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  <BODY bgColor=#ffffff><P align=right><FONT face=serif>As filed with the Securities and Exchange Commission on August 14, 2007 <BR></FONT><FONT face=serif>Registration No. ____________</FONT></P>
  
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  <P align=center><B><FONT face=serif>SECURITIES AND EXCHANGE COMMISSION<BR></FONT></B><B><FONT face=serif>WASHINGTON, D.C. 20549<BR>_____________________________</FONT></B></P>
  
  <P align=center><B><FONT face=serif>FORM S-8 </FONT></B></P>
  
  <P align=center><B><FONT face=serif>REGISTRATION STATEMENT UNDER<BR>THE SECURITIES ACT OF 1933<BR></FONT></B><B><FONT face=serif><B><FONT face=serif>_____________________________</FONT></B></FONT></B></P>
  
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  <P align=center><FONT face=serif>AMTECH SYSTEMS, INC.</FONT></P>
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  <P align=center><FONT face=serif>(Exact name of registrant as specified in its charter)</FONT></P>
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  <P align=center><FONT face=serif>Arizona </FONT></P>
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  <P align=center><FONT face=serif>86-0411215 </FONT></P>
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  <P align=center><FONT face=serif>(State or other jurisdiction of incorporation or organization) </FONT></P>
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  <P align=center><FONT face=serif>(I.R.S. Employer Identification No.) </FONT></P>
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  <P align=center><FONT face=serif>131 South Clark Drive, Tempe, Arizona </FONT></P>
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  <P align=center><FONT face=serif>85281 </FONT></P>
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  <P align=center><FONT face=serif>(Address of Principal Executive offices) </FONT></P>
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  <P align=center><FONT face=serif>(Zip Code) </FONT></P>
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  <P align=center><FONT face=serif>2007 Employee Stock Incentive Plan</FONT></P>
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  <P align=center><FONT face=serif>(Full title of the plan)</FONT></P>
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  <P align=center><FONT face=serif>Robert T. Hass<BR>Amtech Systems, Inc.<BR>131 South Clark Drive <BR></FONT><FONT face=serif>Tempe, Arizona 85281 </FONT></P>
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  <P align=center><FONT face=serif>(Name and address of agent for service) </FONT></P>
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  <P align=center><FONT face=serif>(480) 967-5146</FONT></P>
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  <P align=center><FONT face=serif>(Telephone number, including area code, of agent for service)</FONT></P>
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  <P align=center><FONT face=serif>With copy to: </FONT></P>
  
  <P align=center><FONT face=serif>Christopher D. Johnson, Esq.<BR>Squire, Sanders &amp; Dempsey L.L.P.<BR>40 North Central Avenue, Suite 2700<BR>Phoenix, Arizona 85004<BR>(602) 528-4000 </FONT></P>
  
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  <P align=center><B><FONT face=serif>CALCULATION OF REGISTRATION FEE </FONT></B></P>
  
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  <TD noWrap align=center width="76%"><B><FONT face=serif>Title of Each Class</FONT></B> </TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="4%"></TD>
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  <TD noWrap align=center width="4%"><B><FONT face=serif>Proposed</FONT></B> </TD>
  <TD noWrap align=center width="2%"></TD>
  <TD noWrap align=center width="4%"><B><FONT face=serif>Proposed</FONT></B> </TD>
  <TD noWrap align=center width="2%"></TD>
  <TD noWrap align=left width="4%"></TD></TR>
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  <TD noWrap align=center width="76%"><B><FONT face=serif>of</FONT></B> </TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="4%"></TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=center width="4%"><B><FONT face=serif>Maximum</FONT></B> </TD>
  <TD noWrap align=center width="2%"></TD>
  <TD noWrap align=center width="4%"><B><FONT face=serif>Maximum</FONT></B> </TD>
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  <TD noWrap align=center width="76%"><B><FONT face=serif>Securities</FONT></B> </TD>
  <TD noWrap align=center width="2%"></TD>
  <TD noWrap align=center width="4%"><B><FONT face=serif>Amount</FONT></B> </TD>
  <TD noWrap align=center width="2%"></TD>
  <TD noWrap align=center width="4%"><B><FONT face=serif>Offering</FONT></B> </TD>
  <TD noWrap align=center width="2%"></TD>
  <TD noWrap align=center width="4%"><B><FONT face=serif>Aggregate</FONT></B> </TD>
  <TD noWrap align=center width="2%"></TD>
  <TD noWrap align=center width="4%"><B><FONT face=serif>Amount of</FONT></B> </TD></TR>
  <TR vAlign=bottom>
  <TD noWrap align=center width="76%"><B><FONT face=serif>To Be</FONT></B> </TD>
  <TD noWrap align=center width="2%"></TD>
  <TD noWrap align=center width="4%"><B><FONT face=serif>To Be</FONT></B> </TD>
  <TD noWrap align=center width="2%"></TD>
  <TD noWrap align=center width="4%"><B><FONT face=serif>Price</FONT></B> </TD>
  <TD noWrap align=center width="2%"></TD>
  <TD noWrap align=center width="4%"><B><FONT face=serif>Offering</FONT></B> </TD>
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  <TD noWrap align=center width="4%"><B><FONT face=serif>Registration</FONT></B> </TD></TR>
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  <TD style="BORDER-BOTTOM: #000000 1pt solid" noWrap align=center width="76%"><B><FONT face=serif>Registered</FONT></B> </TD>
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  <P>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </P>
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  <TD style="BORDER-BOTTOM: #000000 1pt solid" noWrap align=center width="4%"><B><FONT face=serif>Registered</FONT></B><B><SUP><FONT face=serif size=2>(1)</FONT></SUP></B> </TD>
  <TD noWrap align=center width="2%">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </TD>
  <TD style="BORDER-BOTTOM: #000000 1pt solid" noWrap align=center width="4%"><B><FONT face=serif>Per Share</FONT></B><B><SUP><FONT face=serif size=2>(2)</FONT></SUP></B> </TD>
  <TD noWrap align=center width="2%">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </TD>
  <TD style="BORDER-BOTTOM: #000000 1pt solid" noWrap align=center width="4%"><B><FONT face=serif>Price</FONT></B> </TD>
  <TD noWrap align=center width="2%">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </TD>
  <TD style="BORDER-BOTTOM: #000000 1pt solid" noWrap align=center width="4%"><B><FONT face=serif>Fee</FONT></B> </TD></TR>
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  <TD noWrap align=left width="76%" bgColor=#c0c0c0><FONT face=serif>Common Stock,</FONT> </TD>
  <TD noWrap align=center width="2%" bgColor=#c0c0c0></TD>
  <TD noWrap align=center width="4%" bgColor=#c0c0c0><FONT face=serif>500,000</FONT> </TD>
  <TD noWrap align=center width="2%" bgColor=#c0c0c0>&nbsp;</TD>
  <TD noWrap align=center width="4%" bgColor=#c0c0c0><FONT face=serif><FONT face=serif>$10.89</FONT> </FONT></TD>
  <TD noWrap align=center width="2%" bgColor=#c0c0c0>&nbsp;</TD>
  <TD noWrap align=center width="4%" bgColor=#c0c0c0><FONT face=serif><FONT face=serif>$5,445,000</FONT> </FONT></TD>
  <TD noWrap align=center width="2%" bgColor=#c0c0c0>&nbsp;</TD>
  <TD noWrap align=center width="4%" bgColor=#c0c0c0><FONT face=serif>$167.17</FONT> </TD></TR>
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  <TD noWrap align=left width="76%" bgColor=#c0c0c0><FONT face=serif>$0.01 par value</FONT> </TD>
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  <TD noWrap align=left width="4%" bgColor=#c0c0c0></TD>
  <TD noWrap align=left width="2%" bgColor=#c0c0c0></TD>
  <TD noWrap align=left width="4%" bgColor=#c0c0c0></TD>
  <TD noWrap align=left width="2%" bgColor=#c0c0c0></TD>
  <TD noWrap align=left width="4%" bgColor=#c0c0c0></TD>
  <TD noWrap align=left width="2%" bgColor=#c0c0c0></TD>
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  <P>____________________</P>
  
