<PAGE>

    As filed with the Securities and Exchange Commission on October 8, 1996
                                                 Registration No. 333-
--------------------------------------------------------------------------------

                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                           --------------------------

                                    FORM S-8
                             REGISTRATION STATEMENT
                        UNDER THE SECURITIES ACT OF 1933

                           --------------------------

                      INTEGRATED MEASUREMENT SYSTEMS, INC.
               (Exact name of registrant as specified in charter)

                 OREGON                               93-0840631
     (State or other jurisdiction of               (I.R.S. Employer
     incorporation or organization)              Identification Number)

                            ------------------------

                 9525 S.W. GEMINI DRIVE, BEAVERTON, OREGON 97008
   (Address, including zip code, of registrant's principal executive offices)

                            -------------------------

         INTEGRATED MEASUREMENT SYSTEMS, INC. 1995 STOCK OPTION PLAN FOR
                              NONEMPLOYEE DIRECTORS
                            (Full title of the Plan)

                            -------------------------

                                 KEITH L. BARNES
                      PRESIDENT AND CHIEF EXECUTIVE OFFICER
                      INTEGRATED MEASUREMENT SYSTEMS, INC.
                 9525 S.W. GEMINI DRIVE, BEAVERTON, OREGON 97008
                                 (503) 626-7117
            (Name, address, including zip code, and telephone number,
                   including area code, of Agent for Service)

                           --------------------------

                                 with copies to:
                             STEPHEN M. GOING, ESQ.
                    ATER WYNNE HEWITT DODSON & SKERRITT, LLP
              222 S.W. COLUMBIA, SUITE 1800, PORTLAND, OREGON 97201
                                 (503) 226-1191

                         CALCULATION OF REGISTRATION FEE

<TABLE>
<CAPTION>
  Title of Securities to      Amount to be       Proposed Maximum Offering       Proposed Maximum Aggregate         Amount of
       be Registered           Registered           Price per Share (1)              Offering Price (1)          Registration Fee
---------------------------------------------------------------------------------------------------------------------------------
<S>                          <C>                 <C>                             <C>                             <C>
 Common Stock, par
 value $.01 per share        250,000 shares            Not Applicable                    $ 3,814,375                  $ 1,156
---------------------------------------------------------------------------------------------------------------------------------
</TABLE>

(1)  Pursuant to Rule 457(h)(1), the aggregate offering price is based on the
     exercise prices of outstanding options and the average of high and low per
     shares sales prices of the Registrant's Common Stock as reported on the
     Nasdaq National Market System on October 4, 1996 for options not yet
     granted.
--------------------------------------------------------------------------------

<PAGE>

                                     PART II

               INFORMATION REQUIRED IN THE REGISTRATION STATEMENT


ITEM 3.   INCORPORATION OF DOCUMENTS BY REFERENCE

     The following documents are incorporated by reference into this
Registration Statement:

     (a)  Annual Report on Form 10-K of the Company for the fiscal year ended
December 31, 1995, filed with the Securities and Exchange Commission (the "SEC")
pursuant to Sections 13(a) and 15(d) of the Securities Exchange Act of 1934 (the
"Exchange Act") on March 29, 1996.

     (b)  Quarterly Report on Form 10-Q of the Company for the quarter ended
June 30, 1996, filed with the SEC on August 14, 1996; Quarterly Report on Form
10-Q of the Company for the quarter ended March 31, 1996, filed with the SEC on
May 15, 1996.

     (c)  Registration Statement on Form 8-A of the Company filed with the SEC
on June 21, 1995.

     (d)  All documents filed by the Company with the SEC pursuant to Sections
13(a), 13(c), 14 and 15(d) of the Exchange Act after the date of this
Registration Statement and before the date of filing of a post-effective
amendment to this Registration Statement stating that all securities offered
have been sold or which deregisters all securities then remaining unsold.

ITEM 4.   DESCRIPTION OF SECURITIES

     Not applicable.

ITEM 5.   INTERESTS OF NAMED EXPERTS AND COUNSEL

     Not applicable.

