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  <TITLE>Prepared by R.R. Donnelley Financial -- Form 8-K</TITLE>
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   <HR NOSHADE COLOR="#000000" ALIGN="left"><DIV><FONT SIZE="1">&nbsp;</FONT></DIV> <DIV ALIGN="center"><FONT FACE="Times New Roman" SIZE="5" COLOR="#000000"><B>U.S. SECURITIES AND EXCHANGE COMMISSION
  </B></FONT></DIV> <DIV ALIGN="center"><FONT FACE="Times New Roman" SIZE="3" COLOR="#000000"><B>Washington, D.C. 20549 </B></FONT></DIV> <DIV><FONT SIZE="1">&nbsp;</FONT></DIV> <DIV><FONT SIZE="1">&nbsp;</FONT></DIV> <HR NOSHADE WIDTH="17%"
  COLOR="#000000"><DIV><FONT SIZE="1">&nbsp;</FONT></DIV> <DIV><FONT SIZE="1">&nbsp;</FONT></DIV> <DIV ALIGN="center"><FONT FACE="Times New Roman" SIZE="5" COLOR="#000000"><B>FORM 8-K </B></FONT></DIV> <DIV><FONT SIZE="1">&nbsp;</FONT></DIV>
  <DIV><FONT SIZE="1">&nbsp;</FONT></DIV> <DIV ALIGN="center"><FONT FACE="Times New Roman" SIZE="4" COLOR="#000000"><B>Current Report </B></FONT></DIV> <DIV><FONT SIZE="1">&nbsp;</FONT></DIV> <DIV ALIGN="center"><FONT FACE="Times New Roman" SIZE="3"
  COLOR="#000000"><B>Pursuant to Section 13 or 15(d) </B></FONT></DIV> <DIV ALIGN="center"><FONT FACE="Times New Roman" SIZE="3" COLOR="#000000"><B>of the Securities Exchange Act of 1934 </B></FONT></DIV> <DIV><FONT SIZE="1">&nbsp;</FONT></DIV> <DIV
  ALIGN="center"><FONT FACE="Times New Roman" SIZE="2" COLOR="#000000"><B>Date of Report (Date of earliest event reported): August 1, 2002 </B></FONT></DIV> <DIV><FONT SIZE="1">&nbsp;</FONT></DIV> <DIV><FONT SIZE="1">&nbsp;</FONT></DIV> <DIV><FONT
  SIZE="1">&nbsp;</FONT></DIV> <DIV ALIGN="center"><FONT FACE="Times New Roman" SIZE="5" COLOR="#000000"><B>THERMA-WAVE, INC. </B></FONT></DIV> <DIV ALIGN="center"><FONT FACE="Times New Roman" SIZE="1" COLOR="#000000"><B>(Exact Name of Registrant as
  Specified in Charter) </B></FONT></DIV> <DIV><FONT SIZE="1">&nbsp;</FONT></DIV> <DIV ALIGN="center"><FONT FACE="Times New Roman" SIZE="2" COLOR="#000000"><B>Delaware </B></FONT></DIV> <DIV ALIGN="center"><FONT FACE="Times New Roman" SIZE="2"
  COLOR="#000000"><B>(State or Other Jurisdiction of Incorporation) </B></FONT></DIV> <DIV><FONT SIZE="1">&nbsp;</FONT></DIV> <DIV ALIGN="center"><FONT FACE="Times New Roman" SIZE="2" COLOR="#000000"><B>000-26911 </B></FONT></DIV> <DIV
  ALIGN="center"><FONT FACE="Times New Roman" SIZE="1" COLOR="#000000"><B>(Commission File Number) </B></FONT></DIV> <DIV><FONT SIZE="1">&nbsp;</FONT></DIV> <DIV ALIGN="center"><FONT FACE="Times New Roman" SIZE="2" COLOR="#000000"><B>94-3000561
  </B></FONT></DIV> <DIV ALIGN="center"><FONT FACE="Times New Roman" SIZE="1" COLOR="#000000"><B>(I.R.S. Employer Identification Number) </B></FONT></DIV> <DIV><FONT SIZE="1">&nbsp;</FONT></DIV> <DIV ALIGN="center"><FONT FACE="Times New Roman"
  SIZE="2" COLOR="#000000"><B>1250 Reliance Way </B></FONT></DIV> <DIV ALIGN="center"><FONT FACE="Times New Roman" SIZE="2" COLOR="#000000"><B>Fremont, California 94539 </B></FONT></DIV> <DIV ALIGN="center"><FONT FACE="Times New Roman" SIZE="1"
