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      <div align="center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">As filed with the Securities and Exchange
  Commission on August 6, 2010 </font></font></div>
      <div><font size="2">&#160;</font></div>
      <div align="right"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Registration No.
  333-______</font></font></div>
      <div><font size="2">&#160;</font></div>
      <div align="center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">SECURITIES AND EXCHANGE
  COMMISSION</font></font><br><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Washington, D.C. 20549 </font></font></div>
      <div><font size="2">&#160;</font></div>
      <div align="center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">FORM S-8 </font></font></div>
      <div><font size="2">&#160;</font></div>
      <div align="center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">REGISTRATION
  STATEMENT<br>UNDER<br></font></font><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">THE SECURITIES ACT OF 1933 </font></font></div>
      <div><font size="2">&#160;</font></div>
      <div align="center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">AMTECH SYSTEMS, INC.<br></font></font><font size="2" style="FONT-FAMILY: serif">(Exact Name of Registrant as Specified in Its
  Charter) </font></div>
      <div><font size="2">&#160;</font></div>
      <div align="center">
        <div align="center">
          <table border="0" cellpadding="0" cellspacing="0" width="75%" style="FONT-SIZE: 10pt; LINE-HEIGHT: 13pt; BORDER-COLLAPSE: collapse; ">
  <tr valign="bottom">
                <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Arizona</font></font> </td>
                <td nowrap width="80%" style="TEXT-ALIGN: center">&#160;</td>
                <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">86-0411215</font></font></td>
              </tr><tr valign="bottom">
                <td nowrap width="10%" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">(State or Other Jurisdiction
  of</font></td>
                <td nowrap width="80%" style="TEXT-ALIGN: center">
                </td>
                <td nowrap width="10%" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">(I.R.S. Employer</font></td>
              </tr><tr valign="bottom">
                <td nowrap width="10%" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">Incorporation or Organization)</font></td>
                <td nowrap width="80%" style="TEXT-ALIGN: center">
                </td>
                <td nowrap width="10%" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">Identification Number)</font> </td>
              </tr><tr>
                <td nowrap width="10%">
                </td>
                <td nowrap width="80%">&#160;</td>
                <td nowrap width="10%">
                </td>
              </tr><tr>
                <td colspan="3" nowrap width="100%">
                  <div align="center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">131 South Clark Drive<br>Tempe, Arizona
        85281</font></font><br><font size="2" style="FONT-FAMILY: serif">(Address of
        Principal Executive Offices, Including Zip Code)</font></div>
                  <div><font size="2">&#160;</font></div>
                  <div align="center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">2007 Employee Stock Incentive
        Plan</font></font><br><font size="2" style="FONT-FAMILY: serif">(Full Title
        of the Plan)</font></div>
                </td>
              </tr><tr>
                <td nowrap width="10%" style="TEXT-ALIGN: center">
                </td>
                <td nowrap width="80%" style="TEXT-ALIGN: center">&#160;</td>
                <td nowrap width="10%" style="TEXT-ALIGN: center">
                </td>
              </tr><tr valign="bottom">
                <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Bradley C. Anderson</font></font></td>
                <td nowrap width="80%" style="TEXT-ALIGN: center">&#160;</td>
                <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Copy to:</font></font></td>
              </tr><tr valign="bottom">
                <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Chief Financial Officer</font></font></td>
                <td nowrap width="80%" style="TEXT-ALIGN: center">
                </td>
                <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Christopher D. Johnson,
        Esq.</font></font></td>
              </tr><tr valign="bottom">
                <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Amtech Systems, Inc.</font></font></td>
                <td nowrap width="80%" style="TEXT-ALIGN: center">
                </td>
                <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Scott I. Gruber,
  Esq.</font></font></td>
              </tr><tr valign="bottom">
                <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">131 South Clark Drive</font></font></td>
                <td nowrap width="80%" style="TEXT-ALIGN: center">
                </td>
                <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Squire, Sanders &amp; Dempsey
        L.L.P.</font></font></td>
              </tr><tr valign="bottom">
                <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Tempe, Arizona 85281</font></font></td>
                <td nowrap width="80%" style="TEXT-ALIGN: center">
                </td>
                <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">1 E. Washington Street, Suite
        2700</font></font></td>
              </tr><tr valign="bottom">
                <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">(480) 967-5146</font></font></td>
                <td nowrap width="80%" style="TEXT-ALIGN: center">
                </td>
                <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Phoenix, Arizona
    85004</font></font></td>
              </tr><tr valign="bottom">
                <td nowrap width="10%" style="TEXT-ALIGN: center">
                </td>
                <td nowrap width="80%" style="TEXT-ALIGN: center">
                </td>
                <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">(602)
    528-4000</font></font></td>
              </tr></table>
        </div>
        <table border="0" cellpadding="0" cellspacing="0" width="100%" style="">
  <tr>
              <td width="50%" style="TEXT-ALIGN: center">
                <div style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">(Name, Address and Telephone Number, including Area Code,<br>of
        Agent For Service)</font></div>
              </td>
              <td width="50%">
              </td>
            </tr></table>
      </div><br>
      <div align="justify"><font size="2" style="FONT-FAMILY: serif">Indicate by check
  mark whether the registrant is a large accelerated filer, an accelerated filer,
  a non-accelerated filer, or a smaller reporting company. See the definitions of
  "large accelerated filer," "accelerated filer" and "smaller reporting company"
  in Rule 12b-2 of the Exchange Act. </font></div>
      <div><font size="2">&#160;</font></div>
      <div>
        <table border="0" cellpadding="0" cellspacing="0" width="100%" style="FONT-SIZE: 10pt; LINE-HEIGHT: 13pt; BORDER-COLLAPSE: collapse; ">
  <tr valign="bottom">
              <td align="left" nowrap width="15%"><font size="2" style="FONT-FAMILY: serif">Large Accelerated Filer <font style="FONT-FAMILY: wingdings">o</font></font></td>
              <td align="left" nowrap width="1%">&#160;&#160;&#160;&#160;&#160;&#160;&#160;</td>
              <td align="left" nowrap width="15%"><font size="2" style="FONT-FAMILY: serif">Accelerated Filer <font style="FONT-FAMILY: wingdings">o</font></font></td>
              <td align="left" nowrap width="1%">&#160;&#160;&#160;&#160;&#160;&#160;&#160;</td>
              <td nowrap width="52%" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">Non-accelerated Filer <font style="FONT-FAMILY: wingdings">o</font></font></td>
              <td align="right" nowrap width="1%">&#160;&#160;&#160;&#160;&#160;&#160;&#160;</td>
              <td align="right" nowrap width="15%"><font size="2" style="FONT-FAMILY: serif">Smaller Reporting Company <font style="FONT-FAMILY: wingdings">&#254;</font></font></td>
            </tr><tr>
              <td align="left" nowrap width="15%">
              </td>
              <td align="left" nowrap width="1%">
              </td>
              <td align="left" nowrap width="15%">
              </td>
              <td colspan="3" nowrap width="54%" style="TEXT-ALIGN: center">(Do not check
        if a smaller reporting company)</td>
              <td align="right" nowrap width="15%">
              </td>
            </tr></table>
      </div><br>
      <hr align="center" noshade size="2" width="100%">
      <div id="PN" style="PAGE-BREAK-BEFORE: always">
      </div><br>
      <div align="center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">CALCULATION OF REGISTRATION
  FEE</font></font></div>
      <div><font size="2">&#160;</font></div>
      <div>
        <table border="0" cellpadding="0" cellspacing="0" width="100%" style="PADDING-RIGHT: 4pt; PADDING-LEFT: 4pt; FONT-SIZE: 10pt; LINE-HEIGHT: 13pt; BORDER-COLLAPSE: collapse; ">
  <tr valign="bottom">
              <td nowrap valign="bottom" width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-TOP: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid; TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Title of securities to<br>be
        registered</font></font></td>
              <td nowrap valign="bottom" width="21%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-TOP: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid; TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Amount to be<br>registered
