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<title>Rudolph Technologies, Inc. Form 8-K</title>
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<p ALIGN="CENTER"><font size="4"><b>UNITED STATES<br>
SECURITIES AND EXCHANGE COMMISSION<br>
</b>Washington,<b> </b>D.C. 20549</font></p>

<p ALIGN="CENTER"><b><font size="4">Form 8-K</font></b></p>

<p ALIGN="CENTER"><font size="3"><b>Current Report</b></font></p>

<p ALIGN="CENTER"><font size="2"><b>Pursuant to Section 13 or 15(d) of the Securities
Exchange Act of 1934</b></font></p>

<p ALIGN="CENTER"><font size="2">Date of Report (date of earliest event reported): May 4,
2005</font></p>
<div align="center"><center>

<table border="0" cellpadding="0" cellspacing="0" width="450" height="82">
  <tr>
    <td height="33" style="border-bottom: 1 solid #000000"><p align="center"><b><font size="4">Rudolph
    Technologies, Inc.</font></b></td>
  </tr>
  <tr>
    <td height="45"><p align="center"><font size="2">(Exact name of registrant as specified in
    its charter)<br>
    <br>
    </font></td>
  </tr>
</table>
</center></div><div align="center"><center>

<table border="0" cellpadding="0" cellspacing="0" width="450" height="57">
  <tr>
    <td align="center" width="156" height="23" style="border-bottom: 1 solid #000000"><p
    align="center"><font size="2">DELAWARE</font></td>
    <td align="center" width="146" height="23" style="border-bottom: 1 solid #000000"><font
    size="2">000-27965</font></td>
    <td align="center" width="140" height="23" style="border-bottom: 1 solid #000000"><font
    size="2">22-3531208</font></td>
  </tr>
  <tr>
    <td align="center" width="156" height="30"><font size="2">(State or other jurisdiction of
    Incorporation)</font></td>
    <td align="center" width="146" height="30"><font size="2">(Commission File Number)<br>
    </font></td>
    <td align="center" width="140" height="30"><font size="2">(IRS Employer Identification
    No.)</font></td>
  </tr>
</table>
</center></div><div align="center"><center>

<table border="0" cellpadding="0" cellspacing="0" width="450">
  <tr>
    <td style="border-bottom: 1 solid #000000"><p align="center"><br>
    <br>
    <font size="2">One Rudolph Road, Flanders, NJ 07836</font></td>
  </tr>
  <tr>
    <td><p align="center"><font size="2">(Address of principal executive offices) (zip code)</font></td>
  </tr>
</table>
</center></div>

<p ALIGN="CENTER"><font size="2"><br>
</font></p>

<p align="center"><font size="2">Registrant's telephone number, including area code: (973)
691-1300</font></p>

<p align="center"><font size="2">Not applicable<br>
</font>(<font size="2">Former name or former address, if changed since last report.)</font></p>

<p><font size="2">Check the appropriate box below if the form 8-K filing is intended to
simultaneously satisfy the filing obligation of the registrant under any of the following
provisions (see General Instruction A.2. below):</font></p>

<p><font size="2">[ ] Written communications pursuant to Rule 425 under the Securities Act
(17 CFR 230.425)</font></p>

<p><font size="2">[ ] Soliciting material pursuant to Rule 14a-12 under the Exchange Act
(17 CFR 240.14a-12)</font></p>

<p><font size="2">[ ] Pre-commencement communications pursuant to Rule 14d-2(b) under the
Exchange Act (17 CFR 240.14d-2(b))</font></p>

<p><font size="2">[ ] Pre-commencement communications pursuant to Rule 13e-4(c) under the
Exchange Act (17 CFR 240.13e-4(c))</font></p>

<hr>

<p><font size="2"><b><u>Item 1.01 Entry into a Material Definitive Agreement.
Restricted Stock Awards</u></b></font></p>
<p><font size="2">As previously reported, the board of directors (the &quot;Board&quot;) of Rudolph
Technologies, Inc. (the &quot;Company&quot;) adopted, effective August 31, 1999,
and the Company's stockholders approved, the Company's 1999 Stock Plan (the
&quot;1999 Plan&quot;). The 1999 Plan was previously filed as Exhibit 10.4 to
the Company's Registration Statement on Form S-1 filed on September 9, 1999.
Pursuant to the 1999 Plan, from time to time, the Company may grant stock
options and restricted stock awards to employees, consultants and directors of the Company. The terms of such
awards are governed by the 1999 Plan and a standard form agreement for each type
of award which is delivered to each grantee.</font></p>
<p><font size="2">Pursuant to the 1999 Plan and a restricted stock
agreement (the &quot;Restricted Stock Agreement&quot;) which is delivered to
each grantee, directors and employees of the Company receive shares of Company
common stock, par value $0.001 per share (the &quot;Restricted Shares&quot;),
subject to certain restrictions. Upon issuance, the Restricted Shares may not be
transferred, alienated, pledged, encumbered or assigned (such transfer
restrictions, the &quot;Restrictions&quot;). The Restricted Shares vest and the
Restrictions cease to apply to 20% of the total number of shares subject to an
award on each of the first five annual anniversary dates of the grant of the
award. Notwithstanding the foregoing, all of the Restricted Shares vest and the
Restrictions cease to apply in the event of a merger of the Company with or into
another corporation, or the sale of substantially all of the assets of the
Company, in connection with which the successor corporation does not assume the
award or substitute an equivalent right for the award. Should the successor
corporation assume the award or substitute an equivalent right, then no such
acceleration shall apply.&nbsp; If the grantee
ceases to serve as an employee or director of the Company, as applicable, any
Restricted Shares still subject to the Restrictions shall immediately be
forfeited. The foregoing summary of the terms of restricted stock awards granted
pursuant to the 1999 Plan is qualified in its entirety by the full text of
Restricted Stock Agreement, which is attached hereto as Exhibit 10.1 and is
incorporated herein by reference</font></p>

