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<P align=center>U.S. SECURITIES AND EXCHANGE COMMISSION</P>
<P align=center>Washington, D.C. 20549</P>
<P align=center></P>
<P align=center>_________________</P>
<P align=center></P></FONT><FONT size=4>
<P align=center>FORM 8-K</P></B>
<P align=center></P>
<P align=center>&nbsp;</P><B>
<P align=center>Current Report</P>
<P align=center></P>
<P align=center>Pursuant to Section 13 or 15(d)</P>
<P align=center>of the Securities Exchange Act of 1934</P></B></FONT><FONT
size=2>
<P align=justify></P>
<P align=justify>&nbsp;</P>
<P align=center>Date of Report (Date of earliest event reported): September 16,
2003</P>
<P align=justify></P>
<P align=justify>&nbsp;</P><B>
<P align=center>THERMA-WAVE, INC.</P></B>
<P align=center>(Exact Name of Registrant as Specified in Charter)</P>
<P align=justify></P>
<P align=center>Delaware</P>
<P align=center>(State or Other Jurisdiction of Incorporation)</P>
<P align=justify></P>
<P align=center>000-26911</P>
<P align=center>(Commission File Number)</P>
<P align=justify></P>
<P align=center>94-3000561</P>
<P align=center>(I.R.S. Employer Identification Number)</P>
<P align=justify></P>
<P align=center>1250 Reliance Way</P>
<P align=center>Fremont, California</P>
<P align=center>(Address of Principal Executive Offices)</P>
<P align=center>94539</P>
<P align=center>(Zip Code)</P>
<P align=center></P>
<P align=center>(510) 668-2200</P>
<P align=center>(Registrant's telephone number, including area code)</P>
<P align=justify></P>
<P align=center>Not Applicable</P>
<P align=center>(Former Name or Former Address, If Changed Since Last
Report)</P>
<P align=justify></P>
<P align=justify>&nbsp;</P>
<P align=justify>&nbsp;</P>
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<P align=justify><B>ITEM 9. Regulation FD Disclosure</B></P>

<P align=justify>On September 16, 2003, Therma-Wave, Inc. issued a press release
announcing closing of $12.8 million private placement of common stock.
A copy of this press release is attached as Exhibit 99.1.</P>
<P align=center></P>
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<P align=center>SIGNATURE</P>
<P align=justify>Pursuant to the requirements of the Securities Exchange Act of
1934, the registrant has duly caused this report to be signed on its behalf by
the undersigned, thereunto duly authorized.</P>
<P align=justify></P>
<P>Dated: September 16, 2003
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<DIR>Therma-Wave, Inc.
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<P>&nbsp;</P>
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<P>By: <U>/s/ L. Ray Christie <BR></U>Name: L. Ray Christie<BR>Title: Vice
President and Chief Financial
Officer</P></DIR></DIR></DIR></DIR></DIR></DIR></DIR></DIR></DIR></DIR></DIR></DIR></DIR></DIR>
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<P align=center>EXHIBIT INDEX</P>
<P align=justify></P>
<P>Number &nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Exhibit
Description</P>
<P></P>
<P>99.1
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Press
Release dated September 16, 2003</P>
<P></P>
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8K DOC
U.S. SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549
_________________
FORM 8-K
Current Report
Pursuant to Section 13 or 15(d)
of the Securities Exchange Act of 1934
Date of Report (Date of earliest event reported): September 16,
2003
THERMA-WAVE, INC.
(Exact Name of Registrant as Specified in Charter)
Delaware
(State or Other Jurisdiction of Incorporation)
000-26911
(Commission File Number)
94-3000561
(I.R.S. Employer Identification Number)
1250 Reliance Way
Fremont, California
(Address of Principal Executive Offices)
94539
(Zip Code)
(510) 668-2200
(Registrant's telephone number, including area code)
Not Applicable
(Former Name or Former Address, If Changed Since Last
Report)
ITEM 9. Regulation FD Disclosure
On September 16, 2003, Therma-Wave, Inc. issued a press release
announcing closing of $12.8 million private placement of common stock.
A copy of this press release is attached as Exhibit 99.1.
SIGNATURE
Pursuant to the requirements of the Securities Exchange Act of
1934, the registrant has duly caused this report to be signed on its behalf by
the undersigned, thereunto duly authorized.
Dated: September 16, 2003
Therma-Wave, Inc.
By:
/s/ L. Ray Christie
Name: L. Ray Christie
Title: Vice
President and Chief Financial
Officer
EXHIBIT INDEX
Number            Exhibit
Description
99.1
                Press
Release dated September 16, 2003