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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><B>As filed with the Securities and Exchange Commission
on May&nbsp;29, 2025</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: right"><B>REGISTRATION NO. 333-&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"></P>

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<P STYLE="font: 18pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><B>UNITED STATES&nbsp;</B></P>

<P STYLE="font: 18pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center; text-indent: 1in"><B>SECURITIES AND EXCHANGE COMMISSION&nbsp;</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><B>WASHINGTON, DC 20549</B></P>

<P STYLE="border-bottom: Black 1pt solid; font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center">&nbsp;</P>

<P STYLE="font: 18pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><B>FORM&nbsp;S-8&nbsp;</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><B>REGISTRATION STATEMENT UNDER THE SECURITIES
ACT OF 1933</B></P>

<P STYLE="border-bottom: Black 1pt solid; font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center">&nbsp;</P>

<P STYLE="font: 18pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><B>AXCELIS TECHNOLOGIES,&nbsp;INC.&nbsp;</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center">(Exact name of registrant as specified in its charter)</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

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    <P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><B>Delaware</B></P>
    <P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center; text-indent: 36.7pt">(State or other jurisdiction
    of incorporation)</P></TD>
    <TD STYLE="vertical-align: bottom; width: 1%; font-size: 10pt">&nbsp;</TD>
    <TD STYLE="vertical-align: top; width: 49%">
    <P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><B>34-1818596</B></P>
    <P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center">(I.R.S. Employer Identification No.)</P></TD></TR>
  </TABLE>
<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><B>108 Cherry Hill Drive, Beverly, Massachusetts
01915&nbsp;</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt; text-align: center">(Address of Principal Executive
Offices and Zip Code)</P>

