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<p align="center"><b>UNITED STATES<br>
SECURITIES AND EXCHANGE COMMISSION<br>
Washington, DC&nbsp; 20549 </b></p>
<b>

<p align="center">FORM 8-K<br>
</b></p>
<b>

<p align="center">CURRENT REPORT </b></p>
<b>

<p align="center">Pursuant to Section 13 or 15(d) of the<br>
Securities Exchange Act of 1934</b></p>

<p align="center">&nbsp; Date of Report (Date of earliest event reported):&nbsp;
February 23, 2006 &nbsp;</p>
<div align="center"><center>

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    <td width="720" valign="top" style="width:7.5in;padding:0in 0in 0in 0in"><blockquote>
      <p class="MsoNormal" align="center"
      style="margin-top:12.0pt;text-align:center;
  mso-pagination:none;mso-layout-grid-align:none;text-autospace:none"><b>RUDOLPH
      TECHNOLOGIES, INC. </b></p>
    </blockquote>
    </td>
  </tr>
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    <td width="720" valign="top" style="width:7.5in;padding:0in 0in 0in 0in"></td>
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    <td width="720" valign="top" style="width:7.5in;padding:0in 0in 0in 0in"><p
    class="MsoNormal" align="center"
    style="text-align:center;mso-pagination:none;
  mso-layout-grid-align:none;text-autospace:none">(Exact
    Name of Registrant as Specified in its Charter)</td>
  </tr>
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</center></div><div align="center"><center>

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    class="MsoNormal" align="center"
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  mso-pagination:none;mso-layout-grid-align:none;text-autospace:none">&nbsp;
    </td>
    <td width="240" valign="top" style="width:2.5in;padding:0in 0in 0in 0in"></td>
    <td width="240" valign="top" style="width:2.5in;padding:0in 0in 0in 0in"></td>
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    class="MsoNormal"
    style="mso-pagination:none;mso-layout-grid-align:none;
  text-autospace:none"><b>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
    Delaware&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
    000-27965&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
    &nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; &nbsp;22-3531208 </b></td>
  </tr>
  <tr>
    <td width="240" valign="top" style="width:2.5in;padding:0in 0in 0in 0in"><p
    class="MsoNormal" align="center"
    style="margin-left:10.1pt;text-align:center;
  mso-pagination:none;mso-layout-grid-align:none;text-autospace:none">(State
    or Other Jurisdiction </td>
    <td width="240" valign="top" style="width:2.5in;padding:0in 0in 0in 0in"><p
    class="MsoNormal" align="center"
    style="text-align:center;mso-pagination:none;
  mso-layout-grid-align:none;text-autospace:none">(Commission
    </td>
    <td width="240" valign="top" style="width:2.5in;padding:0in 0in 0in 0in"><p
    class="MsoNormal" align="center"
    style="text-align:center;mso-pagination:none;
  mso-layout-grid-align:none;text-autospace:none">(IRS
    Employer </td>
  </tr>
  <tr>
    <td width="240" valign="top" style="width:2.5in;padding:0in 0in 0in 0in"><p
    class="MsoNormal" align="center"
    style="margin-left:20.2pt;text-align:center;
  mso-pagination:none;mso-layout-grid-align:none;text-autospace:none">of
    Incorporation) </td>
    <td width="240" valign="top" style="width:2.5in;padding:0in 0in 0in 0in"><p
    class="MsoNormal" align="center"
    style="text-align:center;mso-pagination:none;
  mso-layout-grid-align:none;text-autospace:none">File
    Number) </td>
    <td width="240" valign="top" style="width:2.5in;padding:0in 0in 0in 0in"><p
    class="MsoNormal" align="center"
    style="text-align:center;mso-pagination:none;
  mso-layout-grid-align:none;text-autospace:none">Identification
    No.) </td>
  </tr>
</table>
</center></div><div align="center"><center>

