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      <div align="center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">As filed with the Securities and Exchange
  Commission on August 6, 2010</font></font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="right"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Registration No. 333-_____</font></font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">SECURITIES AND EXCHANGE
  COMMISSION<br></font></font><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Washington, D.C. 20549</font></font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">FORM S-8</font></font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">REGISTRATION
  STATEMENT<br>UNDER<br></font></font><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">THE SECURITIES ACT OF 1933</font></font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">AMTECH SYSTEMS, INC.<br></font></font><font size="2" style="FONT-FAMILY: serif">(Exact Name of Registrant as Specified in Its
  Charter)</font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="center">
        <table border="0" cellpadding="0" cellspacing="0" width="75%" style="LINE-HEIGHT: 13pt; BORDER-COLLAPSE: collapse; ">
  <tr valign="bottom">
              <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Arizona</font></font></td>
              <td nowrap width="79%" style="TEXT-ALIGN: center">
              </td>
              <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">86-0411215</font></font></td>
            </tr><tr valign="bottom">
              <td nowrap width="10%" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">(State or Other Jurisdiction
  of</font></td>
              <td nowrap width="79%" style="TEXT-ALIGN: center">
              </td>
              <td nowrap width="10%" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">(I.R.S. Employer</font></td>
            </tr><tr valign="bottom">
              <td nowrap width="10%" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">Incorporation or Organization)</font></td>
              <td nowrap width="79%" style="TEXT-ALIGN: center">
              </td>
              <td nowrap width="10%" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">Identification Number)</font></td>
            </tr><tr>
              <td colspan="3" width="99%" style="TEXT-ALIGN: center">&#160;</td>
            </tr><tr valign="bottom">
              <td colspan="3" nowrap width="99%" style="LINE-HEIGHT: normal; TEXT-ALIGN: center">
                <div style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif"><font style="DISPLAY: inline; FONT-WEIGHT: bold">131 South Clark
        Drive<br>Tempe, Arizona 85281</font><br>(Address of Principal Executive
        Offices, Including Zip Code)</font></div>
                <div style="TEXT-ALIGN: center">&#160;</div>
                <div style="TEXT-ALIGN: center"><font size="2"><font style="DISPLAY: inline; FONT-WEIGHT: bold">Non-Employee Directors Stock
        Option Plan<br></font>(Full Title of the Plan)</font></div>
              </td>
            </tr><tr>
              <td colspan="3" width="99%" style="TEXT-ALIGN: center">&#160;</td>
            </tr><tr valign="bottom">
              <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Bradley C. Anderson</font></font></td>
              <td nowrap width="79%" style="TEXT-ALIGN: center">
              </td>
              <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Copy to:</font></font></td>
            </tr><tr valign="bottom">
              <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Chief Financial Officer</font></font></td>
              <td nowrap width="79%" style="TEXT-ALIGN: center">
              </td>
              <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Christopher D. Johnson,
        Esq.</font></font></td>
            </tr><tr valign="bottom">
              <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Amtech Systems, Inc.</font></font></td>
              <td nowrap width="79%" style="TEXT-ALIGN: center">
              </td>
              <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Scott I. Gruber,
  Esq.</font></font></td>
            </tr><tr valign="bottom">
              <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">131 South Clark Drive</font></font></td>
              <td nowrap width="79%" style="TEXT-ALIGN: center">
              </td>
              <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Squire, Sanders &amp; Dempsey
        L.L.P.</font></font></td>
            </tr><tr valign="bottom">
              <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Tempe, Arizona 85281</font></font></td>
              <td nowrap width="79%" style="TEXT-ALIGN: center">
              </td>
              <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">1 E. Washington Street, Suite
        2700</font></font></td>
            </tr><tr valign="bottom">
              <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">(480) 967-5146</font></font></td>
              <td nowrap width="79%" style="TEXT-ALIGN: center">
              </td>
              <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Phoenix, Arizona
    85004</font></font></td>
            </tr><tr valign="bottom">
              <td nowrap width="10%" style="TEXT-ALIGN: center">
              </td>
              <td nowrap width="79%" style="TEXT-ALIGN: center">&#160;</td>
              <td nowrap width="10%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">(602)
    528-4000</font></font></td>
            </tr></table>
      </div><br>
      <div>
        <table border="0" cellpadding="0" cellspacing="0" width="100%" style="LINE-HEIGHT: 13pt; BORDER-COLLAPSE: collapse; ">
  <tr valign="bottom">
              <td nowrap width="50%" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">(Name, Address and Telephone Number,
        including Area Code,</font></td>
              <td nowrap width="50%" style="TEXT-ALIGN: center">
              </td>
            </tr><tr valign="bottom">
              <td width="50%" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">of Agent For Service)</font></td>
              <td width="50%">
              </td>
            </tr></table>
      </div><br>
      <div align="justify"><font size="2" style="FONT-FAMILY: serif">Indicate by check
  mark whether the registrant is a large accelerated filer, an accelerated filer,
  a non-accelerated filer, or a smaller reporting company. See the definitions of
  "large accelerated filer," "accelerated filer" and "smaller reporting company"
  in Rule 12b-2 of the Exchange Act.</font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div>
        <table border="0" cellpadding="0" cellspacing="0" width="100%" style="FONT-SIZE: 10pt; LINE-HEIGHT: 13pt; BORDER-COLLAPSE: collapse; ">
  <tr valign="bottom">
              <td align="left" nowrap width="15%"><font size="2" style="FONT-FAMILY: serif">Large Accelerated Filer <font style="FONT-FAMILY: wingdings">o</font></font></td>
              <td align="left" nowrap width="1%">&#160;&#160;&#160;&#160;&#160;&#160;&#160;</td>
              <td align="left" nowrap width="15%"><font size="2" style="FONT-FAMILY: serif">Accelerated Filer <font style="FONT-FAMILY: wingdings">o</font></font></td>
              <td align="left" nowrap width="1%">&#160;&#160;&#160;&#160;&#160;&#160;&#160;</td>
              <td nowrap width="52%" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">Non-accelerated Filer <font style="FONT-FAMILY: wingdings">o</font></font></td>
              <td align="right" nowrap width="1%">&#160;&#160;&#160;&#160;&#160;&#160;&#160;</td>
              <td align="right" nowrap width="15%"><font size="2" style="FONT-FAMILY: serif">Smaller Reporting Company <font style="FONT-FAMILY: wingdings">&#254;</font></font></td>
            </tr><tr>
              <td align="left" nowrap width="15%">
              </td>
              <td align="left" nowrap width="1%">
              </td>
              <td align="left" nowrap width="15%">
              </td>
              <td colspan="3" nowrap width="54%" style="TEXT-ALIGN: center">(Do not check
        if a smaller reporting company)</td>
              <td align="right" nowrap width="15%">
              </td>
            </tr></table>
      </div><br>
      <hr align="center" noshade size="2" width="100%">
      <div id="PN" style="PAGE-BREAK-BEFORE: always">
      </div><br>
      <div align="center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">CALCULATION OF REGISTRATION
  FEE</font></font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div>
        <table border="0" cellpadding="0" cellspacing="0" width="100%" style="PADDING-RIGHT: 4pt; PADDING-LEFT: 4pt; LINE-HEIGHT: 13pt; BORDER-COLLAPSE: collapse; ">
  <tr valign="bottom">
              <td nowrap width="19%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-TOP: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid">&#160;</td>
              <td nowrap width="20%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-TOP: #000000 1pt solid; TEXT-ALIGN: center">&#160;</td>
              <td nowrap width="20%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-TOP: #000000 1pt solid; TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2">Proposed maximum</font></font></td>
              <td nowrap width="20%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-TOP: #000000 1pt solid; TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2">Proposed maximum</font></font></td>
              <td nowrap width="20%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-TOP: #000000 1pt solid; TEXT-ALIGN: center">&#160;</td>
            </tr><tr valign="bottom">
              <td nowrap width="19%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2">Title of securities to</font></font></td>
              <td nowrap width="20%" style="BORDER-RIGHT: #000000 1pt solid; TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2">Amount to be</font></font></td>