        (1)(2)</font></font></td>
              <td nowrap valign="bottom" width="22%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-TOP: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid; TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold">Proposed maximum<br>offering
        price per<br>share (3)</font></td>
              <td nowrap valign="bottom" width="24%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-TOP: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid; TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold">Proposed maximum<br>aggregate
        offering<br>price (3)</font></td>
              <td nowrap valign="bottom" width="14%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-TOP: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid; TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Amount of<br>registration
        fee</font></font></td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-TOP: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Common Stock, par<br>value $.01 per share</font></td>
              <td nowrap valign="middle" width="21%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-TOP: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid; TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">900,000 shares</font></td>
              <td nowrap valign="middle" width="22%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-TOP: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid; TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">$10.105</font></td>
              <td nowrap valign="middle" width="24%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-TOP: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid; TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">$9,094,500</font></td>
              <td nowrap valign="middle" width="14%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-TOP: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid; TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">$648.44</font></td>
            </tr></table>
      </div>____________________<br>&#160;<br>
      <div>
        <table border="0" cellpadding="0" cellspacing="0" style="FONT-SIZE: 10pt; BORDER-COLLAPSE: collapse; ">
  <tr>
              <td nowrap valign="top"><font size="2" style="FONT-FAMILY: serif">(1)</font></td>
              <td nowrap valign="top">&#160;&#160;&#160;&#160;&#160;&#160;&#160;</td>
              <td align="left" width="100%">
                <div align="justify"><font size="2" style="FONT-FAMILY: serif">Pursuant to
        Rule 416(a) under the Securities Act of 1933, as amended (the &#8220;Securities
        Act&#8221;), this registration statement also covers an indeterminate number of
        additional shares of common stock of the registrant that become issuable
        as a result of any stock split, stock dividend, recapitalization or other
        similar transaction that results in an increase in the number of
        outstanding shares of common stock of the registrant. This registration
        statement shall cover such additional shares. In addition, pursuant to
        Rule 416(c) under the Securities Act, this registration statement also
        covers an indeterminate amount of interests to be offered or sold pursuant
        to registrant&#8217;s 2007 Employee Stock Incentive Plan, as amended (the
        &#8220;Plan&#8221;).</font></div>
              </td>
            </tr><tr>
              <td nowrap valign="top">(2)</td>
              <td nowrap valign="top">
              </td>
              <td align="left" width="100%">
                <div align="justify"><font size="2" style="FONT-FAMILY: serif">Pursuant to
        General Instruction E to Form S-8, a filing fee is only being paid with
        respect to the registration of additional securities for the Plan. This
        registration statement on Form S-8 relates to 900,000 additional shares of
        common stock, par value $.01, of the registrant, issuable pursuant to the
        Plan. A registration statement on Form S-8 covering 500,000 shares (before
        stock splits and stock dividends) was previously filed with respect to the
        Plan (registration no. 333-145454 filed August 15,
    2007).</font></div>
              </td>
            </tr><tr>
              <td nowrap valign="top">(3)</td>
              <td nowrap valign="top">
              </td>
              <td align="left" width="100%">
                <div align="justify"><font size="2" style="FONT-FAMILY: serif">Estimated
        pursuant to Rule 457(h) under the Securities Act solely for the purpose of
        calculating the registration fee. The proposed maximum offering price is
        based upon the average of the high and low prices of the common stock as
        reported on the NASDAQ Global Select Market on August 3,
      2010.</font></div>
              </td>
            </tr></table>
      </div>&#160;<br>
      <hr align="center" noshade size="2" width="100%">
      <div id="PN" style="PAGE-BREAK-BEFORE: always">
      </div><br>
      <div align="center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">EXPLANATORY NOTE</font></font></div>
      <div><font size="2">&#160;</font></div>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">INCORPORATION BY REFERENCE: Pursuant to
  General Instruction E to Form S-8, the contents of registration statement no.
  333-145454 is incorporated herein by this reference. </font></div>
      <div><font size="2">&#160;</font></div>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">REGISTRATION OF ADDITIONAL SHARES: This
  registration statement on Form S-8 is filed by the registrant to register
  900,000 additional shares of common stock, par value $.01 per share, of the
  registrant, which may be issued pursuant to an amendment to the Plan authorized
  by the shareholders of the registrant on March 11, 2010.</font></div>
      <div><font size="2">&#160;</font></div>
      <div align="center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">PART II<br></font></font><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">INFORMATION REQUIRED IN THE REGISTRATION STATEMENT</font></font></div>
      <div><font size="2">&#160;</font></div>
      <div align="justify"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Item 3. Incorporation of Documents by
  Reference.</font></font><font size="2" style="FONT-FAMILY: serif"> </font></div>
      <div><font size="2">&#160;</font></div>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">In this registration statement, the terms
  &#8220;we,&#8221; &#8220;our,&#8221; &#8220;us,&#8221; &#8220;Amtech,&#8221; the &#8220;registrant&#8221; and the &#8220;Corporation&#8221; refer to
  Amtech System, Inc. The SEC allows us to incorporate by reference the
  information we file with the SEC, which means that we can disclose important
  information to you by referring you to those documents. The information that we
  incorporate by reference is considered to be part of this registration
  statement. Information that we file with the SEC in the future and incorporate
  by reference in this registration statement automatically updates and supersedes
  previously filed information as applicable. </font></div>
      <div><font size="2">&#160;</font></div>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">We incorporate by reference into this
  registration statement the following documents filed by us with the SEC, other
  than any portion of any such documents that are not deemed &#8220;filed&#8221; under the
  Securities Exchange Act of 1934 (the &#8220;Exchange Act&#8221;) in accordance with the
  Exchange Act and applicable SEC rules: </font></div>
      <ul style="FONT-SIZE: 10pt; TEXT-ALIGN: justify">
        <li><font size="2" style="FONT-FAMILY: serif">Annual Report on Form 10-K for the
    fiscal year ended September 30, 2009.</font>
          </li>
        <li><font size="2" style="FONT-FAMILY: serif">Quarterly Report on Form 10-Q for
    the fiscal quarter ended December 31, 2009.</font>
          </li>
        <li><font size="2" style="FONT-FAMILY: serif">Quarterly Report on Form 10-Q for
    the fiscal quarter ended March 31, 2010.</font>
          </li>
        <li><font size="2" style="FONT-FAMILY: serif">Quarterly Report on Form 10-Q for
    the fiscal quarter ended June 30, 2010. </font>
          </li>
        <li><font size="2" style="FONT-FAMILY: serif">The information specifically
    incorporated by reference into our Annual Report on Form 10-K for the fiscal
    year ended September 30, 2009 from our definitive proxy statement on Schedule
    14A filed with the SEC on January 28, 2010. </font>
          </li>
        <li><font size="2" style="FONT-FAMILY: serif">The description of our common
    stock contained in our registration statement filed pursuant to Section 12 of
    the Exchange Act; and</font>
          </li>
        <li><font size="2" style="FONT-FAMILY: serif">All other reports filed that we
    have filed with the SEC pursuant to Section 13(a) or 15(d) of the Exchange Act
    subsequent to September 30, 2009.</font> </li>
      </ul>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">We also incorporate by reference into this
  registration statement all documents (other than any portions of any such
  documents that are not deemed &#8220;filed&#8221; under the Exchange Act in accordance with
  the Exchange Act and applicable SEC rules) filed by us under Sections 13(a),
  13(c), 14 or 15(d) of the Exchange Act after the date of the initial filing of
  this registration statement and before the filing of a post-effective amendment
  to this registration statement which indicates all securities offered hereunder
  have been sold or that deregisters all securities then remaining unsold.