<p align="left">&nbsp;</p>

<p align="left"><font size="2"><b><u>Item&nbsp;9.01. Financial Statements and Exhibits</u>.
</b></font></p>

<p align="left"><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
(c)&nbsp; Exhibits </font></p>
<div align="center"><center>

<table cellSpacing="0" cellPadding="0" width="784" border="0">
  <tr vAlign="bottom">
    <td width="13">&nbsp; </td>
    <td width="34">&nbsp; </td>
    <td width="63">&nbsp; </td>
    <td width="16">&nbsp; </td>
    <td width="658">&nbsp; </td>
  </tr>
  <tr vAlign="bottom">
    <td vAlign="top" width="13"><font size="2">&nbsp; </font></td>
    <td width="34"><font size="2">&nbsp; </font></td>
    <td vAlign="top" align="left" width="63"><u><strong><font size="2">Exhibit No. </font></strong></u></td>
    <td width="16"><font size="2">&nbsp; </font></td>
    <td vAlign="top" align="left" width="658"><u><strong><font size="2">Description of Exhibit</font></strong></u></td>
  </tr>
  <tr vAlign="bottom">
    <td vAlign="top" width="13"><font size="2">&nbsp; </font></td>
    <td width="34"><font size="2">&nbsp; </font></td>
    <td vAlign="top" align="left" width="63"><font size="2">&nbsp; </font></td>
    <td width="16"><font size="2">&nbsp; </font></td>
    <td vAlign="top" align="left" width="658"><font size="2">&nbsp; </font></td>
  </tr>
  <tr vAlign="bottom">
    <td vAlign="top" width="13"><font size="2">&nbsp; </font></td>
    <td width="34"><font size="2">&nbsp; </font></td>
    <td vAlign="top" align="left" width="63"><font size="2">10.13</font></td>
    <td width="16"><font size="2">&nbsp; </font></td>
    <td vAlign="top" align="left" width="658"><font size="2">Form of Restricted
      Stock Agreement pursuant to the Rudolph Technologies,
      Inc. 1999 Stock Plan.</font></td>
  </tr>
</table>
</center></div>

<p>&nbsp;</p>

<p align="left">&nbsp;</p>

<p align="left">&nbsp;</p>

<p>&nbsp;</p>

<hr>

<p>&nbsp;</p>

<p align="center"><strong><font size="2">EXHIBIT INDEX</font></strong></p>

<p align="center">&nbsp;</p>
<div align="center"><center>

<table cellSpacing="0" cellPadding="0" width="785" border="0">
  <tr vAlign="bottom">
    <td width="34">&nbsp; </td>
    <td width="70">&nbsp; </td>
    <td width="10">&nbsp; </td>
    <td width="658">&nbsp; </td>
  </tr>
  <tr vAlign="bottom">
    <td width="34"><font size="2">&nbsp; </font></td>
    <td vAlign="top" align="left" width="70"><u><strong><font size="2">Exhibit No. </font></strong></u></td>
    <td width="10"><font size="2">&nbsp; </font></td>
    <td vAlign="top" align="left" width="658"><u><strong><font size="2">Description of Exhibit</font></strong></u></td>
  </tr>
  <tr vAlign="bottom">
    <td width="34"><font size="2">&nbsp; </font></td>
    <td vAlign="top" align="left" width="70"><font size="2">&nbsp; </font></td>
    <td width="10"><font size="2">&nbsp; </font></td>
    <td vAlign="top" align="left" width="658"><font size="2">&nbsp; </font></td>
  </tr>
  <tr vAlign="bottom">
    <td width="34"><font size="2">&nbsp; </font></td>
    <td vAlign="top" align="left" width="70"><font size="2">10.13</font></td>
    <td width="10"><font size="2">&nbsp; </font></td>
    <td vAlign="top" align="left" width="658"><font size="2">Form of Restricted
      Stock Agreement pursuant to the Rudolph Technologies,
      Inc. 1999 Stock Plan</font></td>
  </tr>
</table>
</center></div>

<pre>                                     </pre>

<hr>

<p>&nbsp;</p>

<p align="center"><b><font size="2">SIGNATURES</font></b></p>

<p><font size="2">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; Pursuant to the requirements
of the Securities Exchange Act of 1934, the registrant has duly caused this report to be
signed on its behalf by the undersigned thereunto duly authorized.</font></p>

<p align="center"><b><font size="2">Rudolph Technologies, Inc.<br>
</font></b></p>

<table border="0" cellpadding="0" cellspacing="0" width="583">
  <tr>
    <td width="405"><font size="2">Date:&nbsp;&nbsp; June 21, 2005</font></td>
    <td width="414"><font size="2">By:<u>&nbsp;&nbsp;/s/ Paul F. McLaughlin&nbsp;
    &nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; &nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </u></font></td>
  </tr>
  <tr>
    <td width="405"></td>
    <td width="414" valign="top"><p
    style="line-height: 100%; word-spacing: 0; margin-top: 0; margin-bottom: 0"><font size="2">Paul
    F. McLaughlin</font></p>
    <p style="line-height: 100%; word-spacing: 0; margin-top: 0; margin-bottom: 0"><font
    size="2">Chairman and Chief Executive Officer</font></td>
  </tr>
</table>

<pre>                     <font size="2">                                                             </font>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </pre>

<p>&nbsp;&nbsp;
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
</p>

<hr>

<p ALIGN="right"><font size="2"><b><u>EXHIBIT 10.13</u></b></font></p>

<div class="Section1">
  <p class="Centered" align="center"><a name="OLE_LINK1"><font size="3">Rudolph
  Technologies, Inc.