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style="border-collapse:collapse;
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    <td width="480" valign="top" style="width:5.0in;padding:0in 0in 0in 0in"><p
    class="MsoNormal" align="center"
    style="margin-top:12.0pt;text-align:center;
  mso-pagination:none;mso-layout-grid-align:none;text-autospace:none">&nbsp;
    </td>
    <td width="240" valign="top" style="width:2.5in;padding:0in 0in 0in 0in"><p
    class="MsoNormal" align="center"
    style="margin-top:12.0pt;text-align:center;
  mso-pagination:none;mso-layout-grid-align:none;text-autospace:none">&nbsp;
    </td>
  </tr>
  <tr>
    <td width="480" valign="top" style="width:5.0in;padding:0in 0in 0in 0in"><p
    class="MsoNormal" align="center" style="text-align:center"><b>One Rudolph Road <br>
    Flanders, New Jersey </b></td>
    <td width="240" valign="bottom" style="width:2.5in;padding:0in 0in 0in 0in"><p
    class="MsoNormal" align="center" style="text-align:center"><b>07836 </b></td>
  </tr>
  <tr style="height:.2in">
    <td width="480" valign="top" style="width:5.0in;padding:0in 0in 0in 0in;
  height:.2in"><p
    class="MsoNormal" align="center"
    style="text-align:center;mso-pagination:none;
  mso-layout-grid-align:none;text-autospace:none">(Address
    of Principal Executive Offices) </td>
    <td width="240" valign="top" style="width:2.5in;padding:0in 0in 0in 0in;
  height:.2in"><p
    class="MsoNormal" align="center"
    style="text-align:center;mso-pagination:none;
  mso-layout-grid-align:none;text-autospace:none">(Zip
    Code) </td>
  </tr>
</table>
</center></div>

<p class="MsoNormal" align="center">&nbsp; Registrant&#146;s telephone number, including
area code: <b>(973) 691-1300</b></p>
<div align="center"><center>

<table border="0" cellspacing="0" cellpadding="0"
style="border-collapse:collapse;
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    class="MsoNormal" align="center"
    style="margin-top:6.0pt;text-align:center;
  mso-pagination:none;mso-layout-grid-align:none;text-autospace:none">&nbsp;
    </td>
  </tr>
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    <td width="720" valign="top" style="width:7.5in;padding:0in 0in 0in 0in"><p
    class="MsoNormal"
    style="mso-pagination:none;mso-layout-grid-align:none;
  text-autospace:none">___________________________________________________________________________________________________________
    </td>
  </tr>
  <tr>
    <td width="720" valign="top" style="width:7.5in;padding:0in 0in 0in 0in"><p
    class="MsoNormal" align="center"
    style="text-align:center;mso-pagination:none;
  mso-layout-grid-align:none;text-autospace:none">(Former
    Name or Former Address, if Changed Since Last Report.) </td>
  </tr>
</table>
</center></div>

<p class="MsoNormal"
style="margin-top:6.0pt;margin-right:0in;margin-bottom:6.0pt;
margin-left:0in;mso-pagination:none;mso-layout-grid-align:none;text-autospace:
none">&nbsp; </p>

<p class="MsoNormal"
style="margin-top:6.0pt;margin-right:0in;margin-bottom:6.0pt;
margin-left:0in;mso-pagination:none;mso-layout-grid-align:none;text-autospace:
none">Check
the appropriate box below if the Form 8-K filing is intended to simultaneously satisfy the
filing obligation of the registrant under any of the following provisions (<i>see</i>
General Instruction A.2. below): </p>

<p class="MsoNormal"
style="margin-bottom:7.1pt;mso-pagination:none;mso-layout-grid-align:
none;text-autospace:none">[ ]
Written communications pursuant to Rule 425 under the Securities Act (17 CFR 230.425) </p>

<p class="MsoNormal"
style="margin-bottom:6.95pt;mso-pagination:none;mso-layout-grid-align:
none;text-autospace:none">[ ]
Soliciting material pursuant to Rule 14a-12 under the Exchange Act (17 CFR 240.14a-12) </p>

<p class="MsoNormal"
style="margin-bottom:6.95pt;mso-pagination:none;mso-layout-grid-align:
none;text-autospace:none">[
] Pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act (17 CFR
240.14d-2(b)) </p>

<p class="MsoNormal"
style="margin-bottom:2.05pt;mso-pagination:none;mso-layout-grid-align:
none;text-autospace:none">[
] Pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act (17 CFR
240.13e-4(c)) </p>