  COLOR="#000000"><B>(Address of Principal Executive Offices) </B></FONT></DIV> <DIV ALIGN="center"><FONT FACE="Times New Roman" SIZE="1" COLOR="#000000"><B>(Zip Code) </B></FONT></DIV> <DIV><FONT SIZE="1">&nbsp;</FONT></DIV> <DIV ALIGN="center"><FONT
  FACE="Times New Roman" SIZE="2" COLOR="#000000"><B>(510) 668-2200 </B></FONT></DIV> <DIV ALIGN="center"><FONT FACE="Times New Roman" SIZE="1" COLOR="#000000"><B>(Registrant&#146;s telephone number, including area code) </B></FONT></DIV> <DIV><FONT
  SIZE="1">&nbsp;</FONT></DIV> <DIV ALIGN="center"><FONT FACE="Times New Roman" SIZE="2" COLOR="#000000"><B>Not Applicable </B></FONT></DIV> <DIV ALIGN="center"><FONT FACE="Times New Roman" SIZE="1" COLOR="#000000"><B>(Former Name or Former Address,
  If Changed Since Last Report) </B></FONT></DIV> <DIV><FONT SIZE="1">&nbsp;</FONT></DIV> <HR NOSHADE COLOR="#000000" ALIGN="left">
  
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   <DIV><FONT SIZE="1">&nbsp;</FONT></DIV> <DIV><FONT FACE="Times New Roman" SIZE="2" COLOR="#000000"><B>ITEM 5.&nbsp;&nbsp;&nbsp;&nbsp;OTHER EVENTS </B></FONT></DIV> <DIV><FONT SIZE="1">&nbsp;</FONT></DIV>
  <DIV STYLE="text-indent:4%"><FONT FACE="Times New Roman" SIZE="2" COLOR="#000000">On August 1, 2002, Therma-Wave, Inc. (&#147;Therma-Wave&#148;) issued a press release announcing a stock repurchase program. A copy of such press release concerning
  the program is attached as Exhibit 99.1 and incorporated herein by reference. </FONT></DIV> <DIV><FONT SIZE="1">&nbsp;</FONT></DIV> <DIV><FONT FACE="Times New Roman" SIZE="2" COLOR="#000000"><B>ITEM 7.&nbsp;&nbsp;&nbsp;&nbsp;FINANCIAL STATEMENTS,
  PRO FORMA FINANCIAL INFORMATION AND EXHIBITS </B></FONT></DIV> <DIV><FONT SIZE="1">&nbsp;</FONT></DIV>
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  <TD WIDTH="3%" VALIGN="top" ALIGN="left"><DIV><FONT FACE="Times New Roman" SIZE="2" COLOR="#000000">(a)</FONT></DIV></TD>
  <TD WIDTH="1%" VALIGN="top"><DIV><FONT SIZE="1">&nbsp;</FONT></DIV></TD>
  <TD ALIGN="left" VALIGN="top"><DIV><FONT FACE="Times New Roman" SIZE="2" COLOR="#000000">Exhibits </FONT></DIV> </TD></TR></TABLE> <DIV><FONT SIZE="1">&nbsp;</FONT></DIV> <DIV STYLE="margin-left:4%; text-indent:4%"><FONT FACE="Times New Roman"
  SIZE="2" COLOR="#000000">Exhibits included are set forth in the Exhibit Index pursuant to Item 601 of Regulation S-K. </FONT></DIV> <DIV><FONT SIZE="1">&nbsp;</FONT></DIV>
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  <TD WIDTH="3%" VALIGN="top" ALIGN="left"><DIV><FONT FACE="Times New Roman" SIZE="2" COLOR="#000000">(b)</FONT></DIV></TD>
  <TD WIDTH="1%" VALIGN="top"><DIV><FONT SIZE="1">&nbsp;</FONT></DIV></TD>
  <TD ALIGN="left" VALIGN="top"><DIV><FONT FACE="Times New Roman" SIZE="2" COLOR="#000000">SIGNATURE </FONT></DIV> </TD></TR></TABLE> <DIV><FONT SIZE="1">&nbsp;</FONT></DIV> <DIV STYLE="text-indent:4%"><FONT FACE="Times New Roman" SIZE="2"
  COLOR="#000000">Pursuant to the requirements of the Securities Exchange Act of 1934, the registrant has duly caused this report to be signed on its behalf by the undersigned, thereunto duly authorized. </FONT></DIV> <DIV><FONT