  </font></a></p>
  <p class="Centered" align="center">
 <font size="3">Restricted
  Stock Purchase Agreement</font>

  </p>
  <p class="MsoBodyText" style="margin-top:0in;margin-right:-.25in;margin-bottom:
0in;margin-left:0in;margin-bottom:.0001pt;text-align:justify;text-indent:48.0pt">
&nbsp;
  </p>
  <p class="MsoBodyText" style="margin-top:0in;margin-right:-.25in;margin-bottom:
0in;margin-left:0in;margin-bottom:.0001pt;text-align:justify;text-indent:48.0pt">
&nbsp;
  </p>
  <p class="MsoBodyText" style="margin-top:0in;margin-right:-.25in;margin-bottom:
0in;margin-left:0in;margin-bottom:.0001pt;text-align:justify;text-indent:48.0pt">
<font size="2">THIS
  AGREEMENT, dated ____________, 200__ (the "<u>Award Date</u>"), is made
  between Rudolph Technologies, Inc., a Delaware corporation hereinafter
  referred to as the "<u>Company</u>," and ______________ (the "<u>Participant</u>").
   </font></p>
</div>
<font size="2"><br clear="all" style="page-break-before:auto;mso-break-type:section-break">
</font>
<div class="Section2">
<font size="2">1.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
  <u>Definitions.</u>&nbsp; All capitalized terms used in this Agreement without
  definition shall have the meanings ascribed in the Company's 1999 Stock Plan,
  as ammended from time to time (the &quot;Plan&quot;).</font>
</div>
<font size="2"><br clear="all" style="page-break-before:auto;mso-break-type:section-break">
2.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
<u>Award of Restricted Stock</u>.&nbsp;

</font>
<p class="MsoBodyText" style="margin-top:12.0pt;text-align:justify"><font size="2">(a)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
<u>Award</u>.&nbsp; In
consideration of the Participant's agreement to remain in the service or
employ of the Company or one of its Subsidiaries, and for other good and
valuable consideration which the Committee has determined exceeds the aggregate
par value of the shares of the common stock of the Company (the "<u>Common
Stock</u>") subject to the Award (as defined below), as of the Award Date, the
Company issues to the Participant the Award described in this Agreement (the "<u>Award</u>").&nbsp;
The number of shares of Restricted Stock (the "<u>Shares</u>")
subject to the Award (which shall be subject to adjustment in accordance with
Section 13 of the Plan) is set forth on the signature page hereof.&nbsp;
The Participant is an Employee, Director or other Service Provider.