ITEM 6.   INDEMNIFICATION OF DIRECTORS AND OFFICERS

     As an Oregon corporation the Company is subject to the Oregon Business
Corporation Act ("OBCA") and the exculpation from liability and indemnification
provisions contained therein.  Pursuant to Section 60.047(2)(d) of the OBCA,
Article IV of the Company's Restated Articles of Incorporation (the "Articles")
eliminates the liability of the Company's directors to the Company or its
shareholders, except for any liability related to breach of the duty of loyalty,
actions not in good faith and certain other liabilities.  The Articles require
the Company to indemnify its directors and officers to the fullest extent not
prohibited by law.

                                      - 2 -

<PAGE>

     Section 60.387, ET SEQ., of the OBCA allows corporations to indemnify their
directors and officers against liability where the director or officer has acted
in good faith and with a reasonable belief that actions taken were in the best
interests of the corporation or at least not adverse to the corporation's best
interests and, if in a criminal proceeding, the individual had no reasonable
cause to believe the conduct in question was unlawful.  Under the OBCA,
corporations may not indemnify against liability in connection with a claim by
or in the right of the corporation in which the director or officer was adjudged
liable to the corporation, but may indemnify against the reasonable expenses
associated with such claims.  Corporations may not indemnify against breaches of
the duty of loyalty.  The OBCA mandates indemnification against all reasonable
expenses incurred in the successful defense of any claim made or threatened
whether or not such claim was by or in the right of the corporation.  Finally, a
court may order indemnification if it determines that the director or officer is
fairly and reasonably entitled to indemnification in view of all the relevant
circumstances whether or not the director or officer  met the good faith and
reasonable belief standards of conduct set out in the statute.

     The OBCA also provides that the statutory indemnification provisions are
not deemed exclusive of any other rights to which directors or officers may be
entitled under a corporation's articles of incorporation or bylaws, any
agreement, general or specific action of the board of directors, vote of
shareholders or otherwise.

     The Company's Articles require the Company to indemnify its directors and
officers to the fullest extent not prohibited by law.

     Effective as of May 11, 1995, the Company entered into indemnity agreements
with H. Raymond Bingham, C. Scott Gibson, James M. Hurd, James E. Solomon,
Delbert W. Yocam and Keith L. Barnes, each of whom is a member of the Board of
Directors (Mr. Barnes is also an officer of the Company).  Effective as of May
11, 1995, the Company also entered into indemnity agreements with Sar Ramadan,
W. Barry Baril, Donald E. Grant, Marvin S. Wolfson, Kenneth R. Lindsay, James P.
Fraine and Gwyn Harvey, each of whom is an officer of the Company.  In addition,
effective as of November 29, 1995, the Company also entered into an indemnity
agreement with Mark Allison, an officer of the Company.  Each agreement provides
for indemnification of the indemnitee to the fullest extent allowed by law.

ITEM 7.   EXEMPTION FROM REGISTRATION CLAIMED

     Not applicable.

                                      - 3 -

<PAGE>


ITEM 8.   EXHIBITS


     Number                        Description
     ------                        -----------

      5.0      Opinion of Ater Wynne Hewitt Dodson & Skerritt, LLP as to the
               legality of the securities being registered

     23.1      Consent of Ater Wynne Hewitt Dodson & Skerritt, LLP (included in
               legal opinion filed as Exhibit 5.0)

     23.2      Consent of Arthur Andersen LLP

     24.0      Powers of Attorney (included in signature page in Part II of the
               Registration Statement)

     99.0      Integrated Measurement Systems, Inc. 1995 Stock Option Plan for
               Nonemployee Directors (Incorporated by reference to the Company's
               Registration Statement on Form S-1 (Registration No. 33-92408)).

