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            <liveTestFlag>LIVE</liveTestFlag>



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            <issuerName>AXCELIS TECHNOLOGIES, INC</issuerName>
            <secFileNumber>000-30941</secFileNumber>
            <issuerAddress>
                <ns2:street1>108 Cherry Hill Drive</ns2:street1>
                <ns2:city>Beverly</ns2:city>
                <ns2:stateOrCountry>MA</ns2:stateOrCountry>
                <ns2:zipCode>01915</ns2:zipCode>
            </issuerAddress>
            <issuerContactPhone>978-787-4000</issuerContactPhone>
            <nameOfPersonForWhoseAccountTheSecuritiesAreToBeSold>DOUGLAS LAWSON</nameOfPersonForWhoseAccountTheSecuritiesAreToBeSold>
            <relationshipsToIssuer>
                <relationshipToIssuer>Officer</relationshipToIssuer>
            </relationshipsToIssuer>
        </issuerInfo>
        <securitiesInformation>
            <securitiesClassTitle>Common</securitiesClassTitle>
            <brokerOrMarketmakerDetails>
                <name>Morgan Stanley Smith Barney LLC Executive Financial Services</name>
                <address>
                    <ns2:street1>1 New York Plaza</ns2:street1>
                    <ns2:street2>38th Floor</ns2:street2>
                    <ns2:city>New York</ns2:city>
                    <ns2:stateOrCountry>NY</ns2:stateOrCountry>
                    <ns2:zipCode>10004</ns2:zipCode>
                </address>
            </brokerOrMarketmakerDetails>
            <noOfUnitsSold>550</noOfUnitsSold>
            <aggregateMarketValue>79651.00</aggregateMarketValue>
            <noOfUnitsOutstanding>32711130</noOfUnitsOutstanding>
            <approxSaleDate>05/19/2023</approxSaleDate>
            <securitiesExchangeName>NASD</securitiesExchangeName>
        </securitiesInformation>
        <securitiesToBeSold>
            <securitiesClassTitle>Common</securitiesClassTitle>
            <acquiredDate>05/17/2023</acquiredDate>
            <natureOfAcquisitionTransaction>Restricted Stock Vested Under Issuer S-8 Registered Plan</natureOfAcquisitionTransaction>
            <nameOfPersonfromWhomAcquired>Issuer</nameOfPersonfromWhomAcquired>
            <isGiftTransaction>N</isGiftTransaction>
            <amountOfSecuritiesAcquired>550</amountOfSecuritiesAcquired>
            <paymentDate>05/17/2023</paymentDate>
            <natureOfPayment>Not Applicable</natureOfPayment>
        </securitiesToBeSold>
        <nothingToReportFlagOnSecuritiesSoldInPast3Months>N</nothingToReportFlagOnSecuritiesSoldInPast3Months>
        <securitiesSoldInPast3Months>
            <sellerDetails>
                <name>Douglas Lawson</name>
                <address>
                    <ns2:street1>108 Cherry Hill Drive</ns2:street1>
                    <ns2:city>Beverly</ns2:city>
                    <ns2:stateOrCountry>MA</ns2:stateOrCountry>
                    <ns2:zipCode>01915</ns2:zipCode>
                </address>
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            <securitiesClassTitle>Common</securitiesClassTitle>
            <saleDate>05/18/2023</saleDate>
            <amountOfSecuritiesSold>4703</amountOfSecuritiesSold>
            <grossProceeds>663340.00</grossProceeds>
        </securitiesSoldInPast3Months>
        <securitiesSoldInPast3Months>
            <sellerDetails>
                <name>Douglas Lawson</name>
                <address>
                    <ns2:street1>108 Cherry Hill Drive</ns2:street1>
                    <ns2:city>Beverly</ns2:city>
                    <ns2:stateOrCountry>MA</ns2:stateOrCountry>
                    <ns2:zipCode>01915</ns2:zipCode>
                </address>
            </sellerDetails>
            <securitiesClassTitle>Common</securitiesClassTitle>
            <saleDate>05/10/2023</saleDate>
            <amountOfSecuritiesSold>5734</amountOfSecuritiesSold>
            <grossProceeds>699548.00</grossProceeds>
        </securitiesSoldInPast3Months>
        <noticeSignature>
            <noticeDate>05/19/2023</noticeDate>
            <planAdoptionDates/>
            <signature>/s/ Douglas Lawson</signature>
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144
0001420601
XXXXXXXX
LIVE
0001113232
AXCELIS TECHNOLOGIES, INC
000-30941
108 Cherry Hill Drive
Beverly
MA
01915
978-787-4000
DOUGLAS LAWSON
Officer
Common
Morgan Stanley Smith Barney LLC Executive Financial Services
1 New York Plaza
38th Floor
New York
NY
10004
550
79651.00
32711130
05/19/2023
NASD
Common
05/17/2023
Restricted Stock Vested Under Issuer S-8 Registered Plan
Issuer
N
550
05/17/2023
Not Applicable
N
Douglas Lawson
108 Cherry Hill Drive
Beverly
MA
01915
Common
05/18/2023
4703
663340.00
Douglas Lawson
108 Cherry Hill Drive
Beverly
MA
01915
Common
05/10/2023
5734
699548.00
05/19/2023
/s/ Douglas Lawson