<?xml version="1.0" encoding="UTF-8"?><edgarSubmission xmlns="http://www.sec.gov/edgar/ownership" xmlns:com="http://www.sec.gov/edgar/common">
  <headerData>
    <submissionType>144</submissionType>
    <filerInfo>
      <filer>
        <filerCredentials>
          <cik>0001073329</cik>
          <ccc>XXXXXXXX</ccc>
        </filerCredentials>
      </filer>
      <liveTestFlag>LIVE</liveTestFlag>


    </filerInfo>
  </headerData>
  <formData>
    <issuerInfo>
      <issuerCik>0001113232</issuerCik>
      <issuerName>AXCELIS TECHNOLOGIES INC</issuerName>
      <secFileNumber>000-30941</secFileNumber>
      <issuerAddress>
        <com:street1>108 CHERRY HILL DRIVE</com:street1>
        <com:city>BEVERLY</com:city>
        <com:stateOrCountry>MA</com:stateOrCountry>
        <com:zipCode>01915</com:zipCode>
      </issuerAddress>
      <issuerContactPhone>978-787-4000</issuerContactPhone>
      <nameOfPersonForWhoseAccountTheSecuritiesAreToBeSold>KEITHLEY JOSEPH P</nameOfPersonForWhoseAccountTheSecuritiesAreToBeSold>
      <relationshipsToIssuer>
        <relationshipToIssuer>Control Person</relationshipToIssuer>
      </relationshipsToIssuer>
    </issuerInfo>
    <securitiesInformation>
      <securitiesClassTitle>Common Stock</securitiesClassTitle>
      <brokerOrMarketmakerDetails>
        <name>Fidelity Brokerage Services LLC</name>
        <address>
          <com:street1>245 Summer Street</com:street1>
          <com:city>Boston</com:city>
          <com:stateOrCountry>MA</com:stateOrCountry>
          <com:zipCode>02110</com:zipCode>
        </address>
      </brokerOrMarketmakerDetails>
      <noOfUnitsSold>2875</noOfUnitsSold>
      <aggregateMarketValue>505252.50</aggregateMarketValue>
      <noOfUnitsOutstanding>32817464</noOfUnitsOutstanding>
      <approxSaleDate>08/07/2023</approxSaleDate>
      <securitiesExchangeName>NASDAQ</securitiesExchangeName>
    </securitiesInformation>
    <securitiesToBeSold>
      <securitiesClassTitle>Common Stock</securitiesClassTitle>
      <acquiredDate>05/16/2023</acquiredDate>
      <natureOfAcquisitionTransaction>Stock Award</natureOfAcquisitionTransaction>
      <nameOfPersonfromWhomAcquired>Joseph P. Keithley</nameOfPersonfromWhomAcquired>
      <isGiftTransaction>N</isGiftTransaction>
      <amountOfSecuritiesAcquired>2689</amountOfSecuritiesAcquired>
      <paymentDate>05/16/2023</paymentDate>
      <natureOfPayment>N/A</natureOfPayment>
    </securitiesToBeSold>
    <securitiesToBeSold>
      <securitiesClassTitle>Common Stock</securitiesClassTitle>
      <acquiredDate>05/24/2012</acquiredDate>
      <natureOfAcquisitionTransaction>Stock Award</natureOfAcquisitionTransaction>
      <nameOfPersonfromWhomAcquired>Joseph P. Keithley</nameOfPersonfromWhomAcquired>
      <isGiftTransaction>N</isGiftTransaction>
      <amountOfSecuritiesAcquired>1250</amountOfSecuritiesAcquired>
      <paymentDate>05/24/2012</paymentDate>
      <natureOfPayment>N/A</natureOfPayment>
    </securitiesToBeSold>
    <nothingToReportFlagOnSecuritiesSoldInPast3Months>N</nothingToReportFlagOnSecuritiesSoldInPast3Months>
    <securitiesSoldInPast3Months>
      <sellerDetails>
        <name>JOSEPH P. KEITHLEY 1985 TRUST</name>
        <address>
          <com:street1>C/O AXCELIS TECHNOLOGIES, INC.</com:street1>
          <com:street2>108 CHERRY HILL DRIVE</com:street2>
          <com:city>BEVERLY</com:city>
          <com:stateOrCountry>MA</com:stateOrCountry>
          <com:zipCode>01915</com:zipCode>
        </address>
      </sellerDetails>
      <securitiesClassTitle>Common Stock</securitiesClassTitle>