  
  <P><FONT face=serif size=2>(1) Pursuant to Rule 416 under the Securities Act, this registration statement also includes such indeterminate number of shares of common stock as may be issued from time to time by reason of any stock dividend, stock split, recapitalization or other similar transactions.</FONT><FONT face=serif> <BR></FONT><FONT face=serif size=2>(2) Estimated solely for the purpose of calculating the amount of the registration fee, pursuant to Rule 457(c) under the Securities Act of 1933, as amended. The price per share and aggregate offering price are based on the average of the high and low sales prices for shares of common stock of Amtech Systems, Inc., on August 10, 2007, as reported on the NASDAQ Global Stock Market.</FONT><FONT face=serif> </FONT></P>
  
  <P align=center><FONT face=serif>2 </FONT></P>
  
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  <P align=center><B><FONT face=serif>EXPLANATORY NOTE </FONT></B></P>
  
  <P align=justify>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT face=serif>This Registration Statement on Form S-8 relates to the registration of 500,000 shares of common stock issuable on exercise of options to be granted under the 2007 Employee Stock Incentive Plan of Amtech Systems, Inc. (the &#147;Plan&#148;) to employees of Amtech Systems, Inc. (the &#147;Company&#148; or the &#147;Registrant&#148;). On May 18, 2007, the shareholders of Amtech approved the adoption of the Plan. This registration statement is filed pursuant to paragraph A of the General Instructions to Form S-8 to register securities of the Registrant to be offered under an employee benefit plan to its employees.</FONT></P>
  
  <P align=center><FONT face=serif>3 </FONT></P>
  
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  <P align=center><B><FONT face=serif>PART I </FONT></B></P>
  
  <P align=center><B><FONT face=serif>INFORMATION REQUIRED IN THE SECTION 10(a) PROSPECTUS </FONT></B></P>
  
  <P align=justify>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT face=serif>The documents containing the information specified in Part I, Items 1 and 2, will be delivered to current and former employees in accordance with Form S-8 and Rule 428 of the Securities Act of 1933, as amended (the &#147;Securities Act&#148;). </FONT></P>
  
  <P align=center><B><FONT face=serif>PART II </FONT></B></P>
  
  <P align=center><B><FONT face=serif>INFORMATION REQUIRED IN THE REGISTRATION STATEMENT </FONT></B></P>
  
  <P align=justify><B><FONT face=serif>Item 3.</FONT></B><FONT face=serif> </FONT><B><FONT face=serif>Incorporation of Documents by Reference</FONT></B><FONT face=serif>. </FONT></P>
  
  <P align=justify>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT face=serif>The following documents are hereby incorporated by reference into this Amendment and shall be deemed a part hereof: </FONT></P>
  
  <P align=justify><FONT face=serif><FONT face=serif></FONT>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;(a) the prospectus filed pursuant to Rule 424(b) under the Securities Act with the Securities and Exchange Commission (&#147;SEC&#148;) by Amtech on February 1, 2007 (File No. 333-139592); </FONT></P>
  
  <P align=justify><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;(b) the Annual Report of Amtech on Form 10-K for the fiscal year ended September 30, 2006 filed by Amtech on December 21, 2006 and the amendment thereto on Form 10-K/A filed by Amtech on January 29, 2007; </FONT></P>
  
  <P align=justify><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;(c) all other reports filed by Amtech with the Securities and Exchange Commission pursuant to Section 13(a) or 15(d) of the Securities Exchange Act of 1934 (the &#147;Exchange Act&#148;) subsequent to September 30, 2006; and </FONT></P>
  
  <P align=justify><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;(d) the description of Amtech&#146;s common stock contained in Amtech&#146;s registration statement filed pursuant to Section 12 of the Exchange Act. </FONT></P>
  
  <P align=justify>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT face=serif>All documents subsequently filed by Amtech with the SEC pursuant to Sections 13(a), 13(c), 14 or 15(d) of the Exchange Act prior to the filing of a post-effective amendment which indicates that all securities offered hereby have been sold or which deregisters all securities then remaining unsold, shall be deemed to be incorporated by reference in this Registration Statement and to be a part hereof from the date of filing such documents. </FONT></P>
  
  <P align=justify><B><FONT face=serif>Item 4.</FONT></B><FONT face=serif> </FONT><B><FONT face=serif>Description of Securities</FONT></B><FONT face=serif>.</FONT></P>
  
  <P align=justify><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Not applicable.</FONT></P>
  
  <P align=justify><B><FONT face=serif>Item 5.</FONT></B><FONT face=serif> </FONT><B><FONT face=serif>Interests of Named Experts and Counsel</FONT></B><FONT face=serif>.</FONT></P>
  
  <P align=justify><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Not applicable. </FONT></P>
  
  <P align=center><FONT face=serif>4 </FONT></P>
  
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  <P align=justify><B><FONT face=serif>Item 6.</FONT></B><FONT face=serif> </FONT><B><FONT face=serif>Indemnification of Directors and Officers</FONT></B><FONT face=serif>. </FONT></P>
  
  <P align=justify>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT face=serif>Pursuant to Amtech&#146;s Articles of Incorporation, it shall indemnify any and all of its existing and former directors, officers, employees, and agents against all expenses incurred by them and each of them, including, but not limited to legal fees, judgments, penalties, and amounts paid in settlement or compromise, which may arise or be incurred, rendered, or levied in any legal action brought or threatened against any of them for or on account of any action or omission alleged to have been committed while acting within the scope of employment as director, officer, employee or agent of the corporation, whether or not any action is or has been filed against them and whether or not any settlement or compromise is approved by a court, indemnification shall be made by the corporation whether the legal action brought or threatened is by or in the right of the corporation or by any other person. Whenever any existing or former director,
  officer, employee, or agent shall report to the President of the corporation or the chairman of the Board of Directors that he or she has incurred or may incur expenses, including, but not limited to, legal fees, judgments, penalties, and amounts paid in settlement or compromise in a legal action brought or threatened against him or her for or on account of any action or omission alleged to have been committed by him or her while acting within the scope of his or her employment as a director, officer, employee or agent of the corporation, the Board of Directors shall, at its next regular or at a special meeting held within a reasonable time thereafter, determine in good faith, whether in regard to the matter involved in the action or contemplated action, such person acted, failed to act, or refused to act willfully or with gross negligence or with fraudulent or criminal intent. If the Board of Directors determines, in good faith, that such person did not act, fail to act, or refuse to act willfully or
  with gross negligence or with fraudulent or criminal intent, in regard to the matter involved in the action or contemplated action, such person acted, failed to act, or refused to act willfully or with gross negligence or with fraudulent criminal intent, indemnification shall be mandatory and shall be automatically extended as specified herein; provided, that the corporation shall have the right to refuse indemnification in any instance in which the person to whom indemnification would otherwise have been applicable shall have unreasonably refused to permit the corporation, at its own expense and through counsel of its own choosing, to defend him or her in the action. </FONT></P>
  