<P STYLE="border-bottom: Black 1pt solid; font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><B>2012 EQUITY INCENTIVE PLAN&nbsp;</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt; text-align: center">(Full title of the plan)</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><B>Eileen J. Evans&nbsp;</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt; text-align: center"><B>Axcelis Technologies,&nbsp;Inc.&nbsp;</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt; text-align: center"><B>108 Cherry Hill Drive&nbsp;</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt; text-align: center"><B>Beverly, Massachusetts
01915&nbsp;</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt; text-align: center"><B>(978)&nbsp;787-4000&nbsp;</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt; text-align: center">(Name, address and telephone
number of agent for service)</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; text-align: center; margin-top: 0pt; margin-bottom: 0pt">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt; text-align: center"><B>with copies to:</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; text-align: center; margin-top: 0pt; margin-bottom: 0pt">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt; text-align: center"><B>Megan N. Gates&nbsp;</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt; text-align: center"><B>Sarah C. Griffiths&nbsp;</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt; text-align: center"><B>Covington&nbsp;&amp;
Burling LLP&nbsp;</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt; text-align: center"><B>One International Place,
Suite&nbsp;1020&nbsp;</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt; text-align: center"><B>Boston, Massachusetts
02110&nbsp;</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt; text-align: center"><B>(617)&nbsp;603-8800</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">Indicate by check mark whether the registrant is a large accelerated
filer, an accelerated filer, a non-accelerated filer, a smaller reporting company or an emerging growth company.&nbsp; See the definitions
of &ldquo;large accelerated filer,&rdquo; &ldquo;accelerated filer&rdquo; &ldquo;smaller reporting company,&rdquo; and &ldquo;emerging
growth company&rdquo; in Rule&nbsp;12b-2 of the Exchange Act.</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLSPACING="0" CELLPADDING="0" STYLE="font: 10pt Times New Roman, Times, Serif; width: 100%; border-collapse: collapse">
  <TR>
    <TD STYLE="vertical-align: top; width: 58%; font-size: 10pt">Large accelerated filer&nbsp;<FONT STYLE="font-family: Wingdings">&#120;</FONT></TD>
    <TD STYLE="vertical-align: bottom; width: 2%; font-size: 10pt">&nbsp;</TD>
    <TD STYLE="vertical-align: top; width: 40%; font-size: 10pt">Accelerated filer&#8239;<FONT STYLE="font-family: Wingdings"><FONT STYLE="font-family: Wingdings">&#168;</FONT></FONT></TD></TR>
  <TR>
    <TD STYLE="vertical-align: top; font-size: 10pt">Non-accelerated filer&nbsp;&nbsp;&nbsp;<FONT STYLE="font-family: Wingdings"><FONT STYLE="font-family: Wingdings">&#168;</FONT></FONT></TD>
    <TD STYLE="vertical-align: bottom; font-size: 10pt">&nbsp;</TD>
    <TD STYLE="vertical-align: top">
    <P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">Smaller reporting company&nbsp;<FONT STYLE="font-family: Wingdings"><FONT STYLE="font-family: Wingdings">&#168;</FONT></FONT></P>
    <P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">Emerging growth company <FONT STYLE="font-family: Wingdings"><FONT STYLE="font-family: Wingdings">&#168;</FONT></FONT></P></TD></TR>
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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">If an emerging growth company, indicate by check mark if the registrant
has elected not to use the extended transition period for complying with any new or revised financial accounting standards provided pursuant
to Section&nbsp;13(a)&nbsp;of the Exchange Act. <FONT STYLE="font-family: Wingdings">&#168;</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"></P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"></P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"><B>Statement Regarding Incorporation by Reference from Effective Registration
Statement</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">The Registrant hereby increases the number of shares of its Common
Stock, $0.001 par value per share (the &ldquo;Common Stock&rdquo;), registered for issuance under its 2012 Equity Incentive Plan by 3,000,000
shares. Pursuant to General Instruction E to Form&nbsp;S-8, the Registrant incorporates by reference into this Registration Statement
the entire contents of its Registration Statement on Form&nbsp;S-8 (<A HREF="https://www.sec.gov/Archives/edgar/data/1113232/000110465912040602/a12-12723_1s8.htm" STYLE="-sec-extract: exhibit">File No.&nbsp;333-181750</A>) filed with the Securities and Exchange Commission
(the &ldquo;Commission&rdquo;) on May&nbsp;30, 2012 relating to the registration of 3,800,000 shares of Common Stock authorized for issuance
under the 2012 Equity Incentive Plan. The Registrant also incorporates by reference the Registration Statements on Forms S-8 (Commission
File Nos. <A HREF="https://www.sec.gov/Archives/edgar/data/1113232/000110465913046009/a13-12912_1s8.htm" STYLE="-sec-extract: exhibit">333-188967</A>, <A HREF="https://www.sec.gov/Archives/edgar/data/1113232/000110465914040903/a14-13028_1s8.htm" STYLE="-sec-extract: exhibit">333-196157</A>, <A HREF="https://www.sec.gov/Archives/edgar/data/1113232/000110465915041844/a15-12444_1s8.htm" STYLE="-sec-extract: exhibit">333-204544</A>, <A HREF="https://www.sec.gov/Archives/edgar/data/1113232/000110465916123927/a16-11373_1s8.htm" STYLE="-sec-extract: exhibit">333-211673</A>, <A HREF="https://www.sec.gov/Archives/edgar/data/1113232/000110465917035148/a17-13061_1s8.htm" STYLE="-sec-extract: exhibit">333-218225</A>, and <A HREF="https://www.sec.gov/Archives/edgar/data/1113232/000110465919030716/a19-10111_1s8.htm" STYLE="-sec-extract: exhibit">333-231634</A>) with the Commission relating to the registration
of 3,250,000, 1,500,000, 2,500,000, 4,000,000, 1,000,000 and 3,000,000 shares of Common Stock for issuance under the 2012 Equity Incentive
Plan on May&nbsp;31, 2013, May&nbsp;22, 2014, May&nbsp;29, 2015, May&nbsp;27, 2016, May&nbsp;25, 2017, and May&nbsp;21, 2019, respectively.</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><B>PART&nbsp;II</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><B>INFORMATION REQUIRED IN THE REGISTRATION STATEMENT</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"><B>Item 3. Incorporation of Documents by Reference.</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">The following documents, which have previously been filed by the Registrant
with the Commission, are incorporated by reference herein and shall be deemed to be a part hereof:</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0.25in"></TD><TD STYLE="width: 0.25in">(1)</TD><TD><A HREF="https://www.sec.gov/ix?doc=/Archives/edgar/data/1113232/000155837025001855/acls-20241231x10k.htm" STYLE="-sec-extract: exhibit">The Registrant&rsquo;s Annual Report on Form&nbsp;10-K for the year ended December&nbsp;31, 2024, filed with the Commission on February&nbsp;28, 2025;</A></TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0.25in"></TD><TD STYLE="width: 0.25in">(2)</TD><TD>All other reports filed pursuant to Section&nbsp;13(a)&nbsp;or 15(d)&nbsp;of the Securities Exchange Act of 1934 (the &ldquo;Exchange
Act&rdquo;) since the end of the fiscal year covered by the document referred to in (1)&nbsp;above (other than the portions of those documents
not deemed to be filed); and</TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0.25in"></TD><TD STYLE="width: 0.25in">(3)</TD><TD>The Description of Securities Registered under Section&nbsp;12 of the Exchange Act, included as <A HREF="http://www.sec.gov/Archives/edgar/data/1113232/000155837020001858/acls-20191231ex448a2eaee.htm" STYLE="-sec-extract: exhibit">Exhibit&nbsp;4.4 to the Registrant&rsquo;s Annual Report on Form&nbsp;10-K for the year ended December&nbsp;31, 2019, filed with the Commission on March&nbsp;2, 2020</A>.</TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">In addition, subsequent to the date of this Registration Statement
and prior to the filing of a post-effective amendment hereto that indicates all securities offered hereunder have been sold or deregisters
all securities then remaining unsold, all reports and other documents filed by the Registrant pursuant to Section&nbsp;13(a), 13(c), 14
or 15(d)&nbsp;of the Exchange Act shall be deemed to be incorporated by reference herein and to be a part hereof from the date of filing
of such documents; provided, however, that no information furnished (but not filed) under Item 2.02 or Item 7.01 of any Current Report
on Form&nbsp;8-K shall be incorporated by reference except to the extent specified in such Current Report on Form&nbsp;8-K.</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">For purposes of this Registration Statement, any statement contained
in a document incorporated or deemed to be incorporated herein by reference shall be deemed to be modified or superseded to the extent
that a statement contained herein or in any subsequently filed document that also is incorporated or is deemed to be incorporated herein
by reference modifies or supersedes such statement. Any statement so modified or superseded shall not be deemed, except as so modified
or superseded, to constitute a part of this Registration Statement.</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"></P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><U><A NAME="a_002"></A>SIGNATURES</U></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-indent: 0.5in">Pursuant to the requirements of the Securities
Act of 1933, as amended, the Registrant certifies that it has reasonable grounds to believe that it meets all of the requirements for
filing on Form&nbsp;S-8 and has duly caused this Registration Statement to be signed on its behalf by the undersigned, thereunto duly
authorized, in the City of Beverly, Massachusetts, on the 29<SUP>th</SUP> day of May, 2025.</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