<p>&nbsp;
</p>

<p><b>Item 5.02.&nbsp;&nbsp; Departure of Directors or Principal Officers;
Election of Directors; Appointment of Principal Officers</b></p>

<P align=left> On&nbsp; February 23, 2006&nbsp; Rudolph Technologies, Inc.
issued a press release announcing the resignation of the Chief Corporate
Development Officer.&nbsp;</P>
<P align=left>A copy of the press release is attached as Exhibit
99.1 and is incorporated herein by
reference.</P>
<P align=left><u><b>Item 9.01. Financial Statements and Exhibits</b></u></P>
<P align=left>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
(c)&nbsp; Exhibits</P>
<DIV align=center>
<CENTER>
<TABLE border=0 cellPadding=0 cellSpacing=0 width=784>
    <TR vAlign=bottom>
    <TD width=13>&nbsp; </TD>
    <TD width=34>&nbsp; </TD>
    <TD width=63>&nbsp; </TD>
    <TD width=16>&nbsp; </TD>
    <TD width=658>&nbsp; </TD></TR>
  <TR vAlign=bottom>
    <TD vAlign=top width=13><FONT size=2>&nbsp; </FONT></TD>
    <TD width=34><FONT size=2>&nbsp; </FONT></TD>
    <TD align=left vAlign=top width=63><U><STRONG><FONT size=2>Exhibit No.
      </FONT></STRONG></U></TD>
    <TD width=16><FONT size=2>&nbsp; </FONT></TD>
    <TD align=left vAlign=top width=658><U><STRONG><FONT size=2>Description of
      Exhibit</FONT></STRONG></U></TD></TR>
  <TR vAlign=bottom>
    <TD vAlign=top width=13><FONT size=2>&nbsp; </FONT></TD>
    <TD width=34><FONT size=2>&nbsp; </FONT></TD>
    <TD align=left vAlign=top width=63><FONT size=2>&nbsp; </FONT></TD>
    <TD width=16><FONT size=2>&nbsp; </FONT></TD>
    <TD align=left vAlign=top width=658><FONT size=2>&nbsp; </FONT></TD></TR>
  <TR vAlign=bottom>
    <TD vAlign=top width=13><FONT size=2>&nbsp; </FONT></TD>
    <TD width=34><FONT size=2>&nbsp; </FONT></TD>
    <TD align=left vAlign=top width=63><FONT size=2>99.1 </FONT></TD>
    <TD width=16><FONT size=2>&nbsp; </FONT></TD>
    <TD align=left vAlign=top width=658><FONT size=2>Press Release issued
      February 23, 2006</FONT></TD></TR>
  <TR vAlign=bottom>
    <TD vAlign=top width=13>&nbsp;</TD>
    <TD width=34></TD>
    <TD align=left vAlign=top width=63></TD>
    <TD width=16></TD>
    <TD align=left vAlign=top width=658></TD></TR></TABLE></CENTER></DIV>
<p>&nbsp;</p>
<HR>

<P align=center><STRONG><FONT size=2>EXHIBIT INDEX</FONT></STRONG></P>
<DIV align=center>
<CENTER>
<TABLE border=0 cellPadding=0 cellSpacing=0 width=785>
  <TR vAlign=bottom>
    <TD width=34>&nbsp; </TD>
    <TD width=70>&nbsp; </TD>
    <TD width=10>&nbsp; </TD>
    <TD width=658>&nbsp; </TD></TR>
  <TR vAlign=bottom>
    <TD width=34><FONT size=2>&nbsp; </FONT></TD>
    <TD align=left vAlign=top width=70><U><STRONG><FONT size=2>Exhibit No.
      </FONT></STRONG></U></TD>
    <TD width=10><FONT size=2>&nbsp; </FONT></TD>
    <TD align=left vAlign=top width=658><U><STRONG><FONT size=2>Description of
      Exhibit</FONT></STRONG></U></TD></TR>
  <TR vAlign=bottom>
    <TD width=34><FONT size=2>&nbsp; </FONT></TD>
    <TD align=left vAlign=top width=70><FONT size=2>&nbsp; </FONT></TD>
    <TD width=10><FONT size=2>&nbsp; </FONT></TD>
    <TD align=left vAlign=top width=658><FONT size=2>&nbsp; </FONT></TD></TR>
  <TR vAlign=bottom>
    <TD width=34><FONT size=2>&nbsp; </FONT></TD>
    <TD align=left vAlign=top width=70><FONT size=2>99.1 </FONT></TD>
    <TD width=10><FONT size=2>&nbsp; </FONT></TD>
    <TD align=left vAlign=top width=658><FONT size=2>Press Release issued
      February 23, 2006</FONT></TD></TR>
  <TR vAlign=bottom>
    <TD width=34>&nbsp;</TD>
    <TD align=left vAlign=top width=70></TD>
    <TD width=10></TD>
    <TD align=left vAlign=top width=658></TD></TR></TABLE></CENTER></DIV><PRE>                                     </PRE>
<HR>