  <P align=justify>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT face=serif>Section 10-851 of Arizona&#146;s Revised Statutes enables a corporation to eliminate or limit</FONT><B><FONT face=serif> </FONT></B><FONT face=serif>personal liability of members of its board of directors for violations of their</FONT><B><FONT face=serif> </FONT></B><FONT face=serif>fiduciary duty of care. However, Arizona law does not permit the elimination of</FONT><B><FONT face=serif> </FONT></B><FONT face=serif>a director's or officer's liability: (i) in connection with a proceeding by or in the right of the corporation in which the director was adjudged liable to the corporation; and (ii) in connection with any other proceeding charging improper financial benefit to the director, whether or not involving action in the director's official capacity, in which the director was adjudged liable on the basis that financial benefit was improperly received by the director. Insofar as indemnification for liabilities arising under the
  Securities Act may be permitted to directors, officers or persons controlling Amtech pursuant to the foregoing provision, Amtech has been informed that in the opinion of the SEC such indemnification is against public policy as expressed in such Act and is therefore unenforceable. </FONT></P>
  
  <P align=justify><B><FONT face=serif>Item 7.</FONT></B><FONT face=serif> </FONT><B><FONT face=serif>Exemption from Registration Claimed</FONT></B><FONT face=serif>.</FONT></P>
  
  <P align=justify><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Not applicable. </FONT></P>
  
  <P align=center><FONT face=serif>5 </FONT></P>
  
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  <P align=justify><B><FONT face=serif>Item 8.</FONT></B><FONT face=serif> </FONT><B><FONT face=serif>Exhibits</FONT></B><FONT face=serif>. </FONT></P>
  
  <DIV align=center>
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  <TD align=center width="4%"><FONT face=serif><B><FONT face=serif>Exhibit</FONT></B></FONT></TD>
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  <TD align=left width="93%"><FONT face=serif></FONT></TD></TR>
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  <TD style="BORDER-BOTTOM: #000000 1pt solid" align=center width="4%"><FONT face=serif><B><FONT face=serif>Number</FONT></B></FONT></TD>
  <TD align=left width="2%">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </TD>
  <TD style="BORDER-BOTTOM: #000000 1pt solid" align=center width="93%"><FONT face=serif><B><FONT face=serif>Description</FONT></B></FONT></TD></TR>
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  <TD vAlign=top align=center width="4%" bgColor=#c0c0c0><FONT face=serif>4.1</FONT></TD>
  <TD vAlign=top align=left width="2%" bgColor=#c0c0c0></TD>
  <TD vAlign=top align=left width="93%" bgColor=#c0c0c0><FONT face=serif>2007 Employee Stock Incentive Plan of Amtech Systems, Inc.*</FONT> </TD></TR>
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  <TD vAlign=top align=center width="4%"><FONT face=serif>5</FONT></TD>
  <TD vAlign=top align=left width="2%"></TD>
  <TD vAlign=top align=left width="93%"><FONT face=serif>Opinion of Squire, Sanders &amp; Dempsey L.L.P., including consent** </FONT></TD></TR>
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  <TD vAlign=top align=center width="4%" bgColor=#c0c0c0><FONT face=serif>23.1</FONT></TD>
  <TD vAlign=top align=left width="2%" bgColor=#c0c0c0></TD>
  <TD vAlign=top align=left width="93%" bgColor=#c0c0c0><FONT face=serif>Consent of Counsel (see Exhibit 5)</FONT> </TD></TR>
  <TR vAlign=bottom>
  <TD vAlign=top align=center width="4%"><FONT face=serif>23.2</FONT></TD>
  <TD vAlign=top align=left width="2%">&nbsp;</TD>
  <TD vAlign=top align=left width="93%"><FONT face=serif>Consent of Mayer Hoffman McCann P.C.**</FONT> </TD></TR>
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  <TD vAlign=top align=center width="4%" bgColor=#c0c0c0><FONT face=serif>24</FONT></TD>
  <TD vAlign=top align=left width="2%" bgColor=#c0c0c0></TD>
  <TD vAlign=top align=left width="93%" bgColor=#c0c0c0><FONT face=serif>Powers of Attorney**</FONT> </TD></TR>
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  </DIV>____________________<BR><BR>
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  <TD vAlign=top noWrap><FONT face=serif>*</FONT>&nbsp; &nbsp; &nbsp; </TD>
  <TD width="100%"><FONT face=serif>Incorporated herein by reference to Amtech&#146;s Form DEF 14A, File No. 000-11412, filed with the SEC on April 24, 2007.</FONT> </TD></TR>
  <TR>
  <TD vAlign=top noWrap><FONT face=serif>**&nbsp;&nbsp;&nbsp;&nbsp; </FONT></TD>
  <TD width="100%"><FONT face=serif>Filed herewith.</FONT> </TD></TR>
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  <P align=justify><B><FONT face=serif>Item 9.</FONT></B><FONT face=serif> </FONT><B><FONT face=serif>Undertakings</FONT></B><FONT face=serif>. </FONT></P>
  
  <P align=justify><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;(a) The undersigned Registrant hereby undertakes: </FONT></P>
  
  <P align=justify><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;(1) To file, during any period in which offers or sales are being made, a post-effective amendment to this registration statement: </FONT></P>
  
  <P style="PADDING-LEFT: 40px" align=justify><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;(i) To include any prospectus required by Section 10(a)(3) of the Securities Act; </FONT></P>
  
  <P style="PADDING-LEFT: 40px" align=justify><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;(ii) To reflect in the prospectus any facts or events arising after the effective date of the registration statement (or the most recent post-effective amendment thereof) which, individually or in the aggregate, represent a fundamental change in the information set forth in the registration statement. Notwithstanding the foregoing, any increase or decrease in volume of securities offered (if the total dollar value of securities offered would not exceed that which was registered) and any deviation from the low or high end of the estimated maximum offering range may be reflected in the form of prospectus filed with the SEC pursuant to Rule 424(b) if, in the aggregate, the changes in volume and price represent no more than 20 percent change in the maximum aggregate offering price set forth in the &#147;Calculation of Registration Fee&#148; table in the effective registration statement; </FONT></P>
  
  <P style="PADDING-LEFT: 40px" align=justify><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;(iii) To include any material information with respect to the plan of distribution not previously disclosed in the registration statement or any material change to such information in the registration statement; </FONT></P>
  
  <P align=justify><I><FONT face=serif>provided, however</FONT></I><FONT face=serif>, that paragraphs (a)(1)(i) and (a)(1)(ii) do not apply if the information required to be included in a post-effective amendment by those paragraphs is contained in reports </FONT></P>
  
  <P align=center><FONT face=serif>6 </FONT></P>
  
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  <PAGE>
  
  <P align=justify><FONT face=serif>filed with or furnished to the SEC by the Registrant pursuant to Section 13 or Section 15(d) of the Exchange Act that are incorporated by reference in this registration statement. </FONT></P>
  
  <P align=justify><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;(2) That, for the purpose of determining any liability under the Securities Act, each such post-effective amendment shall be deemed to be a new registration statement relating to the securities offered therein, and the offering of such securities at that time shall be deemed to be the initial </FONT><I><FONT face=serif>bona fide</FONT></I><FONT face=serif> offering thereof. </FONT></P>
  
  <P align=justify><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;(3) To remove from registration by means of a post-effective amendment any of the securities being registered which remain unsold at the termination of the offering. </FONT></P>
  