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    <TD STYLE="font: 10pt Times New Roman, Times, Serif; text-align: left; text-indent: 3.5in"></TD><TD COLSPAN="2" STYLE="font: 10pt Times New Roman, Times, Serif">AXCELIS TECHNOLOGIES,&nbsp;INC.</TD></TR>
  <TR STYLE="font: 10pt Times New Roman, Times, Serif; vertical-align: bottom">
    <TD STYLE="font: 10pt Times New Roman, Times, Serif">&nbsp;</TD><TD STYLE="font: 10pt Times New Roman, Times, Serif">&nbsp;</TD>
    <TD STYLE="font: 10pt Times New Roman, Times, Serif; text-align: left">&nbsp;</TD></TR>
  <TR STYLE="font: 10pt Times New Roman, Times, Serif; vertical-align: bottom">
    <TD STYLE="font: 10pt Times New Roman, Times, Serif; width: 50%; padding-bottom: 1pt; text-indent: 3.5in"></TD><TD STYLE="font: 10pt Times New Roman, Times, Serif; width: 3%; padding-bottom: 1pt">By:</TD>
    <TD STYLE="border-bottom: Black 1pt solid; font: 10pt Times New Roman, Times, Serif; width: 47%; text-align: left; padding-bottom: 1pt">/s/ Russell J. Low Ph.D.</TD></TR>
  <TR STYLE="font: 10pt Times New Roman, Times, Serif; vertical-align: bottom">
    <TD STYLE="font: 10pt Times New Roman, Times, Serif">&nbsp;</TD><TD STYLE="font: 10pt Times New Roman, Times, Serif">&nbsp;</TD>
    <TD STYLE="font: 10pt Times New Roman, Times, Serif; text-align: left">Russell J. Low Ph.D., <I>President and Chief Executive Officer</I></TD></TR>
  </TABLE>


<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><U>POWER OF ATTORNEY</U></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-indent: 0.5in">We, the undersigned officers and directors of Axcelis
Technologies,&nbsp;Inc., hereby severally constitute and appoint Russell J. Low, James G. Coogan, and Eileen J. Evans, and each of them
singly, our true and lawful attorneys-in-fact, with full power to them in any and all capacities, to sign any and all amendments to this
Registration Statement on Form&nbsp;S-8 (including any post-effective amendments thereto) for the registration of 3,000,000 shares, and
to file the same, with exhibits thereto and other documents in connection therewith, with the Commission, with respect to the registration
of shares under the Axcelis Technologies,&nbsp;Inc. 2012 Equity Incentive Plan, hereby ratifying and confirming all that each of said
attorneys-in-fact may do or cause to be done by virtue hereof.</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-indent: 0.5in">Pursuant to the requirements of the Securities
Act of 1933, as amended, this Registration Statement has been signed below by the following persons in the capacities and on the dates
indicated.</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"></P>