<P>&nbsp;</P>
<P align=center><B><FONT size=2>SIGNATURES</FONT></B></P>
<P><FONT size=2>Pursuant to the requirements of the Securities Exchange Act of
1934, the registrant has duly caused this report to be signed on its behalf by
the undersigned thereunto duly authorized.</FONT></P>
<P align=center><B><FONT size=2>Rudolph Technologies, Inc.<BR></FONT></B></P>
<TABLE border=0 cellPadding=0 cellSpacing=0 width=583>
   <TR>
    <TD width=405><FONT size=2>Date:&nbsp;&nbsp; February 23,&nbsp; 2005</FONT></TD>
    <TD width=414><FONT size=2>By:<U>&nbsp;&nbsp;/s/ Paul F. McLaughlin&nbsp;
      &nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
      &nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </U></FONT></TD></TR>
  <TR>
    <TD width=405></TD>
    <TD vAlign=top width=414>
      <P
      style="LINE-HEIGHT: 100%; MARGIN-BOTTOM: 0px; MARGIN-TOP: 0px; WORD-SPACING: 0px"><FONT
      size=2>Paul F. McLaughlin</FONT></P>
      <P
      style="LINE-HEIGHT: 100%; MARGIN-BOTTOM: 0px; MARGIN-TOP: 0px; WORD-SPACING: 0px"><FONT
      size=2>Chairman and Chief Executive Officer</FONT></P></TD></TR></TABLE>
<P align="center">&nbsp;</P>

<P align="center"><b>EXHIBIT 99.1</b></P>

<P align="center">&nbsp;</P>

<p align="center"><b>Rudolph Technologies Announces Resignation of Chief
Corporate Development Officer</b></p>
<p><b>Flanders, NJ, February 23, 2006 </b>- Rudolph Technologies, Inc. (NASDAQ:
RTEC), a leading provider of process control equipment for thin film measurement
and macro defect inspection, announced today that Stanley D. Piekos, chief
corporate development officer, has resigned from Rudolph Technologies effective
today, February 23, 2006 to pursue other business opportunities.</p>
<p>&quot;Stan was an important player in bringing the strategic merger between
Rudolph Technologies and August Technology to a successful conclusion,&quot;
said Paul F. McLaughlin, Chairman and Chief Executive Officer at Rudolph
Technologies. &quot;We wish him well in the new opportunities he pursues.&quot;</p>
<p><b>About Rudolph Technologies, Inc. </b></p>
<p>Rudolph Technologies is a worldwide leader in the design, development,
manufacture and support of high-performance process control metrology, defect
inspection and data analysis systems used by semiconductor device manufacturers.
Rudolph provides a full-fab solution through its families of proprietary
products that provide critical yield-enhancing information, enabling
microelectronic device manufacturers to drive down costs and time to market.
Rudolph has enhanced the competitiveness of its products in the marketplace by
anticipating and addressing many emerging trends driving the semiconductor
industry's growth. Rudolph's strategy for continued technological and market
leadership includes aggressive research and development of complementary
metrology and inspection solutions. Headquartered in Flanders, New Jersey,
Rudolph supports its customers with a worldwide sales and service organization.
Additional information can be found on the company's web site at
www.rudolphtech.com.</p>
<p>For more information, please contact:</p>
<p>Investors: <br>
Steven R. Roth <br>
973.448.4302 <br>
steven.roth@rudolphtech.com</p>
<p>Trade Press: <br>
Virginia Becker <br>
952.259.1647 <br>
virginia.becker@rudolphtech.com</p>