  <P align=justify><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;(4) That, for the purpose of determining liability under the Securities Act to any purchaser:</FONT></P>
  
  <P align=justify><FONT face=serif><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT></FONT>(i) If the Registrant is relying on Rule 430B under the Securities Act:</FONT></P>
  
  <P align=justify><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT face=serif>(A) Each prospectus filed by the Registrant pursuant to Rule 424(b)(3) under the Securities Act shall be deemed to be part of this registration statement as of the date the filed prospectus was deemed part of and included in this registration statement; and</FONT></P>
  
  <P align=justify><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT face=serif>(B) Each prospectus required to be filed pursuant to Rule 424(b)(2), (b)(5), or (b)(7) under the Securities Act as part of this registration statement in reliance on Rule 430B under the Securities Act relating to an offering made pursuant to Rule 415(a)(1)(i), (vii), or (x) under the Securities Act for the purpose of providing the information required by Section 10(a) of the Securities Act shall be deemed to be part of and included in this registration statement as of the earlier of the date such form of prospectus is first used after effectiveness or the date of the first contract of sale of securities in the offering described in the prospectus. As provided in Rule 430B under the Securities Act, for liability purposes of the issuer and any person that is at that date an
  underwriter, such date shall be deemed to be a new effective date of this registration statement, and the offering of such securities at that time shall be deemed to be the initial bona fide offering thereof. Provided, however, that no statement made in a registration statement or prospectus that is part of this registration statement or made in a document incorporated or deemed incorporated by reference into this registration statement or prospectus that is part of this registration statement will, as to a purchaser with a time of contract of sale prior to such effective date, supersede or modify any statement that was made in this registration statement or prospectus that was part of this registration statement or made in any such document immediately prior to such effective date; or</FONT></P>
  
  <P align=justify><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT face=serif>(ii) If the Registrant is subject to Rule 430C under the Securities Act, each prospectus filed pursuant to Rule 424(b) under the Securities Act as part of a registration statement relating to an offering, other than registration statements relying on Rule 430B under the Securities Act or other than prospectuses filed in reliance on Rule 430A under the Securities Act, shall be deemed to be part of and included in this registration statement as of the date it is first used after effectiveness. Provided, however, that no statement made in a registration statement or prospectus that is part of this registration statement or made in a document incorporated or deemed incorporated by reference into this registration statement or prospectus that is part of this registration statement will, as to a purchaser with a time of contract of sale
  </FONT></P>
  
  <P align=center><FONT face=serif>7 </FONT></P>
  
  <HR align=center width="100%" noShade SIZE=2>
  
  
  <PAGE>
  
  <P align=justify><FONT face=serif>prior to such first use, supersede or modify any statement that was made in this registration statement or prospectus that was part of this registration statement or made in any such document immediately prior to such date of first use.</FONT></P>
  
  <P align=justify><FONT face=serif><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT>(5) That, for the purpose of determining liability of the Registrant under the Securities Act to any purchaser in the initial distribution of the securities, in a primary offering of securities of the Registrant pursuant to this registration statement, regardless of the underwriting method used to sell the securities to the purchaser, if the securities are offered or sold to such purchaser by means of any of the following communications, the Registrant will be a seller to the purchaser and will be considered to offer or sell such securities to such purchaser:</FONT></P>
  
  <P align=justify><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT face=serif>(i) Any preliminary prospectus or prospectus of the Registrant relating to the offering required to be filed pursuant to Rule 424 under the Securities Act;</FONT></P>
  
  <P align=justify><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT face=serif>(ii) Any free writing prospectus relating to the offering prepared by or on behalf of the Registrant or used or referred to by the Registrant;</FONT></P>
  
  <P align=justify><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT face=serif>(iii) The portion of any other free writing prospectus relating to the offering containing material information about the Registrant or its securities provided by or on behalf of the Registrant; and</FONT></P>
  
  <P align=justify><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT face=serif>(iv) Any other communication that is an offer in the offering made by the Registrant to the purchaser.</FONT></P>
  
  <P align=justify><FONT face=serif><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT>(b) The undersigned Registrant hereby undertakes that, for purposes of determining any liability under the Securities Act, each filing of the Registrant&#146;s annual report pursuant to Section 13(a) or Section 15(d) of the Exchange Act (and, where applicable, each filing of an employee benefit plan&#146;s annual report pursuant to Section 15(d) of the Exchange Act) that is incorporated by reference in the registration statement shall be deemed to be a new registration statement relating to the securities offered therein, and the offering of such securities at that time shall be deemed to be the initial </FONT><I><FONT face=serif>bona fide</FONT></I><FONT face=serif> offering thereof. </FONT></P>
  
  <P align=justify><FONT face=serif><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT>(c) Insofar as indemnification for liabilities arising under the Securities Act may be permitted to directors, officers and controlling persons of the Registrant pursuant to the foregoing provisions, or otherwise, the Registrant has been advised that in the opinion of the SEC such indemnification is against public policy as expressed in the Securities Act and is, therefore, unenforceable. In the event that a claim for indemnification against such liabilities (other than the payment by the Registrant of expenses incurred or paid by a director, officer or controlling person of the Registrant in the successful defense of any action, suit or proceeding) is asserted by such director, officer or controlling person in connection with the securities being registered, the Registrant will, unless in the opinion of its counsel the matter has been settled by controlling precedent, submit to a court of appropriate jurisdiction
  the question of whether such indemnification by it is against public policy as expressed in the Securities Act and will be governed by the final adjudication of such issue. </FONT></P>
  
  <P align=center><FONT face=serif>8 </FONT></P>
  
  <HR align=center width="100%" noShade SIZE=2>
  
  
  <PAGE>
  
  <P align=center><B><FONT face=serif>SIGNATURES </FONT></B></P>
  
  <P align=justify>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT face=serif>Pursuant to the requirements of the Securities Act of 1933, the registrant certifies that it has reasonable grounds to believe that it meets all of the requirements for filing on Form S-8 and has duly caused this registration statement to be signed on its behalf by the undersigned, thereunto duly authorized, in the City of Tempe, State of Arizona, on August 15, 2007. </FONT></P>
  
  <TABLE cellSpacing=0 cellPadding=0 width="100%" border=0>
  <TR>
  <TD noWrap width="50%"></TD>
  <TD noWrap width="50%" colSpan=3>
  <P align=justify><B><FONT face=serif>AMTECH SYSTEMS, INC. </FONT></B></P>
  </TD></TR>
  <TR>
  <TD noWrap width="50%"></TD>
  <TD noWrap width="50%" colSpan=3>&nbsp;</TD></TR>
  <TR>
  <TD noWrap width="50%"></TD>
  <TD noWrap width="2%"><FONT face=serif>By: </FONT></TD>
  <TD style="BORDER-BOTTOM: #000000 1pt solid" noWrap width="10%">
  <P align=justify><FONT face=serif>/s/ Robert T. Hass</FONT></P>
  </TD>
  <TD noWrap width="38%">&nbsp;</TD></TR>
  <TR>
  <TD noWrap width="50%"></TD>
  <TD noWrap width="2%"><FONT face=serif>Name:&nbsp;&nbsp;</FONT></TD>
  <TD noWrap width="48%" colSpan=2>
  <P align=justify><FONT face=serif>Robert T. Hass </FONT></P>
  </TD></TR>
  <TR>
  <TD noWrap width="50%"></TD>
  <TD noWrap width="2%"><FONT face=serif>Title: </FONT></TD>
  <TD noWrap width="48%" colSpan=2>
  <P align=justify><FONT face=serif>Chief Accounting Officer, Assistant </FONT></P>
  </TD></TR>
  <TR>
  <TD noWrap width="50%"></TD>
  <TD noWrap width="2%"></TD>
  <TD noWrap width="48%" colSpan=2><FONT face=serif>Secretary and Assistant Treasurer </FONT></TD></TR>
  </TABLE>
  