  SIZE="1">&nbsp;</FONT></DIV> <DIV>
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  <TD VALIGN="top" COLSPAN="3" WIDTH="53%"> <DIV STYLE="margin-left:2%; text-indent:-2%"><FONT FACE="Times New Roman" SIZE="2" COLOR="#000000">Dated:&nbsp;&nbsp;&nbsp;&nbsp;August 5, 2002</FONT></DIV> </TD>
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  <TD VALIGN="top" COLSPAN="5" WIDTH="53%"> <DIV STYLE="margin-left:2%; text-indent:-2%"><FONT FACE="Times New Roman" SIZE="2" COLOR="#000000">Therma-Wave, Inc.</FONT></DIV> </TD> </TR>
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  <TD HEIGHT="16"> </TD> </TR>
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  <TD> <FONT SIZE="1">&nbsp;</FONT></TD>
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  <TD> <FONT SIZE="1">&nbsp;</FONT></TD>
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  <TD VALIGN="top" WIDTH="5%"> <DIV STYLE="margin-left:2%; text-indent:-2%"><FONT FACE="Times New Roman" SIZE="2" COLOR="#000000">By:</FONT></DIV> </TD>
  <TD VALIGN="bottom" WIDTH="3%"><FONT FACE="Times New Roman" SIZE="1">&nbsp;</FONT></TD>
  <TD VALIGN="top" COLSPAN="3" WIDTH="53%"> <DIV><FONT FACE="Times New Roman" SIZE="2" COLOR="#000000">/s/&nbsp;&nbsp;&nbsp;&nbsp;L. R<SMALL>AY</SMALL> C<SMALL>HRISTIE</SMALL></FONT></DIV> <HR NOSHADE COLOR="#000000" ALIGN="left"></TD> </TR>
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  <TD> <FONT SIZE="1">&nbsp;</FONT></TD>
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  <TD VALIGN="top" WIDTH="5%"> <DIV STYLE="margin-left:2%; text-indent:-2%"><FONT FACE="Times New Roman" SIZE="2" COLOR="#000000">Name:</FONT></DIV> </TD>
  <TD VALIGN="bottom" WIDTH="3%"><FONT FACE="Times New Roman" SIZE="1">&nbsp;</FONT></TD>
  <TD VALIGN="top" COLSPAN="3" WIDTH="53%"> <DIV><FONT FACE="Times New Roman" SIZE="2" COLOR="#000000">L. Ray Christie</FONT></DIV> </TD> </TR>
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  <TD> <FONT SIZE="1">&nbsp;</FONT></TD>
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  <TD> <FONT SIZE="1">&nbsp;</FONT></TD>
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  <TD VALIGN="top" WIDTH="5%"> <DIV STYLE="margin-left:2%; text-indent:-2%"><FONT FACE="Times New Roman" SIZE="2" COLOR="#000000">Title:</FONT></DIV> </TD>
  <TD VALIGN="bottom" WIDTH="3%"><FONT FACE="Times New Roman" SIZE="1">&nbsp;</FONT></TD>
  <TD VALIGN="top" COLSPAN="3" WIDTH="53%"> <DIV><FONT FACE="Times New Roman" SIZE="2" COLOR="#000000">Senior Vice President and Chief Financial Officer</FONT></DIV> </TD> </TR>
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   <DIV><FONT SIZE="1">&nbsp;</FONT></DIV> <DIV ALIGN="center"><FONT FACE="Times New Roman" SIZE="2" COLOR="#000000"><B>EXHIBIT INDEX </B></FONT></DIV> <DIV><FONT SIZE="1">&nbsp;</FONT></DIV> <DIV
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  <TD VALIGN="bottom" ALIGN="center"> <DIV ALIGN="center"><FONT FACE="Times New Roman" SIZE="1" COLOR="#000000"><B>Number</B></FONT></DIV> <HR SIZE="2" NOSHADE WIDTH="48" COLOR="#000000"></TD>
  <TD VALIGN="bottom" WIDTH="3%"><FONT FACE="Times New Roman" SIZE="1">&nbsp;&nbsp;</FONT></TD>
