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<HEAD>
<TITLE>S-8 Filed June 7, 2001</TITLE>
</HEAD>
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<H1 ALIGN=CENTER><FONT FACE="Times New Roman, Times, Serif" SIZE=2>As filed with the Securities and Exchange Commission on June 7, 2001</FONT></H1>
<H1 ALIGN=RIGHT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>Registration No. 333-_________</FONT></H1>

<hr width=100% size=5>

<H1 ALIGN=CENTER><FONT FACE="Times New Roman, Times, Serif" SIZE=4>SECURITIES
AND EXCHANGE COMMISSION</FONT><br><FONT FACE="Times New Roman, Times, Serif" SIZE=2>Washington,
D.C. 20549</FONT></H1>

<hr width=30% size=2>

<H1 ALIGN=CENTER><FONT FACE="Times New Roman, Times, Serif" SIZE=4>FORM S-8</FONT><br><FONT FACE="Times New Roman, Times, Serif" SIZE=2>REGISTRATION
STATEMENT<br>UNDER<br>THE SECURITIES ACT OF 1933</FONT></H1>

<hr width=30% size=2>

<p ALIGN=CENTER><FONT SIZE=5><b>SEMITOOL, INC.</b></font><br><font size=2>
(Exact Name of Registrant as Specified in its Charter)</font></p>


<TABLE WIDTH=100% CELLPADDING=0 CELLSPACING=0>
<TR>
<TD align="center" width="445"><B><FONT SIZE=2>Montana</FONT></B></TD>
<TD align="center" width="445"><B><FONT SIZE=2>81-0384392</FONT></B></TD></TR>
<TR>
<TD align="center" width="445"><FONT SIZE=2>(State or Other Jurisdiction of<BR>Incorporation or Organization)</FONT></TD>
<TD align="center" width="445"><FONT SIZE=2>I.R.S. Employer<BR>Identification Number)</FONT></TD></TR>
</TABLE>


<p ALIGN=CENTER><FONT SIZE=2><b>655 West Reserve Drive<br>Kalispell, Montana 59901<br>
(406) 752-2107</b></font><br><font size=2>(Address, Including Zip Code, and Telephone Number, Including Area Code,
of Registrant's Principal Executive Offices)</font></p>

<H1 ALIGN=CENTER><FONT FACE="Times New Roman, Times, Serif" SIZE=2>Semitool, Inc. Amended and Restated 1994 Stock Option Plan</FONT></H1>

<hr width=30% size=2>

<p ALIGN=CENTER><FONT SIZE=2><u>(Full Title of Plans)</u></font>

<p ALIGN=CENTER><FONT SIZE=2><b>William A.
Freeman<br>Senior Vice President and Chief Financial Officer<br>Semitool, Inc.<br>655 West Reserve Drive<br>
Kalispell, Montana 59901<br>(406) 752-2107</b></font><br><font size=2>
(Name, Address, Including Zip Code, and Telephone Number, Including Area Code, of Agent for Service)</font></p>

<hr width=30% size=2>

<p ALIGN=CENTER><FONT SIZE=2><i>Copy to:</i></font>

<p ALIGN=CENTER><FONT SIZE=2><b>Justin L. Bastian, Esq.<br>Morrison &amp; Foerster LLP<br>755 Page
Mill Road<br>Palo Alto, CA 94304-1018<br>(650) 813-5600</b></font></p>

<hr width=30% size=2>

<H1 ALIGN=CENTER><FONT FACE="Times New Roman, Times, Serif" SIZE=2>CALCULATION
OF REGISTRATION FEE</FONT></H1>


<hr width=100% size=5>

<TABLE WIDTH=100% CELLPADDING=0 CELLSPACING=0>
<TR>
<th width=25%></th>
<th width=20%></th>
<th width=20%>Maximum</th>
<th width=20%>Proposed Maximum</th>
<th width=15%>Amount of</th>
</tr>

<tr>
<th>Title of Securities</th>
<th>Amount to</th>
<th>Offering Price</th>
<th>Aggregate Offering</th>
<th>Registration</th>
</tr>