  
  <P align=justify>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT face=serif>Pursuant to the requirements of the Securities Act of 1933, this registration statement has been signed by the following persons in the capacities and on the dates indicated. </FONT></P>
  
  <TABLE cellSpacing=0 cellPadding=0 width="100%" border=0>
  <TR vAlign=bottom>
  <TD noWrap align=center width="81%"><B><U><FONT face=serif>Signature</FONT></U></B></TD>
  <TD noWrap align=left width="2%">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </TD>
  <TD noWrap align=center width="10%"><B><U><FONT face=serif>Title</FONT></U></B></TD>
  <TD noWrap align=center width="2%">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </TD>
  <TD noWrap align=center width="5%"><B><U><FONT face=serif>Date</FONT></U></B> </TD></TR>
  <TR>
  <TD noWrap align=center width="81%">&nbsp;</TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=center width="10%"></TD>
  <TD noWrap align=center width="2%"></TD>
  <TD noWrap align=center width="5%"></TD></TR>
  <TR vAlign=bottom>
  <TD style="BORDER-BOTTOM: #000000 1pt solid" noWrap align=left width="81%"><FONT face=serif><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; *</FONT></FONT></TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="10%"><FONT face=serif>Chairman of the Board,</FONT>&nbsp; </TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="5%"><FONT face=serif><FONT face=serif><FONT face=serif>August </FONT>15, </FONT>2007</FONT>&nbsp; </TD></TR>
  <TR vAlign=bottom>
  <TD noWrap align=left width="81%"><FONT face=serif>Jong S. Whang</FONT>&nbsp; </TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="10%"><FONT face=serif>President and Chief Executive</FONT>&nbsp; </TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="5%">&nbsp; </TD></TR>
  <TR vAlign=bottom>
  <TD noWrap align=left width="81%">&nbsp; </TD>
  <TD noWrap align=left width="2%">&nbsp;</TD>
  <TD noWrap align=left width="10%"><FONT face=serif>Officer</FONT>&nbsp; </TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="5%">&nbsp; </TD></TR>
  <TR>
  <TD noWrap width="100%" colSpan=5>&nbsp;&nbsp; </TD></TR>
  <TR vAlign=bottom>
  <TD style="BORDER-BOTTOM: #000000 1pt solid" noWrap align=left width="81%"><FONT face=serif><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; *</FONT></FONT></TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="10%"><FONT face=serif>Chief Accounting Officer,</FONT>&nbsp; </TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="5%"><FONT face=serif><FONT face=serif><FONT face=serif><FONT face=serif>August </FONT>15, </FONT>2007</FONT>&nbsp; </FONT></TD></TR>
  <TR vAlign=bottom>
  <TD noWrap align=left width="81%"><FONT face=serif>Robert T. Hass</FONT>&nbsp; </TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="10%"><FONT face=serif>Assistant Secretary and</FONT>&nbsp; </TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="5%">&nbsp; </TD></TR>
  <TR vAlign=bottom>
  <TD noWrap align=left width="81%">&nbsp; </TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="10%"><FONT face=serif>Assistant Treasurer</FONT>&nbsp; </TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="5%">&nbsp; </TD></TR>
  <TR>
  <TD noWrap width="100%" colSpan=5>&nbsp;&nbsp; </TD></TR>
  <TR vAlign=bottom>
  <TD style="BORDER-BOTTOM: #000000 1pt solid" noWrap align=left width="81%"><FONT face=serif><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; *</FONT></FONT></TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="10%"><FONT face=serif>Director</FONT>&nbsp; </TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="5%"><FONT face=serif><FONT face=serif><FONT face=serif><FONT face=serif>August </FONT>15, </FONT>2007</FONT>&nbsp; </FONT></TD></TR>
  <TR>
  <TD noWrap align=left width="81%"><FONT face=serif>Michael Garnreiter</FONT>&nbsp; </TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="10%"></TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="5%"></TD></TR>
  </TABLE>
  
  <BR>
  <P align=center><FONT face=serif>9 </FONT></P>
  
  <HR align=center width="100%" noShade SIZE=2>
  
  
  <PAGE>
  <BR>
  <TABLE cellSpacing=0 cellPadding=0 width="100%" border=0>
  <TR vAlign=bottom>
  <TD noWrap align=center width="81%" colSpan=2><B><U><FONT face=serif>Signature</FONT></U></B></TD>
  <TD noWrap align=left width="2%">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </TD>
  <TD noWrap align=center width="10%"><B><U><FONT face=serif>Title</FONT></U></B></TD>
  <TD noWrap align=center width="2%">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </TD>
  <TD noWrap align=center width="5%"><B><U><FONT face=serif>Date</FONT></U></B> </TD></TR>
  <TR>
  <TD noWrap align=center width="81%" colSpan=2>&nbsp;</TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=center width="10%"></TD>
  <TD noWrap align=center width="2%"></TD>
  <TD noWrap align=center width="5%"></TD></TR>
  <TR vAlign=bottom>
  <TD style="BORDER-BOTTOM: #000000 1pt solid" noWrap align=left width="81%" colSpan=2><FONT face=serif><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; *</FONT></FONT></TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="10%"><FONT face=serif><FONT face=serif>Director</FONT>&nbsp; </FONT></TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="5%"><FONT face=serif><FONT face=serif><FONT face=serif>August </FONT>15, </FONT>2007</FONT>&nbsp; </TD></TR>
  <TR vAlign=bottom>
  <TD noWrap align=left width="81%" colSpan=2><FONT face=serif>Alfred W. Giese</FONT></TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="10%"><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT></TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="5%">&nbsp; </TD></TR>
  <TR>
  <TD noWrap width="100%" colSpan=6>&nbsp;&nbsp; </TD></TR>
  <TR vAlign=bottom>
  <TD style="BORDER-BOTTOM: #000000 1pt solid" noWrap align=left width="81%" colSpan=2><FONT face=serif><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; *</FONT></FONT></TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="10%"><FONT face=serif><FONT face=serif>Director</FONT>&nbsp; </FONT></TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="5%"><FONT face=serif><FONT face=serif><FONT face=serif><FONT face=serif>August </FONT>15, </FONT>2007</FONT>&nbsp; </FONT></TD></TR>
  <TR vAlign=bottom>
  <TD noWrap align=left width="81%" colSpan=2><FONT face=serif>Brian Hoekstra</FONT></TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="10%"></TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="5%">&nbsp; </TD></TR>
  <TR>
  <TD noWrap width="100%" colSpan=6>&nbsp;&nbsp;&nbsp; </TD></TR>
  <TR vAlign=bottom>
  <TD style="BORDER-BOTTOM: #000000 1pt solid" noWrap align=left width="81%" colSpan=2><FONT face=serif><FONT face=serif>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; *</FONT></FONT></TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="10%"><FONT face=serif>Director</FONT>&nbsp; </TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="5%"><FONT face=serif><FONT face=serif><FONT face=serif><FONT face=serif>August </FONT>15, </FONT>2007</FONT>&nbsp; </FONT></TD></TR>
  <TR>
  <TD noWrap align=left width="81%" colSpan=2><FONT face=serif>Robert F. King</FONT></TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="10%"></TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="5%"></TD></TR>
  <TR>
  <TD noWrap align=left width="81%" colSpan=2>&nbsp;</TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="10%"></TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="5%"></TD></TR>
  <TR>
  <TD noWrap align=left width="1%">* By:&nbsp; </TD>
  <TD style="BORDER-BOTTOM: #000000 1pt solid" noWrap align=left width="80%">/s/ Robert T. Hass</TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="10%"></TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="5%"></TD></TR>
  <TR>
  <TD noWrap align=left width="1%"></TD>
  <TD noWrap align=left width="80%">Robert T. Hass. Attorney-In-Fact **</TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="10%"></TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="5%"></TD></TR>
  <TR>
  <TD noWrap align=left width="81%" colSpan=2>____________________</TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="10%"></TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="5%"></TD></TR>
  <TR>
  <TD noWrap align=left width="81%" colSpan=2>&nbsp;</TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="10%"></TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="5%"></TD></TR>
  <TR>
  <TD noWrap align=left width="81%" colSpan=2>** By authority of the power of attorney filed as Exhibit 24 hereto.</TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="10%"></TD>
  <TD noWrap align=left width="2%"></TD>
  <TD noWrap align=left width="5%"></TD></TR>
  </TABLE>
  