ITEM 9.   UNDERTAKINGS

     (a)  The undersigned registrant hereby undertakes to file, during any
period in which offers or sales are being made, a post-effective amendment to
this registration statement:

          (i)  to include any prospectus required by Section 10(a)(3) of the
Securities Act of 1933;

          (ii) to reflect in the prospectus any facts or events arising after
the effective date of the registration statement (or the most recent post-
effective amendment thereof) which, individually or in the aggregate, represent
a fundamental change in the information set forth in the registration statement;

          (iii) to include any material information with respect to the plan of
distribution not previously disclosed in the registration statement or any
material change to such information in the registration statement; provided,
however, that subparagraphs (i) and (ii) do not apply if the information
required to be included in a post-effective amendment by those subparagraphs is
contained in periodic reports filed by the registrant pursuant to Section 13 or
Section 15(d) of the Securities Exchange Act of 1934 that are incorporated by
reference in the registration statement.

     (b)  The undersigned registrant hereby undertakes that, for the purpose of
determining liability under the Securities Act of 1933, each such post-effective
amendment shall be deemed to be a new registration statement relating to the
securities offered

                                      - 4 -

<PAGE>

therein, and the offering of such securities at that time shall be deemed to be
the initial bona fide offering thereof.

     (c)  The undersigned registrant hereby undertakes to remove from
registration by means of a post-effective amendment any of the securities being
registered which remain unsold at the termination of the offering.

     (d)  The undersigned registrant hereby undertakes that, for purposes of
determining any liability under the Securities Act of 1933, each filing of the
registrant's annual report pursuant to Section 13(a) or Section 15(d) of the
Securities Exchange Act of 1934 that is incorporated by reference in the
registration statement shall be deemed to be a new registration statement
relating to the securities offered therein, and the offering of such securities
at that time shall be deemed to be the initial bona fide offering thereof.

     (e)  Insofar as indemnification for liabilities arising under the
Securities Act of 1933 may be permitted to directors, officers and controlling
persons of the registrant pursuant to the foregoing provisions, or otherwise,
the registrant has been advised that in the opinion of the Securities and
Exchange Commission such indemnification is against public policy as expressed
in the Act and is, therefore, unenforceable.  In the event that a claim for
indemnification against such liabilities (other than the payment by the
registrant of expenses incurred or paid by a director, officer or controlling
person of the registrant in the successful defense of any action, suit or
proceeding) is asserted by such a director, officer or controlling person in
connection with securities being registered, the registrant will, unless in the
opinion of its counsel the matter has been settled by controlling precedent,
submit to a court of appropriate jurisdiction the question whether such
indemnification by it is against public policy as expressed in the Act and will
be governed by the final adjudication of such issue.

                                      - 5 -

<PAGE>

                                   SIGNATURES

     Pursuant to the requirements of the Securities Act of 1933, the registrant
certifies that it has reasonable grounds to believe that it meets all of the
requirements for filing on Form S-8 and has duly caused this registration
statement to be signed on its behalf by the undersigned, thereunto duly
authorized, in the City of Beaverton, State of Oregon, on the 30th day of
September, 1996.


                                        INTEGRATED MEASUREMENT SYSTEMS, INC.



                                        By:   /s/ Keith L. Barnes
                                            --------------------------------
                                            Keith L. Barnes
                                            President and Chief Executive
                                              Officer


                                POWER OF ATTORNEY

     KNOW ALL MEN BY THESE PRESENTS, that each person whose signature appears
below constitutes and appoints Keith L. Barnes and Sar Ramadan, and each of them
singly, as true and lawful attorneys-in-fact and agents with full power of
substitution and resubstitution, for him and in his name, place and stead, in
any and all capacities to sign the registration statement filed herewith and any
or all amendments to said registration statement (including post-effective
amendments), and to file the same, with all exhibits thereto, and other
documents in connection therewith, with the Securities and Exchange Commission
granting unto said attorneys-in-fact and agents and each of them, full power and
authority to do and perform each and every act and thing requisite and necessary
to be done in and about the foregoing, as fully to all intents and purposes as
he or she might or could do in person, hereby ratifying and confirming all that
said attorneys-in-fact and agents or any of them, or their or his substitute or
substitutes, may lawfully do or cause to be done by virtue hereof.

     Witness our hands on the date set forth below.

     Pursuant to the requirements of the Securities Act of 1933, this
registration statement has been signed by the following persons in the
capacities and on the dates indicated.