  </font></div>
      <div><font size="2">&#160;</font></div>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">You may request a copy of these filings, which
  we shall deliver to you, together with all exhibits thereto, at no cost, by
  writing or telephoning us as follows: </font></div>
      <div><font size="2">&#160;</font></div>
      <div align="center"><font size="2" style="FONT-FAMILY: serif">Amtech Systems,
  Inc.<br>Attention: Robert T. Hass<br>131 South Clark Drive<br>Tempe, Arizona
  85281<br>(480) 967-5146</font></div>
      <div><font size="2">&#160;</font></div>
      <div align="center"><font size="2" style="FONT-FAMILY: serif">3</font></div>
      <hr align="center" noshade size="2" width="100%">
      <div id="PN" style="PAGE-BREAK-BEFORE: always">
      </div><br>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">Any statement contained in a document that is
  incorporated by reference will be modified or superseded for all purposes to the
  extent that a statement contained in this registration statement, or in any
  other document that is subsequently filed with the SEC and incorporated by
  reference, modifies or is contrary to that previous statement. Any statement so
  modified or superseded will not be deemed a part of this registration statement,
  except as so modified or superseded. Since information that we later file with
  the SEC will update and supersede previously incorporated information, you
  should look at all of the SEC filings that we incorporate by reference to
  determine if any of the statements in this registration statement or in any
  documents previously incorporated by reference have been modified or superseded.
  </font></div>
      <div><font size="2">&#160;</font></div>
      <div align="justify"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Item 4. Description of Securities.
  </font></font></div>
      <div><font size="2">&#160;</font></div>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">Not applicable.</font></div>
      <div><font size="2">&#160;</font></div>
      <div align="justify"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Item 5. Interests of Named Experts and
  Counsel. </font></font></div>
      <div><font size="2">&#160;</font></div>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">Not applicable. </font></div>
      <div><font size="2">&#160;</font></div>
      <div align="justify"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Item 6. Indemnification of Directors and
  Officers. </font></font></div>
      <div><font size="2">&#160;</font></div>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">Section 10-851 of Arizona&#8217;s Revised Statutes
  enables a corporation to eliminate or limit</font><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif"> </font></font><font size="2" style="FONT-FAMILY: serif">personal liability
  of members of its board of directors for violations of their</font><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif"> </font></font><font size="2" style="FONT-FAMILY: serif">fiduciary duty of
  care. However, Arizona law does not permit the elimination of</font><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif"> </font></font><font size="2" style="FONT-FAMILY: serif">a director's or
  officer's liability: (i) in connection with a proceeding by or in the right of
  the corporation in which the director was adjudged liable to the corporation;
  and (ii) in connection with any other proceeding charging improper financial
  benefit to the director, whether or not involving action in the director's
  official capacity, in which the director was adjudged liable on the basis that
  financial benefit was improperly received by the director. Insofar as
  indemnification for liabilities arising under the Securities Act may be
  permitted to directors, officers or persons controlling Amtech pursuant to the
  foregoing provision, Amtech has been informed that in the opinion of the SEC
  such indemnification is against public policy as expressed in such Act and is
  therefore unenforceable.</font></div>
      <div><font size="2">&#160;</font></div>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">Pursuant to Amtech&#8217;s Articles of
  Incorporation, it shall indemnify any and all of its existing and former
  directors, officers, employees, and agents against all expenses incurred by them
  and each of them, including, but not limited to legal fees, judgments,
  penalties, and amounts paid in settlement or compromise, which may arise or be
  incurred, rendered, or levied in any legal action brought or threatened against
  any of them for or on account of any action or omission alleged to have been
  committed while acting within the scope of employment as director, officer,
  employee or agent of the corporation, whether or not any action is or has been
  filed against them and whether or not any settlement or compromise is approved
  by a court, indemnification shall be made by the corporation whether the legal
  action brought or threatened is by or in the right of the corporation or by any
  other person.</font></div>
      <div><font size="2">&#160;</font></div>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">Whenever any existing or former director,
  officer, employee, or agent shall report to the President of the corporation or
  the chairman of the Board of Directors that he or she has incurred or may incur
  expenses, including, but not limited to, legal fees, judgments, penalties, and
  amounts paid in settlement or compromise in a legal action brought or threatened
  against him or her for or on account of any action or omission alleged to have
  been committed by him or her while acting within the scope of his or her
  employment as a director, officer, employee or agent of the corporation, the
  Board of Directors shall, at its next regular or at a special meeting held
  within a reasonable time thereafter, determine in good faith, whether in regard
  to the matter involved in the action or contemplated action, such person acted,
  failed to act, or refused to act willfully or with gross negligence or with
  fraudulent or criminal intent. If the Board of Directors determines, in good
  faith, that such person did not act, fail to act, or refuse to act willfully or
  with gross negligence or with fraudulent or criminal intent, in regard to the
  matter involved in the action or contemplated action, such person acted, failed
  to act, or refused to act willfully or with gross negligence or with fraudulent
  criminal intent, indemnification shall be mandatory and shall be automatically
  extended as specified herein; provided, that the corporation shall have the
  right to refuse indemnification in any instance in which the person to whom
  indemnification would otherwise have been applicable shall have unreasonably
  refused to permit the corporation, at its own expense and through counsel of its
  own choosing, to defend him or her in the action.</font></div>
      <div><font size="2">&#160;</font></div>
      <div align="center"><font size="2" style="FONT-FAMILY: serif">4</font></div>
      <div><font size="2">&#160;</font></div>
      <hr align="center" noshade size="2" width="100%">
      <div id="PN" style="PAGE-BREAK-BEFORE: always">
      </div><br>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">Amtech has purchased insurance on behalf of
  its directors and officers against certain liabilities that may be asserted
  against, or incurred by, such persons in their capacities as directors or
  officers of Amtech, or that may arise out of their status as directors or
  officers of the registrants, including liabilities under the federal and state
  securities laws. </font></div>
      <div><font size="2">&#160;</font></div>
      <div align="justify"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Item 7. Exemption from Registration Claimed.