      <saleDate>05/15/2023</saleDate>
      <amountOfSecuritiesSold>3000</amountOfSecuritiesSold>
      <grossProceeds>378142.46</grossProceeds>
    </securitiesSoldInPast3Months>
    <securitiesSoldInPast3Months>
      <sellerDetails>
        <name>JOSEPH P. KEITHLEY 1985 TRUST</name>
        <address>
          <com:street1>C/O AXCELIS TECHNOLOGIES, INC.</com:street1>
          <com:street2>108 CHERRY HILL DRIVE</com:street2>
          <com:city>BEVERLY</com:city>
          <com:stateOrCountry>MA</com:stateOrCountry>
          <com:zipCode>01915</com:zipCode>
        </address>
      </sellerDetails>
      <securitiesClassTitle>Common Stock</securitiesClassTitle>
      <saleDate>05/16/2023</saleDate>
      <amountOfSecuritiesSold>1000</amountOfSecuritiesSold>
      <grossProceeds>130973.95</grossProceeds>
    </securitiesSoldInPast3Months>
    <securitiesSoldInPast3Months>
      <sellerDetails>
        <name>JOSEPH P. KEITHLEY 1985 TRUST</name>
        <address>
          <com:street1>C/O AXCELIS TECHNOLOGIES, INC.</com:street1>
          <com:street2>108 CHERRY HILL DRIVE</com:street2>
          <com:city>BEVERLY</com:city>
          <com:stateOrCountry>MA</com:stateOrCountry>
          <com:zipCode>01915</com:zipCode>
        </address>
      </sellerDetails>
      <securitiesClassTitle>Common Stock</securitiesClassTitle>
      <saleDate>05/17/2023</saleDate>
      <amountOfSecuritiesSold>1000</amountOfSecuritiesSold>
      <grossProceeds>134473.92</grossProceeds>
    </securitiesSoldInPast3Months>
    <securitiesSoldInPast3Months>
      <sellerDetails>
        <name>JOSEPH P. KEITHLEY 1985 TRUST</name>
        <address>
          <com:street1>C/O AXCELIS TECHNOLOGIES, INC.</com:street1>
          <com:street2>108 CHERRY HILL DRIVE</com:street2>
          <com:city>BEVERLY</com:city>
          <com:stateOrCountry>MA</com:stateOrCountry>
          <com:zipCode>01915</com:zipCode>
        </address>
      </sellerDetails>
      <securitiesClassTitle>Common Stock</securitiesClassTitle>
      <saleDate>05/18/2023</saleDate>
      <amountOfSecuritiesSold>2000</amountOfSecuritiesSold>
      <grossProceeds>284801.12</grossProceeds>
    </securitiesSoldInPast3Months>
    <securitiesSoldInPast3Months>
      <sellerDetails>
        <name>JOSEPH P. KEITHLEY 1985 TRUST</name>
        <address>
          <com:street1>C/O AXCELIS TECHNOLOGIES, INC.</com:street1>
          <com:street2>108 CHERRY HILL DRIVE</com:street2>
          <com:city>BEVERLY</com:city>
          <com:stateOrCountry>MA</com:stateOrCountry>
          <com:zipCode>01915</com:zipCode>
        </address>
      </sellerDetails>
      <securitiesClassTitle>Common Stock</securitiesClassTitle>
      <saleDate>05/25/2023</saleDate>
      <amountOfSecuritiesSold>1000</amountOfSecuritiesSold>
      <grossProceeds>152181.28</grossProceeds>
    </securitiesSoldInPast3Months>
    <securitiesSoldInPast3Months>
      <sellerDetails>
        <name>JOSEPH P. KEITHLEY 1985 TRUST</name>
        <address>
          <com:street1>C/O AXCELIS TECHNOLOGIES, INC.</com:street1>
          <com:street2>108 CHERRY HILL DRIVE</com:street2>
          <com:city>BEVERLY</com:city>
          <com:stateOrCountry>MA</com:stateOrCountry>
          <com:zipCode>01915</com:zipCode>
        </address>
      </sellerDetails>
      <securitiesClassTitle>Common Stock</securitiesClassTitle>
      <saleDate>06/06/2023</saleDate>
      <amountOfSecuritiesSold>1000</amountOfSecuritiesSold>
      <grossProceeds>163473.69</grossProceeds>
    </securitiesSoldInPast3Months>
    <securitiesSoldInPast3Months>