                         [SIGNATURES ON FOLLOWING PAGE]

                                      - 6 -

<PAGE>

  Signature                   Title                       Date
  ---------                   -----                       ----


  /s/ Keith L. Barnes         President, Chief            09/30/96
--------------------------    Executive Officer and
Keith L. Barnes               Director (Principal
                              Executive Officer)

  /s/ Sar Ramadan             Chief Financial Officer     09/30/96
--------------------------    (Principal Financial
Sar Ramadan                   and Accounting Officer)


  /s/ H. Raymond Bingham      Chairman of the Board       09/30/96
--------------------------
H. Raymond Bingham


  /s/ C. Scott Gibson         Director                    09/30/96
--------------------------
C. Scott Gibson


  /s/ James M. Hurd           Director                    09/30/96
--------------------------
James M. Hurd


  /s/ James E. Solomon        Director                    09/30/96
--------------------------
James E. Solomon


  /s/ Delbert W. Yocam        Director                    09/30/96
--------------------------
Delbert W. Yocam

                                      - 7 -

<PAGE>

                                INDEX TO EXHIBITS


Exhibit                                                                     Page
Number      Exhibit                                                         No.
-------     -------                                                         ----

 5.0        Opinion of Ater Wynne Hewitt Dodson & Skerritt, LLP as
            to the legality of the securities being registered

23.1        Consent of Ater Wynne Hewitt Dodson & Skerritt, LLP
            (included in legal opinion filed as Exhibit 5.0)

23.2        Consent of Arthur Andersen LLP

24.0        Powers of Attorney (included in signature page in Part
            II of the Registration Statement)

99.0        Integrated Measurement Systems, Inc. 1995 Stock Option
            Plan for Nonemployee Directors (Incorporated by
            reference to the Company's Registration Statement on
            Form S-1 (Registration No. 33-92408)).
[{"type": "S-8", "sequence": "1", "description": "S-8", "secsgml_size_bytes": 17089}]
{"company-data": {"conformed-name": "INTEGRATED MEASUREMENT SYSTEMS INC /OR/", "cik": "0000945441", "assigned-sic": "3825", "irs-number": "930840631", "state-of-incorporation": "OR", "fiscal-year-end": "1231"}, "filing-values": {"form-type": "S-8", "act": "33", "file-number": "333-13693", "film-number": "96640773"}, "business-address": {"street1": "9525 SW GEMINI DR", "city": "BEAVERTON", "state": "OR", "zip": "97008", "phone": "5036267117"}, "mail-address": {"street1": "9525 SW GEMINI DR", "city": "BEAVERTON", "state": "OR", "zip": "97008"}}
As filed with the Securities and Exchange Commission on October 8, 1996
                                                 Registration No. 333-
--------------------------------------------------------------------------------

                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                           --------------------------

                                    FORM S-8
                             REGISTRATION STATEMENT
                        UNDER THE SECURITIES ACT OF 1933

                           --------------------------

                      INTEGRATED MEASUREMENT SYSTEMS, INC.
               (Exact name of registrant as specified in charter)

                 OREGON                               93-0840631
     (State or other jurisdiction of               (I.R.S. Employer
     incorporation or organization)              Identification Number)

                            ------------------------

                 9525 S.W. GEMINI DRIVE, BEAVERTON, OREGON 97008
   (Address, including zip code, of registrant's principal executive offices)

                            -------------------------

         INTEGRATED MEASUREMENT SYSTEMS, INC. 1995 STOCK OPTION PLAN FOR
                              NONEMPLOYEE DIRECTORS
                            (Full title of the Plan)

                            -------------------------

                                 KEITH L. BARNES
                      PRESIDENT AND CHIEF EXECUTIVE OFFICER
                      INTEGRATED MEASUREMENT SYSTEMS, INC.
                 9525 S.W. GEMINI DRIVE, BEAVERTON, OREGON 97008
                                 (503) 626-7117
            (Name, address, including zip code, and telephone number,
                   including area code, of Agent for Service)