              <td nowrap width="20%" style="BORDER-RIGHT: #000000 1pt solid; TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">offering price per</font></font></td>
              <td nowrap width="20%" style="BORDER-RIGHT: #000000 1pt solid; TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">aggregate offering</font></font></td>
              <td nowrap width="20%" style="BORDER-RIGHT: #000000 1pt solid; TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2">Amount of</font></font></td>
            </tr><tr valign="bottom">
              <td nowrap width="19%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid; TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">be registered</font></font></td>
              <td nowrap width="20%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid; TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">registered (1)(2)</font></font></td>
              <td nowrap width="20%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid; TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2">share (3)</font></font></td>
              <td nowrap width="20%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid; TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2">price (3)</font></font></td>
              <td nowrap width="20%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid; TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">registration fee</font></font></td>
            </tr><tr valign="bottom">
              <td nowrap width="19%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid; TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">Common Stock,
        par<br>value $.01 per share</font></td>
              <td nowrap valign="middle" width="20%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid; TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">150,000 shares</font></td>
              <td nowrap valign="middle" width="20%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid; TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">$10.105</font></td>
              <td nowrap valign="middle" width="20%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid; TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">$1,515,750</font></td>
              <td nowrap valign="middle" width="20%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid; TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">$108.07</font></td>
            </tr></table>
      </div>____________________<br>&#160;<br>
      <div>
        <table border="0" cellpadding="0" cellspacing="0" style="">
  <tr>
              <td nowrap valign="top"><font size="2" style="FONT-FAMILY: serif">(1)</font></td>
              <td nowrap>&#160;&#160;&#160;&#160;&#160; </td>
              <td width="100%" style="TEXT-ALIGN: justify"><font size="2" style="FONT-FAMILY: serif">Pursuant to Rule 416(a) under the
        Securities Act of 1933, as amended (the &#8220;Securities Act&#8221;), this
        registration statement also covers an indeterminate number of additional
        shares of common stock of the registrant that become issuable as a result
        of any stock split, stock dividend, recapitalization or other similar
        transaction that results in an increase in the number of outstanding
        shares of common stock of the registrant. This registration statement
        shall cover such additional shares. In addition, pursuant to Rule 416(c)
        under the Securities Act, this registration statement also covers an
        indeterminate amount of interests to be offered or sold pursuant to
        registrant&#8217;s Non-Employee Directors Stock Option Plan, as amended (the
        &#8220;Plan&#8221;).</font></td>
            </tr><tr>
              <td nowrap valign="top"><font size="2" style="FONT-FAMILY: serif">(2)</font></td>
              <td nowrap>&#160;</td>
              <td width="100%" style="TEXT-ALIGN: justify"><font size="2" style="FONT-FAMILY: serif">Pursuant to General Instruction E to
        Form S-8, a filing fee is only being paid with respect to the registration
        of additional securities for the Plan. This registration statement on Form
        S-8 relates to 150,000 additional shares of common stock, par value $.01,
        of the registrant, issuable pursuant to the Plan. Registration statements
        on Form S-8 covering 200,000 shares (before stock splits and stock
        dividends) were previously filed with respect to the Plan (registration
        nos. 333-09911 filed August 9, 1996 and 333-131051 filed January 17,
        2006).</font></td>
            </tr><tr>
              <td nowrap valign="top"><font size="2" style="FONT-FAMILY: serif">(3)</font></td>
              <td nowrap>&#160;</td>
              <td width="100%" style="TEXT-ALIGN: justify"><font size="2" style="FONT-FAMILY: serif">Estimated pursuant to Rule 457(h) under
        the Securities Act solely for the purpose of calculating the registration
        fee. The proposed maximum offering price is based upon the average of the
        high and low prices of the common stock as reported on the NASDAQ Global
        Select Market on August 3, 2010.</font></td>
            </tr></table>
      </div><br>
      <hr align="center" noshade size="2" width="100%">
      <div id="PN" style="PAGE-BREAK-BEFORE: always">
      </div><br>
      <div align="center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">EXPLANATORY NOTE</font></font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">INCORPORATION BY REFERENCE: Pursuant to
  General Instruction E to Form S-8, the contents of registration statement nos.
  333-09911 and 333-131051 are incorporated herein by this reference.</font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">REGISTRATION OF ADDITIONAL SHARES: This
  registration statement on Form S-8 is filed by the registrant to register
  150,000 additional shares of common stock, par value $.01 per share, of the
  registrant, which may be issued pursuant to an amendment to the Plan authorized
  by the shareholders of the registrant on March 11, 2010.</font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">PART II<br></font></font><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">INFORMATION REQUIRED IN THE REGISTRATION STATEMENT</font></font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="justify"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Item 3. Incorporation of Documents by
  Reference.</font></font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="justify">&#160;&#160;&#160;&#160; <font size="2" style="FONT-FAMILY: serif">In this registration statement, the terms &#8220;we,&#8221; &#8220;our,&#8221; &#8220;us,&#8221; &#8220;Amtech,&#8221;
  the &#8220;registrant&#8221; and the &#8220;Corporation&#8221; refer to Amtech System, Inc. The SEC
  allows us to incorporate by reference the information we file with the SEC,
  which means that we can disclose important information to you by referring you
  to those documents. The information that we incorporate by reference is
  considered to be part of this registration statement. Information that we file
  with the SEC in the future and incorporate by reference in this registration
  statement automatically updates and supersedes previously filed information as
  applicable.</font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="justify"><font size="2" style="FONT-FAMILY: serif"><font size="3">&#160;&#160;&#160;&#160; </font>We incorporate by reference into this
  registration statement the following documents filed by us with the SEC, other
  than any portion of any such documents that are not deemed &#8220;filed&#8221; under the
  Securities Exchange Act of 1934 (the &#8220;Exchange Act&#8221;) in accordance with the
  Exchange Act and applicable SEC rules:</font></div>
      <ul style="FONT-SIZE: 10pt; TEXT-ALIGN: justify">
        <li><font size="2" style="FONT-FAMILY: serif">Annual Report on Form 10-K for the
    fiscal year ended September 30, 2009.</font>
          </li>
        <li><font size="2" style="FONT-FAMILY: serif">Quarterly Report on Form 10-Q for
    the fiscal quarter ended December 31, 2009.</font>
          </li>
        <li><font size="2" style="FONT-FAMILY: serif">Quarterly Report on Form 10-Q for
    the fiscal quarter ended March 31, 2010.</font>
          </li>
        <li><font size="2" style="FONT-FAMILY: serif">Quarterly Report on Form 10-Q for
    the fiscal quarter ended June 30, 2010.</font>
          </li>
        <li><font size="2" style="FONT-FAMILY: serif">The information specifically
    incorporated by reference into our Annual Report on Form 10-K for the fiscal
    year ended September 30, 2009 from our definitive proxy statement on Schedule
    14A filed with the SEC on January 28, 2010.</font>
          </li>
        <li><font size="2" style="FONT-FAMILY: serif">The description of our common
    stock contained in our registration statement filed pursuant to Section 12 of
    the Exchange Act; and</font>
          </li>
        <li><font size="2" style="FONT-FAMILY: serif">All other reports filed that we
    have filed with the SEC pursuant to Section 13(a) or 15(d) of the Exchange Act
    subsequent to September 30, 2009.</font> </li>
      </ul>
      <div align="justify">&#160;&#160;&#160;&#160; <font size="2" style="FONT-FAMILY: serif">We also incorporate by reference into this registration statement all
  documents (other than any portions of any such documents that are not deemed
  &#8220;filed&#8221; under the Exchange Act in accordance with the Exchange Act and
  applicable SEC rules) filed by us under Sections 13(a), 13(c), 14 or 15(d) of
  the Exchange Act after the date of the initial filing of this registration
  statement and before the filing of a post-effective amendment to this
  registration statement which indicates all securities offered hereunder have