<tr>
<th>to be Registered<hr width=90%></th>
<th>Be Registered<hr width=90%></th>
<th>Per Share(1)<hr width=90%></th>
<th>Price(1)<hr width=90%></th>
<th>Fee<hr width=90%></th>
</tr>

<tr>
<td align=left>Common Stock, no</td>
<td></td>
<td></td>
<td></td>
<td></td>
</tr>

<tr>
<td align=left>per value per share......</td>
<td align=center>1,500,000</td>
<td align=center>$12.355</td>
<td align=center>$18,532,500</td>
<td align=center>$4,633.13</td>
</tr>

</TABLE>

<hr width=100% size=5>



<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;(1)
Estimated solely for the purpose of calculating the registration fee in
accordance with Rules&#160;457(h) and 457(c) under the Securities Act of 1933
and based upon the average of the high and low prices reported on the Nasdaq
National Market on June 4, 2001. </FONT></P>


<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;In
addition, pursuant to Rule 416(c) under the Securities Act, this Registration
Statement also covers an indeterminate amount of interests to be offered or sold
pursuant to the employee benefit plans described herein.</FONT></P>

<hr width=100% size=5>



<H1 ALIGN=CENTER><FONT FACE="Times New Roman, Times, Serif" SIZE=2>PART I</FONT></H1>

<H1 ALIGN=CENTER><FONT FACE="Times New Roman, Times, Serif" SIZE=2>INFORMATION REQUIRED IN THE<br>
                                                       SECTION 10(a) PROSPECTUS</FONT></H1>


<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The documents containing the information specified in Part 1 of Form S-8 (plan information and registrant information and
employee plan annual information) will be sent or given to employees as specified by Securities and Exchange Commission Rule
428(b)(1).  Such documents need not be filed with the Securities and Exchange Commission either as part of this Registration
Statement or as prospectuses or prospectus supplements pursuant to Rule 424.  These documents and the documents incorporated by
reference in this Registration Statement pursuant to Item 3 of Form S-8 (Part II hereof), taken together, constitute a prospectus
that meets the requirements of Section 10(a) of the Securities Act of 1933.</FONT></P>

<H1 ALIGN=CENTER><FONT FACE="Times New Roman, Times, Serif" SIZE=2>PART II</FONT></H1>

<H1 ALIGN=CENTER><FONT FACE="Times New Roman, Times, Serif" SIZE=2>INFORMATION
REQUIRED IN THE REGISTRATION STATEMENT</FONT></H1>

<H2 ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>Item 3.
Incorporation of Documents by Reference.</FONT></H2>

<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;There are hereby incorporated by reference in this Registration Statement the following documents and information previously
filed with the Securities and Exchange Commission (the "Commission"):</FONT></P>

<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;1.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The contents of the Registrant's Registration Statement on Form S-8, Commission File No. 333-89562,
including exhibits thereto, are hereby incorporated by reference into this Registration Statement, except as the same may be modified
by the information set forth herein.</FONT></P>

<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;2.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The Registrant's Annual Report on Form 10-K for the fiscal year ended September 30, 2000, filed pursuant to
Section 13 of the Securities Exchange Act of 1934 (the "Exchange Act").</FONT></P>

<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;3.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The Company's Current Reports on Form 10-Q for the periods ended December 31, 2000 and March 31, 2001.</FONT></P>

<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;4.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The description of the Company's Common Stock contained in the Company's Registration Statement on Form 8-A
filed with the Commission on January 25, 1995 and declared effective on February 1, 1995.</FONT></P>

<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;All documents filed by the Registrant pursuant to Sections 13(a), 13(c), 14 and 15(d) of the Exchange Act after the date of
this Registration Statement, and prior to the filing of a post-effective amendment which indicates that all securities offered hereby
have been sold or which deregisters all securities then remaining unsold, shall be deemed to be incorporated by reference in this
Registration Statement and to be a part hereof from the date of filing of such documents.</FONT></P>

<H2 ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>Item 8. Exhibits.</FONT></H2>

<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>5.1&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Opinion of Crowley, Haughey, Hanson, Toole &amp; Dietrich, P.L.L.P.</FONT></P>

<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>23.1&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Consent of Crowley, Haughey, Hanson, Toole &amp; Dietrich, P.L.L.P. (contained in Exhibit 5.1)</FONT></P>