  <BR>
  <P align=center><FONT face=serif>10</FONT></P>
  
  <HR align=center width="100%" noShade SIZE=2>
  
  
  <PAGE>
  
  <P align=center><B><FONT face=serif>EXHIBIT INDEX </FONT></B></P>
  
  <DIV align=center>
  <TABLE cellSpacing=0 cellPadding=0 width="80%" border=0>
  <TR vAlign=bottom>
  <TD align=center width="4%"><FONT face=serif><B><FONT face=serif>Exhibit</FONT></B></FONT></TD>
  <TD align=left width="2%"></TD>
  <TD align=left width="93%"><FONT face=serif></FONT></TD></TR>
  <TR vAlign=bottom>
  <TD style="BORDER-BOTTOM: #000000 1pt solid" align=center width="4%"><FONT face=serif><B><FONT face=serif>Number</FONT></B></FONT></TD>
  <TD align=left width="2%">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </TD>
  <TD style="BORDER-BOTTOM: #000000 1pt solid" align=center width="93%"><FONT face=serif><B><FONT face=serif>Description</FONT></B></FONT></TD></TR>
  <TR vAlign=bottom>
  <TD vAlign=top align=center width="4%" bgColor=#c0c0c0><FONT face=serif>4.1</FONT></TD>
  <TD vAlign=top align=left width="2%" bgColor=#c0c0c0></TD>
  <TD vAlign=top align=left width="93%" bgColor=#c0c0c0><FONT face=serif>2007 Employee Stock Incentive Plan*</FONT> </TD></TR>
  <TR vAlign=bottom>
  <TD vAlign=top align=center width="4%"><FONT face=serif>5</FONT></TD>
  <TD vAlign=top align=left width="2%"></TD>
  <TD vAlign=top align=left width="93%"><FONT face=serif>Opinion of Squire, Sanders &amp; Dempsey L.L.P., including consent** </FONT></TD></TR>
  <TR vAlign=bottom>
  <TD vAlign=top align=center width="4%" bgColor=#c0c0c0><FONT face=serif>23.1</FONT></TD>
  <TD vAlign=top align=left width="2%" bgColor=#c0c0c0></TD>
  <TD vAlign=top align=left width="93%" bgColor=#c0c0c0><FONT face=serif>Consent of Counsel (see Exhibit 5)</FONT> </TD></TR>
  <TR vAlign=bottom>
  <TD vAlign=top align=center width="4%"><FONT face=serif>23.2</FONT></TD>
  <TD vAlign=top align=left width="2%">&nbsp;</TD>
  <TD vAlign=top align=left width="93%"><FONT face=serif>Consent of Mayer Hoffman McCann P.C.**</FONT> </TD></TR>
  <TR vAlign=bottom>
  <TD vAlign=top align=center width="4%" bgColor=#c0c0c0><FONT face=serif>24</FONT></TD>
  <TD vAlign=top align=left width="2%" bgColor=#c0c0c0></TD>
  <TD vAlign=top align=left width="93%" bgColor=#c0c0c0><FONT face=serif>Powers of Attorney** </FONT></TD></TR>
  </TABLE>
  
  </DIV>____________________<BR><BR>
  <TABLE cellSpacing=0 cellPadding=0 border=0>
  <TR>
  <TD vAlign=top noWrap><FONT face=serif>*</FONT>&nbsp; &nbsp; &nbsp; </TD>
  <TD width="100%"><FONT face=serif>Incorporated herein by reference to Amtech&#146;s Form DEF 14A, File No. 000-11412, filed with the SEC on April 24, 2007.</FONT> </TD></TR>
  <TR>
  <TD vAlign=top noWrap><FONT face=serif>**&nbsp;&nbsp;&nbsp;&nbsp; </FONT></TD>
  <TD width="100%"><FONT face=serif>Filed herewith.</FONT> </TD></TR>
  </TABLE>
  