  been sold or that deregisters all securities then remaining unsold.</font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="justify"><font size="2" style="FONT-FAMILY: serif"><font size="3">&#160;&#160;&#160;&#160; </font>You may request a copy of these filings,
  which we shall deliver to you, together with all exhibits thereto, at no cost,
  by writing or telephoning us as follows:</font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="center"><font size="2" style="FONT-FAMILY: serif">Amtech Systems,
  Inc.<br>Attention: Robert T. Hass<br>131 South Clark Drive<br>Tempe, Arizona
  85281<br>(480) 967-5146</font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="center"><font size="2" style="FONT-FAMILY: serif">3</font></div>
      <hr align="center" noshade size="2" width="100%">
      <div id="PN" style="PAGE-BREAK-BEFORE: always">
      </div><br>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">Any statement contained in a document that is
  incorporated by reference will be modified or superseded for all purposes to the
  extent that a statement contained in this registration statement, or in any
  other document that is subsequently filed with the SEC and incorporated by
  reference, modifies or is contrary to that previous statement. Any statement so
  modified or superseded will not be deemed a part of this registration statement,
  except as so modified or superseded. Since information that we later file with
  the SEC will update and supersede previously incorporated information, you
  should look at all of the SEC filings that we incorporate by reference to
  determine if any of the statements in this registration statement or in any
  documents previously incorporated by reference have been modified or
  superseded.</font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="justify"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Item 4. Description of
  Securities.</font></font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="justify"><font size="2" style="FONT-FAMILY: serif"><font size="3">&#160;&#160;&#160;&#160;&#160;</font>Not applicable.</font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="justify"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Item 5. Interests of Named Experts and
  Counsel.</font></font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="justify"><font size="2" style="FONT-FAMILY: serif"><font size="3">&#160;&#160;&#160;&#160;&#160;</font>Not applicable.</font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="justify"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Item 6. Indemnification of Directors and
  Officers.</font></font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">Section 10-851 of Arizona&#8217;s Revised Statutes
  enables a corporation to eliminate or limit</font><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif"> </font></font><font size="2" style="FONT-FAMILY: serif">personal liability
  of members of its board of directors for violations of their</font><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif"> </font></font><font size="2" style="FONT-FAMILY: serif">fiduciary duty of
  care. However, Arizona law does not permit the elimination of</font><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif"> </font></font><font size="2" style="FONT-FAMILY: serif">a director's or
  officer's liability: (i) in connection with a proceeding by or in the right of
  the corporation in which the director was adjudged liable to the corporation;
  and (ii) in connection with any other proceeding charging improper financial
  benefit to the director, whether or not involving action in the director's
  official capacity, in which the director was adjudged liable on the basis that
  financial benefit was improperly received by the director. Insofar as
  indemnification for liabilities arising under the Securities Act may be
  permitted to directors, officers or persons controlling Amtech pursuant to the
  foregoing provision, Amtech has been informed that in the opinion of the SEC
  such indemnification is against public policy as expressed in such Act and is
  therefore unenforceable.</font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">Pursuant to Amtech&#8217;s Articles of
  Incorporation, it shall indemnify any and all of its existing and former
  directors, officers, employees, and agents against all expenses incurred by them
  and each of them, including, but not limited to legal fees, judgments,
  penalties, and amounts paid in settlement or compromise, which may arise or be
  incurred, rendered, or levied in any legal action brought or threatened against
  any of them for or on account of any action or omission alleged to have been
  committed while acting within the scope of employment as director, officer,
  employee or agent of the corporation, whether or not any action is or has been
  filed against them and whether or not any settlement or compromise is approved
  by a court, indemnification shall be made by the corporation whether the legal
  action brought or threatened is by or in the right of the corporation or by any
  other person.</font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">Whenever any existing or former director,
  officer, employee, or agent shall report to the President of the corporation or
  the chairman of the Board of Directors that he or she has incurred or may incur
  expenses, including, but not limited to, legal fees, judgments, penalties, and
  amounts paid in settlement or compromise in a legal action brought or threatened
  against him or her for or on account of any action or omission alleged to have
  been committed by him or her while acting within the scope of his or her
  employment as a director, officer, employee or agent of the corporation, the
  Board of Directors shall, at its next regular or at a special meeting held
  within a reasonable time thereafter, determine in good faith, whether in regard
  to the matter involved in the action or contemplated action, such person acted,
  failed to act, or refused to act willfully or with gross negligence or with
  fraudulent or criminal intent. If the Board of Directors determines, in good
  faith, that such person did not act, fail to act, or refuse to act willfully or
  with gross negligence or with fraudulent or criminal intent, in regard to the
  matter involved in the action or contemplated action, such person acted, failed
  to act, or refused to act willfully or with gross negligence or with fraudulent
  criminal intent, indemnification shall be mandatory and shall be automatically
  extended as specified herein; provided, that the corporation shall have the
  right to refuse indemnification in any instance in which the person to whom
  indemnification would otherwise have been applicable shall have unreasonably
  refused to permit the corporation, at its own expense and through counsel of its
  own choosing, to defend him or her in the action.</font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="center"><font size="2" style="FONT-FAMILY: serif">4</font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <hr align="center" noshade size="2" width="100%">
      <div id="PN" style="PAGE-BREAK-BEFORE: always">
      </div><br>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">Amtech has purchased insurance on behalf of
  its directors and officers against certain liabilities that may be asserted
  against, or incurred by, such persons in their capacities as directors or
  officers of Amtech, or that may arise out of their status as directors or
  officers of the registrants, including liabilities under the federal and state
  securities laws.</font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="justify"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Item 7. Exemption from Registration
  Claimed.</font></font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="justify"><font size="2" style="FONT-FAMILY: serif"><font size="3">&#160;&#160;&#160;&#160;&#160;</font>Not applicable.</font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="justify"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Item 8. Exhibits.</font></font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div>
        <table border="0" cellpadding="0" cellspacing="0" width="100%" style="">
  <tr valign="bottom" style="LINE-HEIGHT: 13pt;">
              <td nowrap width="3%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Exhibit</font></font></td>
              <td nowrap width="1%" style="TEXT-ALIGN: center">
              </td>
              <td nowrap width="96%" style="TEXT-ALIGN: center">
              </td>
            </tr><tr valign="bottom" style="LINE-HEIGHT: 13pt;">
              <td nowrap width="3%" style="BORDER-BOTTOM: #000000 1pt solid; TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">No.</font></font></td>
              <td nowrap width="1%" style="TEXT-ALIGN: center">&#160;&#160;&#160;&#160;&#160; </td>
              <td nowrap width="96%" style="BORDER-BOTTOM: #000000 1pt solid; TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Description</font></font></td>
            </tr><tr valign="bottom">
              <td nowrap valign="top" width="3%" bgcolor="#cceeff" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">4.3</font></td>
              <td align="left" nowrap valign="top" width="1%" bgcolor="#cceeff">&#160;</td>
              <td valign="top" width="96%" bgcolor="#cceeff" style="TEXT-ALIGN: justify"><font size="2" style="FONT-FAMILY: serif">Non-Employee
        Directors Stock Option Plan, as amended*</font></td>
            </tr><tr valign="bottom">
              <td nowrap valign="top" width="3%" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">5.1</font></td>
              <td align="left" nowrap valign="top" width="1%">&#160;</td>
              <td valign="top" width="96%" style="TEXT-ALIGN: justify"><font size="2" style="FONT-FAMILY: serif">Opinion of Squire, Sanders &amp; Dempsey
        L.L.P. regarding legality of shares**</font></td>
            </tr><tr valign="bottom">