<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>23.2&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Consent of Independent Accountants</FONT></P>

<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>24.1&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Power of Attorney (see Signature Page)</FONT></P>



<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2><u>SIGNATURES</u></FONT></P>


<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Pursuant to the requirements of the Securities Act of 1933, the Registrant, Semitool, Inc., certifies that it has reasonable
grounds to believe that it meets all of the requirements for filing on Form S-8 and has duly caused this registration statement to be
signed on its behalf by the undersigned, thereunto duly authorized, in the City of Kalispell, State of Montana, on June 7, 2001.</FONT></P>

<PRE>
                                Semitool, Inc.

                                By:    /s/Raymon F. Thompson
                                       -----------------------------------------
                                       Raymon F. Thompson
                                       Chairman of Board, President and
                                       Chief Executive Officer

</PRE>


<P ALIGN=CENTER><FONT SIZE=2><u>POWER OF ATTORNEY</u></FONT></P>


<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Each person whose signature appears below constitutes and appoints Raymon F. Thompson and William A. Freeman, and each of
them, as attorneys-in-fact, each with the power of substitution, for him in any and all capacities, to sign any amendment to this
Registration Statement and to file the same, with exhibits thereto and other documents in connection therewith, with the Securities
and Exchange Commission, granting to said attorneys-in-fact, full power and authority to do and perform each and every act and thing
requisite and necessary to be done in connection therewith, as fully to all intents and purposes as he might or could do in person,
hereby ratifying and confirming the said attorney-in-fact or his substitute or substitutes, may lawfully do or cause to be done by
virtue hereof</FONT></P>

<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Pursuant to the requirements of the Securities Act of 1933, this registration statement has been signed by the following
persons in the capacities and on the date indicated.</FONT></P>

<PRE>

Signature                                  Capacity                      Date
---------                                  --------                      ----


                                           Chairman of the Board,
/s/ Raymon F. Thompson                     President and Chief           June 7, 2001
----------------------------------         Executive Officer
      Raymon F. Thompson                   <i>(Principal Executive
                                           Officer)</i>


/s/William A. Freeman                      Senior Vice President and     June 7, 2001
----------------------------------         Chief Financial Officer
      William A. Freeman


/s/Larry A. Viano                          Secretary, Treasurer,         June 7, 2001
----------------------------------         Controller and Principal
      Larry A. Viano                       Accounting Officer


/s/Howard E. Bateman                       Director                      June 7, 2001
----------------------------------
      Howard E. Bateman


/s/Robert G. Chamberlain                   Director                      June 7, 2001
----------------------------------
      Robert G. Chamberlain


/s/Richard A. Dasen                        Director                      June 7, 2001
----------------------------------
      Richard A. Dasen


/s/Timothy C. Dodkin                       Director and Senior           June 7, 2001
----------------------------------         Vice President
      Timothy C. Dodkin


/s/Daniel J. Eigeman                       Director                      June 7, 2001
----------------------------------
      Daniel J. Eigeman


/s/L. Peter Larson                         Director                      June 7, 2001
----------------------------------
      L. Peter Larson

</PRE>

<hr width=100% size=2>

<H1 ALIGN=CENTER><FONT FACE="Times New Roman, Times, Serif" SIZE=3>INDEX TO
EXHIBITS</FONT></H1>

<TABLE WIDTH=100% CELLPADDING=0 CELLSPACING=0>
<TR>
<th align=left width=20%>Exhibit</th>
<th width=80%></th>
</tr>

<tr>
<th align=left><u>Number</u></th>
<th align=left><u>Document</u></th>
</tr>
</TABLE>



<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;5.1&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Opinion of Crowley, Haughey, Hanson, Toole &amp; Dietrich, P.L.L.P.</FONT></P>

<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;23.1&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Consent of Crowley, Haughey, Hanson, Toole &amp; Dietrich, P.L.L.P. (contained in Exhibit 5.1)</FONT></P>

<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;23.2&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Consent of Independent Accountants</FONT></P>

<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;24.1&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Power of Attorney (see Signature Page)</FONT></P>