                           --------------------------

                                 with copies to:
                             STEPHEN M. GOING, ESQ.
                    ATER WYNNE HEWITT DODSON & SKERRITT, LLP
              222 S.W. COLUMBIA, SUITE 1800, PORTLAND, OREGON 97201
                                 (503) 226-1191

                         CALCULATION OF REGISTRATION FEE
Title of Securities to      Amount to be       Proposed Maximum Offering       Proposed Maximum Aggregate         Amount of
       be Registered           Registered           Price per Share (1)              Offering Price (1)          Registration Fee
---------------------------------------------------------------------------------------------------------------------------------
Common Stock, par
 value $.01 per share        250,000 shares            Not Applicable                    $ 3,814,375                  $ 1,156
---------------------------------------------------------------------------------------------------------------------------------
(1)  Pursuant to Rule 457(h)(1), the aggregate offering price is based on the
     exercise prices of outstanding options and the average of high and low per
     shares sales prices of the Registrant's Common Stock as reported on the
     Nasdaq National Market System on October 4, 1996 for options not yet
     granted.
--------------------------------------------------------------------------------
PART II

               INFORMATION REQUIRED IN THE REGISTRATION STATEMENT

ITEM 3.   INCORPORATION OF DOCUMENTS BY REFERENCE

     The following documents are incorporated by reference into this
Registration Statement:

     (a)  Annual Report on Form 10-K of the Company for the fiscal year ended
December 31, 1995, filed with the Securities and Exchange Commission (the "SEC")
pursuant to Sections 13(a) and 15(d) of the Securities Exchange Act of 1934 (the
"Exchange Act") on March 29, 1996.

     (b)  Quarterly Report on Form 10-Q of the Company for the quarter ended
June 30, 1996, filed with the SEC on August 14, 1996; Quarterly Report on Form
10-Q of the Company for the quarter ended March 31, 1996, filed with the SEC on
May 15, 1996.

     (c)  Registration Statement on Form 8-A of the Company filed with the SEC
on June 21, 1995.

     (d)  All documents filed by the Company with the SEC pursuant to Sections
13(a), 13(c), 14 and 15(d) of the Exchange Act after the date of this
Registration Statement and before the date of filing of a post-effective
amendment to this Registration Statement stating that all securities offered
have been sold or which deregisters all securities then remaining unsold.

ITEM 4.   DESCRIPTION OF SECURITIES

     Not applicable.

ITEM 5.   INTERESTS OF NAMED EXPERTS AND COUNSEL

     Not applicable.

ITEM 6.   INDEMNIFICATION OF DIRECTORS AND OFFICERS

     As an Oregon corporation the Company is subject to the Oregon Business
Corporation Act ("OBCA") and the exculpation from liability and indemnification
provisions contained therein.  Pursuant to Section 60.047(2)(d) of the OBCA,
Article IV of the Company's Restated Articles of Incorporation (the "Articles")
eliminates the liability of the Company's directors to the Company or its
shareholders, except for any liability related to breach of the duty of loyalty,
actions not in good faith and certain other liabilities.  The Articles require
the Company to indemnify its directors and officers to the fullest extent not
prohibited by law.

                                      - 2 -
Section 60.387, ET SEQ., of the OBCA allows corporations to indemnify their
directors and officers against liability where the director or officer has acted
in good faith and with a reasonable belief that actions taken were in the best
interests of the corporation or at least not adverse to the corporation's best
interests and, if in a criminal proceeding, the individual had no reasonable
cause to believe the conduct in question was unlawful.  Under the OBCA,
corporations may not indemnify against liability in connection with a claim by
or in the right of the corporation in which the director or officer was adjudged
liable to the corporation, but may indemnify against the reasonable expenses
associated with such claims.  Corporations may not indemnify against breaches of
the duty of loyalty.  The OBCA mandates indemnification against all reasonable
expenses incurred in the successful defense of any claim made or threatened
whether or not such claim was by or in the right of the corporation.  Finally, a
court may order indemnification if it determines that the director or officer is
fairly and reasonably entitled to indemnification in view of all the relevant
circumstances whether or not the director or officer  met the good faith and
reasonable belief standards of conduct set out in the statute.

