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<P align=center>U.S. SECURITIES AND EXCHANGE COMMISSION</P>
<P align=center>Washington, D.C. 20549</P>
<P align=center></P>
<P align=center>_________________</P>
<P align=center></P></FONT><FONT size=4>
<P align=center>FORM 8-K</P></B>
<P align=center></P>
<P align=center>&nbsp;</P><B>
<P align=center>Current Report</P>
<P align=center></P>
<P align=center>Pursuant to Section 13 or 15(d)</P>
<P align=center>of the Securities Exchange Act of 1934</P></B></FONT><FONT
size=2>
<P align=justify></P>
<P align=justify>&nbsp;</P>
<P align=center>Date of Report (Date of earliest event reported): May 28,
2003</P>
<P align=justify></P>
<P align=justify>&nbsp;</P><B>
<P align=center>THERMA-WAVE, INC.</P></B>
<P align=center>(Exact Name of Registrant as Specified in Charter)</P>
<P align=justify></P>
<P align=center>Delaware</P>
<P align=center>(State or Other Jurisdiction of Incorporation)</P>
<P align=justify></P>
<P align=center>000-26911</P>
<P align=center>(Commission File Number)</P>
<P align=justify></P>
<P align=center>94-3000561</P>
<P align=center>(I.R.S. Employer Identification Number)</P>
<P align=justify></P>
<P align=center>1250 Reliance Way</P>
<P align=center>Fremont, California</P>
<P align=center>(Address of Principal Executive Offices)</P>
<P align=center>94539</P>
<P align=center>(Zip Code)</P>
<P align=center></P>
<P align=center>(510) 668-2200</P>
<P align=center>(Registrant's telephone number, including area code)</P>
<P align=justify></P>
<P align=center>Not Applicable</P>
<P align=center>(Former Name or Former Address, If Changed Since Last
Report)</P>
<P align=justify></P>
<P align=justify>&nbsp;</P>
<P align=justify>&nbsp;</P>
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<P align=justify><B>ITEM 7. Financial Statements, Pro Forma Financial Information and Exhibits</B></P>
<P align=justify>(c) Exhibits</P>
<P align=justify>99.1 Press Release dated May 28, 2003 announcing fourth fiscal quarter and
fiscal year 2003 financial results.</P>

<P align=justify><B>ITEM 9. Regulation FD Disclosure</B></P>

<P align=justify>In accordance with SEC Release No. 33-8216, the following information,
intended to be furnished under "Item 12. Results of Operations and Financial Condition," is
instead furnished under this "Item 9. Regulation FD Disclosure."</P>

<P align=justify>On May 28, 2003, Therma-Wave, Inc. issued a press release announcing
its financial results for the fourth fiscal quarter and fiscal year ended March 30, 2003. A
copy of this press release is attached as Exhibit 99.1.</P>

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<P align=center>SIGNATURE</P>
<P align=justify>Pursuant to the requirements of the Securities Exchange Act of
1934, the registrant has duly caused this report to be signed on its behalf by
the undersigned, thereunto duly authorized.</P>
<P align=justify></P>
<P>Dated: May 28, 2003
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<DIR>Therma-Wave, Inc.
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<P>&nbsp;</P>
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<P>By: <U>/s/ L. Ray Christie <BR></U>Name: L. Ray Christie<BR>Title: Vice
President and Chief Financial
Officer</P></DIR></DIR></DIR></DIR></DIR></DIR></DIR></DIR></DIR></DIR></DIR></DIR></DIR></DIR>
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<P align=center>EXHIBIT INDEX</P>
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<P align=justify>Number
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Exhibit Description
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<P></P>
<P align=justify>99.1
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Press Release dated May 28, 2003
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8K DOC
U.S. SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549
_________________
FORM 8-K
Current Report
Pursuant to Section 13 or 15(d)
of the Securities Exchange Act of 1934
Date of Report (Date of earliest event reported): May 28,
2003
THERMA-WAVE, INC.
(Exact Name of Registrant as Specified in Charter)
Delaware
(State or Other Jurisdiction of Incorporation)
000-26911
(Commission File Number)
94-3000561
(I.R.S. Employer Identification Number)
1250 Reliance Way
Fremont, California
(Address of Principal Executive Offices)
94539
(Zip Code)
(510) 668-2200
(Registrant's telephone number, including area code)
Not Applicable
(Former Name or Former Address, If Changed Since Last
Report)
ITEM 7. Financial Statements, Pro Forma Financial Information and Exhibits
(c) Exhibits
99.1 Press Release dated May 28, 2003 announcing fourth fiscal quarter and
fiscal year 2003 financial results.
ITEM 9. Regulation FD Disclosure
In accordance with SEC Release No. 33-8216, the following information,
intended to be furnished under "Item 12. Results of Operations and Financial Condition," is
instead furnished under this "Item 9. Regulation FD Disclosure."
On May 28, 2003, Therma-Wave, Inc. issued a press release announcing
its financial results for the fourth fiscal quarter and fiscal year ended March 30, 2003. A
copy of this press release is attached as Exhibit 99.1.
SIGNATURE
Pursuant to the requirements of the Securities Exchange Act of
1934, the registrant has duly caused this report to be signed on its behalf by
the undersigned, thereunto duly authorized.
Dated: May 28, 2003
Therma-Wave, Inc.
By:
/s/ L. Ray Christie
Name: L. Ray Christie
Title: Vice
President and Chief Financial
Officer
EXHIBIT INDEX
Number
Exhibit Description
99.1
Press Release dated May 28, 2003