<P align="left">&nbsp;</P>

</body>

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Rudolph Technologies - Form 8-K
UNITED STATES
SECURITIES AND EXCHANGE COMMISSION
Washington, DC  20549
FORM 8-K
CURRENT REPORT
Pursuant to Section 13 or 15(d) of the
Securities Exchange Act of 1934
Date of Report (Date of earliest event reported): 
February 23, 2006
RUDOLPH
      TECHNOLOGIES, INC.
(Exact
    Name of Registrant as Specified in its Charter)
Delaware                                       
    000-27965                              
              22-3531208
(State
    or Other Jurisdiction
(Commission
(IRS
    Employer
of
    Incorporation)
File
    Number)
Identification
    No.)
One Rudolph Road
Flanders, New Jersey
07836
(Address
    of Principal Executive Offices)
(Zip
    Code)
Registrant's telephone number, including
area code:
(973) 691-1300
___________________________________________________________________________________________________________
(Former
    Name or Former Address, if Changed Since Last Report.)
Check
the appropriate box below if the Form 8-K filing is intended to simultaneously satisfy the
filing obligation of the registrant under any of the following provisions (
see
General Instruction A.2. below):
[ ]
Written communications pursuant to Rule 425 under the Securities Act (17 CFR 230.425)
[ ]
Soliciting material pursuant to Rule 14a-12 under the Exchange Act (17 CFR 240.14a-12)
[
] Pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act (17 CFR
240.14d-2(b))
[
] Pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act (17 CFR
240.13e-4(c))
Item 5.02.   Departure of Directors or Principal Officers;
Election of Directors; Appointment of Principal Officers
On  February 23, 2006  Rudolph Technologies, Inc.
issued a press release announcing the resignation of the Chief Corporate
Development Officer.
A copy of the press release is attached as Exhibit
99.1 and is incorporated herein by
reference.
Item 9.01. Financial Statements and Exhibits
(c)  Exhibits
Exhibit No.
Description of
      Exhibit
99.1
Press Release issued
      February 23, 2006
EXHIBIT INDEX
Exhibit No.
Description of
      Exhibit
99.1
Press Release issued
      February 23, 2006
SIGNATURES
Pursuant to the requirements of the Securities Exchange Act of
1934, the registrant has duly caused this report to be signed on its behalf by
the undersigned thereunto duly authorized.
Rudolph Technologies, Inc.
Date:   February 23,  2005
By:
/s/ Paul F. McLaughlin
Paul F. McLaughlin
Chairman and Chief Executive Officer
EXHIBIT 99.1
Rudolph Technologies Announces Resignation of Chief
Corporate Development Officer
Flanders, NJ, February 23, 2006
- Rudolph Technologies, Inc. (NASDAQ:
RTEC), a leading provider of process control equipment for thin film measurement
and macro defect inspection, announced today that Stanley D. Piekos, chief
corporate development officer, has resigned from Rudolph Technologies effective
today, February 23, 2006 to pursue other business opportunities.
"Stan was an important player in bringing the strategic merger between
Rudolph Technologies and August Technology to a successful conclusion,"
said Paul F. McLaughlin, Chairman and Chief Executive Officer at Rudolph
Technologies. "We wish him well in the new opportunities he pursues."
About Rudolph Technologies, Inc.
Rudolph Technologies is a worldwide leader in the design, development,
manufacture and support of high-performance process control metrology, defect
inspection and data analysis systems used by semiconductor device manufacturers.
Rudolph provides a full-fab solution through its families of proprietary
products that provide critical yield-enhancing information, enabling
microelectronic device manufacturers to drive down costs and time to market.
Rudolph has enhanced the competitiveness of its products in the marketplace by
anticipating and addressing many emerging trends driving the semiconductor
industry's growth. Rudolph's strategy for continued technological and market
leadership includes aggressive research and development of complementary
metrology and inspection solutions. Headquartered in Flanders, New Jersey,
Rudolph supports its customers with a worldwide sales and service organization.
Additional information can be found on the company's web site at
www.rudolphtech.com.
For more information, please contact:
Investors:
Steven R. Roth
973.448.4302
steven.roth@rudolphtech.com
Trade Press:
Virginia Becker
952.259.1647
virginia.becker@rudolphtech.com