<TABLE CELLSPACING="0" CELLPADDING="0" ALIGN="CENTER" STYLE="font: 10pt Times New Roman, Times, Serif; width: 90%; border-collapse: collapse">
<TR STYLE="vertical-align: bottom">
<TD STYLE="text-align: left; white-space: nowrap; width: 39%"><B><U>Signature</U> </B></TD>
<TD STYLE="text-align: center; width: 2%">&nbsp;</TD>
<TD STYLE="text-align: center; white-space: nowrap; width: 38%"><B><U>Title</U> </B></TD>
<TD STYLE="text-align: center; width: 2%">&nbsp;</TD>
<TD STYLE="text-align: center; white-space: nowrap; width: 19%"><B><U>Date</U> </B></TD></TR>
<TR STYLE="vertical-align: bottom">
<TD STYLE="text-align: left">&nbsp;</TD>
<TD>&nbsp;</TD>
<TD>&nbsp;</TD>
<TD>&nbsp;</TD>
<TD STYLE="text-align: left">&nbsp;</TD></TR>
<TR>
<TD STYLE="border-bottom: Black 1pt solid; text-align: left; vertical-align: top">/s/ Russell J. Low</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left; vertical-align: middle">Director
and Principal Executive Officer</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left">*</TD></TR>
<TR>
<TD STYLE="text-align: left; vertical-align: top"> Russell J. Low</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left; vertical-align: middle">&nbsp;</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left">&nbsp;</TD></TR>
<TR>
<TD STYLE="text-align: left; vertical-align: top">&nbsp;</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="vertical-align: bottom">&nbsp;</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left">&nbsp;</TD></TR>
<TR>
<TD STYLE="border-bottom: Black 1pt solid; text-align: left; vertical-align: top">/s/ James G. Coogan </TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left; vertical-align: middle">Principal Accounting and Financial Officer</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left">*</TD></TR>
<TR>
<TD STYLE="text-align: left; vertical-align: top">James G. Coogan</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left; vertical-align: middle">&nbsp;</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left">&nbsp;</TD></TR>
<TR>
<TD STYLE="text-align: left; vertical-align: top">&nbsp;</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="vertical-align: bottom">&nbsp;</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left">&nbsp;</TD></TR>
<TR>
<TD STYLE="border-bottom: Black 1pt solid; text-align: left; vertical-align: top">&nbsp;</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="vertical-align: bottom">Director</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left">&nbsp;</TD></TR>
<TR>
<TD STYLE="text-align: left; vertical-align: top">Tzu-Yin Chiu</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="vertical-align: bottom"></TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left"></TD></TR>
<TR>
<TD STYLE="text-align: left; vertical-align: top">&nbsp;</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="vertical-align: bottom">&nbsp;</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left">&nbsp;</TD></TR>
<TR>
<TD STYLE="border-bottom: Black 1pt solid; text-align: left; vertical-align: top">/s/ Gregory B. Graves </TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="vertical-align: bottom">Director</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left">*</TD></TR>

<TR>
<TD STYLE="text-align: left; vertical-align: top">Gregory B. Graves</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="vertical-align: bottom">&nbsp;</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left">&nbsp;</TD></TR>
<TR>
<TD STYLE="text-align: left; vertical-align: top">&nbsp;</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="vertical-align: bottom">&nbsp;</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left">&nbsp;</TD></TR>
<TR>
<TD STYLE="border-bottom: Black 1pt solid; text-align: left; vertical-align: top">/s/ John T. Kurtzweil </TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left; vertical-align: middle">Director</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left">*</TD></TR>

<TR>
<TD STYLE="text-align: left; vertical-align: top">John T. Kurtzweil</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left; vertical-align: middle">&nbsp;</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left">&nbsp;</TD></TR>
<TR>
<TD STYLE="text-align: left; vertical-align: top">&nbsp;</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left; vertical-align: middle">&nbsp;</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left">&nbsp;</TD></TR>
<TR>
<TD STYLE="border-bottom: Black 1pt solid; text-align: left; vertical-align: top">&nbsp;</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left; vertical-align: middle">Director</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left">&nbsp;</TD></TR>
<TR>
<TD STYLE="text-align: left; vertical-align: top"> Jeanne Quirk</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left; vertical-align: top"></TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left"></TD></TR>
<TR>
<TD STYLE="text-align: left; vertical-align: top">&nbsp;</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="vertical-align: bottom">&nbsp;</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left">&nbsp;</TD></TR>
<TR>
<TD STYLE="border-bottom: Black 1pt solid; text-align: left; vertical-align: top">/s/ Necip Sayiner </TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left; vertical-align: middle">Director</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left">*</TD></TR>