<hr width=100% size=2>

<P ALIGN=RIGHT>Exhibit 5.1</P>

<H1 ALIGN=CENTER><FONT FACE="Times New Roman, Times, Serif" SIZE=3>Opinion Of Crowley, Haughey, Hanson, Toole &amp; Dietrich, P.L.L.P.</FONT></H1>

<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>Semitool, Inc.<br>
655 West Reserve Drive<br>
Kalispell, MT  59901</FONT></P>

<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>Ladies and Gentlemen:</FONT></P>

<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;At your request, we have examined the Registration Statement on Form S-8 to be filed by
Semitool, Inc., a Montana corporation (the "Company"), with the Securities and Exchange
Commission during the week of June 4-8, 2001 (the "Registration Statement"), relating to the
registration under the Securities Act of 1933, as amended, of 1,500,000 share of the Company's
Common Stock, no par value (the "Shares").  The Shares are reserved for issuance pursuant to the
Company's Amended and Restated 1994 Stock Option Plan (the "Plan").  As counsel to the Company,
we have examined the proceedings taken by the Company in connection with the reservation of the
Shares for issuance pursuant to the Plan. </FONT></P>

<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;It is our opinion that the Shares, when issued and sold in the manner described in the Plan, will
be legally and validly issued, fully paid and nonassessable.</FONT></P>

<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We consent to the use of this opinion as an exhibit to the Registration Statement and further
consent to any references to us in the Registration Statement and any amendments thereto.</FONT></P>

<PRE>

                                               Sincerely yours,

                                               CROWLEY, HAUGHEY, HANSON,
                                               TOOLE &amp; DIETRICH, P.L.L.P.



                                               By /s/Allan Karell
                                                  ------------------------------
                                                  Allan Karell

</PRE>

<hr width=100% size=2>

<P ALIGN=RIGHT>Exhibit 23.2</P>

<H1 ALIGN=CENTER><FONT FACE="Times New Roman, Times, Serif" SIZE=3>Consent Of Independent Accountants</FONT></H1>

<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>We hereby consent to the incorporation by reference in this Registration Statement on Form S-8
pertaining to the Amended and Restated 1994 Stock Option Plan of Semitool, Inc. of our report dated
October 31, 2000, relating to the consolidated financial statements and schedule of Semitool, Inc.
which appears in its Annual Report on Form 10-K for the year ended September 30, 2000.</FONT></P>



<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>PricewaterhouseCoopers LLP<br>
Boise, Idaho<br>
June 6, 2001</FONT></P>

