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      <submissionType>144</submissionType>
      <filerInfo>
        <filer>
          <filerCredentials>
            <cik>0001073329</cik>
            <ccc>XXXXXXXX</ccc>
          </filerCredentials>
        </filer>
        <liveTestFlag>LIVE</liveTestFlag>
  
  
      </filerInfo>
    </headerData>
    <formData>
      <issuerInfo>
        <issuerCik>0001113232</issuerCik>
        <issuerName>AXCELIS TECHNOLOGIES INC</issuerName>
        <secFileNumber>000-30941</secFileNumber>
        <issuerAddress>
          <com:street1>108 CHERRY HILL DRIVE</com:street1>
          <com:city>BEVERLY</com:city>
          <com:stateOrCountry>MA</com:stateOrCountry>
          <com:zipCode>01915</com:zipCode>
        </issuerAddress>
        <issuerContactPhone>978-787-4000</issuerContactPhone>
        <nameOfPersonForWhoseAccountTheSecuritiesAreToBeSold>KEITHLEY JOSEPH P</nameOfPersonForWhoseAccountTheSecuritiesAreToBeSold>
        <relationshipsToIssuer>
          <relationshipToIssuer>control person</relationshipToIssuer>
        </relationshipsToIssuer>
      </issuerInfo>
      <securitiesInformation>
        <securitiesClassTitle>Common</securitiesClassTitle>
        <brokerOrMarketmakerDetails>
          <name>Fidelity Brokerage Services LLC</name>
          <address>
            <com:street1>245 summer street</com:street1>
            <com:city>boston</com:city>
            <com:stateOrCountry>MA</com:stateOrCountry>
            <com:zipCode>02110</com:zipCode>
          </address>
        </brokerOrMarketmakerDetails>
        <noOfUnitsSold>2875</noOfUnitsSold>
        <aggregateMarketValue>372427.50</aggregateMarketValue>
        <noOfUnitsOutstanding>34000000</noOfUnitsOutstanding>
        <approxSaleDate>11/06/2023</approxSaleDate>
        <securitiesExchangeName>nasdaq</securitiesExchangeName>
      </securitiesInformation>
      <securitiesToBeSold>
        <securitiesClassTitle>common</securitiesClassTitle>
        <acquiredDate>05/24/2012</acquiredDate>
        <natureOfAcquisitionTransaction>stock award</natureOfAcquisitionTransaction>
        <nameOfPersonfromWhomAcquired>Joseph P. Keithley</nameOfPersonfromWhomAcquired>
        <isGiftTransaction>N</isGiftTransaction>
        <amountOfSecuritiesAcquired>186</amountOfSecuritiesAcquired>
        <paymentDate>05/24/2012</paymentDate>
        <natureOfPayment>Stock Award</natureOfPayment>
      </securitiesToBeSold>
      <securitiesToBeSold>
        <securitiesClassTitle>common</securitiesClassTitle>
        <acquiredDate>05/16/2023</acquiredDate>
        <natureOfAcquisitionTransaction>stock award</natureOfAcquisitionTransaction>
        <nameOfPersonfromWhomAcquired>Joseph P. Keithley</nameOfPersonfromWhomAcquired>
        <isGiftTransaction>N</isGiftTransaction>
        <amountOfSecuritiesAcquired>2689</amountOfSecuritiesAcquired>
        <paymentDate>05/16/2023</paymentDate>
        <natureOfPayment>Stock Award</natureOfPayment>
      </securitiesToBeSold>
      <nothingToReportFlagOnSecuritiesSoldInPast3Months>Y</nothingToReportFlagOnSecuritiesSoldInPast3Months>
      <remarks>shares are being sold from Joseph P Keithley 1985 trust</remarks>
      <noticeSignature>
        <noticeDate>11/06/2023</noticeDate>
        <signature>/s/ Audrey Skillern as a duly authorized representative of Fidelity Brokerage Services LLC, as attorney-in-fact for Joseph P Keithley</signature>
      </noticeSignature>
    </formData>
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text: 144
  0001073329
  XXXXXXXX
  LIVE
  0001113232
  AXCELIS TECHNOLOGIES INC
  000-30941
  108 CHERRY HILL DRIVE
  BEVERLY
  MA
  01915
  978-787-4000
  KEITHLEY JOSEPH P
  control person
  Common
  Fidelity Brokerage Services LLC
  245 summer street
  boston
  MA
  02110
  2875
  372427.50
  34000000
  11/06/2023
  nasdaq
  common
  05/24/2012
  stock award
  Joseph P. Keithley
  N
  186
  05/24/2012
  Stock Award
  common
  05/16/2023
  stock award
  Joseph P. Keithley
  N
  2689
  05/16/2023
  Stock Award
  Y
  shares are being sold from Joseph P Keithley 1985 trust
  11/06/2023
  /s/ Audrey Skillern as a duly authorized representative of Fidelity Brokerage Services LLC, as attorney-in-fact for Joseph P Keithley