<TR>
<TD STYLE="text-align: left; vertical-align: top">Necip Sayiner</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left; vertical-align: middle">&nbsp;</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left">&nbsp;</TD></TR>
<TR>
<TD STYLE="text-align: left; vertical-align: top">&nbsp;</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left; vertical-align: middle">&nbsp;</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left">&nbsp;</TD></TR>
<TR>
<TD STYLE="border-bottom: Black 1pt solid; text-align: left; vertical-align: top">/s/ Thomas St. Dennis </TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left; vertical-align: middle">Director</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left">*</TD></TR>

<TR STYLE="vertical-align: bottom">
<TD STYLE="text-align: left">Thomas St. Dennis</TD>
<TD>&nbsp;</TD>
<TD>&nbsp;</TD>
<TD>&nbsp;</TD>
<TD STYLE="text-align: left">&nbsp;</TD></TR>
<TR STYLE="vertical-align: bottom">
<TD STYLE="text-align: left">&nbsp;</TD>
<TD>&nbsp;</TD>
<TD>&nbsp;</TD>
<TD>&nbsp;</TD>
<TD STYLE="text-align: left">&nbsp;</TD></TR>
<TR>
<TD STYLE="border-bottom: Black 1pt solid; text-align: left; vertical-align: top">/s/ Jorge Titinger </TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left; vertical-align: middle">Director</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left">*</TD></TR>