  </font></font></div>
      <div><font size="2">&#160;</font></div>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">Not applicable.</font></div>
      <div><font size="2">&#160;</font></div>
      <div align="justify"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Item 8. Exhibits. </font></font></div>
      <div><font size="2">&#160;</font></div>
      <div>
        <table border="0" cellpadding="0" cellspacing="0" width="100%" style="FONT-SIZE: 10pt; LINE-HEIGHT: 13pt; BORDER-COLLAPSE: collapse; ">
  <tr valign="bottom">
              <td nowrap width="2%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Exhibit</font></font> </td>
              <td nowrap width="1%" style="TEXT-ALIGN: center">
              </td>
              <td nowrap width="96%" style="TEXT-ALIGN: center">
              </td>
            </tr><tr valign="bottom">
              <td nowrap width="2%" style="BORDER-BOTTOM: #000000 1pt solid; TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">No.</font></font></td>
              <td nowrap width="1%" style="TEXT-ALIGN: center">&#160;&#160;&#160;&#160;&#160;&#160;&#160;</td>
              <td nowrap width="96%" style="BORDER-BOTTOM: #000000 1pt solid; TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Description</font></font></td>
            </tr><tr valign="bottom">
              <td nowrap width="2%" bgcolor="#cceeff" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">4.3</font></td>
              <td nowrap width="1%" bgcolor="#cceeff">&#160;</td>
              <td align="left" nowrap width="96%" bgcolor="#cceeff"><font size="2" style="FONT-FAMILY: serif">2007 Employee Stock Incentive Plan, as
        amended*</font></td>
            </tr><tr valign="bottom">
              <td nowrap width="2%" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">5.1</font></td>
              <td nowrap width="1%">
              </td>
              <td align="left" nowrap width="96%"><font size="2" style="FONT-FAMILY: serif">Opinion of Squire, Sanders &amp; Dempsey L.L.P. regarding legality
        of shares**</font></td>
            </tr><tr valign="bottom">
              <td nowrap width="2%" bgcolor="#cceeff" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">23.1</font></td>
              <td nowrap width="1%" bgcolor="#cceeff">&#160;</td>
              <td align="left" nowrap width="96%" bgcolor="#cceeff"><font size="2" style="FONT-FAMILY: serif">Consent of Squire, Sanders &amp; Dempsey
        L.L.P. (included in Exhibit 5.1 hereto)</font></td>
            </tr><tr valign="bottom">
              <td nowrap width="2%" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">23.2</font></td>
              <td nowrap width="1%">
              </td>
              <td align="left" nowrap width="96%"><font size="2" style="FONT-FAMILY: serif">Consent of Mayer Hoffman McCann, P.C. **</font></td>
            </tr><tr valign="bottom">
              <td nowrap width="2%" bgcolor="#cceeff" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">24</font></td>
              <td nowrap width="1%" bgcolor="#cceeff">&#160;</td>
              <td align="left" nowrap width="96%" bgcolor="#cceeff"><font size="2" style="FONT-FAMILY: serif">Powers of attorney
    **</font></td>
            </tr></table>
      </div>____________________<br>&#160;<br>
      <div>
        <table border="0" cellpadding="0" cellspacing="0" style="">
  <tr>
              <td nowrap valign="top"><font size="2" style="FONT-FAMILY: serif">*</font></td>
              <td nowrap valign="top">
              </td>
              <td align="left" width="100%">
                <div align="justify"><font size="2" style="FONT-FAMILY: serif">Incorporated
        herein by reference to Amtech&#8217;s current report on Form 8-K, filed with the
        SEC on March 17, 2010</font></div>
              </td>
            </tr><tr>
              <td nowrap valign="top"><font size="2" style="FONT-FAMILY: serif">**</font></td>
              <td nowrap valign="top">&#160;<font style="FONT-SIZE: 10pt; FONT-FAMILY: times new roman">&#160;&#160;&#160;&#160;&#160;</font></td>
              <td align="left" width="100%"><font size="2" style="FONT-FAMILY: serif">Filed
        herewith</font></td>
            </tr></table>
      </div>
      <div><font size="2">&#160;</font></div>
      <div align="justify"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Item 9. Undertakings. </font></font></div>
      <div><font size="2">&#160;</font></div>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">(a) The undersigned registrant hereby
  undertakes: </font></div>
      <div><font size="2">&#160;</font></div>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">(1) To file, during any period in which offers
  or sales are being made, a post-effective amendment to this registration
  statement: </font></div>
      <div><font size="2">&#160;</font></div>
      <div align="justify"><font size="2" style="FONT-FAMILY: serif"><font size="3">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;</font>(i)
  To include any prospectus required by Section 10(a)(3) of the Securities Act;
  </font></div>
      <div><font size="2">&#160;</font></div>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">(ii) To reflect in the prospectus any facts or
  events arising after the effective date of the registration statement (or the
  most recent post-effective amendment thereof) which, individually or in the
  aggregate, represent a fundamental change in the information set forth in the
  registration statement. Notwithstanding the foregoing, any increase or decrease
  in the volume of securities offered (if the total dollar value of securities
  offered would not exceed that which was registered) and any deviation from the
  low or high end of the estimated maximum offering range may be reflected in the
  form of prospectus filed with the Commission pursuant to Rule 424(b) if, in the
  aggregate, the changes in volume and price represent no more than 20% change in
  the maximum aggregate offering price set forth in the "Calculation of
  Registration Fee" table in the effective registration statement; </font></div>
      <div><font size="2">&#160;</font></div>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">(iii) To include any material information with
  respect to the plan of distribution not previously disclosed in the registration
  statement or any material change to such information in the registration
  statement; </font></div>
      <div><font size="2">&#160;</font></div>
      <div align="justify"><font style="DISPLAY: inline; FONT-STYLE: italic"><font size="2" style="FONT-FAMILY: serif">provided, however</font></font><font size="2" style="FONT-FAMILY: serif">, that paragraphs (a)(1)(i) and (a)(1)(ii) of
  this section do not apply if the information required to be included in a
  post-effective amendment by those paragraphs is contained in reports filed with
  or furnished to the SEC by the registrant pursuant to Section 13 or Section
  15(d) of the Exchange Act that are incorporated by reference in the registration
  statement. </font></div>
      <div><font size="2">&#160;</font></div>
      <div align="center"><font size="2" style="FONT-FAMILY: serif">5</font></div>
      <div><font size="2">&#160;</font></div>
      <hr align="center" noshade size="2" width="100%">
      <div id="PN" style="PAGE-BREAK-BEFORE: always">
      </div><br>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">(2) That, for the purpose of determining any
  liability under the Securities Act, each such post-effective amendment shall be
  deemed to be a new registration statement relating to the securities offered
  therein, and the offering of such securities at that time shall be deemed to be
  the initial bona fide offering thereof.</font></div>
      <div><font size="2">&#160;</font></div>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">(3) To remove from registration by means of a
  post-effective amendment any of the securities being registered which remain
  unsold at the termination of the offering. </font></div>
      <div><font size="2">&#160;</font></div>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">(b) The undersigned registrant hereby
  undertakes that, for purposes of determining any liability under the Securities
  Act, each filing of the registrant's annual report pursuant to Section 13(a) or
  Section 15(d) of the Exchange Act (and, where applicable, each filing of an
  employee benefit plan's annual report pursuant to Section 15(d) of the Exchange
  Act) that is incorporated by reference in the registration statement shall be
  deemed to be a new registration statement relating to the securities offered
  therein, and the offering of such securities at that time shall be deemed to be
  the initial bona fide offering thereof. </font></div>
      <div><font size="2">&#160;</font></div>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">(c) Insofar as indemnification for liabilities
  arising under the Securities Act of 1933 may be permitted to directors, officers
  and controlling persons of the registrant pursuant to the foregoing provisions,
  or otherwise, the registrant has been advised that in the opinion of the
  Securities and Exchange Commission such indemnification is against public policy
  as expressed in the Act and is, therefore, unenforceable. In the event that a
  claim for indemnification against such liabilities (other than the payment by
  the registrant of expenses incurred or paid by a director, officer or
  controlling person of the registrant in the successful defense of any action,
  suit or proceeding) is asserted by such director, officer or controlling person
  in connection with the securities being registered, the registrant will, unless
  in the opinion of its counsel the matter has been settled by controlling
  precedent, submit to a court of appropriate jurisdiction the question whether
  such indemnification by it is against public policy as expressed in the Act and
  will be governed by the final adjudication of such issue.</font><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif"> </font></font></div>
      <div><font size="2">&#160;</font></div>
      <div align="center"><font size="2" style="FONT-FAMILY: serif">6</font></div>
      <div><font size="2">&#160;</font></div>
      <hr align="center" noshade size="2" width="100%">
      <div id="PN" style="PAGE-BREAK-BEFORE: always">
      </div><br>
      <div align="center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">SIGNATURES</font></font></div>
      <div><font size="2">&#160;</font></div>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">Pursuant to the requirements of the Securities
  Act of 1933, the registrant certifies that it has reasonable grounds to believe
  that it meets all of the requirements for filing on Form S-8 and has duly caused
  this registration statement to be signed on its behalf by the undersigned,
  thereunto duly authorized, in the City of Tempe, State of Arizona, on August 6,
  2010.</font></div>
      <div><font size="2">&#160;</font></div>
      <div align="right">
        <table border="0" cellpadding="0" cellspacing="0" width="50%" style="FONT-SIZE: 10pt; LINE-HEIGHT: 13pt; BORDER-COLLAPSE: collapse; ">
  <tr valign="bottom">
              <td align="left" colspan="3" nowrap width="1%">
                <div align="justify"><font size="2" style="FONT-FAMILY: serif">Amtech Systems,
        Inc.</font></div>
              </td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%"><font size="2" style="FONT-FAMILY: serif">&#160;</font></td>
              <td align="left" nowrap width="1%">&#160;</td>
              <td align="left" nowrap width="98%"><font size="2" style="FONT-FAMILY: serif">&#160;</font></td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%"><font size="2" style="FONT-FAMILY: serif">By:</font></td>
              <td align="left" nowrap width="1%">&#160;&#160;&#160;&#160;&#160;&#160;&#160;</td>
              <td align="left" nowrap width="98%" style="BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">/s/ Bradley C.