     The OBCA also provides that the statutory indemnification provisions are
not deemed exclusive of any other rights to which directors or officers may be
entitled under a corporation's articles of incorporation or bylaws, any
agreement, general or specific action of the board of directors, vote of
shareholders or otherwise.

     The Company's Articles require the Company to indemnify its directors and
officers to the fullest extent not prohibited by law.

     Effective as of May 11, 1995, the Company entered into indemnity agreements
with H. Raymond Bingham, C. Scott Gibson, James M. Hurd, James E. Solomon,
Delbert W. Yocam and Keith L. Barnes, each of whom is a member of the Board of
Directors (Mr. Barnes is also an officer of the Company).  Effective as of May
11, 1995, the Company also entered into indemnity agreements with Sar Ramadan,
W. Barry Baril, Donald E. Grant, Marvin S. Wolfson, Kenneth R. Lindsay, James P.
Fraine and Gwyn Harvey, each of whom is an officer of the Company.  In addition,
effective as of November 29, 1995, the Company also entered into an indemnity
agreement with Mark Allison, an officer of the Company.  Each agreement provides
for indemnification of the indemnitee to the fullest extent allowed by law.

ITEM 7.   EXEMPTION FROM REGISTRATION CLAIMED

     Not applicable.

                                      - 3 -
ITEM 8.   EXHIBITS

     Number                        Description
     ------                        -----------

      5.0      Opinion of Ater Wynne Hewitt Dodson & Skerritt, LLP as to the
               legality of the securities being registered

     23.1      Consent of Ater Wynne Hewitt Dodson & Skerritt, LLP (included in
               legal opinion filed as Exhibit 5.0)

     23.2      Consent of Arthur Andersen LLP

     24.0      Powers of Attorney (included in signature page in Part II of the
               Registration Statement)

     99.0      Integrated Measurement Systems, Inc. 1995 Stock Option Plan for
               Nonemployee Directors (Incorporated by reference to the Company's
               Registration Statement on Form S-1 (Registration No. 33-92408)).

ITEM 9.   UNDERTAKINGS

     (a)  The undersigned registrant hereby undertakes to file, during any
period in which offers or sales are being made, a post-effective amendment to
this registration statement:

          (i)  to include any prospectus required by Section 10(a)(3) of the
Securities Act of 1933;

          (ii) to reflect in the prospectus any facts or events arising after
the effective date of the registration statement (or the most recent post-
effective amendment thereof) which, individually or in the aggregate, represent
a fundamental change in the information set forth in the registration statement;

          (iii) to include any material information with respect to the plan of
distribution not previously disclosed in the registration statement or any
material change to such information in the registration statement; provided,
however, that subparagraphs (i) and (ii) do not apply if the information
required to be included in a post-effective amendment by those subparagraphs is
contained in periodic reports filed by the registrant pursuant to Section 13 or
Section 15(d) of the Securities Exchange Act of 1934 that are incorporated by
reference in the registration statement.

     (b)  The undersigned registrant hereby undertakes that, for the purpose of
determining liability under the Securities Act of 1933, each such post-effective
amendment shall be deemed to be a new registration statement relating to the
securities offered

                                      - 4 -
therein, and the offering of such securities at that time shall be deemed to be
the initial bona fide offering thereof.

     (c)  The undersigned registrant hereby undertakes to remove from
registration by means of a post-effective amendment any of the securities being
registered which remain unsold at the termination of the offering.

     (d)  The undersigned registrant hereby undertakes that, for purposes of
determining any liability under the Securities Act of 1933, each filing of the
registrant's annual report pursuant to Section 13(a) or Section 15(d) of the
Securities Exchange Act of 1934 that is incorporated by reference in the
registration statement shall be deemed to be a new registration statement
relating to the securities offered therein, and the offering of such securities
at that time shall be deemed to be the initial bona fide offering thereof.