</BODY>
</HTML>
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{"company-data": {"conformed-name": "SEMITOOL INC", "cik": "0000934550", "assigned-sic": "3559", "irs-number": "810384392", "state-of-incorporation": "MT", "fiscal-year-end": "0930"}, "filing-values": {"form-type": "S-8", "act": "33", "file-number": "333-62474", "film-number": "1655680"}, "business-address": {"street1": "655 WEST RESERVE DR", "city": "KALISPELL", "state": "MT", "zip": "59901", "phone": "4067522107"}, "mail-address": {"street2": "655 WEST RESERVE DRIVE", "city": "KALISPELL", "state": "MT", "zip": "59901"}}
S-8 Filed June 7, 2001
As filed with the Securities and Exchange Commission on June 7, 2001
Registration No. 333-_________
SECURITIES
AND EXCHANGE COMMISSION
Washington,
D.C. 20549
FORM S-8
REGISTRATION
STATEMENT
UNDER
THE SECURITIES ACT OF 1933
SEMITOOL, INC.
(Exact Name of Registrant as Specified in its Charter)
Montana
81-0384392
(State or Other Jurisdiction of
Incorporation or Organization)
I.R.S. Employer
Identification Number)
655 West Reserve Drive
Kalispell, Montana 59901
(406) 752-2107
(Address, Including Zip Code, and Telephone Number, Including Area Code,
of Registrant's Principal Executive Offices)
Semitool, Inc. Amended and Restated 1994 Stock Option Plan
(Full Title of Plans)
William A.
Freeman
Senior Vice President and Chief Financial Officer
Semitool, Inc.
655 West Reserve Drive
Kalispell, Montana 59901
(406) 752-2107
(Name, Address, Including Zip Code, and Telephone Number, Including Area Code, of Agent for Service)
Copy to:
Justin L. Bastian, Esq.
Morrison & Foerster LLP
755 Page
Mill Road
Palo Alto, CA 94304-1018
(650) 813-5600
CALCULATION
OF REGISTRATION FEE
Maximum
Proposed Maximum
Amount of
Title of Securities
Amount to
Offering Price
Aggregate Offering
Registration
to be Registered
Be Registered
Per Share(1)
Price(1)
Fee
Common Stock, no
per value per share......
1,500,000
$12.355
$18,532,500
$4,633.13
(1)
Estimated solely for the purpose of calculating the registration fee in
accordance with Rules 457(h) and 457(c) under the Securities Act of 1933
and based upon the average of the high and low prices reported on the Nasdaq
National Market on June 4, 2001.
In
addition, pursuant to Rule 416(c) under the Securities Act, this Registration
Statement also covers an indeterminate amount of interests to be offered or sold
pursuant to the employee benefit plans described herein.
PART I
INFORMATION REQUIRED IN THE
SECTION 10(a) PROSPECTUS
The documents containing the information specified in Part 1 of Form S-8 (plan information and registrant information and
employee plan annual information) will be sent or given to employees as specified by Securities and Exchange Commission Rule
428(b)(1).  Such documents need not be filed with the Securities and Exchange Commission either as part of this Registration
Statement or as prospectuses or prospectus supplements pursuant to Rule 424.  These documents and the documents incorporated by
reference in this Registration Statement pursuant to Item 3 of Form S-8 (Part II hereof), taken together, constitute a prospectus
that meets the requirements of Section 10(a) of the Securities Act of 1933.
PART II
INFORMATION
REQUIRED IN THE REGISTRATION STATEMENT
Item 3.
Incorporation of Documents by Reference.
There are hereby incorporated by reference in this Registration Statement the following documents and information previously
filed with the Securities and Exchange Commission (the "Commission"):
1.     The contents of the Registrant's Registration Statement on Form S-8, Commission File No. 333-89562,
including exhibits thereto, are hereby incorporated by reference into this Registration Statement, except as the same may be modified
by the information set forth herein.
2.     The Registrant's Annual Report on Form 10-K for the fiscal year ended September 30, 2000, filed pursuant to
Section 13 of the Securities Exchange Act of 1934 (the "Exchange Act").
3.     The Company's Current Reports on Form 10-Q for the periods ended December 31, 2000 and March 31, 2001.
4.     The description of the Company's Common Stock contained in the Company's Registration Statement on Form 8-A
filed with the Commission on January 25, 1995 and declared effective on February 1, 1995.
All documents filed by the Registrant pursuant to Sections 13(a), 13(c), 14 and 15(d) of the Exchange Act after the date of
this Registration Statement, and prior to the filing of a post-effective amendment which indicates that all securities offered hereby
have been sold or which deregisters all securities then remaining unsold, shall be deemed to be incorporated by reference in this
Registration Statement and to be a part hereof from the date of filing of such documents.
Item 8. Exhibits.
5.1          Opinion of Crowley, Haughey, Hanson, Toole & Dietrich, P.L.L.P.
23.1         Consent of Crowley, Haughey, Hanson, Toole & Dietrich, P.L.L.P. (contained in Exhibit 5.1)
23.2         Consent of Independent Accountants
24.1         Power of Attorney (see Signature Page)
SIGNATURES
Pursuant to the requirements of the Securities Act of 1933, the Registrant, Semitool, Inc., certifies that it has reasonable
grounds to believe that it meets all of the requirements for filing on Form S-8 and has duly caused this registration statement to be
signed on its behalf by the undersigned, thereunto duly authorized, in the City of Kalispell, State of Montana, on June 7, 2001.
Semitool, Inc.