              <td nowrap valign="top" width="3%" bgcolor="#cceeff" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">23.1</font></td>
              <td align="left" nowrap valign="top" width="1%" bgcolor="#cceeff">&#160;</td>
              <td valign="top" width="96%" bgcolor="#cceeff" style="TEXT-ALIGN: justify"><font size="2" style="FONT-FAMILY: serif">Consent of Squire,
        Sanders &amp; Dempsey L.L.P. (included in Exhibit 5.1 hereto)</font></td>
            </tr><tr valign="bottom">
              <td nowrap valign="top" width="3%" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">23.2</font></td>
              <td align="left" nowrap valign="top" width="1%">&#160;</td>
              <td valign="top" width="96%" style="TEXT-ALIGN: justify"><font size="2" style="FONT-FAMILY: serif">Consent of Mayer Hoffman McCann,
        P.C.**</font></td>
            </tr><tr valign="bottom">
              <td nowrap valign="top" width="3%" bgcolor="#cceeff" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">24</font></td>
              <td align="left" nowrap valign="top" width="1%" bgcolor="#cceeff">&#160;</td>
              <td valign="top" width="96%" bgcolor="#cceeff" style="TEXT-ALIGN: justify"><font size="2" style="FONT-FAMILY: serif">Powers of attorney
        **</font></td>
            </tr></table>
      </div>____________________<br>&#160;<br>
      <div>
        <table border="0" cellpadding="0" cellspacing="0" style="">
  <tr>
              <td nowrap valign="top"><font size="2" style="FONT-FAMILY: serif">*</font></td>
              <td nowrap valign="top">&#160;&#160;&#160;&#160;&#160; </td>
              <td valign="top" width="100%" style="TEXT-ALIGN: justify"><font size="2" style="FONT-FAMILY: serif">Incorporated herein by reference to
        Amtech&#8217;s current report on Form 8-K, filed with the SEC on March 17,
        2010</font></td>
            </tr><tr>
              <td nowrap valign="top"><font size="2" style="FONT-FAMILY: serif">**</font></td>
              <td nowrap valign="top">&#160;</td>
              <td valign="top" width="100%" style="TEXT-ALIGN: justify"><font size="2" style="FONT-FAMILY: serif">Filed
  herewith</font></td>
            </tr></table>
      </div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="justify"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Item 9. Undertakings.</font></font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="justify"><font size="2" style="FONT-FAMILY: serif"><font size="3">&#160;&#160;&#160;&#160;&#160;</font>(a) The undersigned registrant
  hereby undertakes:</font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="justify"><font size="2" style="FONT-FAMILY: serif"><font size="3">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;</font>(1) To
  file, during any period in which offers or sales are being made, a
  post-effective amendment to this registration statement:</font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="justify"><font size="2" style="FONT-FAMILY: serif"><font size="3">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;</font>(i)
  To include any prospectus required by Section 10(a)(3) of the Securities
  Act;</font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="justify"><font size="2" style="FONT-FAMILY: serif"><font size="3">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;</font>(ii)
  To reflect in the prospectus any facts or events arising after the effective
  date of the registration statement (or the most recent post-effective amendment
  thereof) which, individually or in the aggregate, represent a fundamental change
  in the information set forth in the registration statement. Notwithstanding the
  foregoing, any increase or decrease in the volume of securities offered (if the
  total dollar value of securities offered would not exceed that which was
  registered) and any deviation from the low or high end of the estimated maximum
  offering range may be reflected in the form of prospectus filed with the
  Commission pursuant to Rule 424(b) if, in the aggregate, the changes in volume
  and price represent no more than 20% change in the maximum aggregate offering
  price set forth in the "Calculation of Registration Fee" table in the effective
  registration statement;</font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="justify"><font size="2" style="FONT-FAMILY: serif"><font size="3">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;</font>(iii)
  To include any material information with respect to the plan of distribution not
  previously disclosed in the registration statement or any material change to
  such information in the registration statement;</font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="justify"><font style="DISPLAY: inline; FONT-STYLE: italic"><font size="2" style="FONT-FAMILY: serif">provided, however</font></font><font size="2" style="FONT-FAMILY: serif">, that paragraphs (a)(1)(i) and (a)(1)(ii) of
  this section do not apply if the information required to be included in a
  post-effective amendment by those paragraphs is contained in reports filed with
  or furnished to the SEC by the registrant pursuant to Section 13 or Section
  15(d) of the Exchange Act that are incorporated by reference in the registration
  statement.</font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="center"><font size="2" style="FONT-FAMILY: serif">5</font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <hr align="center" noshade size="2" width="100%">
      <div id="PN" style="PAGE-BREAK-BEFORE: always">
      </div><br>
      <div align="justify"><font size="2" style="FONT-FAMILY: serif"><font size="3">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;</font>(2)
  That, for the purpose of determining any liability under the Securities Act,
  each such post-effective amendment shall be deemed to be a new registration
  statement relating to the securities offered therein, and the offering of such
  securities at that time shall be deemed to be the initial bona fide offering
  thereof.</font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="justify"><font size="2" style="FONT-FAMILY: serif"><font size="3">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;</font>(3) To
  remove from registration by means of a post-effective amendment any of the
  securities being registered which remain unsold at the termination of the
  offering.</font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">(b) The undersigned registrant hereby
  undertakes that, for purposes of determining any liability under the Securities
  Act, each filing of the registrant's annual report pursuant to Section 13(a) or
  Section 15(d) of the Exchange Act (and, where applicable, each filing of an
  employee benefit plan's annual report pursuant to Section 15(d) of the Exchange
  Act) that is incorporated by reference in the registration statement shall be
  deemed to be a new registration statement relating to the securities offered
  therein, and the offering of such securities at that time shall be deemed to be
  the initial bona fide offering thereof. </font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">(c) Insofar as indemnification for liabilities
  arising under the Securities Act of 1933 may be permitted to directors, officers
  and controlling persons of the registrant pursuant to the foregoing provisions,
  or otherwise, the registrant has been advised that in the opinion of the
  Securities and Exchange Commission such indemnification is against public policy
  as expressed in the Act and is, therefore, unenforceable. In the event that a
  claim for indemnification against such liabilities (other than the payment by
  the registrant of expenses incurred or paid by a director, officer or
  controlling person of the registrant in the successful defense of any action,
  suit or proceeding) is asserted by such director, officer or controlling person
  in connection with the securities being registered, the registrant will, unless
  in the opinion of its counsel the matter has been settled by controlling
  precedent, submit to a court of appropriate jurisdiction the question whether
  such indemnification by it is against public policy as expressed in the Act and
  will be governed by the final adjudication of such issue.</font><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif"> </font></font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="center"><font size="2" style="FONT-FAMILY: serif">6</font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <hr align="center" noshade size="2" width="100%">
      <div id="PN" style="PAGE-BREAK-BEFORE: always">
      </div><br>
      <div align="center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">SIGNATURES</font></font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="justify">&#160;&#160;&#160;&#160;&#160;<font size="2" style="FONT-FAMILY: serif">Pursuant to the requirements of the Securities
  Act of 1933, the registrant certifies that it has reasonable grounds to believe
  that it meets all of the requirements for filing on Form S-8 and has duly caused
  this registration statement to be signed on its behalf by the undersigned,
  thereunto duly authorized, in the City of Tempe, State of Arizona, on August 6,
  2010.</font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div align="right">
        <table border="0" cellpadding="0" cellspacing="0" width="50%" style="LINE-HEIGHT: 13pt; BORDER-COLLAPSE: collapse; ">
  <tr valign="bottom">
              <td align="left" colspan="3" nowrap width="99%"><font size="2" style="FONT-FAMILY: serif">Amtech Systems, Inc.</font></td>
            </tr><tr>
              <td colspan="3" width="99%">&#160;</td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="2%"><font size="2" style="FONT-FAMILY: serif">By:</font></td>
              <td align="left" nowrap width="1%">&#160;&#160;&#160;&#160;&#160; </td>
              <td align="left" nowrap width="96%" style="BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">/s/ Bradley C.