        Anderson</font></td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%">
              </td>
              <td align="left" nowrap width="1%">
              </td>
              <td align="left" nowrap width="98%"><font size="2" style="FONT-FAMILY: serif">Bradley C. Anderson</font></td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%">
              </td>
              <td align="left" nowrap width="1%">
              </td>
              <td align="left" nowrap width="98%"><font size="2" style="FONT-FAMILY: serif">Vice President and Chief Financial
  Officer</font></td>
            </tr></table>
      </div><br>
      <div align="justify"><font size="2" style="FONT-FAMILY: serif">Pursuant to the
  requirements of the Securities Act of 1933, this registration statement has been
  signed by the following persons in the capacities and on the date indicated.
  </font></div>
      <div><font size="2">&#160;</font></div>
      <div>
        <table border="0" cellpadding="0" cellspacing="0" width="100%" style="PADDING-RIGHT: 4pt; PADDING-LEFT: 4pt; FONT-SIZE: 10pt; LINE-HEIGHT: 13pt; BORDER-COLLAPSE: collapse; ">
  <tr valign="bottom">
              <td align="left" colspan="3" nowrap width="34%" style="BORDER-TOP: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid"><font style="DISPLAY: inline; TEXT-DECORATION: underline"><font size="2" style="FONT-FAMILY: serif">Signature</font></font></td>
              <td align="left" nowrap width="47%" style="BORDER-TOP: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid"><font style="DISPLAY: inline; TEXT-DECORATION: underline"><font size="2" style="FONT-FAMILY: serif">Title</font></font></td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-TOP: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid"><font style="DISPLAY: inline; TEXT-DECORATION: underline"><font size="2" style="FONT-FAMILY: serif">Date</font></font></td>
            </tr><tr>
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%" style="BORDER-BOTTOM: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">&#160;</td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%">
              </td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Chief Executive
        Officer and</font></td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid">
              </td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="23%" style="PADDING-LEFT: 0pt; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">*</font></td>
              <td align="left" nowrap width="10%">&#160;</td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Director (Principal
        Executive</font></td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">August 6, 2010</font></td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%" style="PADDING-LEFT: 0pt; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Jong S. Whang</font> </td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Officer)</font></td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%">
              </td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Vice President --
        Finance, Chief</font></td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid">
              </td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%">
              </td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Financial Officer,
        Treasurer and</font></td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid">
              </td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="23%" style="PADDING-LEFT: 0pt; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">*</font></td>
              <td align="left" nowrap width="10%">
              </td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid">Secretary (Principal Financial</td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">August 6, 2010</font></td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%" style="PADDING-LEFT: 0pt; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Bradley C. Anderson</font></td>
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              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
            </tr><tr>
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%">&#160;</td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid">
              </td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="23%" style="PADDING-LEFT: 0pt; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">*</font></td>
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            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
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              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
            </tr><tr>
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%">&#160;</td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid">
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              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
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              </td>
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              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">August 6, 2010</font></td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%" style="PADDING-LEFT: 0pt; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Michael Garnreiter</font></td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
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            </tr><tr>
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%">&#160;</td>
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              </td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid">
              </td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
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              </td>
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              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">August 6, 2010</font></td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%" style="PADDING-LEFT: 0pt; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Alfred W. Giese</font></td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
            </tr><tr>
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%">&#160;</td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid">
              </td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="23%" style="PADDING-LEFT: 0pt; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">*</font></td>
              <td align="left" nowrap width="10%">
              </td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Director</font></td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">August 6, 2010</font></td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%" style="PADDING-LEFT: 0pt; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Egbert Jan Geert Goudena</font></td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
            </tr><tr>
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%">&#160;</td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid">
              </td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="23%" style="PADDING-LEFT: 0pt; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">*</font></td>
              <td align="left" nowrap width="10%">
              </td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Director</font></td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">August 6, 2010</font></td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%" style="PADDING-LEFT: 0pt; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Jeong Mo Hwang</font></td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
            </tr><tr>
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%">&#160;</td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid">
              </td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="23%" style="PADDING-LEFT: 0pt; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">*</font></td>
              <td align="left" nowrap width="10%">
              </td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Director</font></td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">August 6, 2010</font></td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%" style="BORDER-RIGHT: #000000 1pt solid; PADDING-LEFT: 0pt; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Robert F. King</font></td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
            </tr></table>
      </div>
      <div>
        <table border="0" cellpadding="0" cellspacing="0" width="50%" style="FONT-SIZE: 10pt; LINE-HEIGHT: 13pt; BORDER-COLLAPSE: collapse; ">
  <tr valign="bottom">
              <td align="left" nowrap width="1%"><font size="2" style="FONT-FAMILY: serif">&#160;* By:</font></td>
              <td align="left" nowrap width="1%">&#160;&#160;&#160;&#160;&#160;&#160;&#160;</td>
              <td align="left" nowrap width="98%" style="BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">/s/ Bradley C.