                                By:    /s/Raymon F. Thompson
                                       -----------------------------------------
                                       Raymon F. Thompson
                                       Chairman of Board, President and
                                       Chief Executive Officer
POWER OF ATTORNEY
Each person whose signature appears below constitutes and appoints Raymon F. Thompson and William A. Freeman, and each of
them, as attorneys-in-fact, each with the power of substitution, for him in any and all capacities, to sign any amendment to this
Registration Statement and to file the same, with exhibits thereto and other documents in connection therewith, with the Securities
and Exchange Commission, granting to said attorneys-in-fact, full power and authority to do and perform each and every act and thing
requisite and necessary to be done in connection therewith, as fully to all intents and purposes as he might or could do in person,
hereby ratifying and confirming the said attorney-in-fact or his substitute or substitutes, may lawfully do or cause to be done by
virtue hereof
Pursuant to the requirements of the Securities Act of 1933, this registration statement has been signed by the following
persons in the capacities and on the date indicated.
Signature                                  Capacity                      Date
---------                                  --------                      ----

                                           Chairman of the Board,
/s/ Raymon F. Thompson                     President and Chief           June 7, 2001
----------------------------------         Executive Officer
      Raymon F. Thompson
(Principal Executive
                                           Officer)
/s/William A. Freeman                      Senior Vice President and     June 7, 2001
----------------------------------         Chief Financial Officer
      William A. Freeman

/s/Larry A. Viano                          Secretary, Treasurer,         June 7, 2001
----------------------------------         Controller and Principal
      Larry A. Viano                       Accounting Officer

/s/Howard E. Bateman                       Director                      June 7, 2001
----------------------------------
      Howard E. Bateman

/s/Robert G. Chamberlain                   Director                      June 7, 2001
----------------------------------
      Robert G. Chamberlain

/s/Richard A. Dasen                        Director                      June 7, 2001
----------------------------------
      Richard A. Dasen

/s/Timothy C. Dodkin                       Director and Senior           June 7, 2001
----------------------------------         Vice President
      Timothy C. Dodkin

/s/Daniel J. Eigeman                       Director                      June 7, 2001
----------------------------------
      Daniel J. Eigeman

/s/L. Peter Larson                         Director                      June 7, 2001
----------------------------------
      L. Peter Larson
INDEX TO
EXHIBITS
Exhibit
Number
Document
5.1          Opinion of Crowley, Haughey, Hanson, Toole & Dietrich, P.L.L.P.
23.1         Consent of Crowley, Haughey, Hanson, Toole & Dietrich, P.L.L.P. (contained in Exhibit 5.1)
23.2         Consent of Independent Accountants
24.1         Power of Attorney (see Signature Page)
Exhibit 5.1
Opinion Of Crowley, Haughey, Hanson, Toole & Dietrich, P.L.L.P.
Semitool, Inc.
655 West Reserve Drive
Kalispell, MT  59901
Ladies and Gentlemen:
At your request, we have examined the Registration Statement on Form S-8 to be filed by
Semitool, Inc., a Montana corporation (the "Company"), with the Securities and Exchange
Commission during the week of June 4-8, 2001 (the "Registration Statement"), relating to the
registration under the Securities Act of 1933, as amended, of 1,500,000 share of the Company's
Common Stock, no par value (the "Shares").  The Shares are reserved for issuance pursuant to the
Company's Amended and Restated 1994 Stock Option Plan (the "Plan").  As counsel to the Company,
we have examined the proceedings taken by the Company in connection with the reservation of the
Shares for issuance pursuant to the Plan.
It is our opinion that the Shares, when issued and sold in the manner described in the Plan, will
be legally and validly issued, fully paid and nonassessable.
We consent to the use of this opinion as an exhibit to the Registration Statement and further
consent to any references to us in the Registration Statement and any amendments thereto.
Sincerely yours,

                                               CROWLEY, HAUGHEY, HANSON,
                                               TOOLE & DIETRICH, P.L.L.P.

                                               By /s/Allan Karell
                                                  ------------------------------
                                                  Allan Karell
Exhibit 23.2
Consent Of Independent Accountants
We hereby consent to the incorporation by reference in this Registration Statement on Form S-8
pertaining to the Amended and Restated 1994 Stock Option Plan of Semitool, Inc. of our report dated
October 31, 2000, relating to the consolidated financial statements and schedule of Semitool, Inc.
which appears in its Annual Report on Form 10-K for the year ended September 30, 2000.
PricewaterhouseCoopers LLP
Boise, Idaho
June 6, 2001