</font></p>
<p class="MsoBodyText" style="margin-top:12.0pt;text-align:justify"><font size="2">(b)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
<u>Purchase Price; Book Entry Form</u>.&nbsp;
The purchase price of the Shares is zero dollars ($0.00) per share.&nbsp; The Shares will be issued in uncertificated form.&nbsp;
The Shares will be recorded in the name of the Participant in the books
and records of the Company's transfer agent with appropriate notations
regarding the restrictions on transfer imposed pursuant to this Agreement.&nbsp;
Upon vesting and the satisfaction of all conditions set forth in Section
3(d), the Company shall cause certificates representing the Shares to be issued
to the Participant.&nbsp;
</font></p>
<p class="MsoBodyText" style="margin-top:12.0pt;text-align:justify"><font size="2">(c)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
<u>Plan</u>.&nbsp; The Award
granted hereunder is subject to the terms and provisions of the Plan, including
without limitation, Article 13 thereof.&nbsp; The
Award shall constitute a Stock Purchase Right as described in Section 11 of the
Plan.
</font></p>
<p class="MsoNormal" style="margin-right:1.8pt;text-align:justify;mso-pagination:
none;tab-stops:0in .5in 1.0in 1.5in 2.0in 2.5in 3.0in 3.5in 4.0in 4.5in 5.0in 5.5in 6.0in"><font size="2">3.
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
<u>Restrictions</u>.&nbsp;&nbsp;
</font></p>
<p class="MsoBodyText" style="margin-top:12.0pt;text-align:justify"><font size="2">
(a)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
<u>Forfeiture</u>.&nbsp; Any Award
which is not vested as of the date the Participant ceases to be an employee of
the Company or one of its Subsidiaries or other Service Provider shall thereupon
be forfeited immediately and without any further action by the Company.&nbsp;
For purposes of this Agreement, "<u>Restrictions</u>"
shall mean the restrictions on sale or other transfer set forth in Section 5 and
the exposure to forfeiture set forth in this Section 3(a).
&nbsp;
</font></p>
<p class="MsoBodyText" style="margin-top:12.0pt;text-align:justify"><font size="2">
(b)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
<u>Vesting and Lapse of Restrictions</u>.&nbsp; Subject to Sections 3(a) and 3(c), the Award shall vest and
Restrictions shall lapse with respect to twenty percent (20%) of the Shares
subject to the Award (rounded down to the next whole number of shares) on each
of the first five (5) anniversaries of the Award Date, provided in each case
that the Participant remains continuously as an employee or in the service of
the Company or a Subsidiary or otherwise as a Service Provider from the Award
Date through such date.&nbsp; </font></p>
<p class="MsoBodyText" style="margin-top:12.0pt;text-align:justify"><font size="2">
(c)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
<u>Accelerations of Vesting.</u>&nbsp;&nbsp; Notwithstanding
Sections 3(a) and 3(b), pursuant to Section 13 of the Plan, the Award shall
become fully vested and all Restrictions applicable to such Award shall lapse in
the event of a merger of the Company with or into another corporation, or the
sale of substantially all of the assets of the Company, in connection with which
the successor corporation does not assume the Award or substitute an equivalent
right for the Award.&nbsp; Should the
successor corporation assume the Award or substitute an equivalent right, then
no such acceleration shall apply. </font></p>
<p class="MsoBodyText" style="margin-top:12.0pt;text-align:justify">
<font size="2">(d)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
<u>Tax Withholding; Conditions to Issuance of Certificates</u>.&nbsp;
Notwithstanding any other provision of this Agreement (including without
limitation Section 2(b)):</font></p>
<p class="MsoBodyText" style="margin-top:12.0pt;text-align:justify"><font size="2">&nbsp;&nbsp;
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
(i)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
No new certificate shall be delivered to the Participant or his legal
representative unless and until the Participant or his legal representative
shall have paid to the Company the full amount of all federal and state
withholding or other taxes applicable to the taxable income of Participant
resulting from the grant of&nbsp; Restricted Stock or the lapse or removal of
the Restrictions.</font></p>
<p class="MsoBodyText" style="margin-top:12.0pt;text-align:justify"><font size="2">&nbsp;&nbsp;
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
(ii)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
The Company shall not be required to issue or deliver any certificate or
certificates for any Shares prior to the fulfillment of all of the following
conditions:&nbsp; (A) the admission of the Shares to listing on all stock
exchanges on which such Common Stock is then listed, (B) the completion of any
registration or other qualification of the Shares under any state or federal law
or under rulings or regulations of the Securities and Exchange Commission or
other governmental regulatory body, which the Committee shall, in its sole and
absolute discretion, deem necessary and advisable, (C) the obtaining of any
approval or other clearance from any state or federal governmental agency that
the Committee shall, in its absolute discretion, determine to be necessary or
advisable and (D) the lapse of any such reasonable period of time following the
date the Restriction lapse as the Committee may from time to time establish for
reasons of administrative convenience.</font></p>
<p class="MsoBodyText" style="margin-top:12.0pt;text-align:justify"><font size="2">4.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
<u>Section 83(b) Election.</u>&nbsp; Participant understands that Section 83(a)
of the Code taxes as ordinary income the difference between the amount, if any,
paid for the shares of Common Stock and the Fair Market Value of such shares at
the time the Restrictions on such shares lapse.&nbsp; Participant understands
that, notwithstanding the preceding sentence, Participant may elect to be taxed
at the time of the Award Date, rather than at the time the Restrictions lapse,
by filing an election under Section 83(b) of the Code (an &quot;<u>83(b)
Election</u>&quot;) with the Internal Revenue Service within 30 days of the
Award Date.&nbsp; In the event Participant files an 83(b) Election, Participant
will recognize ordinary income in an amount equal to the difference between the
amount, if any, paid for the shares of Common Stock and the Fair Market Value of
such shares as of the Award Date.&nbsp; Participant further understands that an
additional copy of such 83(b) Election form should be filed with his or her
federal income tax return for the calendar year in which the date of the
Agreement falls.&nbsp; Participant acknowledges that the foregoing is only a
summary of the effect of United States federal income taxation with respect to
the award of Restricted Stock hereunder, and does not purport to be
complete.&nbsp; PARTICIPANT FURTHER ACKNOWLEDGES THAT THE COMPANY IS NOT
RESPONSIBLE FOR FILING THE PARTICIPANT'S 83(b) ELECTION, AND THE COMPANY HAS
DIRECTED PARTICIPANT TO SEEK INDEPENDENT ADVICE REGARDING THE APPLICABLE
PROVISIONS OF THE INTERNAL REVENUE CODE, THE INCOME TAX LAWS OF ANY
MUNICIPALITY, STATE OR FOREIGN COUNTRY IN WHICH PARTICIPANT MAY RESIDE, AND THE
TAX CONSEQUENCES OR PARTICIPANT'S DEATH.</font></p>
<p class="MsoBodyText" style="margin-top:12.0pt;text-align:justify"><font size="2">5.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
<u>Restricted
Stock Not Transferable</u>.&nbsp; No
Restricted Stock or any interest or right therein or part thereof shall be
liable for the debts, contracts or engagements of the Participant or his
successors in interest or shall be subject to disposition by transfer,
alienation, anticipation, pledge, encumbrance, assignment or any other means
whether such disposition be voluntary or involuntary or by operation of law by
judgment, levy, attachment, garnishment or any other legal or equitable
proceedings (including bankruptcy), and any attempted disposition thereof shall
be null and void and of no effect; <i>provided, however,</i> that this Section 5
shall not prevent transfers by will or by applicable laws of descent and
distribution.&nbsp;&nbsp; </font></p>
<p class="MsoBodyText" style="margin-top:12.0pt;text-align:justify"><font size="2">6.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
<u>Rights as Stockholder</u>.&nbsp; Except as otherwise provided herein, upon
the Award Date the Participant shall have all the rights of a stockholder with
respect to the Shares, subject to the Restrictions herein, including the right
to vote the Shares and the right to receive any cash or stock dividends paid to
or made with respect to the Shares; <i>provided, however</i>, that at the
discretion of the Company, and prior to the delivery of shares of Restricted
Stock, the Participant may be required to execute a stockholders agreement in
such form as shall be determined by the Company.</font></p>
<p class="MsoBodyText" style="margin-top:12.0pt;text-align:justify"><font size="2">7.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
<u>Not a
Contract of Employment</u>.&nbsp; Nothing
in this Agreement or in the Plan shall confer upon the Participant any right to
continue to serve as an employee or other Service Provider of the Company or any
of its Subsidiaries.</font></p>
<p class="MsoBodyText" style="margin-top:12.0pt;text-align:justify"><font size="2">8.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
<u>Governing Law.</u>&nbsp; The laws
of the State of Delaware shall govern the interpretation, validity,
administration, enforcement and performance of the terms of this Agreement
regardless of the law that might be applied under principles of conflicts of
laws.
</font></p>
<p class="MsoBodyText" style="margin-top:12.0pt;text-align:justify;text-indent:
0in"><font size="2">9.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
<u>Conformity to Securities Laws</u>.&nbsp;
The Participant acknowledges that the Plan and this Agreement are
intended to conform to the extent necessary with all provisions of the
Securities Act of 1933, as amended, and the Exchange Act, and any and all
regulations and rules promulgated thereunder by the Securities and Exchange
Commission, including without limitation Rule 16b-3 under the Exchange Act.&nbsp;
Notwithstanding anything herein to the contrary, the Plan shall be
administered, and the Awards are granted, only in such a manner as to conform to
such laws, rules and regulations.&nbsp; To
the extent permitted by applicable law, the Plan and this Agreement shall be
deemed amended to the extent necessary to conform to such laws, rules and
regulations.
</font></p>
<p class="MsoBodyText" style="margin-top:12.0pt;text-align:justify;text-indent:
0in"><font size="2">10.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
<u>Amendment, Suspension and Termination</u>.&nbsp;
The Awards may be wholly or partially amended or otherwise modified,
suspended or terminated at any time or from time to time by the Committee or the
Board<i>, provided,</i> that, except as may otherwise be provided by the Plan,
neither the amendment, suspension nor termination of this Agreement shall,
without the consent of the Participant, alter or impair any rights or
obligations under any Award.