        Anderson</font></td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="2%">
              </td>
              <td align="left" nowrap width="1%">
              </td>
              <td align="left" nowrap width="96%"><font size="2" style="FONT-FAMILY: serif">Bradley C. Anderson</font></td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="2%">
              </td>
              <td align="left" nowrap width="1%">
              </td>
              <td align="left" nowrap width="96%"><font size="2" style="FONT-FAMILY: serif">Vice President and Chief Financial
  Officer</font></td>
            </tr></table>
      </div><br>
      <div align="justify"><font size="2" style="FONT-FAMILY: serif">Pursuant to the
  requirements of the Securities Act of 1933, this registration statement has been
  signed by the following persons in the capacities and on the date
  indicated.</font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div>
        <table border="0" cellpadding="0" cellspacing="0" width="100%" style="PADDING-RIGHT: 4pt; PADDING-LEFT: 4pt; FONT-SIZE: 10pt; LINE-HEIGHT: 13pt; BORDER-COLLAPSE: collapse; ">
  <tr valign="bottom">
              <td align="left" colspan="3" nowrap width="34%" style="BORDER-TOP: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid"><font style="DISPLAY: inline; TEXT-DECORATION: underline"><font size="2" style="FONT-FAMILY: serif">Signature</font></font></td>
              <td align="left" nowrap width="47%" style="BORDER-TOP: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid"><font style="DISPLAY: inline; TEXT-DECORATION: underline"><font size="2" style="FONT-FAMILY: serif">Title</font></font></td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-TOP: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid"><font style="DISPLAY: inline; TEXT-DECORATION: underline"><font size="2" style="FONT-FAMILY: serif">Date</font></font></td>
            </tr><tr>
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%" style="BORDER-BOTTOM: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">&#160;</td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%">
              </td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Chief Executive
        Officer and</font></td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid">
              </td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="23%" style="PADDING-LEFT: 0pt; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">*</font></td>
              <td align="left" nowrap width="10%">&#160;</td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Director (Principal
        Executive</font></td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">August 6, 2010</font></td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%" style="PADDING-LEFT: 0pt; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Jong S. Whang</font> </td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Officer)</font></td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%">
              </td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Vice President --
        Finance, Chief</font></td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid">
              </td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%">
              </td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Financial Officer,
        Treasurer and</font></td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid">
              </td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="23%" style="PADDING-LEFT: 0pt; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">*</font></td>
              <td align="left" nowrap width="10%">
              </td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid">Secretary (Principal Financial</td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">August 6, 2010</font></td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%" style="PADDING-LEFT: 0pt; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Bradley C. Anderson</font></td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">Officer)</td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
            </tr><tr>
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%">&#160;</td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid">
              </td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="23%" style="PADDING-LEFT: 0pt; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">*</font></td>
              <td align="left" nowrap width="10%">
              </td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid">Chief Accounting Officer (Principal</td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">August 6, 2010</font></td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%" style="PADDING-LEFT: 0pt; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Robert T. Hass</font></td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Accounting Officer)</font></td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
            </tr><tr>
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%">&#160;</td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid">
              </td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="23%" style="PADDING-LEFT: 0pt; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">*</font></td>
              <td align="left" nowrap width="10%">
              </td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Director</font></td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">August 6, 2010</font></td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%" style="PADDING-LEFT: 0pt; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Michael Garnreiter</font></td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
            </tr><tr>
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%">&#160;</td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid">
              </td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="23%" style="PADDING-LEFT: 0pt; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">*</font></td>
              <td align="left" nowrap width="10%">
              </td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Director</font></td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">August 6, 2010</font></td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%" style="PADDING-LEFT: 0pt; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Alfred W. Giese</font></td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
            </tr><tr>
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%">&#160;</td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid">
              </td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="23%" style="PADDING-LEFT: 0pt; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">*</font></td>
              <td align="left" nowrap width="10%">
              </td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Director</font></td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">August 6, 2010</font></td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%" style="PADDING-LEFT: 0pt; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Egbert Jan Geert Goudena</font></td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
            </tr><tr>
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%">&#160;</td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid">
              </td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="23%" style="PADDING-LEFT: 0pt; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">*</font></td>
              <td align="left" nowrap width="10%">
              </td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Director</font></td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">August 6, 2010</font></td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%" style="PADDING-LEFT: 0pt; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Jeong Mo Hwang</font></td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
            </tr><tr>
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%">&#160;</td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid">
              </td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="23%" style="PADDING-LEFT: 0pt; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">*</font></td>
              <td align="left" nowrap width="10%">
              </td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Director</font></td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">August 6, 2010</font></td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
              <td align="left" colspan="2" nowrap width="33%" style="BORDER-RIGHT: #000000 1pt solid; PADDING-LEFT: 0pt; BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">Robert F. King</font></td>
              <td align="left" nowrap width="47%" style="BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
              <td align="left" nowrap width="18%" style="BORDER-RIGHT: #000000 1pt solid; BORDER-LEFT: #000000 1pt solid; BORDER-BOTTOM: #000000 1pt solid">
              </td>
            </tr></table>
      </div>
      <div>
        <table border="0" cellpadding="0" cellspacing="0" width="50%" style="FONT-SIZE: 10pt; LINE-HEIGHT: 13pt; BORDER-COLLAPSE: collapse; ">
  <tr valign="bottom">
              <td align="left" nowrap width="1%"><font size="2" style="FONT-FAMILY: serif">&#160;&#160;&#160;* By:</font></td>
              <td align="left" nowrap width="1%">&#160;&#160;&#160;&#160;&#160;&#160;&#160;</td>
              <td align="left" nowrap width="98%" style="BORDER-BOTTOM: #000000 1pt solid"><font size="2" style="FONT-FAMILY: serif">/s/ Bradley C.