     (e)  Insofar as indemnification for liabilities arising under the
Securities Act of 1933 may be permitted to directors, officers and controlling
persons of the registrant pursuant to the foregoing provisions, or otherwise,
the registrant has been advised that in the opinion of the Securities and
Exchange Commission such indemnification is against public policy as expressed
in the Act and is, therefore, unenforceable.  In the event that a claim for
indemnification against such liabilities (other than the payment by the
registrant of expenses incurred or paid by a director, officer or controlling
person of the registrant in the successful defense of any action, suit or
proceeding) is asserted by such a director, officer or controlling person in
connection with securities being registered, the registrant will, unless in the
opinion of its counsel the matter has been settled by controlling precedent,
submit to a court of appropriate jurisdiction the question whether such
indemnification by it is against public policy as expressed in the Act and will
be governed by the final adjudication of such issue.

                                      - 5 -
SIGNATURES

     Pursuant to the requirements of the Securities Act of 1933, the registrant
certifies that it has reasonable grounds to believe that it meets all of the
requirements for filing on Form S-8 and has duly caused this registration
statement to be signed on its behalf by the undersigned, thereunto duly
authorized, in the City of Beaverton, State of Oregon, on the 30th day of
September, 1996.

                                        INTEGRATED MEASUREMENT SYSTEMS, INC.

                                        By:   /s/ Keith L. Barnes
                                            --------------------------------
                                            Keith L. Barnes
                                            President and Chief Executive
                                              Officer

                                POWER OF ATTORNEY

     KNOW ALL MEN BY THESE PRESENTS, that each person whose signature appears
below constitutes and appoints Keith L. Barnes and Sar Ramadan, and each of them
singly, as true and lawful attorneys-in-fact and agents with full power of
substitution and resubstitution, for him and in his name, place and stead, in
any and all capacities to sign the registration statement filed herewith and any
or all amendments to said registration statement (including post-effective
amendments), and to file the same, with all exhibits thereto, and other
documents in connection therewith, with the Securities and Exchange Commission
granting unto said attorneys-in-fact and agents and each of them, full power and
authority to do and perform each and every act and thing requisite and necessary
to be done in and about the foregoing, as fully to all intents and purposes as
he or she might or could do in person, hereby ratifying and confirming all that
said attorneys-in-fact and agents or any of them, or their or his substitute or
substitutes, may lawfully do or cause to be done by virtue hereof.

     Witness our hands on the date set forth below.

     Pursuant to the requirements of the Securities Act of 1933, this
registration statement has been signed by the following persons in the
capacities and on the dates indicated.

                         [SIGNATURES ON FOLLOWING PAGE]

                                      - 6 -
Signature                   Title                       Date
  ---------                   -----                       ----

  /s/ Keith L. Barnes         President, Chief            09/30/96
--------------------------    Executive Officer and
Keith L. Barnes               Director (Principal
                              Executive Officer)

  /s/ Sar Ramadan             Chief Financial Officer     09/30/96
--------------------------    (Principal Financial
Sar Ramadan                   and Accounting Officer)

  /s/ H. Raymond Bingham      Chairman of the Board       09/30/96
--------------------------
H. Raymond Bingham

  /s/ C. Scott Gibson         Director                    09/30/96
--------------------------
C. Scott Gibson

  /s/ James M. Hurd           Director                    09/30/96
--------------------------
James M. Hurd

  /s/ James E. Solomon        Director                    09/30/96
--------------------------
James E. Solomon

  /s/ Delbert W. Yocam        Director                    09/30/96
--------------------------
Delbert W. Yocam

                                      - 7 -
INDEX TO EXHIBITS

Exhibit                                                                     Page
Number      Exhibit                                                         No.
-------     -------                                                         ----

 5.0        Opinion of Ater Wynne Hewitt Dodson & Skerritt, LLP as
            to the legality of the securities being registered

23.1        Consent of Ater Wynne Hewitt Dodson & Skerritt, LLP
            (included in legal opinion filed as Exhibit 5.0)

23.2        Consent of Arthur Andersen LLP

24.0        Powers of Attorney (included in signature page in Part
            II of the Registration Statement)

99.0        Integrated Measurement Systems, Inc. 1995 Stock Option
            Plan for Nonemployee Directors (Incorporated by
            reference to the Company's Registration Statement on
            Form S-1 (Registration No. 33-92408)).