<TR>
<TD STYLE="text-align: left; vertical-align: top">Jorge Titinger</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left; vertical-align: middle">&nbsp;</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left">&nbsp;</TD></TR>
<TR>
<TD STYLE="text-align: left; vertical-align: top">&nbsp;</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left; vertical-align: middle">&nbsp;</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left">&nbsp;</TD></TR>
<TR>
<TD STYLE="text-align: left; vertical-align: top">&nbsp;</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left; vertical-align: middle">&nbsp;</TD>
<TD STYLE="vertical-align: top">&nbsp;</TD>
<TD STYLE="text-align: left">*May 29, 2025</TD></TR>
</TABLE>
<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-indent: 0.5in">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-indent: 0.5in"></P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-indent: 0.5in">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><U>EXHIBIT&nbsp;INDEX</U></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" STYLE="width: 100%; font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD>Exhibit <BR>
<U>Number</U></TD><TD STYLE="text-align: left; vertical-align: bottom"><U>Description</U></TD></TR>
                                                                                                                                          <TR STYLE="vertical-align: top">
<TD>&nbsp;</TD><TD>&nbsp;</TD></TR>
                                                                                                                                          <TR STYLE="vertical-align: top">
<TD STYLE="width: 99pt"><A HREF="https://www.sec.gov/Archives/edgar/data/1113232/000155837017008078/acls-20170930ex31a83feb6.htm" STYLE="-sec-extract: exhibit">4.1*</A></TD><TD><A HREF="https://www.sec.gov/Archives/edgar/data/1113232/000155837017008078/acls-20170930ex31a83feb6.htm" STYLE="-sec-extract: exhibit">Restated Certificate of Incorporation of the Registrant, as adopted November&nbsp;2, 2017. Incorporated by reference to Exhibit&nbsp;3.1
of the Registrant&rsquo;s Form&nbsp;10-Q filed with the Commission on November&nbsp;3, 2017.</A></TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0pt"></TD><TD STYLE="width: 99pt"><A HREF="https://www.sec.gov/Archives/edgar/data/1113232/000110465924059307/tm2413500d1_ex3-1.htm" STYLE="-sec-extract: exhibit">4.2*</A></TD><TD><A HREF="https://www.sec.gov/Archives/edgar/data/1113232/000110465924059307/tm2413500d1_ex3-1.htm" STYLE="-sec-extract: exhibit">Certificate of Amendment to the Restated Certificate of Incorporation of the Registrant filed May&nbsp;9, 2024. Incorporated by reference
to Exhibit&nbsp;3.1 of the Registrant&rsquo;s Form&nbsp;8-K filed with the Commission on May&nbsp;9, 2024.</A></TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0pt"></TD><TD STYLE="width: 99pt"><A HREF="https://www.sec.gov/Archives/edgar/data/1113232/000110465922058781/tm2213765d1_ex3-1.htm" STYLE="-sec-extract: exhibit"><FONT STYLE="font-family: Times New Roman, Times, Serif">4.3*</FONT></A></TD><TD><A HREF="https://www.sec.gov/Archives/edgar/data/1113232/000110465922058781/tm2213765d1_ex3-1.htm" STYLE="-sec-extract: exhibit">Bylaws of the Registrant, as amended as of May&nbsp;11, 2022. Incorporated by reference to Exhibit&nbsp;3.1 of the Registrant&rsquo;s
Form&nbsp;8-K filed with the Commission on May&nbsp;11, 2022.</A></TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0pt"></TD><TD STYLE="width: 99pt"><A HREF="tm2515248d1_ex5-1.htm">5.1</A></TD><TD><A HREF="tm2515248d1_ex5-1.htm">Opinion of Covington&nbsp;&amp; Burling LLP as to the legality of the shares being registered hereunder. Filed herewith.</A></TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0pt"></TD><TD STYLE="width: 99pt"><A HREF="https://www.sec.gov/Archives/edgar/data/1113232/000110465925046247/tm2514302d1_ex10-1.htm" STYLE="-sec-extract: exhibit">10.1*</A></TD><TD><A HREF="https://www.sec.gov/Archives/edgar/data/1113232/000110465925046247/tm2514302d1_ex10-1.htm" STYLE="-sec-extract: exhibit">Axcelis Technologies,&nbsp;Inc. 2012 Equity Incentive Plan, as amended through May&nbsp;7, 2025. Incorporated by reference to Exhibit&nbsp;10.1
of the Registrant&rsquo;s Form&nbsp;8-K filed with the Commission on May&nbsp;8, 2025.</A></TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0pt"></TD><TD STYLE="width: 99pt"><A HREF="tm2515248d1_ex5-1.htm">23.1</A></TD><TD><A HREF="tm2515248d1_ex5-1.htm"><FONT STYLE="font-family: Times New Roman, Times, Serif">Consent of Covington&nbsp;&amp; Burling LLP (included in the Opinion filed
as Exhibit&nbsp;5.1).</FONT></A></TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" STYLE="width: 100%; font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 99pt"><A HREF="tm2515248d1_ex23-1.htm" STYLE="-sec-extract: exhibit">23.2</A></TD><TD><A HREF="tm2515248d1_ex23-1.htm" STYLE="-sec-extract: exhibit">Consent of Ernst&nbsp;&amp; Young LLP, independent accountants. Filed herewith.</A></TD></TR><TR STYLE="vertical-align: top">
<TD>&nbsp;</TD><TD>&nbsp;</TD></TR>
                                                                                                                                                          <TR STYLE="vertical-align: top">
<TD><A HREF="#a_002">24.1</A></TD><TD><A HREF="#a_002">Power
of Attorney (contained on the signature page&nbsp;hereto).</A></TD></TR>
                                                                                                                                                          <TR STYLE="vertical-align: top">
<TD>&nbsp;</TD><TD>&nbsp;</TD></TR>
                                                                                                                                                          <TR STYLE="vertical-align: top">
<TD><A HREF="tm2515248d1_ex-filingfees.htm" STYLE="-sec-extract: exhibit">107</A></TD><TD><A HREF="tm2515248d1_ex-filingfees.htm" STYLE="-sec-extract: exhibit">Filing
Fee Table. Filed herewith.</A></TD></TR>
                                                                                                                                                          </TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"></P>

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<P STYLE="text-align: left; font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"><FONT STYLE="font-family: Times New Roman, Times, Serif">*</FONT> Indicates
exhibit previously filed with the Securities and Exchange Commission and incorporated herein by reference. Exhibits filed with Forms 10-Q
or 8-K of Axcelis Technologies,&nbsp;Inc. were filed under Commission File No.&nbsp;000-30941.</P>