        Anderson</font></td>
            </tr><tr valign="bottom">
              <td align="left" nowrap width="1%">
              </td>
              <td align="left" nowrap width="1%">
              </td>
              <td align="left" nowrap width="98%"><font size="2" style="FONT-FAMILY: serif">Bradley C. Anderson, Attorney-In-Fact
  **</font></td>
            </tr></table>
      </div>____________________<br>&#160;<br>
      <div>
        <table border="0" cellpadding="0" cellspacing="0" width="100%" style="">
  <tr valign="bottom">
              <td align="left" nowrap valign="top" width="1%"><font size="2">**</font></td>
              <td align="left" nowrap valign="top" width="1%"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160; </font></td>
              <td valign="top" width="98%" style="TEXT-ALIGN: justify">
                <div style="TEXT-ALIGN: justify"><font size="2" style="FONT-FAMILY: serif">By authority of the power of attorney filed as Exhibit 24
        hereto.</font></div>
              </td>
            </tr></table>
      </div><br>
      <hr align="center" noshade size="2" width="100%">
      <div id="PN" style="PAGE-BREAK-BEFORE: always">
      </div><br>
      <div align="center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">EXHIBIT INDEX</font></font></div>
      <div><font size="2" style="FONT-FAMILY: serif">&#160;</font></div>
      <div>
        <table border="0" cellpadding="0" cellspacing="0" width="100%" style="">
  <tr valign="bottom" style="LINE-HEIGHT: 13pt;">
              <td nowrap width="3%" style="TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Exhibit</font></font></td>
              <td nowrap width="1%" style="TEXT-ALIGN: center">
              </td>
              <td nowrap width="96%" style="TEXT-ALIGN: center">
              </td>
            </tr><tr valign="bottom" style="LINE-HEIGHT: 13pt;">
              <td nowrap width="3%" style="BORDER-BOTTOM: #000000 1pt solid; TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">No.</font></font></td>
              <td nowrap width="1%" style="TEXT-ALIGN: center">&#160;&#160;&#160;&#160;&#160; </td>
              <td nowrap width="96%" style="BORDER-BOTTOM: #000000 1pt solid; TEXT-ALIGN: center"><font style="DISPLAY: inline; FONT-WEIGHT: bold"><font size="2" style="FONT-FAMILY: serif">Description</font></font></td>
            </tr><tr valign="bottom">
              <td nowrap valign="top" width="3%" bgcolor="#cceeff" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">4.3</font></td>
              <td align="left" nowrap valign="top" width="1%" bgcolor="#cceeff">&#160;</td>
              <td valign="top" width="96%" bgcolor="#cceeff" style="TEXT-ALIGN: justify"><font size="2" style="FONT-FAMILY: serif">Non-Employee
        Directors Stock Option Plan, as amended*</font></td>
            </tr><tr valign="bottom">
              <td nowrap valign="top" width="3%" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">5.1</font></td>
              <td align="left" nowrap valign="top" width="1%">&#160;</td>
              <td valign="top" width="96%" style="TEXT-ALIGN: justify"><font size="2" style="FONT-FAMILY: serif">Opinion of Squire, Sanders &amp; Dempsey
        L.L.P. regarding legality of shares**</font></td>
            </tr><tr valign="bottom">
              <td nowrap valign="top" width="3%" bgcolor="#cceeff" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">23.1</font></td>
              <td align="left" nowrap valign="top" width="1%" bgcolor="#cceeff">&#160;</td>
              <td valign="top" width="96%" bgcolor="#cceeff" style="TEXT-ALIGN: justify"><font size="2" style="FONT-FAMILY: serif">Consent of Squire,
        Sanders &amp; Dempsey L.L.P. (included in Exhibit 5.1 hereto)</font></td>
            </tr><tr valign="bottom">
              <td nowrap valign="top" width="3%" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">23.2</font></td>
              <td align="left" nowrap valign="top" width="1%">&#160;</td>
              <td valign="top" width="96%" style="TEXT-ALIGN: justify"><font size="2" style="FONT-FAMILY: serif">Consent of Mayer Hoffman McCann,
        P.C.**</font></td>
            </tr><tr valign="bottom">
              <td nowrap valign="top" width="3%" bgcolor="#cceeff" style="TEXT-ALIGN: center"><font size="2" style="FONT-FAMILY: serif">24</font></td>
              <td align="left" nowrap valign="top" width="1%" bgcolor="#cceeff">&#160;</td>
              <td valign="top" width="96%" bgcolor="#cceeff" style="TEXT-ALIGN: justify"><font size="2" style="FONT-FAMILY: serif">Powers of attorney
        **</font></td>
            </tr></table>
      </div>____________________<br>&#160;<br>
      <div>
        <table border="0" cellpadding="0" cellspacing="0" style="">
  <tr>
              <td nowrap valign="top"><font size="2" style="FONT-FAMILY: serif">*</font></td>
              <td nowrap valign="top">&#160;&#160;&#160;&#160;&#160; </td>
              <td valign="top" width="100%" style="TEXT-ALIGN: justify"><font size="2" style="FONT-FAMILY: serif">Incorporated herein by reference to
        Amtech&#8217;s current report on Form 8-K, filed with the SEC on March 17,
        2010</font></td>
            </tr><tr>
              <td nowrap valign="top"><font size="2" style="FONT-FAMILY: serif">**</font></td>
              <td nowrap valign="top">&#160;</td>
              <td valign="top" width="100%" style="TEXT-ALIGN: justify"><font size="2" style="FONT-FAMILY: serif">Filed
  herewith</font></td>
            </tr></table>
      </div><br>
      <hr align="center" noshade size="2" width="100%">
    </body>
  </html>
metadata_documents: [{"type": "S-8", "sequence": "1", "filename": "amtech_s8.htm", "description": "INITIAL REGISTRATION STATEMENT FOR SECURITIES TO BE OFFERED TO EMPLOYEES", "secsgml_size_bytes": 70172}]
metadata_filer: {"company-data": {"conformed-name": "AMTECH SYSTEMS INC", "cik": "0000720500", "assigned-sic": "3559", "irs-number": "860411215", "state-of-incorporation": "AZ", "fiscal-year-end": "0930"}, "filing-values": {"form-type": "S-8", "act": "33", "file-number": "333-168607", "film-number": "10998310"}, "business-address": {"street1": "131 S CLARK DR", "city": "TEMPE", "state": "AZ", "zip": "85281", "phone": "6029675146"}, "mail-address": {"street1": "131 SOUTH CLARK DRIVE", "city": "TEMPE", "state": "AZ", "zip": "85281"}, "former-company": {"former-conformed-name": "QUARTZ ENGINEERING & MATERIALS INC", "date-changed": "19870715"}}
text: amtech_s8.htm
  As filed with the Securities and Exchange
  Commission on August 6, 2010
  Registration No. 333-_____
  SECURITIES AND EXCHANGE
  COMMISSION
  Washington, D.C. 20549
  FORM S-8
  REGISTRATION
  STATEMENT
  UNDER
  THE SECURITIES ACT OF 1933
  AMTECH SYSTEMS, INC.
  (Exact Name of Registrant as Specified in Its
  Charter)
  Arizona
  86-0411215
  (State or Other Jurisdiction
  of
  (I.R.S. Employer
  Incorporation or Organization)
  Identification Number)
  131 South Clark
        Drive
  Tempe, Arizona 85281
  (Address of Principal Executive
        Offices, Including Zip Code)
  Non-Employee Directors Stock
        Option Plan
  (Full Title of the Plan)
  Bradley C. Anderson
  Copy to:
  Chief Financial Officer
  Christopher D. Johnson,
        Esq.
  Amtech Systems, Inc.
  Scott I. Gruber,
  Esq.
  131 South Clark Drive
  Squire, Sanders & Dempsey
        L.L.P.
  Tempe, Arizona 85281
  1 E. Washington Street, Suite
        2700
  (480) 967-5146
  Phoenix, Arizona
    85004
  (602)
    528-4000
  (Name, Address and Telephone Number,
        including Area Code,
  of Agent For Service)
  Indicate by check
  mark whether the registrant is a large accelerated filer, an accelerated filer,
  a non-accelerated filer, or a smaller reporting company. See the definitions of
  "large accelerated filer," "accelerated filer" and "smaller reporting company"
  in Rule 12b-2 of the Exchange Act.