</font></p>
<p class="MsoBodyText" style="margin-top:12.0pt;text-align:justify;text-indent:
0in"><font size="2">11.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
<u>Notices</u>.&nbsp; Notices
required or permitted hereunder shall be given in writing and shall be deemed
effectively given upon personal delivery or upon deposit in the United States
mail by certified mail, with postage and fees prepaid, addressed to the
Participant to his address shown in the Company records, and to the Company at
its principal executive office.

</font></p>
<p class="MsoBodyText" align="center" style="margin-top:6.0pt;text-align:center;
text-indent:0in"><font size="2">*&nbsp;
*&nbsp; *&nbsp;*&nbsp; *
</font></p>
<p class="MsoBodyText" style="margin-top:6.0pt;text-align:justify">
<font size="2">The
Participant represents that he has read this Agreement and the Plan and is
familiar with the terms and provisions of each.&nbsp;
The Participant acknowledges that the Award is issued pursuant to, and is
subject to the terms and conditions of, the Plan, and the Participant will be
bound by the terms of the Plan as if it were set forth verbatim in this
Agreement.&nbsp; The Participant agrees
to comply with all rules the Company may establish with respect to the Plan.&nbsp;
The Participant agrees to accept as binding, conclusive and final all
decisions or interpretations of the Committee with respect to any questions
arising under the Plan or this Agreement.&nbsp; The
Participant further acknowledges and agrees that this Agreement (and the Plan)
constitutes the entire agreement between the parties with respect to the Award
and that this Agreement (and the Plan) supersedes any and all prior agreements,
whether written or oral, between the parties with respect to the Award.

</font></p>
<p class="MsoBodyText" style="text-align:justify;text-indent:1.0in"><font size="2">IN
WITNESS WHEREOF, this
Agreement has been executed and delivered by the parties hereto as of the date
first set forth above.