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[{"type": "S-8", "sequence": "1", "filename": "tm2515248d1_s8.htm", "description": "FORM S-8", "secsgml_size_bytes": 38376}]
{"company-data": {"conformed-name": "AXCELIS TECHNOLOGIES INC", "cik": "0001113232", "assigned-sic": "3559", "organization-name": "06 Technology", "ein": "341818596", "state-of-incorporation": "DE", "fiscal-year-end": "1231"}, "filing-values": {"form-type": "S-8", "act": "33", "file-number": "333-287655", "film-number": "251004739"}, "business-address": {"street1": "108 CHERRY HILL DRIVE", "city": "BEVERLY", "state": "MA", "zip": "01915", "phone": "978-787-4000"}, "mail-address": {"street1": "108 CHERRY HILL DRIVE", "city": "BEVERLY", "state": "MA", "zip": "01915"}, "former-company": {"former-conformed-name": "EATON SEMICONDUCTOR EQUIPMENT INC", "date-changed": "20000501"}}
As filed with the Securities and Exchange Commission
on May 29, 2025
REGISTRATION NO. 333-
UNITED STATES
SECURITIES AND EXCHANGE COMMISSION
WASHINGTON, DC 20549
FORM S-8
REGISTRATION STATEMENT UNDER THE SECURITIES
ACT OF 1933
AXCELIS TECHNOLOGIES, INC.
(Exact name of registrant as specified in its charter)
Delaware
(State or other jurisdiction
    of incorporation)
34-1818596
(I.R.S. Employer Identification No.)
108 Cherry Hill Drive, Beverly, Massachusetts
01915
(Address of Principal Executive
Offices and Zip Code)
2012 EQUITY INCENTIVE PLAN
(Full title of the plan)
Eileen J. Evans
Axcelis Technologies, Inc.
108 Cherry Hill Drive
Beverly, Massachusetts
01915
(978) 787-4000
(Name, address and telephone
number of agent for service)
with copies to:
Megan N. Gates
Sarah C. Griffiths
Covington &
Burling LLP
One International Place,
Suite 1020
Boston, Massachusetts
02110
(617) 603-8800
Indicate by check mark whether the registrant is a large accelerated
filer, an accelerated filer, a non-accelerated filer, a smaller reporting company or an emerging growth company.  See the definitions
of "large accelerated filer," "accelerated filer" "smaller reporting company," and "emerging
growth company" in Rule 12b-2 of the Exchange Act.
Large accelerated filer
x
Accelerated filer
¨
Non-accelerated filer
¨
Smaller reporting company
¨
Emerging growth company
¨
If an emerging growth company, indicate by check mark if the registrant
has elected not to use the extended transition period for complying with any new or revised financial accounting standards provided pursuant
to Section 13(a) of the Exchange Act.
¨
Statement Regarding Incorporation by Reference from Effective Registration
Statement
The Registrant hereby increases the number of shares of its Common
Stock, $0.001 par value per share (the "Common Stock"), registered for issuance under its 2012 Equity Incentive Plan by 3,000,000
shares. Pursuant to General Instruction E to Form S-8, the Registrant incorporates by reference into this Registration Statement
the entire contents of its Registration Statement on Form S-8 (
File No. 333-181750
) filed with the Securities and Exchange Commission
(the "Commission") on May 30, 2012 relating to the registration of 3,800,000 shares of Common Stock authorized for issuance
under the 2012 Equity Incentive Plan. The Registrant also incorporates by reference the Registration Statements on Forms S-8 (Commission
File Nos.
333-188967
,
333-196157
,
333-204544
,
333-211673
,
333-218225
, and
333-231634
) with the Commission relating to the registration
of 3,250,000, 1,500,000, 2,500,000, 4,000,000, 1,000,000 and 3,000,000 shares of Common Stock for issuance under the 2012 Equity Incentive
Plan on May 31, 2013, May 22, 2014, May 29, 2015, May 27, 2016, May 25, 2017, and May 21, 2019, respectively.
PART II
INFORMATION REQUIRED IN THE REGISTRATION STATEMENT
Item 3. Incorporation of Documents by Reference.
The following documents, which have previously been filed by the Registrant
with the Commission, are incorporated by reference herein and shall be deemed to be a part hereof:
(1)
The Registrant's Annual Report on Form 10-K for the year ended December 31, 2024, filed with the Commission on February 28, 2025;
(2)
All other reports filed pursuant to Section 13(a) or 15(d) of the Securities Exchange Act of 1934 (the "Exchange
Act") since the end of the fiscal year covered by the document referred to in (1) above (other than the portions of those documents
not deemed to be filed); and
(3)
The Description of Securities Registered under Section 12 of the Exchange Act, included as
Exhibit 4.4 to the Registrant's Annual Report on Form 10-K for the year ended December 31, 2019, filed with the Commission on March 2, 2020
.
In addition, subsequent to the date of this Registration Statement