  <TD VALIGN="bottom" WIDTH="100%"> <DIV><FONT FACE="Times New Roman" SIZE="1" COLOR="#000000"><B>Exhibit Description</B></FONT></DIV> <HR SIZE="2" NOSHADE WIDTH="120" ALIGN="left" COLOR="#000000"></TD> </TR>
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  <TD VALIGN="top" ALIGN="center" WIDTH="8%"> <DIV ALIGN="center"><FONT FACE="Times New Roman" SIZE="2" COLOR="#000000">99.1</FONT></DIV> </TD>
  <TD VALIGN="bottom" WIDTH="3%"><FONT FACE="Times New Roman" SIZE="1">&nbsp;&nbsp;</FONT></TD>
  <TD VALIGN="bottom" WIDTH="100%"> <DIV STYLE="margin-left:2%; text-indent:-2%"><FONT FACE="Times New Roman" SIZE="2" COLOR="#000000">Press Release dated August 1, 2002 announcing Therma-Wave&#146;s stock repurchase program.</FONT></DIV> </TD> </TR>
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metadata_filer: {"company-data": {"conformed-name": "THERMA WAVE INC", "cik": "0000828119", "assigned-sic": "3823", "irs-number": "943000561", "state-of-incorporation": "DE", "fiscal-year-end": "0331"}, "filing-values": {"form-type": "8-K", "act": "34", "file-number": "000-26911", "film-number": "02719665"}, "business-address": {"street1": "1250 RELIANCE WAY", "city": "FREMONT", "state": "CA", "zip": "94539", "phone": "5104903663"}, "mail-address": {"street1": "1250 RELIANCE WAY", "city": "FREMONT", "state": "CA", "zip": "94539"}}
text: Prepared by R.R. Donnelley Financial -- Form 8-K
  U.S. SECURITIES AND EXCHANGE COMMISSION
  Washington, D.C. 20549
  FORM 8-K
  Current Report
  Pursuant to Section 13 or 15(d)
  of the Securities Exchange Act of 1934
  Date of Report (Date of earliest event reported): August 1, 2002
  THERMA-WAVE, INC.
  (Exact Name of Registrant as
  Specified in Charter)
  Delaware
  (State or Other Jurisdiction of Incorporation)
  000-26911
  (Commission File Number)
  94-3000561
  (I.R.S. Employer Identification Number)
  1250 Reliance Way
  Fremont, California 94539
  (Address of Principal Executive Offices)
  (Zip Code)
  (510) 668-2200
  (Registrant's telephone number, including area code)
  Not Applicable
  (Former Name or Former Address,
  If Changed Since Last Report)
  ITEM 5.    OTHER EVENTS
  On August 1, 2002, Therma-Wave, Inc. ("Therma-Wave") issued a press release announcing a stock repurchase program. A copy of such press release concerning
  the program is attached as Exhibit 99.1 and incorporated herein by reference.
  ITEM 7.    FINANCIAL STATEMENTS,
  PRO FORMA FINANCIAL INFORMATION AND EXHIBITS
  (a)
  Exhibits
  Exhibits included are set forth in the Exhibit Index pursuant to Item 601 of Regulation S-K.
  (b)
  SIGNATURE
  Pursuant to the requirements of the Securities Exchange Act of 1934, the registrant has duly caused this report to be signed on its behalf by the undersigned, thereunto duly authorized.
  Dated:    August 5, 2002
  Therma-Wave, Inc.
  By:
  /s/    L. R
  AY
  C
  HRISTIE
  Name:
  L. Ray Christie
  Title:
  Senior Vice President and Chief Financial Officer
  EXHIBIT INDEX
  Number
  Exhibit Description
  99.1
  Press Release dated August 1, 2002 announcing Therma-Wave's stock repurchase program.