        Anderson</font></td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%">
              </td>
              <td align="left" nowrap width="1%">
              </td>
              <td align="left" nowrap width="98%"><font size="2" style="FONT-FAMILY: serif">Bradley C. Anderson, Attorney-In-Fact
  **</font></td>
            </tr></table>
      </div>
      <div>____________________</div>
      <div>&#160;</div>
      <div align="justify"><font size="2" style="FONT-FAMILY: serif">**&#160;&#160;&#160;&#160;&#160;&#160;&#160;By authority of the power of
  attorney filed as Exhibit 24 hereto.</font></div>
      <div><font size="2">&#160;</font></div>
      <hr align="center" noshade size="2" width="100%">
      <div id="PN" style="PAGE-BREAK-BEFORE: always">
      </div><br>
      <div align="center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">EXHIBIT INDEX</font></font></div>
      <div><font size="2">&#160;</font></div>
      <div>
        <table border="0" cellpadding="0" cellspacing="0" width="100%" style="FONT-SIZE: 10pt; LINE-HEIGHT: 13pt; BORDER-COLLAPSE: collapse; ">
  <tr valign="bottom">
              <td nowrap width="2%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Exhibit</font></font> </td>
              <td nowrap width="1%" style="TEXT-ALIGN: center">
              </td>
              <td nowrap width="96%" style="TEXT-ALIGN: center">
              </td>
            </tr><tr valign="bottom">
              <td nowrap width="2%" style="BORDER-BOTTOM: #000000 1pt solid; TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">No.</font></font></td>
              <td nowrap width="1%" style="TEXT-ALIGN: center">&#160;&#160;&#160;&#160;&#160;&#160;&#160;</td>
              <td nowrap width="96%" style="BORDER-BOTTOM: #000000 1pt solid; TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Description</font></font></td>
            </tr><tr valign="bottom">
              <td nowrap width="2%" bgcolor="#cceeff" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">4.3</font></td>
              <td nowrap width="1%" bgcolor="#cceeff">&#160;</td>
              <td align="left" nowrap width="96%" bgcolor="#cceeff"><font size="2" style="FONT-FAMILY: serif">2007 Employee Stock Incentive Plan, as
        amended*</font></td>
            </tr><tr valign="bottom">
              <td nowrap width="2%" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">5.1</font></td>
              <td nowrap width="1%">
              </td>
              <td align="left" nowrap width="96%"><font size="2" style="FONT-FAMILY: serif">Opinion of Squire, Sanders &amp; Dempsey L.L.P. regarding legality
        of shares**</font></td>
            </tr><tr valign="bottom">
              <td nowrap width="2%" bgcolor="#cceeff" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">23.1</font></td>
              <td nowrap width="1%" bgcolor="#cceeff">&#160;</td>
              <td align="left" nowrap width="96%" bgcolor="#cceeff"><font size="2" style="FONT-FAMILY: serif">Consent of Squire, Sanders &amp; Dempsey
        L.L.P. (included in Exhibit 5.1 hereto)</font></td>
            </tr><tr valign="bottom">
              <td nowrap width="2%" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">23.2</font></td>
              <td nowrap width="1%">
              </td>
              <td align="left" nowrap width="96%"><font size="2" style="FONT-FAMILY: serif">Consent of Mayer Hoffman McCann, P.C. **</font></td>
            </tr><tr valign="bottom">
              <td nowrap width="2%" bgcolor="#cceeff" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">24</font></td>
              <td nowrap width="1%" bgcolor="#cceeff">&#160;</td>
              <td align="left" nowrap width="96%" bgcolor="#cceeff"><font size="2" style="FONT-FAMILY: serif">Powers of attorney
    **</font></td>
            </tr></table>
      </div>____________________<br>&#160;<br>
      <div>
        <table border="0" cellpadding="0" cellspacing="0" style="">
  <tr>
              <td nowrap valign="top"><font size="2" style="FONT-FAMILY: serif">*</font></td>
              <td nowrap valign="top">&#160;<font style="FONT-SIZE: 10pt; FONT-FAMILY: times new roman">&#160;&#160;&#160;&#160;&#160;</font></td>
              <td align="left" width="100%">
                <div align="justify"><font size="2" style="FONT-FAMILY: serif">Incorporated
        herein by reference to Amtech&#8217;s current report on Form 8-K, filed with the
        SEC on March 17, 2010</font></div>
              </td>
            </tr><tr>
              <td nowrap valign="top"><font size="2" style="FONT-FAMILY: serif">**</font></td>
              <td nowrap valign="top">
              </td>
              <td align="left" width="100%"><font size="2" style="FONT-FAMILY: serif">Filed
        herewith</font></td>
            </tr></table>
      </div><br>
      <hr align="center" noshade size="2" width="100%">
    </body>
  </html>
metadata_documents: [{"type": "S-8", "sequence": "1", "filename": "amtechsys_s8.htm", "description": "INITIAL REGISTRATION STATEMENT FOR SECURITIES TO BE OFFERED TO EMPLOYEES", "secsgml_size_bytes": 67312}]
metadata_filer: {"company-data": {"conformed-name": "AMTECH SYSTEMS INC", "cik": "0000720500", "assigned-sic": "3559", "irs-number": "860411215", "state-of-incorporation": "AZ", "fiscal-year-end": "0930"}, "filing-values": {"form-type": "S-8", "act": "33", "file-number": "333-168606", "film-number": "10998306"}, "business-address": {"street1": "131 S CLARK DR", "city": "TEMPE", "state": "AZ", "zip": "85281", "phone": "6029675146"}, "mail-address": {"street1": "131 SOUTH CLARK DRIVE", "city": "TEMPE", "state": "AZ", "zip": "85281"}, "former-company": {"former-conformed-name": "QUARTZ ENGINEERING & MATERIALS INC", "date-changed": "19870715"}}
text: amtechsys_s8.htm
  As filed with the Securities and Exchange
  Commission on August 6, 2010
  Registration No.
  333-______
  SECURITIES AND EXCHANGE
  COMMISSION
  Washington, D.C. 20549
  FORM S-8
  REGISTRATION
  STATEMENT
  UNDER
  THE SECURITIES ACT OF 1933
  AMTECH SYSTEMS, INC.
  (Exact Name of Registrant as Specified in Its
  Charter)
  Arizona
  86-0411215
  (State or Other Jurisdiction
  of
  (I.R.S. Employer
  Incorporation or Organization)
  Identification Number)
  131 South Clark Drive
  Tempe, Arizona
        85281
  (Address of
        Principal Executive Offices, Including Zip Code)
  2007 Employee Stock Incentive
        Plan
  (Full Title
        of the Plan)
  Bradley C. Anderson
  Copy to:
  Chief Financial Officer
  Christopher D. Johnson,
        Esq.
  Amtech Systems, Inc.
  Scott I. Gruber,
  Esq.
  131 South Clark Drive
  Squire, Sanders & Dempsey
        L.L.P.
  Tempe, Arizona 85281
  1 E. Washington Street, Suite
        2700
  (480) 967-5146
  Phoenix, Arizona
    85004
  (602)
    528-4000
  (Name, Address and Telephone Number, including Area Code,
  of
        Agent For Service)
  Indicate by check
  mark whether the registrant is a large accelerated filer, an accelerated filer,
  a non-accelerated filer, or a smaller reporting company. See the definitions of
  "large accelerated filer," "accelerated filer" and "smaller reporting company"
  in Rule 12b-2 of the Exchange Act.