</font></p>
<p class="MsoBodyText" style="text-align:justify;text-indent:1.0in">
<font size="2">&nbsp;

</font></p>
<p class="MsoBodyText" style="margin-bottom:.25in;text-align:justify;tab-stops:
4.0in"><font size="2">RUDOLPH
TECHNOLOGIES, INC.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
PARTICIPANT
</font></p>
<p class="MsoBodyText" style="margin-bottom:0in;margin-bottom:.0001pt;text-align:
justify;tab-stops:4.0in"><font size="2">By:
___________________________&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
________________________________<br>
Name:<br>
Title:&nbsp; &nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
<br>
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
<u>Residence Address</u>:<br>
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
&lt;&lt;STREET1&gt;&gt;<br>
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
&lt;&lt;STREET2&gt;&gt;<br>
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
&lt;&lt;CITY&gt;&gt;, &lt;&lt;STATE&gt;&gt;,&lt;&lt;ZIP&gt;&gt;<br>
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&lt;&lt;COUNTRY&gt;&gt;</font></p>
<p class="MsoBodyText" style="margin-bottom:0in;margin-bottom:.0001pt;text-align:
justify;text-indent:0in;tab-stops:4.0in"><font size="2">&nbsp;
</font></p>
<p class="MsoBodyText" style="margin-bottom:0in;margin-bottom:.0001pt;text-align:
justify;text-indent:0in;tab-stops:4.0in"><font size="2">
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
Aggregate number of shares of<br>
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
Restricted Stock subject to the<br>
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
Award:
__________________
</font></p>

