this Registration Statement
to be signed on its behalf by the undersigned, thereunto duly authorized, in the City of
Flanders, State of New Jersey, on this 7th day of April, 2003.
RUDOLPH TECHNOLOGIES, INC.
By:
/s/
Paul F. McLaughlin
Paul F. McLaughlin,
Chairman and Chief Executive Officer
POWER OF ATTORNEY
KNOW
ALL PERSONS BY THESE PRESENTS, that each person whose signature appears below constitutes
and appoints Paul F. McLaughlin and Steven R. Roth, jointly and severally, his or her
attorneys-in-fact, each with the power of substitution, for him or her in any and all
capacities, to sign any amendments to this Registration Statement on Form S-8, and to file
the same, with exhibits thereto and other documents in connection therewith, with the
Commission, hereby ratifying and confirming all that each of said attorneys-in-fact, or
his substitute or substitutes, may do or cause to be done by virtue hereof.
Pursuant to the requirements of the Securities Act of 1933, this Registration Statement
has been signed by the following persons in the capacities and on the dates indicated:
Signature
Title
Date
/s/
Paul F. McLaughlin
Chairman and Chief Executive
    Officer (Principal Executive Officer)
March 31, 2003
Paul F. McLaughlin
/s/
Steven R. Roth
Senior Vice President & Chief
    Financial Officer (Principal Financial and Accounting Officer)
March 31, 2003
Steven R. Roth
/s/
David Belluck
Director
April 7, 2003
David Belluck
/s/
Daniel H. Berry
Director
April 4, 2003
Daniel H. Berry
/s/
Paul Craig
Director
March 31, 2003
Paul Craig
/s/
Thomas G. Greig
Director
April 2, 2003
Thomas G. Greig
/s/
Carl E. Ring, Jr.
Director
April 7, 2003
Carl E. Ring, Jr.
/s/
Richard F. Spanier
Director
April 3, 2003
Richard F. Spanier
/s/
Aubrey C. Tobey
Director
March 31, 2003
Aubrey C. Tobey
SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549
EXHIBITS
Registration Statement on Form S-8
RUDOLPH TECHNOLOGIES, INC.
April 7, 2003
INDEX TO EXHIBITS
Exhibit
    Number
4.1(1)
Restated Certificate of Incorporation of Registrant
4.2(2)
Restated Bylaws of Registrant
5.1
Opinion of Wilson Sonsini Goodrich & Rosati,
    Professional Corporation, as to legality of securities being registered
23.1
Consent of PricewaterhouseCoopers LLP, independent
    accountants
23.2
Consent of KPMG LLP, independent auditors
23.3
Consent of Counsel (contained in Exhibit 5.1)
24.1
Power of Attorney (see Page II-5)
(1)        Exhibit 4.1 is
incorporated by reference to Exhibit 3.1(c) filed with the Registrant's Registration
Statement on Form S-1, No. 333-86821.
(2)        Exhibit 4.2 is
incorporated by reference to Exhibit 3.2(b) filed with the Registrant's Registration
Statement on Form S-1, No. 333-86821.
EXHIBIT 5.1
April 7, 2003
Rudolph Technologies, Inc.
One Rudolph Road
Flanders, NJ 07836
Re:
Registration Statement on Form S-8
Ladies and Gentlemen:
We
have examined the Registration Statement on Form S-8 to be filed by Rudolph Technologies,
Inc. (the "Company") with the Securities and Exchange Commission on or about
April 7, 2003 (the "Registration Statement") in connection with the registration
under the Securities Act of 1933, as amended, of 1,844,212 shares of Common Stock (the
"Shares") reserved for issuance under the 1999 Stock Plan and 1999 Employee
Stock Purchase Plan (collectively, the "Plans"). As your counsel, we have
examined the proceedings taken and are familiar with the proceedings proposed to be taken
by you in connection with said issuance and sale of the Shares pursuant to the Plans.
It
is our opinion that, upon completion of the proceedings being taken or contemplated by us
to be taken prior to the issuance and sale of the Shares pursuant to the Plans, and upon
completion of the proceedings being taken in order to permit such transaction to be
carried out in accordance with the securities laws of the various states where required,
the Shares, when issued and sold in the manner referred to in the Plan and the
Registration Statement, will be legally and validly issued, fully-paid and non-assessable.
We
consent to the use of this opinion as an exhibit to the Registration Statement, and
further consent to the use of our name wherever appearing in the Registration Statement,
including the prospectus constituting a part thereof, and any amendments thereto.
Very truly yours,
WILSON SONSINI GOODRICH & ROSATI
Professional Corporation
/s/ Wilson Sonsini Goodrich & Rosati
EXHIBIT 23.1
CONSENT OF INDEPENDENT ACCOUNTANTS
We hereby consent to the incorporation by reference in this
Registration Statement on Form S-8 of our report
dated January 26, 2001 relating to the consolidated financial statements and
financial statement schedule of Rudolph Technologies, Inc., which appears in Rudolph
Technologies, Inc.'s Annual Report on Form 10-K for the year ended December 31, 2002.
/s/ PRICEWATERHOUSECOOPERS LLP
PricewaterhouseCoopers LLP
Florham Park, New Jersey
April 7, 2003
EXHIBIT 23.2
INDEPENDENT
AUDITORS' CONSENT
We
consent to the incorporation by reference in this registration statement on Form S-8 of
Rudolph Technologies, Inc. of our report dated January 29, 2003, with respect to the
consolidated balance sheet of Rudolph Technolgies, Inc. and subsidiaries as of December
31, 2002, and the related consolidated statement of income (loss), stockholders'
equity, and cash flows for the year then ended, and the related 2002 financial statement
schedule, which report appears in the December 31, 2002 annual report on Form 10-K of
Rudolph Technologies, Inc.
/s/ KPMG LLP
KPMG LLP
Short Hills, New Jersey
April 7, 2003