  Large Accelerated Filer
  o
  Accelerated Filer
  o
  Non-accelerated Filer
  o
  Smaller Reporting Company
  þ
  (Do not check
        if a smaller reporting company)
  CALCULATION OF REGISTRATION
  FEE
  Title of securities to
  be
        registered
  Amount to be
  registered
        (1)(2)
  Proposed maximum
  offering
        price per
  share (3)
  Proposed maximum
  aggregate
        offering
  price (3)
  Amount of
  registration
        fee
  Common Stock, par
  value $.01 per share
  900,000 shares
  $10.105
  $9,094,500
  $648.44
  ____________________
  (1)
  Pursuant to
        Rule 416(a) under the Securities Act of 1933, as amended (the "Securities
        Act"), this registration statement also covers an indeterminate number of
        additional shares of common stock of the registrant that become issuable
        as a result of any stock split, stock dividend, recapitalization or other
        similar transaction that results in an increase in the number of
        outstanding shares of common stock of the registrant. This registration
        statement shall cover such additional shares. In addition, pursuant to
        Rule 416(c) under the Securities Act, this registration statement also
        covers an indeterminate amount of interests to be offered or sold pursuant
        to registrant's 2007 Employee Stock Incentive Plan, as amended (the
        "Plan").
  (2)
  Pursuant to
        General Instruction E to Form S-8, a filing fee is only being paid with
        respect to the registration of additional securities for the Plan. This
        registration statement on Form S-8 relates to 900,000 additional shares of
        common stock, par value $.01, of the registrant, issuable pursuant to the
        Plan. A registration statement on Form S-8 covering 500,000 shares (before
        stock splits and stock dividends) was previously filed with respect to the
        Plan (registration no. 333-145454 filed August 15,
    2007).
  (3)
  Estimated
        pursuant to Rule 457(h) under the Securities Act solely for the purpose of
        calculating the registration fee. The proposed maximum offering price is
        based upon the average of the high and low prices of the common stock as
        reported on the NASDAQ Global Select Market on August 3,
      2010.
  EXPLANATORY NOTE
  INCORPORATION BY REFERENCE: Pursuant to
  General Instruction E to Form S-8, the contents of registration statement no.
  333-145454 is incorporated herein by this reference.
  REGISTRATION OF ADDITIONAL SHARES: This
  registration statement on Form S-8 is filed by the registrant to register
  900,000 additional shares of common stock, par value $.01 per share, of the
  registrant, which may be issued pursuant to an amendment to the Plan authorized
  by the shareholders of the registrant on March 11, 2010.
  PART II
  INFORMATION REQUIRED IN THE REGISTRATION STATEMENT
  Item 3. Incorporation of Documents by
  Reference.
  In this registration statement, the terms
  "we," "our," "us," "Amtech," the "registrant" and the "Corporation" refer to
  Amtech System, Inc. The SEC allows us to incorporate by reference the
  information we file with the SEC, which means that we can disclose important
  information to you by referring you to those documents. The information that we
  incorporate by reference is considered to be part of this registration
  statement. Information that we file with the SEC in the future and incorporate
  by reference in this registration statement automatically updates and supersedes
  previously filed information as applicable.
  We incorporate by reference into this
  registration statement the following documents filed by us with the SEC, other
  than any portion of any such documents that are not deemed "filed" under the
  Securities Exchange Act of 1934 (the "Exchange Act") in accordance with the
  Exchange Act and applicable SEC rules:
  Annual Report on Form 10-K for the
    fiscal year ended September 30, 2009.
  Quarterly Report on Form 10-Q for
    the fiscal quarter ended December 31, 2009.
  Quarterly Report on Form 10-Q for
    the fiscal quarter ended March 31, 2010.
  Quarterly Report on Form 10-Q for
    the fiscal quarter ended June 30, 2010.
  The information specifically
    incorporated by reference into our Annual Report on Form 10-K for the fiscal
    year ended September 30, 2009 from our definitive proxy statement on Schedule
    14A filed with the SEC on January 28, 2010.
  The description of our common
    stock contained in our registration statement filed pursuant to Section 12 of
    the Exchange Act; and
  All other reports filed that we
    have filed with the SEC pursuant to Section 13(a) or 15(d) of the Exchange Act
    subsequent to September 30, 2009.
  We also incorporate by reference into this
  registration statement all documents (other than any portions of any such
  documents that are not deemed "filed" under the Exchange Act in accordance with
  the Exchange Act and applicable SEC rules) filed by us under Sections 13(a),
  13(c), 14 or 15(d) of the Exchange Act after the date of the initial filing of
  this registration statement and before the filing of a post-effective amendment
  to this registration statement which indicates all securities offered hereunder
  have been sold or that deregisters all securities then remaining unsold.
  You may request a copy of these filings, which
  we shall deliver to you, together with all exhibits thereto, at no cost, by
  writing or telephoning us as follows:
  Amtech Systems,
  Inc.
  Attention: Robert T. Hass
  131 South Clark Drive
  Tempe, Arizona
  85281
  (480) 967-5146
  3
  Any statement contained in a document that is
  incorporated by reference will be modified or superseded for all purposes to the
  extent that a statement contained in this registration statement, or in any
  other document that is subsequently filed with the SEC and incorporated by
  reference, modifies or is contrary to that previous statement. Any statement so
  modified or superseded will not be deemed a part of this registration statement,
  except as so modified or superseded. Since information that we later file with
  the SEC will update and supersede previously incorporated information, you
  should look at all of the SEC filings that we incorporate by reference to
  determine if any of the statements in this registration statement or in any
  documents previously incorporated by reference have been modified or superseded.
  Item 4. Description of Securities.
  Not applicable.
  Item 5. Interests of Named Experts and
  Counsel.
  Not applicable.
  Item 6. Indemnification of Directors and
  Officers.
  Section 10-851 of Arizona's Revised Statutes
  enables a corporation to eliminate or limit
  personal liability
  of members of its board of directors for violations of their
  fiduciary duty of
  care. However, Arizona law does not permit the elimination of
  a director's or
  officer's liability: (i) in connection with a proceeding by or in the right of
  the corporation in which the director was adjudged liable to the corporation;
  and (ii) in connection with any other proceeding charging improper financial
  benefit to the director, whether or not involving action in the director's
  official capacity, in which the director was adjudged liable on the basis that
  financial benefit was improperly received by the director. Insofar as
  indemnification for liabilities arising under the Securities Act may be
  permitted to directors, officers or persons controlling Amtech pursuant to the
  foregoing provision, Amtech has been informed that in the opinion of the SEC
  such indemnification is against public policy as expressed in such Act and is
  therefore unenforceable.
  Pursuant to Amtech's Articles of
  Incorporation, it shall indemnify any and all of its existing and former
  directors, officers, employees, and agents against all expenses incurred by them
  and each of them, including, but not limited to legal fees, judgments,
  penalties, and amounts paid in settlement or compromise, which may arise or be
  incurred, rendered, or levied in any legal action brought or threatened against
  any of them for or on account of any action or omission alleged to have been
  committed while acting within the scope of employment as director, officer,
  employee or agent of the corporation, whether or not any action is or has been
  filed against them and whether or not any settlement or compromise is approved
  by a court, indemnification shall be made by the corporation whether the legal
  action brought or threatened is by or in the right of the corporation or by any
  other person.