<p ALIGN="left">&nbsp;</p>

</body>
</html>
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{"company-data": {"conformed-name": "RUDOLPH TECHNOLOGIES INC", "cik": "0001094392", "assigned-sic": "3823", "irs-number": "223531208", "state-of-incorporation": "DE", "fiscal-year-end": "1231"}, "filing-values": {"form-type": "8-K", "act": "34", "file-number": "000-27965", "film-number": "05907679"}, "business-address": {"street1": "ONE RUDOLPH RD", "city": "FLANDERS", "state": "NJ", "zip": "07836", "phone": "9736911300"}, "mail-address": {"street1": "ONE RUDOLPH RD", "city": "FLANDERS", "state": "NJ", "zip": "07836"}}
Rudolph Technologies, Inc. Form 8-K
UNITED STATES
SECURITIES AND EXCHANGE COMMISSION
Washington,
D.C. 20549
Form 8-K
Current Report
Pursuant to Section 13 or 15(d) of the Securities
Exchange Act of 1934
Date of Report (date of earliest event reported): May 4,
2005
Rudolph
    Technologies, Inc.
(Exact name of registrant as specified in
    its charter)
DELAWARE
000-27965
22-3531208
(State or other jurisdiction of
    Incorporation)
(Commission File Number)
(IRS Employer Identification
    No.)
One Rudolph Road, Flanders, NJ 07836
(Address of principal executive offices) (zip code)
Registrant's telephone number, including area code: (973)
691-1300
Not applicable
(
Former name or former address, if changed since last report.)
Check the appropriate box below if the form 8-K filing is intended to
simultaneously satisfy the filing obligation of the registrant under any of the following
provisions (see General Instruction A.2. below):
[ ] Written communications pursuant to Rule 425 under the Securities Act
(17 CFR 230.425)
[ ] Soliciting material pursuant to Rule 14a-12 under the Exchange Act
(17 CFR 240.14a-12)
[ ] Pre-commencement communications pursuant to Rule 14d-2(b) under the
Exchange Act (17 CFR 240.14d-2(b))
[ ] Pre-commencement communications pursuant to Rule 13e-4(c) under the
Exchange Act (17 CFR 240.13e-4(c))
Item 1.01 Entry into a Material Definitive Agreement.
Restricted Stock Awards
As previously reported, the board of directors (the "Board") of Rudolph
Technologies, Inc. (the "Company") adopted, effective August 31, 1999,
and the Company's stockholders approved, the Company's 1999 Stock Plan (the
"1999 Plan"). The 1999 Plan was previously filed as Exhibit 10.4 to
the Company's Registration Statement on Form S-1 filed on September 9, 1999.
Pursuant to the 1999 Plan, from time to time, the Company may grant stock
options and restricted stock awards to employees, consultants and directors of the Company. The terms of such
awards are governed by the 1999 Plan and a standard form agreement for each type
of award which is delivered to each grantee.
Pursuant to the 1999 Plan and a restricted stock
agreement (the "Restricted Stock Agreement") which is delivered to
each grantee, directors and employees of the Company receive shares of Company
common stock, par value $0.001 per share (the "Restricted Shares"),
subject to certain restrictions. Upon issuance, the Restricted Shares may not be
transferred, alienated, pledged, encumbered or assigned (such transfer
restrictions, the "Restrictions"). The Restricted Shares vest and the
Restrictions cease to apply to 20% of the total number of shares subject to an
award on each of the first five annual anniversary dates of the grant of the
award. Notwithstanding the foregoing, all of the Restricted Shares vest and the
Restrictions cease to apply in the event of a merger of the Company with or into
another corporation, or the sale of substantially all of the assets of the
Company, in connection with which the successor corporation does not assume the
award or substitute an equivalent right for the award. Should the successor
corporation assume the award or substitute an equivalent right, then no such
acceleration shall apply.  If the grantee
ceases to serve as an employee or director of the Company, as applicable, any
Restricted Shares still subject to the Restrictions shall immediately be
forfeited. The foregoing summary of the terms of restricted stock awards granted
pursuant to the 1999 Plan is qualified in its entirety by the full text of
Restricted Stock Agreement, which is attached hereto as Exhibit 10.1 and is
incorporated herein by reference
Item 9.01. Financial Statements and Exhibits
.
(c)  Exhibits
Exhibit No.
Description of Exhibit
10.13
Form of Restricted
      Stock Agreement pursuant to the Rudolph Technologies,
      Inc. 1999 Stock Plan.
EXHIBIT INDEX
Exhibit No.
Description of Exhibit
10.13
Form of Restricted
      Stock Agreement pursuant to the Rudolph Technologies,
      Inc. 1999 Stock Plan
SIGNATURES
Pursuant to the requirements
of the Securities Exchange Act of 1934, the registrant has duly caused this report to be
signed on its behalf by the undersigned thereunto duly authorized.
Rudolph Technologies, Inc.
Date:   June 21, 2005
By:
/s/ Paul F. McLaughlin
Paul
    F. McLaughlin
Chairman and Chief Executive Officer
EXHIBIT 10.13
Rudolph
  Technologies, Inc.
Restricted
  Stock Purchase Agreement
THIS
  AGREEMENT, dated ____________, 200__ (the "
Award Date
"), is made
  between Rudolph Technologies, Inc., a Delaware corporation hereinafter
  referred to as the "
Company
," and ______________ (the "
Participant
").
1.
Definitions.
All capitalized terms used in this Agreement without
  definition shall have the meanings ascribed in the Company's 1999 Stock Plan,
  as ammended from time to time (the "Plan").
2.
Award of Restricted Stock
.
(a)
Award
.  In
consideration of the Participant's agreement to remain in the service or
employ of the Company or one of its Subsidiaries, and for other good and
valuable consideration which the Committee has determined exceeds the aggregate
par value of the shares of the common stock of the Company (the "
Common
Stock
") subject to the Award (as defined below), as of the Award Date, the
Company issues to the Participant the Award described in this Agreement (the "
Award
"). 
The number of shares of Restricted Stock (the "
Shares
")
subject to the Award (which shall be subject to adjustment in accordance with
Section 13 of the Plan) is set forth on the signature page hereof. 
The Participant is an Employee, Director or other Service Provider.
(b)
Purchase Price; Book Entry Form
. 
The purchase price of the Shares is zero dollars ($0.00) per share.  The Shares will be issued in uncertificated form. 
The Shares will be recorded in the name of the Participant in the books
and records of the Company's transfer agent with appropriate notations
regarding the restrictions on transfer imposed pursuant to this Agreement. 
Upon vesting and the satisfaction of all conditions set forth in Section
3(d), the Company shall cause certificates representing the Shares to be issued
to the Participant.
(c)
Plan
.  The Award
granted hereunder is subject to the terms and provisions of the Plan, including
without limitation, Article 13 thereof.  The
Award shall constitute a Stock Purchase Right as described in Section 11 of the
Plan.
3.
Restrictions
.
(a)
Forfeiture
.  Any Award
which is not vested as of the date the Participant ceases to be an employee of
the Company or one of its Subsidiaries or other Service Provider shall thereupon
be forfeited immediately and without any further action by the Company. 
For purposes of this Agreement, "
Restrictions
"
shall mean the restrictions on sale or other transfer set forth in Section 5 and
the exposure to forfeiture set forth in this Section 3(a).
(b)
Vesting and Lapse of Restrictions
.  Subject to Sections 3(a) and 3(c), the Award shall vest and
Restrictions shall lapse with respect to twenty percent (20%) of the Shares
subject to the Award (rounded down to the next whole number of shares) on each
of the first five (5) anniversaries of the Award Date, provided in each case
that the Participant remains continuously as an employee or in the service of
the Company or a Subsidiary or otherwise as a Service Provider from the Award
Date through such date.
(c)
Accelerations of Vesting.
Notwithstanding
Sections 3(a) and 3(b), pursuant to Section 13 of the Plan, the Award shall
become fully vested and all Restrictions applicable to such Award shall lapse in
the event of a merger of the Company with or into another corporation, or the