  Large Accelerated Filer
  o
  Accelerated Filer
  o
  Non-accelerated Filer
  o
  Smaller Reporting Company
  þ
  (Do not check
        if a smaller reporting company)
  CALCULATION OF REGISTRATION
  FEE
  Proposed maximum
  Proposed maximum
  Title of securities to
  Amount to be
  offering price per
  aggregate offering
  Amount of
  be registered
  registered (1)(2)
  share (3)
  price (3)
  registration fee
  Common Stock,
        par
  value $.01 per share
  150,000 shares
  $10.105
  $1,515,750
  $108.07
  ____________________
  (1)
  Pursuant to Rule 416(a) under the
        Securities Act of 1933, as amended (the "Securities Act"), this
        registration statement also covers an indeterminate number of additional
        shares of common stock of the registrant that become issuable as a result
        of any stock split, stock dividend, recapitalization or other similar
        transaction that results in an increase in the number of outstanding
        shares of common stock of the registrant. This registration statement
        shall cover such additional shares. In addition, pursuant to Rule 416(c)
        under the Securities Act, this registration statement also covers an
        indeterminate amount of interests to be offered or sold pursuant to
        registrant's Non-Employee Directors Stock Option Plan, as amended (the
        "Plan").
  (2)
  Pursuant to General Instruction E to
        Form S-8, a filing fee is only being paid with respect to the registration
        of additional securities for the Plan. This registration statement on Form
        S-8 relates to 150,000 additional shares of common stock, par value $.01,
        of the registrant, issuable pursuant to the Plan. Registration statements
        on Form S-8 covering 200,000 shares (before stock splits and stock
        dividends) were previously filed with respect to the Plan (registration
        nos. 333-09911 filed August 9, 1996 and 333-131051 filed January 17,
        2006).
  (3)
  Estimated pursuant to Rule 457(h) under
        the Securities Act solely for the purpose of calculating the registration
        fee. The proposed maximum offering price is based upon the average of the
        high and low prices of the common stock as reported on the NASDAQ Global
        Select Market on August 3, 2010.
  EXPLANATORY NOTE
  INCORPORATION BY REFERENCE: Pursuant to
  General Instruction E to Form S-8, the contents of registration statement nos.
  333-09911 and 333-131051 are incorporated herein by this reference.
  REGISTRATION OF ADDITIONAL SHARES: This
  registration statement on Form S-8 is filed by the registrant to register
  150,000 additional shares of common stock, par value $.01 per share, of the
  registrant, which may be issued pursuant to an amendment to the Plan authorized
  by the shareholders of the registrant on March 11, 2010.
  PART II
  INFORMATION REQUIRED IN THE REGISTRATION STATEMENT
  Item 3. Incorporation of Documents by
  Reference.
  In this registration statement, the terms "we," "our," "us," "Amtech,"
  the "registrant" and the "Corporation" refer to Amtech System, Inc. The SEC
  allows us to incorporate by reference the information we file with the SEC,
  which means that we can disclose important information to you by referring you
  to those documents. The information that we incorporate by reference is
  considered to be part of this registration statement. Information that we file
  with the SEC in the future and incorporate by reference in this registration
  statement automatically updates and supersedes previously filed information as
  applicable.
  We incorporate by reference into this
  registration statement the following documents filed by us with the SEC, other
  than any portion of any such documents that are not deemed "filed" under the
  Securities Exchange Act of 1934 (the "Exchange Act") in accordance with the
  Exchange Act and applicable SEC rules:
  Annual Report on Form 10-K for the
    fiscal year ended September 30, 2009.
  Quarterly Report on Form 10-Q for
    the fiscal quarter ended December 31, 2009.
  Quarterly Report on Form 10-Q for
    the fiscal quarter ended March 31, 2010.
  Quarterly Report on Form 10-Q for
    the fiscal quarter ended June 30, 2010.
  The information specifically
    incorporated by reference into our Annual Report on Form 10-K for the fiscal
    year ended September 30, 2009 from our definitive proxy statement on Schedule
    14A filed with the SEC on January 28, 2010.
  The description of our common
    stock contained in our registration statement filed pursuant to Section 12 of
    the Exchange Act; and
  All other reports filed that we
    have filed with the SEC pursuant to Section 13(a) or 15(d) of the Exchange Act
    subsequent to September 30, 2009.
  We also incorporate by reference into this registration statement all
  documents (other than any portions of any such documents that are not deemed
  "filed" under the Exchange Act in accordance with the Exchange Act and
  applicable SEC rules) filed by us under Sections 13(a), 13(c), 14 or 15(d) of
  the Exchange Act after the date of the initial filing of this registration
  statement and before the filing of a post-effective amendment to this
  registration statement which indicates all securities offered hereunder have
  been sold or that deregisters all securities then remaining unsold.
  You may request a copy of these filings,
  which we shall deliver to you, together with all exhibits thereto, at no cost,
  by writing or telephoning us as follows:
  Amtech Systems,
  Inc.
  Attention: Robert T. Hass
  131 South Clark Drive
  Tempe, Arizona
  85281
  (480) 967-5146
  3
  Any statement contained in a document that is
  incorporated by reference will be modified or superseded for all purposes to the
  extent that a statement contained in this registration statement, or in any
  other document that is subsequently filed with the SEC and incorporated by
  reference, modifies or is contrary to that previous statement. Any statement so
  modified or superseded will not be deemed a part of this registration statement,
  except as so modified or superseded. Since information that we later file with
  the SEC will update and supersede previously incorporated information, you
  should look at all of the SEC filings that we incorporate by reference to
  determine if any of the statements in this registration statement or in any
  documents previously incorporated by reference have been modified or
  superseded.
  Item 4. Description of
  Securities.
  Not applicable.
  Item 5. Interests of Named Experts and
  Counsel.
  Not applicable.
  Item 6. Indemnification of Directors and
  Officers.
  Section 10-851 of Arizona's Revised Statutes
  enables a corporation to eliminate or limit
  personal liability
  of members of its board of directors for violations of their
  fiduciary duty of
  care. However, Arizona law does not permit the elimination of
  a director's or
  officer's liability: (i) in connection with a proceeding by or in the right of
  the corporation in which the director was adjudged liable to the corporation;
  and (ii) in connection with any other proceeding charging improper financial
  benefit to the director, whether or not involving action in the director's
  official capacity, in which the director was adjudged liable on the basis that
  financial benefit was improperly received by the director. Insofar as
  indemnification for liabilities arising under the Securities Act may be
  permitted to directors, officers or persons controlling Amtech pursuant to the
  foregoing provision, Amtech has been informed that in the opinion of the SEC
  such indemnification is against public policy as expressed in such Act and is
  therefore unenforceable.
  Pursuant to Amtech's Articles of
  Incorporation, it shall indemnify any and all of its existing and former
  directors, officers, employees, and agents against all expenses incurred by them
  and each of them, including, but not limited to legal fees, judgments,
  penalties, and amounts paid in settlement or compromise, which may arise or be
  incurred, rendered, or levied in any legal action brought or threatened against
  any of them for or on account of any action or omission alleged to have been
  committed while acting within the scope of employment as director, officer,
  employee or agent of the corporation, whether or not any action is or has been
  filed against them and whether or not any settlement or compromise is approved
  by a court, indemnification shall be made by the corporation whether the legal
  action brought or threatened is by or in the right of the corporation or by any
  other person.