and prior to the filing of a post-effective amendment hereto that indicates all securities offered hereunder have been sold or deregisters
all securities then remaining unsold, all reports and other documents filed by the Registrant pursuant to Section 13(a), 13(c), 14
or 15(d) of the Exchange Act shall be deemed to be incorporated by reference herein and to be a part hereof from the date of filing
of such documents; provided, however, that no information furnished (but not filed) under Item 2.02 or Item 7.01 of any Current Report
on Form 8-K shall be incorporated by reference except to the extent specified in such Current Report on Form 8-K.
For purposes of this Registration Statement, any statement contained
in a document incorporated or deemed to be incorporated herein by reference shall be deemed to be modified or superseded to the extent
that a statement contained herein or in any subsequently filed document that also is incorporated or is deemed to be incorporated herein
by reference modifies or supersedes such statement. Any statement so modified or superseded shall not be deemed, except as so modified
or superseded, to constitute a part of this Registration Statement.
SIGNATURES
Pursuant to the requirements of the Securities
Act of 1933, as amended, the Registrant certifies that it has reasonable grounds to believe that it meets all of the requirements for
filing on Form S-8 and has duly caused this Registration Statement to be signed on its behalf by the undersigned, thereunto duly
authorized, in the City of Beverly, Massachusetts, on the 29
th
day of May, 2025.
AXCELIS TECHNOLOGIES, INC.
By:
/s/ Russell J. Low Ph.D.
Russell J. Low Ph.D.,
President and Chief Executive Officer
POWER OF ATTORNEY
We, the undersigned officers and directors of Axcelis
Technologies, Inc., hereby severally constitute and appoint Russell J. Low, James G. Coogan, and Eileen J. Evans, and each of them
singly, our true and lawful attorneys-in-fact, with full power to them in any and all capacities, to sign any and all amendments to this
Registration Statement on Form S-8 (including any post-effective amendments thereto) for the registration of 3,000,000 shares, and
to file the same, with exhibits thereto and other documents in connection therewith, with the Commission, with respect to the registration
of shares under the Axcelis Technologies, Inc. 2012 Equity Incentive Plan, hereby ratifying and confirming all that each of said
attorneys-in-fact may do or cause to be done by virtue hereof.
Pursuant to the requirements of the Securities
Act of 1933, as amended, this Registration Statement has been signed below by the following persons in the capacities and on the dates
indicated.
Signature
Title
Date
/s/ Russell J. Low
Director
and Principal Executive Officer
*
Russell J. Low
/s/ James G. Coogan
Principal Accounting and Financial Officer
*
James G. Coogan
Director
Tzu-Yin Chiu
/s/ Gregory B. Graves
Director
*
Gregory B. Graves
/s/ John T. Kurtzweil
Director
*
John T. Kurtzweil
Director
Jeanne Quirk
/s/ Necip Sayiner
Director
*
Necip Sayiner
/s/ Thomas St. Dennis
Director
*
Thomas St. Dennis
/s/ Jorge Titinger
Director
*
Jorge Titinger
*May 29, 2025
EXHIBIT INDEX
Exhibit
Number
Description
4.1*
Restated Certificate of Incorporation of the Registrant, as adopted November 2, 2017. Incorporated by reference to Exhibit 3.1
of the Registrant's Form 10-Q filed with the Commission on November 3, 2017.
4.2*
Certificate of Amendment to the Restated Certificate of Incorporation of the Registrant filed May 9, 2024. Incorporated by reference
to Exhibit 3.1 of the Registrant's Form 8-K filed with the Commission on May 9, 2024.
4.3*
Bylaws of the Registrant, as amended as of May 11, 2022. Incorporated by reference to Exhibit 3.1 of the Registrant's
Form 8-K filed with the Commission on May 11, 2022.
5.1
Opinion of Covington & Burling LLP as to the legality of the shares being registered hereunder. Filed herewith.
10.1*
Axcelis Technologies, Inc. 2012 Equity Incentive Plan, as amended through May 7, 2025. Incorporated by reference to Exhibit 10.1
of the Registrant's Form 8-K filed with the Commission on May 8, 2025.
23.1
Consent of Covington & Burling LLP (included in the Opinion filed
as Exhibit 5.1).
23.2
Consent of Ernst & Young LLP, independent accountants. Filed herewith.
24.1
Power
of Attorney (contained on the signature page hereto).
107
Filing
Fee Table. Filed herewith.
*
Indicates
exhibit previously filed with the Securities and Exchange Commission and incorporated herein by reference. Exhibits filed with Forms 10-Q
or 8-K of Axcelis Technologies, Inc. were filed under Commission File No. 000-30941.