sale of substantially all of the assets of the Company, in connection with which
the successor corporation does not assume the Award or substitute an equivalent
right for the Award.  Should the
successor corporation assume the Award or substitute an equivalent right, then
no such acceleration shall apply.
(d)
Tax Withholding; Conditions to Issuance of Certificates
. 
Notwithstanding any other provision of this Agreement (including without
limitation Section 2(b)):
(i)               
No new certificate shall be delivered to the Participant or his legal
representative unless and until the Participant or his legal representative
shall have paid to the Company the full amount of all federal and state
withholding or other taxes applicable to the taxable income of Participant
resulting from the grant of  Restricted Stock or the lapse or removal of
the Restrictions.
(ii)               
The Company shall not be required to issue or deliver any certificate or
certificates for any Shares prior to the fulfillment of all of the following
conditions:  (A) the admission of the Shares to listing on all stock
exchanges on which such Common Stock is then listed, (B) the completion of any
registration or other qualification of the Shares under any state or federal law
or under rulings or regulations of the Securities and Exchange Commission or
other governmental regulatory body, which the Committee shall, in its sole and
absolute discretion, deem necessary and advisable, (C) the obtaining of any
approval or other clearance from any state or federal governmental agency that
the Committee shall, in its absolute discretion, determine to be necessary or
advisable and (D) the lapse of any such reasonable period of time following the
date the Restriction lapse as the Committee may from time to time establish for
reasons of administrative convenience.
4.
Section 83(b) Election.
Participant understands that Section 83(a)
of the Code taxes as ordinary income the difference between the amount, if any,
paid for the shares of Common Stock and the Fair Market Value of such shares at
the time the Restrictions on such shares lapse.  Participant understands
that, notwithstanding the preceding sentence, Participant may elect to be taxed
at the time of the Award Date, rather than at the time the Restrictions lapse,
by filing an election under Section 83(b) of the Code (an "
83(b)
Election
") with the Internal Revenue Service within 30 days of the
Award Date.  In the event Participant files an 83(b) Election, Participant
will recognize ordinary income in an amount equal to the difference between the
amount, if any, paid for the shares of Common Stock and the Fair Market Value of
such shares as of the Award Date.  Participant further understands that an
additional copy of such 83(b) Election form should be filed with his or her
federal income tax return for the calendar year in which the date of the
Agreement falls.  Participant acknowledges that the foregoing is only a
summary of the effect of United States federal income taxation with respect to
the award of Restricted Stock hereunder, and does not purport to be
complete.  PARTICIPANT FURTHER ACKNOWLEDGES THAT THE COMPANY IS NOT
RESPONSIBLE FOR FILING THE PARTICIPANT'S 83(b) ELECTION, AND THE COMPANY HAS
DIRECTED PARTICIPANT TO SEEK INDEPENDENT ADVICE REGARDING THE APPLICABLE
PROVISIONS OF THE INTERNAL REVENUE CODE, THE INCOME TAX LAWS OF ANY
MUNICIPALITY, STATE OR FOREIGN COUNTRY IN WHICH PARTICIPANT MAY RESIDE, AND THE
TAX CONSEQUENCES OR PARTICIPANT'S DEATH.
5.
Restricted
Stock Not Transferable
.  No
Restricted Stock or any interest or right therein or part thereof shall be
liable for the debts, contracts or engagements of the Participant or his
successors in interest or shall be subject to disposition by transfer,
alienation, anticipation, pledge, encumbrance, assignment or any other means
whether such disposition be voluntary or involuntary or by operation of law by
judgment, levy, attachment, garnishment or any other legal or equitable
proceedings (including bankruptcy), and any attempted disposition thereof shall
be null and void and of no effect;
provided, however,
that this Section 5
shall not prevent transfers by will or by applicable laws of descent and
distribution.
6.
Rights as Stockholder
.  Except as otherwise provided herein, upon
the Award Date the Participant shall have all the rights of a stockholder with
respect to the Shares, subject to the Restrictions herein, including the right
to vote the Shares and the right to receive any cash or stock dividends paid to
or made with respect to the Shares;
provided, however
, that at the
discretion of the Company, and prior to the delivery of shares of Restricted
Stock, the Participant may be required to execute a stockholders agreement in
such form as shall be determined by the Company.
7.
Not a
Contract of Employment
.  Nothing
in this Agreement or in the Plan shall confer upon the Participant any right to
continue to serve as an employee or other Service Provider of the Company or any
of its Subsidiaries.
8.
Governing Law.
The laws
of the State of Delaware shall govern the interpretation, validity,
administration, enforcement and performance of the terms of this Agreement
regardless of the law that might be applied under principles of conflicts of
laws.
9.
Conformity to Securities Laws
. 
The Participant acknowledges that the Plan and this Agreement are
intended to conform to the extent necessary with all provisions of the
Securities Act of 1933, as amended, and the Exchange Act, and any and all
regulations and rules promulgated thereunder by the Securities and Exchange
Commission, including without limitation Rule 16b-3 under the Exchange Act. 
Notwithstanding anything herein to the contrary, the Plan shall be
administered, and the Awards are granted, only in such a manner as to conform to
such laws, rules and regulations.  To
the extent permitted by applicable law, the Plan and this Agreement shall be
deemed amended to the extent necessary to conform to such laws, rules and
regulations.
10.
Amendment, Suspension and Termination
. 
The Awards may be wholly or partially amended or otherwise modified,
suspended or terminated at any time or from time to time by the Committee or the
Board
, provided,
that, except as may otherwise be provided by the Plan,
neither the amendment, suspension nor termination of this Agreement shall,
without the consent of the Participant, alter or impair any rights or
obligations under any Award.
11.
Notices
.  Notices
required or permitted hereunder shall be given in writing and shall be deemed
effectively given upon personal delivery or upon deposit in the United States
mail by certified mail, with postage and fees prepaid, addressed to the
Participant to his address shown in the Company records, and to the Company at
its principal executive office.
* 
*  * *  *
The
Participant represents that he has read this Agreement and the Plan and is
familiar with the terms and provisions of each. 
The Participant acknowledges that the Award is issued pursuant to, and is
subject to the terms and conditions of, the Plan, and the Participant will be
bound by the terms of the Plan as if it were set forth verbatim in this
Agreement.  The Participant agrees
to comply with all rules the Company may establish with respect to the Plan. 
The Participant agrees to accept as binding, conclusive and final all
decisions or interpretations of the Committee with respect to any questions
arising under the Plan or this Agreement.  The
Participant further acknowledges and agrees that this Agreement (and the Plan)
constitutes the entire agreement between the parties with respect to the Award
and that this Agreement (and the Plan) supersedes any and all prior agreements,
whether written or oral, between the parties with respect to the Award.
IN
WITNESS WHEREOF, this
Agreement has been executed and delivered by the parties hereto as of the date
first set forth above.
RUDOLPH
TECHNOLOGIES, INC.                                                  
PARTICIPANT
By:
___________________________                                         
________________________________
Name:
Title:
Residence Address
:
<<STREET1>>
<<STREET2>>
<<CITY>>, <<STATE>>,<<ZIP>>
<<COUNTRY>>
Aggregate number of shares of
Restricted Stock subject to the
Award:
__________________