  Whenever any existing or former director,
  officer, employee, or agent shall report to the President of the corporation or
  the chairman of the Board of Directors that he or she has incurred or may incur
  expenses, including, but not limited to, legal fees, judgments, penalties, and
  amounts paid in settlement or compromise in a legal action brought or threatened
  against him or her for or on account of any action or omission alleged to have
  been committed by him or her while acting within the scope of his or her
  employment as a director, officer, employee or agent of the corporation, the
  Board of Directors shall, at its next regular or at a special meeting held
  within a reasonable time thereafter, determine in good faith, whether in regard
  to the matter involved in the action or contemplated action, such person acted,
  failed to act, or refused to act willfully or with gross negligence or with
  fraudulent or criminal intent. If the Board of Directors determines, in good
  faith, that such person did not act, fail to act, or refuse to act willfully or
  with gross negligence or with fraudulent or criminal intent, in regard to the
  matter involved in the action or contemplated action, such person acted, failed
  to act, or refused to act willfully or with gross negligence or with fraudulent
  criminal intent, indemnification shall be mandatory and shall be automatically
  extended as specified herein; provided, that the corporation shall have the
  right to refuse indemnification in any instance in which the person to whom
  indemnification would otherwise have been applicable shall have unreasonably
  refused to permit the corporation, at its own expense and through counsel of its
  own choosing, to defend him or her in the action.
  4
  Amtech has purchased insurance on behalf of
  its directors and officers against certain liabilities that may be asserted
  against, or incurred by, such persons in their capacities as directors or
  officers of Amtech, or that may arise out of their status as directors or
  officers of the registrants, including liabilities under the federal and state
  securities laws.
  Item 7. Exemption from Registration
  Claimed.
  Not applicable.
  Item 8. Exhibits.
  Exhibit
  No.
  Description
  4.3
  Non-Employee
        Directors Stock Option Plan, as amended*
  5.1
  Opinion of Squire, Sanders & Dempsey
        L.L.P. regarding legality of shares**
  23.1
  Consent of Squire,
        Sanders & Dempsey L.L.P. (included in Exhibit 5.1 hereto)
  23.2
  Consent of Mayer Hoffman McCann,
        P.C.**
  24
  Powers of attorney
        **
  ____________________
  *
  Incorporated herein by reference to
        Amtech's current report on Form 8-K, filed with the SEC on March 17,
        2010
  **
  Filed
  herewith
  Item 9. Undertakings.
  (a) The undersigned registrant
  hereby undertakes:
  (1) To
  file, during any period in which offers or sales are being made, a
  post-effective amendment to this registration statement:
  (i)
  To include any prospectus required by Section 10(a)(3) of the Securities
  Act;
  (ii)
  To reflect in the prospectus any facts or events arising after the effective
  date of the registration statement (or the most recent post-effective amendment
  thereof) which, individually or in the aggregate, represent a fundamental change
  in the information set forth in the registration statement. Notwithstanding the
  foregoing, any increase or decrease in the volume of securities offered (if the
  total dollar value of securities offered would not exceed that which was
  registered) and any deviation from the low or high end of the estimated maximum
  offering range may be reflected in the form of prospectus filed with the
  Commission pursuant to Rule 424(b) if, in the aggregate, the changes in volume
  and price represent no more than 20% change in the maximum aggregate offering
  price set forth in the "Calculation of Registration Fee" table in the effective
  registration statement;
  (iii)
  To include any material information with respect to the plan of distribution not
  previously disclosed in the registration statement or any material change to
  such information in the registration statement;
  provided, however
  , that paragraphs (a)(1)(i) and (a)(1)(ii) of
  this section do not apply if the information required to be included in a
  post-effective amendment by those paragraphs is contained in reports filed with
  or furnished to the SEC by the registrant pursuant to Section 13 or Section
  15(d) of the Exchange Act that are incorporated by reference in the registration
  statement.
  5
  (2)
  That, for the purpose of determining any liability under the Securities Act,
  each such post-effective amendment shall be deemed to be a new registration
  statement relating to the securities offered therein, and the offering of such
  securities at that time shall be deemed to be the initial bona fide offering
  thereof.
  (3) To
  remove from registration by means of a post-effective amendment any of the
  securities being registered which remain unsold at the termination of the
  offering.
  (b) The undersigned registrant hereby
  undertakes that, for purposes of determining any liability under the Securities
  Act, each filing of the registrant's annual report pursuant to Section 13(a) or
  Section 15(d) of the Exchange Act (and, where applicable, each filing of an
  employee benefit plan's annual report pursuant to Section 15(d) of the Exchange
  Act) that is incorporated by reference in the registration statement shall be
  deemed to be a new registration statement relating to the securities offered
  therein, and the offering of such securities at that time shall be deemed to be
  the initial bona fide offering thereof.
  (c) Insofar as indemnification for liabilities
  arising under the Securities Act of 1933 may be permitted to directors, officers
  and controlling persons of the registrant pursuant to the foregoing provisions,
  or otherwise, the registrant has been advised that in the opinion of the
  Securities and Exchange Commission such indemnification is against public policy
  as expressed in the Act and is, therefore, unenforceable. In the event that a
  claim for indemnification against such liabilities (other than the payment by
  the registrant of expenses incurred or paid by a director, officer or
  controlling person of the registrant in the successful defense of any action,
  suit or proceeding) is asserted by such director, officer or controlling person
  in connection with the securities being registered, the registrant will, unless
  in the opinion of its counsel the matter has been settled by controlling
  precedent, submit to a court of appropriate jurisdiction the question whether
  such indemnification by it is against public policy as expressed in the Act and
  will be governed by the final adjudication of such issue.
  6
  SIGNATURES
  Pursuant to the requirements of the Securities
  Act of 1933, the registrant certifies that it has reasonable grounds to believe
  that it meets all of the requirements for filing on Form S-8 and has duly caused
  this registration statement to be signed on its behalf by the undersigned,
  thereunto duly authorized, in the City of Tempe, State of Arizona, on August 6,
  2010.
  Amtech Systems, Inc.
  By:
  /s/ Bradley C.
        Anderson
  Bradley C. Anderson
  Vice President and Chief Financial
  Officer
  Pursuant to the
  requirements of the Securities Act of 1933, this registration statement has been
  signed by the following persons in the capacities and on the date
  indicated.
  Signature
  Title
  Date
  Chief Executive
        Officer and
  *
  Director (Principal
        Executive
  August 6, 2010
  Jong S. Whang
  Officer)
  Vice President --
        Finance, Chief
  Financial Officer,
        Treasurer and
  *
  Secretary (Principal Financial
  August 6, 2010
  Bradley C. Anderson
  Officer)
  *
  Chief Accounting Officer (Principal
  August 6, 2010
  Robert T. Hass
  Accounting Officer)
  *
  Director
  August 6, 2010
  Michael Garnreiter
  *
  Director
  August 6, 2010
  Alfred W. Giese
  *
  Director
  August 6, 2010
  Egbert Jan Geert Goudena
  *
  Director
  August 6, 2010
  Jeong Mo Hwang
  *
  Director
  August 6, 2010
  Robert F. King
  * By:
  /s/ Bradley C.
        Anderson
  Bradley C. Anderson, Attorney-In-Fact
  **
  ____________________
  **
  By authority of the power of attorney filed as Exhibit 24
        hereto.
  EXHIBIT INDEX
  Exhibit
  No.
  Description
  4.3
  Non-Employee
        Directors Stock Option Plan, as amended*
  5.1
  Opinion of Squire, Sanders & Dempsey
        L.L.P. regarding legality of shares**
  23.1
  Consent of Squire,
        Sanders & Dempsey L.L.P. (included in Exhibit 5.1 hereto)
  23.2
  Consent of Mayer Hoffman McCann,
        P.C.**
  24
  Powers of attorney
        **
  ____________________
  *
  Incorporated herein by reference to
        Amtech's current report on Form 8-K, filed with the SEC on March 17,
        2010
  **
  Filed
  herewith