      <sellerDetails>
        <name>JOSEPH P. KEITHLEY 1985 TRUST</name>
        <address>
          <com:street1>C/O AXCELIS TECHNOLOGIES, INC.</com:street1>
          <com:street2>108 CHERRY HILL DRIVE</com:street2>
          <com:city>BEVERLY</com:city>
          <com:stateOrCountry>MA</com:stateOrCountry>
          <com:zipCode>01915</com:zipCode>
        </address>
      </sellerDetails>
      <securitiesClassTitle>Common Stock</securitiesClassTitle>
      <saleDate>06/07/2023</saleDate>
      <amountOfSecuritiesSold>1000</amountOfSecuritiesSold>
      <grossProceeds>172973.61</grossProceeds>
    </securitiesSoldInPast3Months>
    <securitiesSoldInPast3Months>
      <sellerDetails>
        <name>JOSEPH P. KEITHLEY 1985 TRUST</name>
        <address>
          <com:street1>C/O AXCELIS TECHNOLOGIES, INC.</com:street1>
          <com:street2>108 CHERRY HILL DRIVE</com:street2>
          <com:city>BEVERLY</com:city>
          <com:stateOrCountry>MA</com:stateOrCountry>
          <com:zipCode>01915</com:zipCode>
        </address>
      </sellerDetails>
      <securitiesClassTitle>Common Stock</securitiesClassTitle>
      <saleDate>06/12/2023</saleDate>
      <amountOfSecuritiesSold>500</amountOfSecuritiesSold>
      <grossProceeds>90861.77</grossProceeds>
    </securitiesSoldInPast3Months>
    <remarks>shares sold for JOSEPH P. KEITHLEY 1985 TRUST, JOSEPH P. KEITHLEY TRUSTEE</remarks>
    <noticeSignature>
      <noticeDate>08/07/2023</noticeDate>
      <signature>/s/ Myra King, as a duly authorized representative of Fidelity Brokerage Services LLC, as attorney-in-fact for JOSEPH P. KEITHLEY</signature>
    </noticeSignature>
  </formData>
</edgarSubmission>
[{"type": "144", "sequence": "1", "filename": "primary_doc.xml", "secsgml_size_bytes": 8866}]
144
0001073329
XXXXXXXX
LIVE
0001113232
AXCELIS TECHNOLOGIES INC
000-30941
108 CHERRY HILL DRIVE
BEVERLY
MA
01915
978-787-4000
KEITHLEY JOSEPH P
Control Person
Common Stock
Fidelity Brokerage Services LLC
245 Summer Street
Boston
MA
02110
2875
505252.50
32817464
08/07/2023
NASDAQ
Common Stock
05/16/2023
Stock Award
Joseph P. Keithley
N
2689
05/16/2023
N/A
Common Stock
05/24/2012
Stock Award
Joseph P. Keithley
N
1250
05/24/2012
N/A
N
JOSEPH P. KEITHLEY 1985 TRUST
C/O AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE
BEVERLY
MA
01915
Common Stock
05/15/2023
3000
378142.46
JOSEPH P. KEITHLEY 1985 TRUST
C/O AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE
BEVERLY
MA
01915
Common Stock
05/16/2023
1000
130973.95
JOSEPH P. KEITHLEY 1985 TRUST
C/O AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE
BEVERLY
MA
01915
Common Stock
05/17/2023
1000
134473.92
JOSEPH P. KEITHLEY 1985 TRUST
C/O AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE
BEVERLY
MA
01915
Common Stock
05/18/2023
2000
284801.12
JOSEPH P. KEITHLEY 1985 TRUST
C/O AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE
BEVERLY
MA
01915
Common Stock
05/25/2023
1000
152181.28
JOSEPH P. KEITHLEY 1985 TRUST
C/O AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE
BEVERLY
MA
01915
Common Stock
06/06/2023
1000
163473.69
JOSEPH P. KEITHLEY 1985 TRUST
C/O AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE
BEVERLY
MA
01915
Common Stock
06/07/2023
1000
172973.61
JOSEPH P. KEITHLEY 1985 TRUST
C/O AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE
BEVERLY
MA
01915
Common Stock
06/12/2023
500
90861.77
shares sold for JOSEPH P. KEITHLEY 1985 TRUST, JOSEPH P. KEITHLEY TRUSTEE
08/07/2023
/s/ Myra King, as a duly authorized representative of Fidelity Brokerage Services LLC, as attorney-in-fact for JOSEPH P. KEITHLEY