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<P ALIGN="CENTER">U.S. SECURITIES AND EXCHANGE COMMISSION</P>
<P ALIGN="CENTER">Washington, D.C. 20549</P>
<P ALIGN="CENTER"></P>
<P ALIGN="CENTER">_________________</P>
<P ALIGN="CENTER"></P>
</FONT><FONT SIZE=4><P ALIGN="CENTER">FORM 8-K</P>
</B><P ALIGN="CENTER"></P>
<P ALIGN="CENTER">&nbsp;</P>
<B><P ALIGN="CENTER">Current Report</P>
<P ALIGN="CENTER"></P>
<P ALIGN="CENTER">Pursuant to Section 13 or 15(d)</P>
<P ALIGN="CENTER">of the Securities Exchange Act of 1934</P>
</B></FONT><FONT SIZE=2><P ALIGN="JUSTIFY"></P>
<P ALIGN="JUSTIFY">&nbsp;</P>
<P ALIGN="CENTER">Date of Report (Date of earliest event reported):  August 14,
2002</P>
<P ALIGN="JUSTIFY"></P>
<P ALIGN="JUSTIFY">&nbsp;</P>
<B><P ALIGN="CENTER">THERMA-WAVE, INC.</P>
</B><P ALIGN="CENTER">(Exact Name of Registrant as Specified in Charter)</P>
<P ALIGN="JUSTIFY"></P>
<P ALIGN="CENTER">Delaware</P>
<P ALIGN="CENTER">(State or Other Jurisdiction of Incorporation)</P>
<P ALIGN="JUSTIFY"></P>
<P ALIGN="CENTER">000-26911</P>
<P ALIGN="CENTER">(Commission File Number)</P>
<P ALIGN="JUSTIFY"></P>
<P ALIGN="CENTER">94-3000561</P>
<P ALIGN="CENTER">(I.R.S. Employer Identification Number)</P>
<P ALIGN="JUSTIFY"></P>
<P ALIGN="CENTER">1250 Reliance Way</P>
<P ALIGN="CENTER">Fremont, California 94539</P>
<P ALIGN="CENTER">(Address of Principal Executive Offices)</P>
<P ALIGN="CENTER">(Zip Code)</P>
<P ALIGN="CENTER"></P>
<P ALIGN="CENTER">(510) 668-2200</P>
<P ALIGN="CENTER">(Registrant's telephone number, including area code)</P>
<P ALIGN="JUSTIFY"></P>
<P ALIGN="CENTER">Not Applicable</P>
<P ALIGN="CENTER">(Former Name or Former Address, If Changed Since Last
Report)</P>
<P ALIGN="JUSTIFY"></P>
<P ALIGN="JUSTIFY">&nbsp;</P>
<P ALIGN="JUSTIFY">&nbsp;</P><DIR></font>

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<P ALIGN="JUSTIFY">ITEM 9. REGULATION FD DISCLOSURE</P>


<P ALIGN="JUSTIFY">Attached hereto as Exhibit 99.1 are certifications pursuant
to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-
Oxley Act of 2002.</P>
<P ALIGN="JUSTIFY">NOTE: The information in this report (including the exhibit)
is furnished pursuant to Item 9 and shall not be deemed to be "filed" for the
purpose of Section 18 of the Securities Exchange Act of 1934 or otherwise
subject to the liabilities of that section. This report will not be deemed an
admission as to the materiality of any information contained herein that is
required to be disclosed solely by regulation FD.</P>
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<P ALIGN="CENTER">SIGNATURE</P>
<P ALIGN="JUSTIFY">Pursuant to the requirements of the Securities Exchange Act
of 1934, the registrant has duly caused this report to be signed on its behalf
by the undersigned, thereunto duly authorized.</P>
<P ALIGN="JUSTIFY"></P>
<P>Dated:&#9;August 14, 2002<DIR><DIR><DIR><DIR><DIR><DIR><DIR><DIR><DIR><DIR><DIR><DIR><DIR><DIR>Therma-Wave, Inc.</P>
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<P>By:   <U>/s/ L. Ray Christie&#9;<br>
</U>Name:&#9;L. Ray Christie<br>
Title:&#9;Vice President and
Chief Financial Officer</P>

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<P ALIGN="CENTER">EXHIBIT INDEX</P>
<P ALIGN="JUSTIFY"></P>
<P ALIGN="JUSTIFY">Number<DIR><DIR><DIR><DIR><DIR>Exhibit Description
</DIR></DIR></DIR></DIR></DIR></P>
<P ALIGN="JUSTIFY">99.1<DIR>
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Certifications pursuant to 18 U.S.C. Section 1350, as
adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002</DIR>
</DIR></DIR></DIR></DIR></P>


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8K DOC
U.S. SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549
_________________
FORM 8-K
Current Report
Pursuant to Section 13 or 15(d)
of the Securities Exchange Act of 1934
Date of Report (Date of earliest event reported):  August 14,
2002
THERMA-WAVE, INC.
(Exact Name of Registrant as Specified in Charter)
Delaware
(State or Other Jurisdiction of Incorporation)
000-26911
(Commission File Number)
94-3000561
(I.R.S. Employer Identification Number)
1250 Reliance Way
Fremont, California 94539
(Address of Principal Executive Offices)
(Zip Code)
(510) 668-2200
(Registrant's telephone number, including area code)
Not Applicable
(Former Name or Former Address, If Changed Since Last
Report)
ITEM 9. REGULATION FD DISCLOSURE
Attached hereto as Exhibit 99.1 are certifications pursuant
to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-
Oxley Act of 2002.
NOTE: The information in this report (including the exhibit)
is furnished pursuant to Item 9 and shall not be deemed to be "filed" for the
purpose of Section 18 of the Securities Exchange Act of 1934 or otherwise
subject to the liabilities of that section. This report will not be deemed an
admission as to the materiality of any information contained herein that is
required to be disclosed solely by regulation FD.
SIGNATURE
Pursuant to the requirements of the Securities Exchange Act
of 1934, the registrant has duly caused this report to be signed on its behalf
by the undersigned, thereunto duly authorized.
Dated:	August 14, 2002
Therma-Wave, Inc.
By:
/s/ L. Ray Christie
Name:	L. Ray Christie
Title:	Vice President and
Chief Financial Officer
EXHIBIT INDEX
Number
Exhibit Description
99.1
Certifications pursuant to 18 U.S.C. Section 1350, as
adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002