  
  <P align=center><FONT face=serif>11 </FONT></P>
  
  <HR align=center width="100%" noShade SIZE=2>
  
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metadata_filer: {"company-data": {"conformed-name": "AMTECH SYSTEMS INC", "cik": "0000720500", "assigned-sic": "3559", "irs-number": "860411215", "state-of-incorporation": "AZ", "fiscal-year-end": "0930"}, "filing-values": {"form-type": "S-8", "act": "33", "file-number": "333-145454", "film-number": "071058341"}, "business-address": {"street1": "131 S CLARK DR", "city": "TEMPE", "state": "AZ", "zip": "85281", "phone": "6029675146"}, "mail-address": {"street1": "131 SOUTH CLARK DRIVE", "city": "TEMPE", "state": "AZ", "zip": "85281"}, "former-company": {"former-conformed-name": "QUARTZ ENGINEERING & MATERIALS INC", "date-changed": "19870715"}}
text: As filed with the Securities and Exchange Commission on August 14, 2007
  Registration No. ____________
  SECURITIES AND EXCHANGE COMMISSION
  WASHINGTON, D.C. 20549
  _____________________________
  FORM S-8
  REGISTRATION STATEMENT UNDER
  THE SECURITIES ACT OF 1933
  _____________________________
  AMTECH SYSTEMS, INC.
  (Exact name of registrant as specified in its charter)
  Arizona
  86-0411215
  (State or other jurisdiction of incorporation or organization)
  (I.R.S. Employer Identification No.)
  131 South Clark Drive, Tempe, Arizona
  85281
  (Address of Principal Executive offices)
  (Zip Code)
  2007 Employee Stock Incentive Plan
  (Full title of the plan)
  Robert T. Hass
  Amtech Systems, Inc.
  131 South Clark Drive
  Tempe, Arizona 85281
  (Name and address of agent for service)
  (480) 967-5146
  (Telephone number, including area code, of agent for service)
  With copy to:
  Christopher D. Johnson, Esq.
  Squire, Sanders & Dempsey L.L.P.
  40 North Central Avenue, Suite 2700
  Phoenix, Arizona 85004
  (602) 528-4000
  CALCULATION OF REGISTRATION FEE
  Title of Each Class
  Proposed
  Proposed
  of
  Maximum
  Maximum
  Securities
  Amount
  Offering
  Aggregate
  Amount of
  To Be
  To Be
  Price
  Offering
  Registration
  Registered
  Registered
  (1)
  Per Share
  (2)
  Price
  Fee
  Common Stock,
  500,000
  $10.89
  $5,445,000
  $167.17
  $0.01 par value
  ____________________
  (1) Pursuant to Rule 416 under the Securities Act, this registration statement also includes such indeterminate number of shares of common stock as may be issued from time to time by reason of any stock dividend, stock split, recapitalization or other similar transactions.
  (2) Estimated solely for the purpose of calculating the amount of the registration fee, pursuant to Rule 457(c) under the Securities Act of 1933, as amended. The price per share and aggregate offering price are based on the average of the high and low sales prices for shares of common stock of Amtech Systems, Inc., on August 10, 2007, as reported on the NASDAQ Global Stock Market.
  2
  EXPLANATORY NOTE
  This Registration Statement on Form S-8 relates to the registration of 500,000 shares of common stock issuable on exercise of options to be granted under the 2007 Employee Stock Incentive Plan of Amtech Systems, Inc. (the "Plan") to employees of Amtech Systems, Inc. (the "Company" or the "Registrant"). On May 18, 2007, the shareholders of Amtech approved the adoption of the Plan. This registration statement is filed pursuant to paragraph A of the General Instructions to Form S-8 to register securities of the Registrant to be offered under an employee benefit plan to its employees.
  3
  PART I
  INFORMATION REQUIRED IN THE SECTION 10(a) PROSPECTUS
  The documents containing the information specified in Part I, Items 1 and 2, will be delivered to current and former employees in accordance with Form S-8 and Rule 428 of the Securities Act of 1933, as amended (the "Securities Act").
  PART II
  INFORMATION REQUIRED IN THE REGISTRATION STATEMENT
  Item 3.
  Incorporation of Documents by Reference
  .
  The following documents are hereby incorporated by reference into this Amendment and shall be deemed a part hereof:
  (a) the prospectus filed pursuant to Rule 424(b) under the Securities Act with the Securities and Exchange Commission ("SEC") by Amtech on February 1, 2007 (File No. 333-139592);
  (b) the Annual Report of Amtech on Form 10-K for the fiscal year ended September 30, 2006 filed by Amtech on December 21, 2006 and the amendment thereto on Form 10-K/A filed by Amtech on January 29, 2007;
  (c) all other reports filed by Amtech with the Securities and Exchange Commission pursuant to Section 13(a) or 15(d) of the Securities Exchange Act of 1934 (the "Exchange Act") subsequent to September 30, 2006; and
  (d) the description of Amtech's common stock contained in Amtech's registration statement filed pursuant to Section 12 of the Exchange Act.
  All documents subsequently filed by Amtech with the SEC pursuant to Sections 13(a), 13(c), 14 or 15(d) of the Exchange Act prior to the filing of a post-effective amendment which indicates that all securities offered hereby have been sold or which deregisters all securities then remaining unsold, shall be deemed to be incorporated by reference in this Registration Statement and to be a part hereof from the date of filing such documents.
  Item 4.
  Description of Securities
  .
  Not applicable.
  Item 5.
  Interests of Named Experts and Counsel
  .
  Not applicable.
  4
  Item 6.
  Indemnification of Directors and Officers
  .
  Pursuant to Amtech's Articles of Incorporation, it shall indemnify any and all of its existing and former directors, officers, employees, and agents against all expenses incurred by them and each of them, including, but not limited to legal fees, judgments, penalties, and amounts paid in settlement or compromise, which may arise or be incurred, rendered, or levied in any legal action brought or threatened against any of them for or on account of any action or omission alleged to have been committed while acting within the scope of employment as director, officer, employee or agent of the corporation, whether or not any action is or has been filed against them and whether or not any settlement or compromise is approved by a court, indemnification shall be made by the corporation whether the legal action brought or threatened is by or in the right of the corporation or by any other person. Whenever any existing or former director,
  officer, employee, or agent shall report to the President of the corporation or the chairman of the Board of Directors that he or she has incurred or may incur expenses, including, but not limited to, legal fees, judgments, penalties, and amounts paid in settlement or compromise in a legal action brought or threatened against him or her for or on account of any action or omission alleged to have been committed by him or her while acting within the scope of his or her employment as a director, officer, employee or agent of the corporation, the Board of Directors shall, at its next regular or at a special meeting held within a reasonable time thereafter, determine in good faith, whether in regard to the matter involved in the action or contemplated action, such person acted, failed to act, or refused to act willfully or with gross negligence or with fraudulent or criminal intent. If the Board of Directors determines, in good faith, that such person did not act, fail to act, or refuse to act willfully or
  with gross negligence or with fraudulent or criminal intent, in regard to the matter involved in the action or contemplated action, such person acted, failed to act, or refused to act willfully or with gross negligence or with fraudulent criminal intent, indemnification shall be mandatory and shall be automatically extended as specified herein; provided, that the corporation shall have the right to refuse indemnification in any instance in which the person to whom indemnification would otherwise have been applicable shall have unreasonably refused to permit the corporation, at its own expense and through counsel of its own choosing, to defend him or her in the action.
  Section 10-851 of Arizona's Revised Statutes enables a corporation to eliminate or limit
  personal liability of members of its board of directors for violations of their
  fiduciary duty of care. However, Arizona law does not permit the elimination of
  a director's or officer's liability: (i) in connection with a proceeding by or in the right of the corporation in which the director was adjudged liable to the corporation; and (ii) in connection with any other proceeding charging improper financial benefit to the director, whether or not involving action in the director's official capacity, in which the director was adjudged liable on the basis that financial benefit was improperly received by the director. Insofar as indemnification for liabilities arising under the
  Securities Act may be permitted to directors, officers or persons controlling Amtech pursuant to the foregoing provision, Amtech has been informed that in the opinion of the SEC such indemnification is against public policy as expressed in such Act and is therefore unenforceable.
  Item 7.
  Exemption from Registration Claimed
  .
  Not applicable.
  5
  Item 8.
  Exhibits
  .
  Exhibit
  Number
  Description
  4.1
  2007 Employee Stock Incentive Plan of Amtech Systems, Inc.*
  5
  Opinion of Squire, Sanders & Dempsey L.L.P., including consent**
  23.1
  Consent of Counsel (see Exhibit 5)
  23.2
  Consent of Mayer Hoffman McCann P.C.**
  24
  Powers of Attorney**
  ____________________
  *
  Incorporated herein by reference to Amtech's Form DEF 14A, File No. 000-11412, filed with the SEC on April 24, 2007.
  **
  Filed herewith.
  Item 9.
  Undertakings
  .
  (a) The undersigned Registrant hereby undertakes:
  (1) To file, during any period in which offers or sales are being made, a post-effective amendment to this registration statement:
  (i) To include any prospectus required by Section 10(a)(3) of the Securities Act;
  (ii) To reflect in the prospectus any facts or events arising after the effective date of the registration statement (or the most recent post-effective amendment thereof) which, individually or in the aggregate, represent a fundamental change in the information set forth in the registration statement. Notwithstanding the foregoing, any increase or decrease in volume of securities offered (if the total dollar value of securities offered would not exceed that which was registered) and any deviation from the low or high end of the estimated maximum offering range may be reflected in the form of prospectus filed with the SEC pursuant to Rule 424(b) if, in the aggregate, the changes in volume and price represent no more than 20 percent change in the maximum aggregate offering price set forth in the "Calculation of Registration Fee" table in the effective registration statement;
  (iii) To include any material information with respect to the plan of distribution not previously disclosed in the registration statement or any material change to such information in the registration statement;
  provided, however
  , that paragraphs (a)(1)(i) and (a)(1)(ii) do not apply if the information required to be included in a post-effective amendment by those paragraphs is contained in reports
  6
  filed with or furnished to the SEC by the Registrant pursuant to Section 13 or Section 15(d) of the Exchange Act that are incorporated by reference in this registration statement.
  (2) That, for the purpose of determining any liability under the Securities Act, each such post-effective amendment shall be deemed to be a new registration statement relating to the securities offered therein, and the offering of such securities at that time shall be deemed to be the initial
  bona fide
  offering thereof.
  (3) To remove from registration by means of a post-effective amendment any of the securities being registered which remain unsold at the termination of the offering.
  (4) That, for the purpose of determining liability under the Securities Act to any purchaser:
  (i) If the Registrant is relying on Rule 430B under the Securities Act:
  (A) Each prospectus filed by the Registrant pursuant to Rule 424(b)(3) under the Securities Act shall be deemed to be part of this registration statement as of the date the filed prospectus was deemed part of and included in this registration statement; and
  (B) Each prospectus required to be filed pursuant to Rule 424(b)(2), (b)(5), or (b)(7) under the Securities Act as part of this registration statement in reliance on Rule 430B under the Securities Act relating to an offering made pursuant to Rule 415(a)(1)(i), (vii), or (x) under the Securities Act for the purpose of providing the information required by Section 10(a) of the Securities Act shall be deemed to be part of and included in this registration statement as of the earlier of the date such form of prospectus is first used after effectiveness or the date of the first contract of sale of securities in the offering described in the prospectus. As provided in Rule 430B under the Securities Act, for liability purposes of the issuer and any person that is at that date an
  underwriter, such date shall be deemed to be a new effective date of this registration statement, and the offering of such securities at that time shall be deemed to be the initial bona fide offering thereof. Provided, however, that no statement made in a registration statement or prospectus that is part of this registration statement or made in a document incorporated or deemed incorporated by reference into this registration statement or prospectus that is part of this registration statement will, as to a purchaser with a time of contract of sale prior to such effective date, supersede or modify any statement that was made in this registration statement or prospectus that was part of this registration statement or made in any such document immediately prior to such effective date; or
  (ii) If the Registrant is subject to Rule 430C under the Securities Act, each prospectus filed pursuant to Rule 424(b) under the Securities Act as part of a registration statement relating to an offering, other than registration statements relying on Rule 430B under the Securities Act or other than prospectuses filed in reliance on Rule 430A under the Securities Act, shall be deemed to be part of and included in this registration statement as of the date it is first used after effectiveness. Provided, however, that no statement made in a registration statement or prospectus that is part of this registration statement or made in a document incorporated or deemed incorporated by reference into this registration statement or prospectus that is part of this registration statement will, as to a purchaser with a time of contract of sale
  7
  prior to such first use, supersede or modify any statement that was made in this registration statement or prospectus that was part of this registration statement or made in any such document immediately prior to such date of first use.
  (5) That, for the purpose of determining liability of the Registrant under the Securities Act to any purchaser in the initial distribution of the securities, in a primary offering of securities of the Registrant pursuant to this registration statement, regardless of the underwriting method used to sell the securities to the purchaser, if the securities are offered or sold to such purchaser by means of any of the following communications, the Registrant will be a seller to the purchaser and will be considered to offer or sell such securities to such purchaser:
  (i) Any preliminary prospectus or prospectus of the Registrant relating to the offering required to be filed pursuant to Rule 424 under the Securities Act;
  (ii) Any free writing prospectus relating to the offering prepared by or on behalf of the Registrant or used or referred to by the Registrant;
  (iii) The portion of any other free writing prospectus relating to the offering containing material information about the Registrant or its securities provided by or on behalf of the Registrant; and
  (iv) Any other communication that is an offer in the offering made by the Registrant to the purchaser.
  (b) The undersigned Registrant hereby undertakes that, for purposes of determining any liability under the Securities Act, each filing of the Registrant's annual report pursuant to Section 13(a) or Section 15(d) of the Exchange Act (and, where applicable, each filing of an employee benefit plan's annual report pursuant to Section 15(d) of the Exchange Act) that is incorporated by reference in the registration statement shall be deemed to be a new registration statement relating to the securities offered therein, and the offering of such securities at that time shall be deemed to be the initial
  bona fide
  offering thereof.
  (c) Insofar as indemnification for liabilities arising under the Securities Act may be permitted to directors, officers and controlling persons of the Registrant pursuant to the foregoing provisions, or otherwise, the Registrant has been advised that in the opinion of the SEC such indemnification is against public policy as expressed in the Securities Act and is, therefore, unenforceable. In the event that a claim for indemnification against such liabilities (other than the payment by the Registrant of expenses incurred or paid by a director, officer or controlling person of the Registrant in the successful defense of any action, suit or proceeding) is asserted by such director, officer or controlling person in connection with the securities being registered, the Registrant will, unless in the opinion of its counsel the matter has been settled by controlling precedent, submit to a court of appropriate jurisdiction
  the question of whether such indemnification by it is against public policy as expressed in the Securities Act and will be governed by the final adjudication of such issue.
  8
  SIGNATURES
  Pursuant to the requirements of the Securities Act of 1933, the registrant certifies that it has reasonable grounds to believe that it meets all of the requirements for filing on Form S-8 and has duly caused this registration statement to be signed on its behalf by the undersigned, thereunto duly authorized, in the City of Tempe, State of Arizona, on August 15, 2007.
  AMTECH SYSTEMS, INC.
  By:
  /s/ Robert T. Hass
  Name:
  Robert T. Hass
  Title:
  Chief Accounting Officer, Assistant
  Secretary and Assistant Treasurer
  Pursuant to the requirements of the Securities Act of 1933, this registration statement has been signed by the following persons in the capacities and on the dates indicated.
  Signature
  Title
  Date
  *
  Chairman of the Board,
  August
  15,
  2007
  Jong S. Whang
  President and Chief Executive
  Officer
  *
  Chief Accounting Officer,
  August
  15,
  2007
  Robert T. Hass
  Assistant Secretary and
  Assistant Treasurer
  *
  Director
  August
  15,
  2007
  Michael Garnreiter
  9
  Signature
  Title
  Date
  *
  Director
  August
  15,
  2007
  Alfred W. Giese
  *
  Director
  August
  15,
  2007
  Brian Hoekstra
  *
  Director
  August
  15,
  2007
  Robert F. King
  * By:
  /s/ Robert T. Hass
  Robert T. Hass. Attorney-In-Fact **
  ____________________
  ** By authority of the power of attorney filed as Exhibit 24 hereto.
  10
  EXHIBIT INDEX
  Exhibit
  Number
  Description
  4.1
  2007 Employee Stock Incentive Plan*
  5
  Opinion of Squire, Sanders & Dempsey L.L.P., including consent**
  23.1
  Consent of Counsel (see Exhibit 5)
  23.2
  Consent of Mayer Hoffman McCann P.C.**
  24
  Powers of Attorney**
  ____________________
  *
  Incorporated herein by reference to Amtech's Form DEF 14A, File No. 000-11412, filed with the SEC on April 24, 2007.
  **
  Filed herewith.
  11