  Whenever any existing or former director,
  officer, employee, or agent shall report to the President of the corporation or
  the chairman of the Board of Directors that he or she has incurred or may incur
  expenses, including, but not limited to, legal fees, judgments, penalties, and
  amounts paid in settlement or compromise in a legal action brought or threatened
  against him or her for or on account of any action or omission alleged to have
  been committed by him or her while acting within the scope of his or her
  employment as a director, officer, employee or agent of the corporation, the
  Board of Directors shall, at its next regular or at a special meeting held
  within a reasonable time thereafter, determine in good faith, whether in regard
  to the matter involved in the action or contemplated action, such person acted,
  failed to act, or refused to act willfully or with gross negligence or with
  fraudulent or criminal intent. If the Board of Directors determines, in good
  faith, that such person did not act, fail to act, or refuse to act willfully or
  with gross negligence or with fraudulent or criminal intent, in regard to the
  matter involved in the action or contemplated action, such person acted, failed
  to act, or refused to act willfully or with gross negligence or with fraudulent
  criminal intent, indemnification shall be mandatory and shall be automatically
  extended as specified herein; provided, that the corporation shall have the
  right to refuse indemnification in any instance in which the person to whom
  indemnification would otherwise have been applicable shall have unreasonably
  refused to permit the corporation, at its own expense and through counsel of its
  own choosing, to defend him or her in the action.
  4
  Amtech has purchased insurance on behalf of
  its directors and officers against certain liabilities that may be asserted
  against, or incurred by, such persons in their capacities as directors or
  officers of Amtech, or that may arise out of their status as directors or
  officers of the registrants, including liabilities under the federal and state
  securities laws.
  Item 7. Exemption from Registration Claimed.
  Not applicable.
  Item 8. Exhibits.
  Exhibit
  No.
  Description
  4.3
  2007 Employee Stock Incentive Plan, as
        amended*
  5.1
  Opinion of Squire, Sanders & Dempsey L.L.P. regarding legality
        of shares**
  23.1
  Consent of Squire, Sanders & Dempsey
        L.L.P. (included in Exhibit 5.1 hereto)
  23.2
  Consent of Mayer Hoffman McCann, P.C. **
  24
  Powers of attorney
    **
  ____________________
  *
  Incorporated
        herein by reference to Amtech's current report on Form 8-K, filed with the
        SEC on March 17, 2010
  **
  Filed
        herewith
  Item 9. Undertakings.
  (a) The undersigned registrant hereby
  undertakes:
  (1) To file, during any period in which offers
  or sales are being made, a post-effective amendment to this registration
  statement:
  (i)
  To include any prospectus required by Section 10(a)(3) of the Securities Act;
  (ii) To reflect in the prospectus any facts or
  events arising after the effective date of the registration statement (or the
  most recent post-effective amendment thereof) which, individually or in the
  aggregate, represent a fundamental change in the information set forth in the
  registration statement. Notwithstanding the foregoing, any increase or decrease
  in the volume of securities offered (if the total dollar value of securities
  offered would not exceed that which was registered) and any deviation from the
  low or high end of the estimated maximum offering range may be reflected in the
  form of prospectus filed with the Commission pursuant to Rule 424(b) if, in the
  aggregate, the changes in volume and price represent no more than 20% change in
  the maximum aggregate offering price set forth in the "Calculation of
  Registration Fee" table in the effective registration statement;
  (iii) To include any material information with
  respect to the plan of distribution not previously disclosed in the registration
  statement or any material change to such information in the registration
  statement;
  provided, however
  , that paragraphs (a)(1)(i) and (a)(1)(ii) of
  this section do not apply if the information required to be included in a
  post-effective amendment by those paragraphs is contained in reports filed with
  or furnished to the SEC by the registrant pursuant to Section 13 or Section
  15(d) of the Exchange Act that are incorporated by reference in the registration
  statement.
  5
  (2) That, for the purpose of determining any
  liability under the Securities Act, each such post-effective amendment shall be
  deemed to be a new registration statement relating to the securities offered
  therein, and the offering of such securities at that time shall be deemed to be
  the initial bona fide offering thereof.
  (3) To remove from registration by means of a
  post-effective amendment any of the securities being registered which remain
  unsold at the termination of the offering.
  (b) The undersigned registrant hereby
  undertakes that, for purposes of determining any liability under the Securities
  Act, each filing of the registrant's annual report pursuant to Section 13(a) or
  Section 15(d) of the Exchange Act (and, where applicable, each filing of an
  employee benefit plan's annual report pursuant to Section 15(d) of the Exchange
  Act) that is incorporated by reference in the registration statement shall be
  deemed to be a new registration statement relating to the securities offered
  therein, and the offering of such securities at that time shall be deemed to be
  the initial bona fide offering thereof.
  (c) Insofar as indemnification for liabilities
  arising under the Securities Act of 1933 may be permitted to directors, officers
  and controlling persons of the registrant pursuant to the foregoing provisions,
  or otherwise, the registrant has been advised that in the opinion of the
  Securities and Exchange Commission such indemnification is against public policy
  as expressed in the Act and is, therefore, unenforceable. In the event that a
  claim for indemnification against such liabilities (other than the payment by
  the registrant of expenses incurred or paid by a director, officer or
  controlling person of the registrant in the successful defense of any action,
  suit or proceeding) is asserted by such director, officer or controlling person
  in connection with the securities being registered, the registrant will, unless
  in the opinion of its counsel the matter has been settled by controlling
  precedent, submit to a court of appropriate jurisdiction the question whether
  such indemnification by it is against public policy as expressed in the Act and
  will be governed by the final adjudication of such issue.
  6
  SIGNATURES
  Pursuant to the requirements of the Securities
  Act of 1933, the registrant certifies that it has reasonable grounds to believe
  that it meets all of the requirements for filing on Form S-8 and has duly caused
  this registration statement to be signed on its behalf by the undersigned,
  thereunto duly authorized, in the City of Tempe, State of Arizona, on August 6,
  2010.
  Amtech Systems,
        Inc.
  By:
  /s/ Bradley C.
        Anderson
  Bradley C. Anderson
  Vice President and Chief Financial
  Officer
  Pursuant to the
  requirements of the Securities Act of 1933, this registration statement has been
  signed by the following persons in the capacities and on the date indicated.
  Signature
  Title
  Date
  Chief Executive
        Officer and
  *
  Director (Principal
        Executive
  August 6, 2010
  Jong S. Whang
  Officer)
  Vice President --
        Finance, Chief
  Financial Officer,
        Treasurer and
  *
  Secretary (Principal Financial
  August 6, 2010
  Bradley C. Anderson
  Officer)
  *
  Chief Accounting Officer (Principal
  August 6, 2010
  Robert T. Hass
  Accounting Officer)
  *
  Director
  August 6, 2010
  Michael Garnreiter
  *
  Director
  August 6, 2010
  Alfred W. Giese
  *
  Director
  August 6, 2010
  Egbert Jan Geert Goudena
  *
  Director
  August 6, 2010
  Jeong Mo Hwang
  *
  Director
  August 6, 2010
  Robert F. King
  * By:
  /s/ Bradley C.
        Anderson
  Bradley C. Anderson, Attorney-In-Fact
  **
  ____________________
  **       By authority of the power of
  attorney filed as Exhibit 24 hereto.
  EXHIBIT INDEX
  Exhibit
  No.
  Description
  4.3
  2007 Employee Stock Incentive Plan, as
        amended*
  5.1
  Opinion of Squire, Sanders & Dempsey L.L.P. regarding legality
        of shares**
  23.1
  Consent of Squire, Sanders & Dempsey
        L.L.P. (included in Exhibit 5.1 hereto)
  23.2
  Consent of Mayer Hoffman McCann, P.C. **
  24
  Powers of attorney
    **
  ____________________
  *
  Incorporated
        herein by reference to Amtech's current report on Form 8-K, filed with the
        SEC on March 17, 2010
  **
  Filed
        herewith